2D Cantilever Array with Fixed Geometries and

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We present 2D cantilever arrays for parallel AFM and their fabrication process using a silicon nitride cantilever with molded tip as the base element of the array.
Available online at www.sciencedirect.com

Procedia Engineering 25 (2011) 669 – 672

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1877-7058 © 2011 Published by Elsevier Ltd. Open access under CC BY-NC-ND license. doi:10.1016/j.proeng.2011.12.165

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