ADVANCED SILICON CARBIDE DEVICES AND PROCESSING Edited by Stephen E. Saddow and Francesco La Via
About the Book Since the production of the first commercially available blue LED in the late 1980s, silicon carbide technology has grown into a billion-dollar industry world-wide in the area of solid-state lighting and power electronics. With this in mind we organized this book to bring to the attention of those well versed in SiC technology some new developments in the field with a particular emphasis on particularly promising technologies such as SiC-based solar cells and optoelectronics. We have balanced this with the more traditional subjects such as power electronics and some new developments in the improvement of the MOS system for SiC MOSFETS. Given the importance of advanced microsystems and sensors based on SiC, we also included a review on 3C-SiC for both microsystem and electronic applications.
About the Editors Stephen E. Saddow, Editor
Stephen E. Saddow is a Professor of Electrical Engineering and member of the Biomedical Engineering Faculty, College of Engineering, at the University of South Florida, Tampa, FL USA. He has been an active researcher in the field of SiC Technology since 1992, when he pioneered the use of 6H-SiC for high-power optical switching. Since this early work, he has specialized in the development of various SiC processing methods, most notably CVD of 3C-SiC on Si. In the last decade he has focused on the use of 3C-SiC for biomedical applications and has been developing SiC-based continuous glucose monitoring systems and neural implants. He has over 150 published papers, 3 books, several book chapters and has several patents, awarded or pending, on the use of SiC for biomedical applications. He has held several visiting researcher/ professor positions in Italy, Germany, France, and more recently Brazil. Francesco La Via, Editor
Francesco La Via was born in Catania, Italy, in September 1961. He received the M.S. degree in physics from Catania University, Italy, in 1985. From 1985 to 1990 he had a fellowship at STMicroelectronics, Catania and was a Visiting Scientist at Philips National Laboratory, Eindhoven, Netherlands. In 1990 he joined the CNR Institute for Microelectronic, Catania as a researcher. In 2001 he became senior researcher and from 2003 he has been responsible of the division of CNR-IMM that develops new processes for silicon carbide epitaxy and hetero-epitaxy. From 2013 he has been in the International Steering Committee of the ICSCRM conference. In 2015 he became co-Chair of the ICSCRM 2015 and Chair of the Technical Program Committee. In this period he published more than 300 papers on JCR journals, one e-book, a focus issue of JMR and three book chapters. He has presented nine invited contributions to international conferences. He has 10 patents on SiC processing.
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ADVANCED SILICON CARBIDE DEVICES AND PROCESSING
Edited by Stephen E. Saddow and Francesco La Via
ADVANCED SILICON CARBIDE DEVICES AND PROCESSING Edited by Stephen E. Saddow and Francesco La Via
Advanced Silicon Carbide Devices and Processing Edited by Stephen E. Saddow, PhD Professor of Electrical Engineering, University of South Florida, Tampa, USA
Francesco La Via , PhD Italian National Research Council, Catania, Sicily, Italy
ISBN 978-953-51-2168-8 Hard Cover 256 pages Publisher: InTech Publication date September 16, 2015
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