Fabrication of periodic nanovein structures by holography lithography technique Lai N.D., Huang Y.D., Lin J.H., Do D.B., Hsu C.C. Department of Physics, National Chung Cheng University, Ming Hsiung, Chiayi 621, Taiwan; Laboratoire de Photonique Quantique et Moléculaire, UMR CNRS 8537, Ecole Normale Supérieure Cachan, 94235 Cachan cedex, France; Department of Physics, Hanoi National University of Education, 36 Xuan Thuy, Hanoi, Viet Nam; Graduate Institute of Opto-Mechatronics, National Chung Cheng University, Ming Hsiung, Chia Yi 621, Taiwan; Department of Photonics, National Sun Yat-sen University, Kaohsiung, 804, Taiwan Abstract: This work demonstrates a promising method to fabricate periodic nanovein structures, which can be served as templates for fabricating photonic crystals possessing a large complete photonic bandgap. First, the fabrication of a one-dimensional grating structure connected with nanolines is demonstrated by controlling the exposure dosage of the second exposure of the two-exposure two-beam interference technique. Secondly, by using the same interference technique but setting each exposure under the same exposure dosage, two-dimensional periodic structures with nanovein connections were fabricated. These structures were obtained by using either a pure negative photoresist with very low concentration of photoinitiator or a mixing of a negative and a positive photoresists. The fabricated structures are not, as usual, a duplication of the interference pattern but are constituted by square or triangular rods connecting with narrow veins. They can be used as templates for fabricating photonic crystals with very large complete photonic bandgap. © 2009 Optical Society of America. Index Keywords: Crystal atomic structure; Energy gap; Fabrication; Holographic interferometry; Lithography; Periodic structures; Photoresistors; Spontaneous emission; Surface treatment; Fabricated structures; Interference patterns; Low concentrations; Nanolines; Negative photoresists; One-dimensional gratings; Photoinitiator; Photonic band-gap; Two-beam interferences; Two-dimensional periodic structures; Photonic crystals Year: 2009 Source title: Optics Express Volume: 17 Issue: 5 Page : 3362-3369 Link: Scorpus Link Correspondence Address: Lai, N. D.; Department of Physics, National Chung Cheng University, Ming Hsiung, Chiayi 621, Taiwan; email:
[email protected] ISSN: 10944087 DOI: 10.1364/OE.17.003362 Language of Original Document: English Abbreviated Source Title: Optics Express
Document Type: Article Source: Scopus Authors with affiliations: 1. Lai, N.D., Department of Physics, National Chung Cheng University, Ming Hsiung, Chiayi 621, Taiwan, Laboratoire de Photonique Quantique et Moléculaire, UMR CNRS 8537, Ecole Normale Supérieure Cachan, 94235 Cachan cedex, France 2. Huang, Y.D., Department of Physics, National Chung Cheng University, Ming Hsiung, Chiayi 621, Taiwan 3. Lin, J.H., Department of Physics, National Chung Cheng University, Ming Hsiung, Chiayi 621, Taiwan 4. Do, D.B., Department of Physics, National Chung Cheng University, Ming Hsiung, Chiayi 621, Taiwan, Department of Physics, Hanoi National University of Education, 36 Xuan Thuy, Hanoi, Viet Nam 5. Hsu, C.C., Department of Physics, National Chung Cheng University, Ming Hsiung, Chiayi 621, Taiwan, Graduate Institute of Opto-Mechatronics, National Chung Cheng University, Ming Hsiung, Chia Yi 621, Taiwan, Department of Photonics, National Sun Yat-sen University, Kaohsiung, 804, Taiwan
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