EE 5344 – Introduction to MEMS CHAPTER 5 Radiation Sensors 5 ...
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EE 5344 – Introduction to MEMS CHAPTER 5 Radiation Sensors 5 ...
EE 5344 – Introduction to MEMS. CHAPTER 5 Radiation Sensors. 5. Radiation
Microsensors. Radiation µ-sensors convert incident radiant signals into standard
...
EE 5344 – Introduction to MEMS CHAPTER 5 Radiation Sensors 5. Radiation Microsensors Radiation µ-sensors convert incident radiant signals into standard electrical out put signals. Radiant Signals 1. Electromagnetic 2. Neutrons 3. Fast Electrons 4. Heavy-Charged Particles
Classification According to Weight 1. Baryons (heavy) 2. Mesons (medium) 3. Leptons (light)
Electromagnetic Go over the EM Spectra.
Fast Electrons Mass of an electron, but (+) or (-) charge, corresponding to a β-particle or a positron. β+ β− (Leptons)
Neutrons Charge is zero. Symbol is n. (Baryon) Heavy Charged Particles α particle (2 protons + 2 neutrons, He++) charge:+2 Proton (p) (charge +2) Both are Baryons. In Addition Mesons Such as Pions and Kaons-Charge can be positive, neutral, or negative π+ K+
π° K°
πK-
5.1 Classification of Radiation Sensors They are non-contacting, because they detect emission.
1 / Radiation Sensors
5.2 Nuclear Radiation Microsensors Measure nuclear particles such as α, and β particles as well as radiation such as γ-rays and x-rays.
5.2.1 Scintillation Counters (photons) pulses of light
Incident nuclear radiation
Photomultiplier tube
Processor amplifier
Scintillator (inorganic or organic crystal)
Pulse height α ER (Energy of radiation) Pulse count rate α ΦR (Radiation flux) In addition to the materials listed in Table 6.3. ZnO (doped with gallium) and ZnS (doped with silver) are also used.
5.2.2 Solid-State Detectors Mostly semiconductor materials are used (CdTe, HgI2, GaAs, Si, Ge). Electromagnetic energy interacts with semiconductors primarily through absorption processes. Absorption: relative change of irradiance or incident radiation intensity per unit path (distance into the material) δI R ( x) IR
= −αdx
x: distance into the material α: absorption coefficient IR: Radiation intensity Solution:
I R ( x) = I Ro exp( −αx)
The total absorption coefficient is the sum of three mechanisms:
