Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform C. A. Barrios,1* B. Sánchez,2 K. B. Gylfason,3 A. Griol,2 H. Sohlström,3 M. Holgado4 and R. Casquel4 1
ISOM, Universidad Politécnica de Madrid, ETSI Telecomunicación, Ciudad Universitaria s/n, 28040 Madrid, Spain 2 NTC, Universidad Politécnica de Valencia, Camino de Vera s/n, Valencia, Spain 3 Microsystem Technology Laboratory, School of Electrical Engineering, KTH – Royal Institute of Technology, Osquldas väg 10, SE-10044 Stockholm, Sweden 4 Centro Láser, Universidad Politécnica de Madrid, Carretera de Valencia km 7 300, Madrid, Spain *Corresponding autor:
[email protected]
Abstract: We report on the first demonstration of guiding light in vertical slot-waveguides on silicon nitride/silicon oxide material system. Integrated ring resonators and Fabry-Perot cavities have been fabricated and characterized in order to determine optical features of the slot-waveguides. Group index behavior evidences guiding and confinement in the low-index slot region at O-band (1260-1370nm) telecommunication wavelengths. Propagation losses of
