Get your stakeholders into modeling using graphical ...

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Wafer Logistics Specification and Analysis Tool (WLSAT). • Improvements on layout. • The power of Sirius and Xtext integration. • Project Results. • Improvement ...
Get your stakeholders into modeling using graphical editors Waheed Ahmad Olaf Donk

Who are these guys

Waheed Ahmad • PhD in Computer Science • Software designer at unit High Tech • TNO-ESI/ASML

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Olaf Donk • MSc. Artificial Intelligence • Sr. Software designer at unit High Tech • Cordis Automation

ICT at a glance Dutch industrial technology solutions and services provider since 1978 Over 1000 highly educated professionals, 20+ nationalities Active in High Tech, Healthcare, Infrastructure, Transport, Energy and more… High Tech has strong focus on the development of LVHCHM systems: ▪ Low Volume: series of 1 – 1000 products ▪ High Complexity: e.g. groundbreaking precision or operating in extreme conditions ▪ High Mix: state of the art technologies, combining a diversity of disciplines (e.g. Mechatronics, Optics, Electronics) ▪ For example: wafer scanners, electron microscopes, interventional X-ray systems Slide 3

Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

Need for MDE

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Model Driven Engineering – Overview @ICT •

Key partnerships:



Customer segments: • •



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Companies that use MDE technology Companies that are developing LVHCHM machines

Main value propositions: • •

Trained professionals on Attitude, Skills and Knowledge Organizing in-house training

• •

Reference projects / best practices Training material on technology and tooling

Sirius Training (Obeo, March 2017)

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Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

Cyber-Physical Systems project

About ASML •

World’s leading lithography machines manufacturer. Lithography creates the image of chip patterns on a wafer. An average lithography machine costs around 32 million euros1. Involves a variety of disciplines, e.g., mechatronics, optics, physics, laser etc.

• • •

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1

https://www.asml.com/asml/show.do?lang=EN&ctx=5869&rid=44696

Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

Problem Statement Increased productivity and accuracy is required •

Optimal processing and handling of a wafer



Timing & throughput requirements



Safety requirements



Accuracy requirements

Performance prediction is a challenge

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Scalability



Complicated/multidisciplinary



Expensive

Problem Statement - Analysis

model

Formal Specification in DSL

Code

design space exploration

analyze

Requirements, Specification

Schedule, timing Slide 12

Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

Wafer Logistics Specification and Analysis Tool (WLSAT) LoadRobot

Peripherals

IN Slide 14

UnloadRobot Transfer

Resources

COND

Action

DRILL

Action

OUT

Wafer Logistics Specification and Analysis Tool (WLSAT) Why Graphical Editors? •

Most of the stakeholders are “non-software”



Preference for graphical or table representation



Huge models require graphical visualization

Why Sirius?

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Available diagrams (diagram, tree, table) offer an equivalent replacement of existing documentation



Natural fit into already used MDE stack

Wafer Logistics Specification and Analysis Tool (WLSAT)

Structure of WLSAT Logistics

L

Transfers Actions

A

A

Resources Peripherals

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A L

XY

A U

CL

T

T

T

A

A

A

C

A

L

D

CL

DL

A

A D

ZR

A

Previous state of practice: document-based

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Current state of practice: Sirius-based

Diagram Table

Tree

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Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

Improvements on layout Do you recognize the need for layout tools? How did you solve it? •

Eclipse Layout Kernel (ELK) Logistics Transfers Actions Resources Peripherals

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Custom Layout Connector ELK Graph

Layout Algorithm

Improvements on layout - demo • 72 Actions • Manual layout took 4 hours

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Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

The power of Sirius and Xtext integration • Sirius diagrams are persisted together with Xtext

• Not everything is a picture (but a lot is) • Text is better for details

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The power of Sirius and Xtext integration Graphical models preserve natural representation for • Directed graphs • Sequences of actions

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Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

Project Results • Model-driven environment and demonstrator • Formally model logistics • Replacement of the current specification documents • Compute system throughput • Visualize behavior and timing in terms of Gantt charts

• Successful application both in design phase and in troubleshooting production issues • Sirius-based editors supported by

• textual editors • layout • backend algorithms Slide 26

• Significant acceptance from stakeholders

Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

Improvement Ideas •

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Displaying Maps (key-value pairs) • Master-slave widgets in properties view • Currently implemented as diagrams

Improvement Ideas • To delete a referred element, all references must explicitly be removed • “Some” support for serialization • Consumes most of the time in building a Sirius-based editor

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Agenda

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Need for MDE



Cyber-Physical Systems project



Problem Statement •

Wafer Logistics Specification and Analysis Tool (WLSAT)



Improvements on layout



The power of Sirius and Xtext integration



Project Results



Improvement Ideas



Future Steps

Future Steps • Generating documentation from models • M2Doc will come in handy

• Utilization of enhanced properties view in Sirius 5.0 • Creating widgets from domain classes • Reusing and extending properties view

• Wizards and dialogs

Monopoly’s original design documentation

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Summary

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Successful project



Sirius editors leveraged adoption by domain experts



Thanks to TNO-ESI, ASML and TU/e



Sirius a definite yes!!

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