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MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY (PLASTICS ENGINEERING) BY SABURO NONOGAKI, UENO TAKUMI,

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MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY (PLASTICS ENGINEERING) BY SABURO NONOGAKI, UENO TAKUMI, PDF

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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials." ● ● ● ● ● ● ● ●

Sales Rank: #5098916 in Books Brand: Brand: CRC Press Published on: 1998-06-25 Original language: English Number of items: 1 Dimensions: 9.50" h x 6.50" w x .75" l, 1.33 pounds Binding: Hardcover 336 pages

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