Jun 26, 2012 ... TESCAN Brno. High resolution SEM and high current plasma FIB dual-column
instrument. See also Mini-WS on Wednesday: .... Zeiss NTS GmbH Oberkochen.
Combined EDS,WDS and EBSD Analysis on the FE-SEM ULTRA.
Deutsche Gesellschaft für Elektronenmikroskopie e.V.
Deutsche Gesellschaft für Materialkunde e. V.
Dreiländer-Arbeitskreis FIB Workshop June, 25th – 27th, 2012 Campus TU Dresden / IFW, Dülfer-Hörsaal (Alte Mensa Mommsenstraße) Preliminary Program, state 11.05.2012 Please note: •
oral presentations 20 min (40 min for invited talks) + 5 min discussion, introductions to Mini-WS 15 min without discussion
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conference language: German (favoured) or English; abstracts, posters and slides in English please
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please put the posters up at poster boards (H150xB100cm) in lecture room before the second session on Monday starts
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for content of oral and poster presentations see the abstract book
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please find out your group number for the Mini Workshops on Wednesday by looking at the groups plan on the information board
Monday, 25.06.2012 9:30 – 10:00
Registration & Welcome Coffee
10:00 – 10:10
Address of welcome (Prof. Jürgen Eckert, Director of the IKM/IFW)
10:10 – 10:15
Comments of the local organizers
Conference room
1/13
10:15 – 11:50
Fundamentals: Fundamentals and news from manufacturers Chair: S. Menzel / IFW Dresden
10:15 – 11:00
L. Bischoff / HZ Dresden-Rossendorf (Invited)
Modern Trends in FIB Development
11:00 – 11:25
J. Jiruše et al. / TESCAN Brno
High resolution SEM and high current plasma FIB dual-column instrument See also Mini-WS on Wednesday: “Time-Of-Flight SIMS integration with FIB-SEM” with introduction on Tuesday afternoon session
11:25 – 11:50
I. Schulmeyer et al. / Carl Zeiss NTS GmbH Oberkochen
Efficient and precise sample preparation by combination of pulsed laser ablation and FIB milling See also Mini-WS on Wednesday: with introduction on Tuesday afternoon session
11:50 – 13:00
Lunch (Mensa) / Coffee
Please use the MENSA rooms on first floor of the Mensa (this building), meal including one non-alcoholic drink will be free of charge, please apply your badge or bon for legitimation, coffee in lecture room near posters please put the posters up on poster boards in lecture room
Fundamentals: Fundamentals and news from manufacturers (cont.) 13:00 – 14:15 Chair: H.-J. Engelmann / Globalfoundries Dresden 13:00 – 13:25
P. Schlossmacher et al. / FEI Eindhoven NL
High resolution FIB/SEM large scale combined with 3D imaging and analysis of materials See also Mini-WS on Wednesday: “Helios NanoLab 600i with FlipStage” with introduction on Tuesday afternoon session
13:25 – 13:50
A.C. Robins et al. / E.A. Fischione Instruments Inc. PA
Concentrated Ar Ion Milling for Aberration – Corrected Electron Microscopy: A Review See also Mini-WS on Wednesday: “The NanoMill 1040 workstation” with introduction on Tuesday afternoon session
13:50 – 14:15
S. Curtze et al. / Oxford Instruments GmbH Wiesbaden
On-Probe Thinning of Samples for Bulk or STEM Type EDS Analysis
14:15 – 14:45
Posters / Coffee break
Coffee in lecture room near posters 2/13
Fundamentals: Fundamentals and news from manufacturers (cont.) 14:45 – 16:00 Chair: F. Altmann / CAM FhG Halle 14:45 – 15:10
A.J. Smith et al. / Kleindiek Nanotechnik GmbH Reutlingen
A new approach for making electrical conductive interconnections between small objects inside an SEM See also Mini-WS on Wednesday: “Give your microscope a hand - Handling & Characterizing Materials and Electronics from the Micro to the Nano Scale” with introduction on Tuesday afternoon session
15:10 – 15:35
C. Kofler et al. / TVIPS GmbH Gauting
Fiber Optic Coupled CMOS Detectors for Transmission Electron Microscopy
15:35 – 16:00
S. Bauerdick et al. / Raith GmbH Dortmund
Ion Beam Lithography Approaches for unique High Resolution and Large Area Direct Patterning See also Mini-WS on Wednesday: “The ELPHY MultiBeam System” with introduction on Tuesday afternoon session
16:00 – 17:00
Poster session
Lecture room
17:00 – 23:30
Social program & workshop dinner
We meet at 17:00 in front of the Mensa / Mommsenstraße entry for a Dresden sightseeing tour by bus, after that we start at 18:30 at the main entry of the “Großer Garten” to walk through the garden to the restaurant “Carolaschlösschen”. There a buffet-style conference-dinner will start at 19:00. This is free of charge thanks to financial support by the sponsors.
Sponsors:
3/13
Tuesday, 26.06.2012 08:45 – 10:45
Applications I: General Applications Chair: L. Bischoff / HZ Dresden-Rossendorf
08:45 – 09:30
W. Österle / BAM Berlin (Invited)
Applications of FIB-technique within the Federal Institute for Materials Research and Testing
09:30 – 09:55
F. Altmann et al. / CAM FhG Halle
High throughput Plasma FIB milling of semiconductor devices
09:55 – 10:20
U. Jäntsch et al. / IAM-AWP Karlsruher Institut für Technologie (KIT)
Einsatz des Dual Beam REM/FIB zur Untersuchung der Mikrostruktur an Refraktärwerkstoffen
10:20 – 10:45
R. Schmied et al. / ZEM Graz
New possibilities for soft matter applications: Eliminating technically induced thermal stress during FIB processing
10:45 – 11:15
Posters / Coffee break
Coffee in lecture room near posters
11:15 – 12:30
Applications II: FIB for TEM preparation Chair: U. Mühle / IZFP FhG Dresden
11:15 – 11:40
E. Spiecker et al. / Universität Erlangen-Nürnberg
TEM preparation method for site- and orientation-specific sectioning of individual anisotropic nanoparticles based on Shadow-FIB-Geometry
11:40 – 12:05
D. Utess et al. / Globalfoundries Dresden
An Innovative Method for fast TEM Sample Transfer and Immediate Analysis Thereafter
12:05 – 12:30
J. Thomas et al. / IFW Dresden
Verbesserung der Qualität von FIB-Lamellen durch Beschuss mit fokussiertem Ar-Ionen-Strahl geringer Energie
12:30 – 13:30
Lunch (Mensa)
Please use the MENSA rooms on first floor of the Mensa (this building), meal including one non-alcoholic drink will be free of charge, please apply your badge or bon for legitimation
13:30 – 14:45
Applications III: New Applications of FIB Chair: Michael Rogers, austriamicrosystems AG
13:30 – 13:55
H. Plank et al. / ZEM Graz
Improving functionality and resolution capabilities for electron beam induced Pt deposition
4/13
13:55 – 14:20
T. Mühl et al. / IFW Dresden
FIB-based preparation of monopole-like probes for magnetic force microscopy
14:20 – 14:45
C. Burkhardt et al. / NMI Reutlingen
FIB-SIMS-Analysen mit Quadrupol und Ionenfalle Massenspektrometer
14:45 – 15:15
Posters / Coffee break
Coffee in lecture room near posters
15:15 – 15:50
Introduction papers to Mini-workshops on Wednesday
Without discussion
Chair: T. Gemming / IFW Dresden 15:15 – 15:30
A.C. Robins / E.A. Fischione Instruments Inc. PA
The NanoMill 1040 workstation
15:30 – 15:45
S. Curtze / Oxford Instruments GmbH Wiesbaden and
Combined EDS,WDS and EBSD Analysis on the FE-SEM ULTRA
I. Schulmeyer / Carl Zeiss NTS GmbH Oberkochen 15:45 – 15:50
P. Schlossmacher / FEI Eindhoven NL
The Helios NanoLab 600i Workstation with FlipStage
15:50 – 16:15
Posters / Coffee break
Coffee in lecture room near posters
16:15 – 17:00
Introduction papers to Mini-workshops on Wednesday
Without discussion
Chair: C. Burkhardt / NMI Reutlingen 16:15 – 16:30
J. Jiruše / TESCAN Brno
Time-Of-Flight SIMS integration with FIB-SEM
16:30 – 16:45
S. Kleindiek / Kleindiek Nanotechnik GmbH Reutlingen
Give your microscope a hand - Handling & Characterizing Materials and Electronics from the Micro to the Nano Scale
16:45 – 17:00
S. Bauerdick et al. / Raith GmbH Dortmund
The ELPHY MultiBeam System
17:00 – 18:00
Posters / Individual talks at instruments (IFW)
Individual discussion at posters or at instruments of Mini-Workshops which are presented on Wednesday. This is only for colleagues who are no more present on Wednesday, for rooms see Lab tour on Wednesday) Attention: The MENSA rooms will close at 18:00, please leave till then. Please look for your correct group number for the mini-workshops that is posted on the information board.
5/13
Station 1: TESCAN (http://www.tescan.com/) with FIB-TOFSIMS at LYRA GM
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SPM/AFM (Scanning Probe MicroscopeAtomic Force Microscope)
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TOF (Time of Flight SIMS)
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EBSD (Electron Backscattered Scanning Diffraction)
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WDX (Wavelength Dispersive X-Ray Spectrometry)
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EDX (Energy Dispersive X-Ray Spectrometry)
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CL (Cathodoluminescence)
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EBIC (Electron Beam Induced Current)
The LYRA GM can integrate a variety of nano-analytic techniques. A newly designed chamber, with more than 20 ports, the LYRA GM Nanotechnology workstation is the first in its class to fully realize the integration of a “Time of Flight” secondary ion mass spectrometer and in situ “SPM/AFM”, making the LYRA GM one of the most versatile Nano-manipulation and characterization tools in the world. The following analytical applications can be fully realized in one single instrument
6/13
Station 2: KLEINDIEK Nanotechnik (http://www.nanotechnik.com/) with plug-in / add-on tools inside 1540XB / ZEISS
7/13
Station 3: OXFORD (http://www.oxford-instruments.com/) with EBSD-EDX-WDX / Oxford at ULTRA / ZEISS
8/13
Station 4: FEI Comp. (http://www.fei.com/) with Helios 600i and Flip-Stage
9/13
Station 5: FISCHIONE Comp. (http://www.fischione.com/) with NanoMill 1040
10/13
Station 6: Raith GmbH (http://www.raith.com/) with SEM & FIB lithography kits at NVision40 / ZEISS
11/13
Anreise:
12/13
Trip Conference Room Dülfersaal (Alte Mensa TU Dresden, Uni Campus, Dresden Südvorstadt) to IFW, Helmholtzstr. 20 (Mini-Workshops on Wednesday):
13/13
