Dual Stage Rotary Vane Pumps Varian, Inc. Vacuum Technologies

Varian, Inc. Vacuum Technologies

Dual Stage Rotary Vane Pumps

Features and Benefits

2-3

Typical Applications

4-5

Technical Specifications

6-7

Rotary Vane Pumps Features and Benefits A Reliable Line of Pumps to Cover the Most Demanding Industrial and Scientific Applications Varian Vacuum Technologies’ new DS line of Rotary Vane Pumps are designed and manufactured to meet the demanding requirements of various industrial and scientific applications. Thanks to a very simple and highly reliable design, these field proven rotary vane pumps provide excellent vacuum performance. Varian’s quality and manufacturing standards ensure that the DS Rotary Vane Pumps provide high pumping stability for light gases, low noise, minimal oil backstreaming, and a long operating life. Varian’s DS Rotary Vane Pumps conform with CE requirements, and all pump motors are UL and CSA approved. Varian’s world class technical support organization makes the DS Rotary Vane Pump cost-effective and well suited for a wide range of applications.

Dual Stage Pump The two stage design allows low 10-3 mbar operation, low operating temperature, minimal backstreaming at low pressure, good pumping efficiency and gas ballast in the high 10-3 mbar region.

Forced Oil Circulation The dedicated oil circulation gear pump ensures efficient and reliable lubrication of the pump from atmospheric pressure throughout the entire vacuum operating range.

Built-in Oil Shield This feature minimizes the oil mist at the pump exhaust. Apart from drastically reducing the oil consumption over long periods of operation, this results in a reduction of air pollution limiting the impact on the environment.

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Anti-suckback Valve and Vent Device This valve isolates the pump should it stop or be idle. It prevents inadequate venting and oil contamination of the vacuum system when the pump is switched off.

World-wide Motors Pump motors, available as 1-phase or 3-phase, are suitable for all voltages and frequencies world-wide. Operational voltages are easily selectable, allowing greater flexibility, easy planning and inventory reduction.

Socket Type IEC320 permits use of standard power cables, eliminating the need to open box and wire the motor.

Gas Ballast Valve The opening of this valve injects air into the second stage of the pump. This action increases the temperature of the module which facilitates the outgasing and clean up of water vapor or other condensibles from the pump fluid.

Alignment Pins on Pump Module The pump module components are assembled and positioned by built-in alignment pins. These speed up and facilitate pump assembling and maintenance.

Forced Air Ventilation The cooling fan between the motor and the pump reduces the pump operating temperature, lowers the oil vapor partial pressure, minimizes oil backstreaming and vacuum system contamination.

Varian, Inc. Vacuum Technologies 3

Rotary Vane Pumps Typical Applications

• Analytical Instruments Dual Stage Rotary Vane Pumps are practically the only primary vacuum pumps used on GC-MS, LC-MS, ICP-MS, and MALDI-TOF Instruments. GC-MS typically uses our smallest pump, the DS102; the pump is needed to rough the system and back the high vacuum Turbo or Diffusion pump. LC-MS and ICP-MS use a medium capacity pump on the sample injection/system interface, typically a DS402 or a DS602, and a smaller pump to back the system Turbo pumps. MALDI-TOF depending on system size, uses the DS102 to the DS602 as roughing or interface pumps. Electron Microscopes Small pumps, typically the DS202 and the DS302, are still used in competition with dry pumps to rough the system and the high vacuum Turbo or Diffusion pump.

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• Leak Detection Pumps in the DS102, DS202 and DS302 range are typically used to back the Helium Mass Spectrometer Turbo or Diffusion pump. The roughing pump is usually bigger, typically up to the DS402/DS602, and can still be installed on the Leak Detector itself, while bigger pumps can be used to pump down high throughput Leak Detection systems.


• Industrial Vacuum Processes Vacuum coatings, Metallurgy Vacuum Furnaces, Lamps and TV Tube manufacture, Sterilizers, Freeze Dryers, Glove Boxes, High Speed Centrifuges, and Flywheels (for energy storage) represent the main Industrial applications for Dual Stage Rotary Vane pumps. In the first four fields of application the Rotary Pumps are used as roughing and backing pumps for High Vacuum Turbo or Diffusion pumps, while in the others the Rotary Pumps are typically the only vacuum pumps on the system. • High Energy Physics and Research Laboratories In these applications the Rotary Vane pumps are mainly used in combination with Turbo pumps. The combination is typically used to rough and pump High Vacuum experimental chambers or to start Ion Pumps in ultra high vacuum systems.


Rotary Vane Pumps Technical Specifications Technical Specifications Free air displacement Pumping speed* Ultimate partial pressure* Ultimate total pressure* Ultimate total pressure with gas ballast* Water vapor tolerance Water vapor capacity Oil capacity min/max Motor rating 1ph Motor rating 3ph Nominal rotation speed Weight Inlet flange Exhaust flange

Hz 60 50 60 50

50/60 50/60 60 50

Units l/min (cfm) l/min (m3/h) cfm m3/h mbar mbar mbar mbar g/h l kW kW rpm rpm kg lb DN DN

DS 102 114 (4) 95 (5.7) 3.5 5 10-4 2 x 10-3 2 x 10-2 15 60 0.2/0.5 0.45/0.55

DS 202 192 (6.8) 160 (9.6) 5.8 8.3 10-4 2 x 10-3 2 x 10-2 15 100 0.25/0.6 0.45/0.55

DS 302 285 (10) 237 (14.2) 8.2 11.6 10-4 2 x 10-3 2 x 10-2 20 160 0.25/0.6 0.45/0.55

1800 1500 22 48 25KF 25KF

1800 1500 25 55 25KF 25KF

1800 1500 25 55 25KF 25KF

DS 402 410 (14.5) 342 (20.5) 12.3 17.4 10-4 2 x 10-3 1 x 10-2 30 350 0.5/1 0.75/0.90 0.75/0.90 1800 1500 35 77 25KF 25KF

DS 602 605 (21.4) 504 (30.2) 18.3 26 10-4 2 x 10-3 1 x 10-2 30 550 0.5/1 0.75/0.90 0.75/0.90 1800 1500 35 77 25KF 25KF

DS 1002 1010 (35.7) 842 (50.5) 31 44 10-4 2 x 10-3 1 x 10-2 20 650 2.3/3.1 1.10/1.30 1800 1500 62 136 40KF 40KF

* According to PNEUROP 6602

Pump Accessories

Exhaust Filters - Oil Mist Eliminator

Foreline Roughing Traps

The exhaust filters (below, left) and the oil mist eliminator (right), retain the oil vapors which would otherwise be expelled into the atmosphere during pumpdown and gas ballast operation. Some models feature an oil return line to allow condensed oil or fluid to return to the pump reservoir.

Varian’s new traps are designed to prevent the backstreaming of mechanical pump fluids. Copper and stainless steel gauze inserts are designed to reduce oil backstreaming. Molecular sieve inserts are available for applications where it is desirable to increase water vapor pumping speed while eliminating backstreaming above the trap.

NW25 oil exhaust filter (left) PN 9499392 Oil mist eliminator DS 102 - DS 602 (right) PN 9499395

Foreline/Roughing Traps: please call Varian for ordering information

For any further details on our rotary vane pump accessories, please contact Varian Vacuum Technologies.

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Outline Drawings DS 102 - DS 202 - DS 302 - DS 402 - DS 602

DS 1002 A

R

A B

R

B

C

H Z

H

D

C

M (M1)

N (N1) W

P

L

N

Model DS 102 DS 202 DS 302 DS 402 DS 602

A 30 (1.18) 30 (1.18) 30 (1.18) 40 (1.57) 40 (1.57)

B 30 (1.18) 30 (1.18) 30 (1.18) 40 (1.57) 40 (1.57)

C 35 (1.38) 35 (1.38) 35 (1.38) 40 (1.57) 40 (1.57)

D 3 (0.12) 3 (0.12) 3 (0.12) 6 (0.24) 6 (0.24)

H 212 (8.3) 212 (8.3) 212 (8.3) 242 (9.5) 242 (9.5)

L 430 (16.9) 467 (18.4) 467 (18.4) 541 (21.3) 541 (21.3)

P

M L

W

M 245 (9.6) 245 (9.6) 245 (9.6) 261 (10.3) 261 (10.3)

N P R 104 (4.1) 105 (4.13) 165 (6.5) 104 (4.1) 105 (4.13) 205 (8.1) 104 (4.1) 105 (4.13) 205 (8.1) 130 (5.1) 100 (3.9) 230 (9) 130 (5.1) 100 (3.9) 230 (9)

W 132 (5.2) 132 (5.2) 132 (5.2) 164 (6.5) 164 (6.5)

Alternative mounting holes are also available, with M1 = 226 (8.9) and N1 = 98 (3.8), with hole Ø = 7 (0.3) for DS 102 / DS 202 / DS 302 or thread 1/4-20UNC for DS 402 / DS 602.

Model DS 1002

A 65 (2.6)

B 55 (2.2)

C 95 (3.7)

H L M 335 (13.2) 640 (25.2) 355 (14)

N 185 (7.3)

P R 115 (4.5) 300 (11.8)

W 230 (9)

Z 350 (13.8)

Dimensions in millimeters (inches)

Ordering Information Dual Stage Rotary Vane Pumps DS 102 with 1 phase worldwide motor* DS 102 with 1 phase worldwide motor* (UK version) DS 202 with 1 phase worldwide motor* DS 202 with 1 phase worldwide motor* (UK version) DS 302 with 1 phase worldwide motor* DS 302 with 1 phase worldwide motor* (UK version) DS 402 with 1 phase worldwide motor* DS 402 with 3 phase worldwide motor** DS 602 with 1 phase worldwide motor* DS 602 with 3 phase worldwide motor** DS 1002 with 3 phase worldwide motor**

Part Number 9499315 9499350 9499320 9499351 9499325 9499352 9499330 9499331 9499335 9499336 9499340

* 1 phase motors (100-120 / 200-240) V ±10%, 50/60 Hz. ** 3 phase motors (200-220 / 380-415) V ±10% at 50 Hz or (200-230 / 460) V ±10% at 60 Hz. All motors comply with CE and UL/CSA standards.

Minor Maintenance Kit (Contains all the valves, O-rings and seals to refurbish the pump to vacuum integrity) DS 102, DS 202, DS 302 DS 402, DS 602 DS 1002

Part Number 9499370 9499371 9499372

Major Maintenance Kit (Includes all the items of the minor kit plus the vanes) DS 102 DS 202, DS 302 DS 402, DS 602 DS 1002

Part Number 9499380 9499381 9499382 9499383

Oil and Accessories Rotary vane fluid, GP type, 1 liter Rotary vane fluid, GP type, 1 liter (USA)* Rotary vane fluid, GP type, 2 liters Rotary vane fluid, GP type, 1 gallon (USA) Oil mist eliminator (DS 102 - DS 602) Oil mist replacement cartridge (pkg. of 2) NW 25 oil exhaust filter NW 40 oil exhaust filter NW 25-NW 40 oil exhaust replacement cartridge Oil return kit European plug power cable 2 meters (DS 102 - DS 602) 1 ph USA plug power cable 2 meters (DS 102 - DS 602) 1 ph UK plug power cable 2 meters (DS 102 - DS 602) 1 ph NW 25 centering ring Viton (DS 102 - DS 602) NW 25 aluminum clamp (DS 102 - DS 602) NW 40 centering ring Viton (DS 1002) NW 40 aluminum clamp (DS 1002)

Part Number 9499390 K7516301 9499391 K7516302 9499395 9499394 9499392 9499393 9499342 9499376 9499396 9499397 9499398 KC25AV KQ25AWP KC40AV KQ40AWP

* When these pumps are used in Leak Detectors applications, we

recommend the use of Rotary Vane Fluid (Elite-Z mechanical), P/N 695409005 as it features a lower vapor pressure.


Benelux Varian Vacuum Technologies Rijksstraatweg 269 H, 3956 CP Leersum The Netherlands Tel: (31) 343 469910 Fax: (31) 343 469961

Italy Varian Vacuum Technologies via F.lli Varian 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9 111 Fax: (39) 011 997 9 350

United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437

Canada Central coordination through: Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437 Toll Free # 1 (800) 882 7426

Japan Varian Vacuum Technologies Sumitomo Shibaura Building, 8th Floor 4-16-36 Shibaura Minato-ku, Tokyo 108 Japan Tel: (81) 3 5232 1253 Fax: (81) 3 5232 1263

Other Countries Varian Vacuum Technologies via F.lli Varian 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9 111 Fax: (39) 011 997 9 350

China Varian Technologies - Beijing Room 1201, Jinyu Mansion No. 129A, Xuanwumen Xidajie Xicheng District Beijing 100031 P.R. China Tel: (86) 10 6641 1530 Fax: (86) 10 6641 1534 France and Wallonie Varian s.a. 7 avenue des Tropiques Z.A. de Courtaboeuf - B.P. 12 Les Ulis cedex (Orsay) 91941 France Tel: (33) 1 69 86 38 13 Fax: (33) 1 69 28 23 08 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel: (49) 6151 703 353 Fax: (49) 6151 703 302 India Varian India PVT LTD 101-108, 1st Floor 1010 Competent House 7, Nangal Raya Business Centre New Delhi 110 046 India Tel: (91) 11 5548444 Fax: (91) 11 5548445

All specifications are subject to change without notice. Copyright by Varian SpA

www.varianinc.com

Korea Varian Technologies Korea, Ltd Shinsa 2nd Bldg. 2F 966-5 Daechi-dong Kangnam-gu, Seoul Korea 135-280 Tel: (82) 2 3452 2452 Fax: (82) 2 3452 2451 Mexico Varian, S. de R.L. de C.V. Concepcion Beistegui No 109 Col Del Valle C.P. 03100 Mexico, D.F. Tel: (52) 5 523 9465 Fax: (52) 5 523 9472 Russia Central coordination through: Varian Vacuum Technologies via F.lli Varian 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9 252 Fax: (39) 011 997 9 316 Taiwan Varian Technologies Asia Ltd. 14F-6, No.77, Hsin Tai Wu Rd., Sec. 1 Hsi chih, Taipei Hsien Taiwan, R.O.C. Tel: (886) 2 2698 9555 Fax: (886) 2 2698 9678 UK and Ireland Varian Ltd. 28 Manor Road Walton-On-Thames Surrey KT 12 2QF England Tel: (44) 1932 89 8000 Fax: (44) 1932 22 8769

Toll Free Number for United States 1 (800) 882 7426 Toll Free Number for Europe 00 800 234 234 00

12/2003

Varian, Inc. Vacuum Technologies