product information catalogue product information catalogue

ProdInfoCatal_UK_02050_omsl

03-07-2001

13:45

Pagina 1

LOCAL AND WORLDWIDE SUPPORT

The European Flow Centre Brooks Instrument provides sales and service facilities around the world, ensuring quick delivery from local stock, timely repairs, and local based sales and service facilities. Our dedication to customer service, helpdesk and support extends to our direct sales force, who are well trained, experienced and equipped. These flow specialists provide consultation and support, assuring successful application of the Brooks products. Calibration facilities are available in virtually all local sales and service offices. The primary standard calibration equipment used to calibrate

the flow products is certified by the Dutch Weights and Measures Authority-NMi and traceable to the relevant international standards.

PRODUCT INFORMATION CATALOGUE

Efficient workshops, skilled staff and highly advanced tools warrant products of the best quality. This was expressed in 1989, when Brooks Instrument B.V. was the first in the instrumentation branche to receive the internationally recognised quality certificate ISO 9001. And it has been renewed ever since. The Veenendaal (the Netherlands) factory where the keywords accuracy, reliability and flexibility mean a lot, serves as the European Flow Centre. Try us and contact your local representative!

Your local representative is:

The contents of this publication are presented for informational purposes only, and while every effort has been made to ensure their accuracy, they are not be construed as warranties or guarantees, express or implied, regarding the products or services described herein or their use or applicability. We reserve the right to modify or improve the designs or specifications of such products at any time without notice. © Brooks Instrument B.V., 2001. Printed in the Netherlands. All rights reserved

Brooks Instrument B.V. Groeneveldselaan 6 3903 AZ Veenendaal The Netherlands Tel +31-(0)318 549 549 Fax +31-(0)318 549 559 E-Mail [email protected] http://www.brooksinstrument.com http://www.quantim.com

LABCAT-E rev. 4 04/01

FLOW AND PRESSURE INSTRUMENTATION FOR LABORATORY AND INDUSTRY

Introduction This catalogue has been prepared to provide an overview of instruments for usage in laboratories and research centres. Although Brooks Instrument manufactures a broad line of flowmeter equipment, this is a selection. It encompasses Variable Area flowmeters and Thermal- and "Quantim" Mass Flowmeters and Controllers for typical laboratory and research centre applications. Ask your Brooks’ representative for a complete overview of other available products for the measurements of liquids and gases.

Contents Model

Description

Output

Page

ranges are for air and water

Brooksmite PT 2700 Purgemeter Gas 8 - 2633 ln/h Liquid 0.17 - 83 l/h

N/A

4

Sho-Rate GT 1350 Purgemeter Gas 0.28 - 3644 ln/h Liquid 0.0033 - 125 l/h

Switches only

5

Armite MT 3750 Purgemeter Gas 35 - 3100 ln/h Liquid 0.8 - 100 l/h

Switches only

12

ELF Needle Control Valves Models 8503/04

N/A

14

Needle Control Valves Models 8509/8510

N/A

16

Flow Controllers Gas 0.05 - 56000 ln/h Liquid 0.01 - 1820 l/h

N/A

18

Pressure Regulators 8601 16 bar 8606/07 10 bar

N/A

25

Pressure Controller Model 5866 Gas 25 mbar - 100 bar

N/A

27

Smart Thermal Mass Flow (IP40) Analogue I/O Meters and Controllers, Series "S" & digital communications Gas 0.06 mln/min - 2160 m3n/h

2

29

Model

Description

Output

Page

ranges are for air and water

Smart Thermal Mass Flow (IP65) Analogue I/O meters and Controllers & digital communications Gas 0.06 mln/min - 2160 m3n/h

33

Smart Control Software for use with the Brooks Smart Mass Flow Meters and Controllers

Digital communications

37

Smart DDE Software for use with the Brooks Smart Mass Flow Meters and Controllers

Digital communications

38

Thermal Mass Flowmeters and Controllers, 5850TR Gas 0.2 mln/min - 20 ln/min

Analogue

40

Thermal Mass Flowmeters and Controllers, 5850-5864, Series "E" Gas 0.06 mln/min - 2160 m3n/h

Analogue

41

Massrate 5700 Electronic Flowmeter

42

Flomega Flowmeters and Controllers Liquid 0.3 - 1000 grams/h

Analogue

44

Electronic Control Valves

N/A

46

Read-Out Equipment Analogue PS/Control/Indication/Ratio Control

48

Volumeter Calibrators Gas 1 mln/min - 36 ln/min

N/A

49

"Quantim" Coriolis Mass Flowmeter and Controllers Liquid 0 - 3000 g/h

Analogue/digital

55

Summary of Adapters

N/A

58

3

PT 2700 BROOKS-MITE LOW FLOW PURGEMETERS DESCRIPTION The PT 2700 Brooksmite Purgemeter is a low-flow variable area flowmeter molded of high impact polycarbonate. The single piece molded unit forms the tapered ribbed tube, integral float stops and front bezel. The O-ring sealed metal connector inserts possible cracking of the meter body by overModel 2700 tightening. The rotatable connectors act also as line unions to simplify piping. The unit is designed for flow rate indication of non-corrosive liquids and gases at lowest possible cost. It is available with or without the optional integral Brooks Valve.

More details wanted? Ask for our Product Data Sheet PDS 2700

Max. operating temp. Accuracy Reproducibility Connections

Scale

Valve

55 °C ± 10 % F.S. 1 % F.S. 1/8" NPT female horizontal Optional: 1/4" NPT and hose connectors Silk screened on adhesive sheet, direct reading for air @ 20 °C & pa 1.013 bar and water (see capacity table). Also mm inscriptions with calibration curves for other process conditions are available. An integral needle valve can be mounted at the inlet of the instrument.

DIMENSIONAL DRAWING PT 2700 (mm)

MATERIALS OF CONSTRUCTION Meter body Clear polycarbonate Vertical clean out plug Polycarbonate Floats Glass or 316 St. Steel O-rings Viton Line connections Brass or 316 St. Steel SPECIFICATIONS Scale length 38 mm Max. operating pressure pe 6.9 bar Min. operating temp. - 30 °C

CAPACITY TABLE MODEL PT 2700 TUBE SIZE 2 4 6

FLOAT MATERIAL Glass St. Steel Glass St. Steel Glass St. Steel

AIR ln/h* 10-80 25-150 50-300 50-500 0.25-1.5 m3n/h 0.5-2.5 m3n/h

WATER l/h 0.25-1.5 1-4 0.5-6 2.5-16 5-30 10-80

∆P PASCAL** (no valve) 190 250 250 650 2400 6600

* Flow ranges at normal conditions (pa 1.013 bar & 0 °C), when the meter is operated at pa 1.013 bar and 20 °C. ** Pressure drop at max. flow for instruments without needle valve.

4

GT 1350 SERIES SHO-RATE LOW FLOW INDICATORS DESCRIPTION The Sho-Rate series of flow indicators provide an economical means of flow rate indication and control for general plant use, laboratory and analytical applications. Available options include Brooks Line IV Valves or NRS Needle Valves as well as flow controllers which can be mounted integrally to Model 1350 the inlet or the outlet of the meter. For high or low flow signalling one or two inductive switches may be applied. SPECIFICATIONS Performance Scale length model 1350 model 1355 model 1357 Accuracy model 1350

65 mm 150 mm 250 mm


Tube packing material O-Ring material

Viton Viton

OPTIONAL FEATURES/EQUIPMENT ● PVDF fitting material PVDF is resistant to most acids and bases. Therefore, the Sho-Rate equipped with PVDF fittings provides an economical means of flow rate indication for difficult to handle, corrosive fluids encountered in chemical plants, research laboratories, semiconductor and film processing industries. ● Brooks Line IV Valve The Brooks Line IV Valve is a multi-purpose valve, designed for low flow gas and liquid applications. Three needles with different conical tapers provide a wide choice of flow ranges for all models (see page 17).

EXPLODED VIEW BROOKS LINE IV VALVE

± 10% F.S. Optional ± 5% F.S. model 1355 ± 5% F.S. Optional ± 3% F.S. model 1357 ± 3% F.S. Optional ± 2% F.S. or ± 1% F.S. Repeatability 0,5% F.S. Rangeability 10 : 1 Max. operating pressure pe 13.8 bar Max. operating temp. 120 °C CONSTRUCTION DATA Fitting material Brass or 316 SS Connection material Brass or 316 SS Connection types 1/8" NPT, 1/4" NPT, 1/8" tube compression, 1/4" tube compression or 1/4" I.D. Hose Side plate material Anodized aluminum Metering tube material Borosilicate glass Float material Glass, Sapphire, 316 SS, Carboloy or Tantalum Float stop material Teflon

● NRS Needle Valve The NRS (Non Rising Stem) Needle Valves are designed specifically for extremely low flow gas and liquid applications. They feature a means of adjusting a sliding tapered needle which prevents sticking due to foreign matter in the fluid. These valves are particularly suitable for precise control requirements and possess a high turns to lift ratio. The flow is constant for any given stem position. Six needles with different tapers and two different orifices provide a wide choice of flow ranges (see page 15).

5

EXPLODED VIEW NRS VALVE

● Flush mounting bezel The instrument can be equipped with an aluminum (model 1350 and 1355) or plastic (model 1357) bezel for back panel mounting. ● Threaded adapters with mounting nuts for front panel mounting. ● Integrally mounted flow controllers Brooks self-contained flow controllers are constant differential regulators with built-in flow control needle valve. An internal diaphragmactuated control valve is positioned by the

incoming fluid pressure on one side of the diaphragm, and outlet pressure + spring action on the other side. Variations in the supply and/or discharge pressure disturb the balance of forces on the diaphragm, causing the control valve to close or to open, thus maintaining a fixed differential across the manual flow regulating valve. The series 8800 controllers are designed for all liquid and gas flows with constant downstream pressure. Series 8900 controllers are designed for all liquids and gas flows with constant upstream pressure.

The 8800/8900 controllers are designed to offer an economical way of controlling all your liquid and gas flows.

The 8840/8940 controllers are designed to offer the most accurate way of controlling all your ELF (Extremely Low Flow) liquid and gas flows.

Model 8842

BACK PANEL MOUNTING GT 1350/55

6

FRONT PANEL MOUNTING GT 1350/1355

CROSS SECTIONAL VIEW SHO-RATE WITH 8800 SERIES FLOWCONTROLLER (mm)

CROSS SECTIONAL VIEW SHO-RATE WITH 8900 SERIES FLOWCONTROLLER (mm)

FLOW CONTROLLER DATA TABLE Model nr.

Pressure drop min. - max.

Connection size inlet - outlet

Needle size

Flow range l/h water

Flow range ln/h air

8800

0.7 - 20 bar

1/4" - integral

1

0.02 - 4.5

0.7 - 130

2

0.05 - 14.5

1.4 - 420

3

0.12 - 88.0

3.5 - 2540

8900

0.7 - 10 bar

integral - 1/4"

7

DIMENSIONAL DRAWING GT 1350/1355/1357 WITH ALARM (mm)

MULTI TUBE GT 1360/1370 SERIES (mm)

DIMENSIONAL DRAWING SHO-RATE (mm) ● Inductive switches for high and low flow alarm. One or more inductive sensing coils may be mounted to the instrument to create a highly sensitive, stable and accurate device for signalling high or low flows or deviations from a controlled flow. ● The 1390 filter is a convenient in-line filter with a large filtering area. A sintered stainless steel filter element, mounted in a protective housing, can be easily removed for cleaning or exchanging. ● Aluminum circular or triangle perspex (with spirit level and levelling screws) base plates can be supplied mounted to the instrument. ● Multi-tube construction with individual or manifold inlet/ outlet.

Sho-Rate with base plate

8

CAPACITY TABLES MODELS 1350/1355/1357 MODEL GT 1350* TUBE

R-2-65-5

1-65 2-65A 2-65B 2-65C 3-65 4-65 6-65

FLOAT

Glass 316 SS Carboloy Glass Glass 316 SS 316 SS Glass 316 SS Glass 316 SS Glass 316 SS Carboloy

Water

Air

l/h 0.60 4.60 2.30 3.60 7.80 8.80 22 37 76 105

Hydrogen Nitrogen Oxygen ∆P **

ln/h

Argon Carbon Helium dioxide ln/h ln/h ln/h

ln/h

ln/h

ln/h

Pascal

4.2 13.5 22 42 50 165 180 310 350 620 1300 2300 3500

3.5 11.2 18.3 35.9 42.2 141 155 270 302 529 1095 1980 2964

9.3 30.0 50.8 133 156 562 610 1086 1191 2123 4452 8235 12543

4.4 14.1 23.0 43.7 51.4 169 187 324 366 640 1322 2385 3564

3.8 12.3 20.2 39.9 46.9 157 172 301 337 590 1220 2208 3306

60 320 325 80 100 580 320 240 510 580 1130 3670 12500 23000

4.9 14.4 22.3 38.5 45.2 141 160 269 314 543 1117 1988 2944

4.2 13.9 23.6 79.5 93.4 352 394 694 770 1390 2964 5588 8649

* Flow ranges at normal conditions (pa 1.013 bar & 0 °C), when the meter is operated at pa 1.013 bar and 20 °C. ** Pressure drop at max. flow for instruments without needle valve/flow controller.

9

MODEL GT 1355* TUBE

R-2-15-AAA

R-2-15-AA

R-2-15-D

R-2-15-A

R-2-15-B

R-2-15-C

R-6-15-A

R-6-15-B

FLOAT

Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum

Helium


ln/h

Argon Carbon dioxide ln/h ln/h

ln/h

ln/h

ln/h

ln/h

Pascal

2.78 4.32 8.26 14.0 15.3 5.4 8.2 15.9 26.9 29.1 21 29 47 70 75 46 61 94 136 144 133 173 262 376 398 221 292 439 629 667 510 629 950 1347 1430 1296 1690 2500 3549 3644

2.26 3.47 6.76 11.52 12.71 4.3 6.7 13.0 22.0 24.0 17 24 39 59 63 38 51 79 114 121 112 145 221 317 336 186 247 371 532 564 429 531 802 1139 1209 1095 1427 2114 3006 3090

2.53 4.55 8.73 15.44 17.21 4.7 7.6 15.8 28.4 32.0 24 39 75 126 140 85 118 194 288 312 281 375 576 857 907 472 633 979 1422 1515 1093 1391 2178 3150 3345 2934 3962 5967 8770 8993

5.86 9.83 18.98 32.94 36.76 12.4 17.5 34.8 61.2 67.3 55 81 140 219 238 143 194 309 452 485 437 579 888 1298 1374 735 981 1503 2177 2307 1690 2129 3279 4697 4986 4431 5880 8793 12719 13083

2.86 4.48 8.53 14.39 15.68 5.6 8.5 16.3 27.6 29.9 21 30 48 72 76 47 62 96 138 146 136 176 267 383 405 225 298 447 640 679 520 641 968 1372 1456 1321 1723 2547 3614 3709

2.49 3.80 7.45 12.73 14.09 4.8 7.4 14.3 24.3 26.5 19 27 44 66 70 43 57 88 127 135 125 162 246 354 375 208 275 413 593 629 478 591 894 1270 1348 1220 1590 2358 3353 3449

55 60 170 320 350 55 60 175 325 370 55 85 190 380 430 80 150 320 580 680 170 240 510 1190 1220 330 510 1140 2230 2490 650 1030 2110 4080 4890 3670 5850 12500 23100 26900

Water

Air

l/h 0.033 0.064 0.150 0.296 0.330 0.068 0.125 0.315 0.575 0.670 0.34 0.63 1.35 2.09 2.26 1.00 1.57 2.76 4.24 4.54 3.2 4.8 7.9 12.1 13.1 5.2 8.0 13.3 20.3 21.9 12.3 18.3 30.0 44.4 47.7 34.0 49.4 79.3 116.5 125.0

3.31 5.21 8.91 14.16 14.74 6.2 9.0 16.4 26.9 28.5 19 27 41 62 65 42 53 82 117 123 117 151 224 319 338 191 250 372 529 561 445 544 814 1144 1214 1111 1449 2123 2985 3035


10

MODEL GT 1357* TUBE

R-2-25-D

R-2-25-A

R-2-25-B

R-2-25-C

R-6-25-A

R-6-25-B

FLOAT

Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum Glass Sapphire 316 SS Carboloy Tantalum


ln/h

Argon Carbon Helium dioxide ln/h ln/h ln/h

ln/h

ln/h

ln/h

Pascal

20.4 28.1 45.2 67.1 72.8 47 62.2 95.9 138 146.8 123 160.7 242.2 347 369 212 277 417 579 612 483 619 910 1280 1356 1273 1621 2349 3283 3470

16.8 23.2 37.6 55.9 60.0 39 51 80 115 123 102 134 203 291 310 177 232 349 486 513 404 518 763 1075 1138 1068 1358 1972 2761 2923

53.6 77.6 134 207 227 145 198 315 459 495 403 538 821 1200 1276 703 930 1427 2004 2115 1602 2095 3141 4463 4728 4335 5640 8262 11769 12461

20.8 28.7 46.1 68.5 73.2 48 63 97 140 149 125 163 246 354 376 216 282 424 589 623 492 631 927 1304 1381 1298 1652 2393 3344 3533

18.8 26.0 42.1 62.7 67.3 43 58 89 129 138 115 150 228 327 348 199 260 393 546 577 453 582 857 1207 1279 1199 1525 2215 3102 3285

55 85 190 380 430 80 150 320 580 680 170 240 510 1190 1220 330 510 1140 2230 2440 650 1030 2110 4080 4890 3670 5850 12500 23100 26900

Water

Air

l/h 0.332 0.612 1.212 1.947 2.103 1.019 1.609 2.826 4.320 4.632 2.95 4.50 7.44 11.16 11.88 4.9 7.5 12.7 19.1 20.5 11.8 17.6 29.2 43.0 45.8 33.1 49.2 80.4 113.1 120.0

18.8 25.4 39.9 58.7 62.2 41 54 83 118 125 107 139 206 292 311 182 236 351 483 510 419 532 774 1079 1143 1084 1380 1981 2743 2871

23.5 37.4 72.2 120 133 87 120 198 292 318 259 348 532 792 842 451 600 929 1309 1389 1035 1369 2087 2994 3172 2884 3800 5607 8115 8565


11

MT 3750 AR-MITE LOW FLOW ARMOURED FLOWMETER DESCRIPTION The MT 3750 Metal Tube Flowmeter is a reliable, low flow metal tube flowmeter with 316 L SS (1.4404) wetted parts. The magnetically coupled indicator provides a highly reliable method of indication. The instrument is a practical and economical approach to low flow rate indication for high pressure and difficult to handle fluids. SPECIFICATIONS Performance Accuracy specification

Repeatability

Model 3750C

Standard: Class 4 acc VDE/VDI 3513 Optional: Class 2.5 acc VDE/VDI 3513 Within 1 % F.S.

Ratings Max. operating temp.

200 °C (Indicator only) 85 °C (Unit with alarm contact(s)) Max. operating pressure Standard: pa 100 bar Optional: pa 266 bar (All welded execution, without valve only)


CONSTRUCTION DATA Tube material 316 L SS (1.4404) Fitting material 316 L SS (1.4404) Float stop material Inconel 625 Clean-out plug material 316 L SS (1.4404) Float material 316 L SS (1.4404) O-Ring material Viton Housing Epoxy coated aluminum, protection category to EN 60529: IP 65 (certificate pending) Connections Horizontally threaded or vertically flanged Scale length 50 mm Scale inscription Direct reading scales in imperial or metric units

OPTIONAL EQUIPMENT ● Cartridge or NRS Needle Valves The cartridge valve can be supplied integrally mounted to the inlet fitting of the instrument. The NRS needle valve, also integrally mounted to the inlet fitting, provides a greater number of turns affording precision control. Max. operating pressure for MT 3750 with NRS needle valve is 65 bar.

CAPACITY / NEEDLE SIZE TABLE METER SIZE

l/h WATER

ln/h AIR *

NRS VALVE SIZE

CARTRIDGE VALVE SIZE

0 1 2 3 4 5 6

0.8 1.3 3.6 10.6 21 42 100

35 57 130 340 630 1400 3150

3 4 5 5 6 6 7

LOW LOW LOW MEDIUM MEDIUM HIGH HIGH

Rangeability 1 : 10 * Air flows are given at pa 1.013 bar & 0 °C when the meter is operated at pa 1.013 bar & 20 °C.

12

EXPLODED VIEW CARTRIDGE VALVE

TYPICAL PERFORMANCE CURVE CARTRIDGE VALVE

● Limit Switches One or two electronic initiators type SJ2-N can be installed in the indicator housing to allow initiation of signalling or switching functions on a preset flow value being reached. The SJ2-N initiator operates as a sleeve initiator that is inductively actuated by a cam mounted to the pointer. Any flow value can be used for setting the limit value by sliding the switch along the slot in the mounting plate for the initiators. Minimum setting distance between two initiators is approximately 50 % of scale indication.

and outlet pressure + spring action on the other side. Variations in the supply and/or discharge pressure disturb the balance of forces on the diaphragm, causing the control valve to close or to open, thus maintaining a fixed differential across the manual flow regulating valve. The series 8800 controllers are designed for all liquid and gas flows with constant downstream pressure. Series 8900 controllers are designed for all liquid and gas flows with constant upstream pressure. For detailed information we refer to page 21.

Power supply Current consumption

DIMENSIONAL DRAWING MT 3750 (mm)

Current consumption Self inductance Self capacitance Protection category

Electrical classification

8 Vdc active area clear: > 3 mA active area obscured: < 1 mA 29 µH 20 nF IP 67. Electrical characteristics in conformity with DIN 19234 or NAMUR Eex ib IIC T6 by P.T.B. cert. no. Ex-83 2022X. Intrinsically safe relays on request

● Flow Controllers mounted on inlet or outlet side Brooks self-contained flow controllers are constant differential regulators with built-in flow control needle valve. An internal diaphragmactuated control valve is positioned by the incoming fluid pressure on one side of the diaphragm,

13

PC 8503, PC 8504 BROOKS NRS NEEDLE CONTROL VALVES DESCRIPTION Brooks PC 8503/04 NRS (Non-Rising-Stem) Needle Valves are designed specifically for ELF (Extremely Low Flow) gas and liquid applications. Straight and angle pattern models in brass or 316 SS are available. They feature a positive, direct mechanical means of adjusting a sliding tapered needle Model 8504 which virtually prevents sticking due to foreign matter in the fluid stream. These valves are particulary suitable for the precise control requirements in chromatography. The flow is constant for any given stem position. Sawtoothing is eliminated. Needles and orifices can be exchanged without removing the valve body from the process line. An optional numerical handle provides precise valve settings of this high resolution valve.

SPECIFICATIONS Max. Operating Temp.

85 °C (Brass) 120 °C (316 SS) Max. Operating Pressure 40 bar (Brass) 65 bar (316 SS)

CONSTRUCTION DATA Body Nickel-plated brass or 316 SS Orifice Brass/Delrin or 316 SS/ Teflon Needle 316 SS Plunger Brass or 316 SS O-Rings Viton Connections Standard 1/8" NPT-F Optional 1/4" NPT-F 1/8" Tube compression 1/4" Tube compression 1/4" I.D. Hose Optional 3-digit direct reading digital handle, 10 digits per turn, readable to 1/20 turn. Handle can be rotated 360° to facilitate reading of indicator.

FLOW RANGES/KV VALUES NEEDLE SIZE

ORIFICE TYPE

MAXIMUM AIR (ln/h)

CAPACITY WATER (l/h)

Kv VALUE

8.2

0.3

0.0003

19.8

0.75

0.0007

3

39.0

1.5

0.0015

4

172

6.5

0.0065

5

510

19.0

0.019

1550

59.0

0.059

2500

110

0.110

1 2

6 7

Small (1.04 mm)

Large (2.4 mm)

* Capacities are measured at 1 bar gauge supply and atmospheric pressure exhaust. ** For flow ranges at other process conditions we refer to page 18.

14

DIMENSIONAL DRAWING 8503/04 (mm)

TYPICAL PERFORMANCE CURVE NRS VALVE

15

PC 8509, PC 8510 BROOKS LINE IV NEEDLE CONTROL VALVES SPECIFICATIONS Max. Operating Temp.

DESCRIPTION The Brooks Line IV Valve is a multi-purpose valve, designed for low flow gas and liquid applications. Three needles with different conical tapers provide a wide choice of flow ranges for all models.

85 °C (Brass) 120 °C (316 SS) Max. Operating Pressure 40 bar (Brass) 65 bar (316 SS) CONSTRUCTION DATA Body Nickel-plated brass or 316 SS Orifice LPN-OFL-4036 (Fluor Elastomer) Needle 316 SS O-Rings Viton Connections Standard 1/8" NPT-F Optional 1/4" NPT-F 1/8" Tube compression 1/4" Tube compression 1/4" I.D. hose

Model 8509

FLOW RANGES/KV VALUES NEEDLE SIZE

MAX.CAPACITY ** AIR (ln/h) *

1 2 3

130 420 2540

WATER (l/h) 4.5 14.5 88

* Capacities are measured at 1 bar gauge supply and atmospheric pressure exhaust. ** For flow ranges at other process conditions we refer to page 18.

16

Kv VALUE

0.0045 0.0145 0.088

NEEDLE VALVE SIZING TABLE GAS

OVER CRITICAL P2

Qmax > 0,5

Kv

=

P1

density x T x ∆P x P2

514

UNDER CRITICAL P2

Qmax < 0,5

Kv

=

P1

x

density x T

257 x P1

LIQUID

density Kv =

Qmax

x ∆P x 1000

Qmax =

Actual flow range in m3/h for liquid flow and m3n/h for gas flow density = Density of fluid in kg/m3 for liquid flow and kg/m3n for gas flow P1 = Upstream pressure in bar abs

P2 = ∆P = T=

DIMENSIONAL DRAWING (mm)

TYPICAL PERFORMANCE CURVE

Downstream pressure in bar abs Pressure drop in bar Actual operating temperature in K

17

PC 8744 BROOKS NRS FLOW CONTROLLERS DESCRIPTION Brooks PC 8744 flow controller for ELF (Extremely Low Flow) gas service accurately adjust and maintain gas flows for i.e. analytical service. They are designed for constant upstream and variable downstream applications. The units have integral NRS needle valves with smooth nonreversing flow characteristics and a high turns-to-lift ratio. model 8744 SPECIFICATIONS Max. Operating Temp.

60 °C (with buna diaphragm) 149 °C (with teflon diaphragm) Max. Operating Pressure 17 bar (Aluminum) 20 bar (316 SS)

Temperature coefficient

Pressure drop range

0.3 % /°C for temperature range 10 - 60 °C and flow range 5 - 350 mln/min Helium at 50 psig 0.7 - 10 bar

CONSTRUCTION DATA Body Aluminum or 316 SS Diaphragm Buna (with aluminum body) and Teflon (with 316 SS body) O-Rings Buna Connections Standard 1/8" NPT Female Optional 1/8" Tube compression 1/4" Tube compression 1/4" I.D. Hose Optional 3-digit direct reading digital handle, 10 digits per turn, readable to 1/20 turn. Handle can be rotated 360° to facilitate reading of indicator.

FLOW RANGES FLOW RANGE * Air ln/h

NEEDLE SIZE

Water l/h

min.

max.

min.

max.

1

0.05

24

0.01

0.25

2

0.09

45

0.02

0.44

3

0.17

84

0.04

1.10

* Capacities are measured at P1 5 bar g, P2 atmospheric. For flow ranges at other conditions we refer to page 24.

18

DIMENSIONAL DRAWING 8744 (mm)

PERFORMANCE CURVE MODEL 8744

19

PC 8800/8900 SERIES FLOW CONTROLLERS DESCRIPTION Brooks PC 8800 and PC 8900 series flow controllers are designed to maintain a constant differential pressure across an integral manual flow regulating valve. An internaldiaphragm actuated control valve is positioned by the incoming fluid pressure on one side of the diaphragm, and outlet pressure + spring force on the Model 8802 other side. Variations in the supply and/or discharge pressure disturb the balance of forces on the diaphragm, causing the control valve to open or close, thus maintaining a fixed differential across the manual flow regulating valve.

The 8800 series controllers are designed for all liquid and gas flows with constant downstream pressures. The 8900 series are for all liquid and gas flows with constant upstream pressure. CONSTRUCTION DATA Body Brass or 316 SS Needle Valve Brooks Line IV Valve (For detailed information we refer to page 17) O-Rings Viton Connections Standard 1/4" NPT-F Optional 1/8" Tube compression 1/4" Tube compression 1/4" I.D. Hose

FLOW CONTROLLER DATA TABLE Model Temp. Pressure rating DiaPressure drop NPT-F Conn. Needle No. Rating Brass 316 SS phragm min. - max. size * size material inlet - outlet

Flow range Flow range l/h water ln/h air **

8802 8805

148 °C 148 °C

17 NA

20 bar 70 bar

Viton PTFE

0.7 - 20 bar 0.7 - 20 bar

1/4" - 1/4" 1/4" - 1/4"

1 2 3

0.02 - 4.5 0.05 - 14.5 0.12 - 88.0

0.7 - 130 1.4 - 420 3.5 - 2540

8810 8815

148 °C 148 °C

17 NA

20 bar 70 bar

Viton PTFE

1.0 - 10 bar 1.0 - 10 bar

1/4" - 1/4" 1/4" - 1/4"

St’d St’d

22 - 570 22 - 570

600 - 14000 600 - 14000

8830

148 °C

NA

20 bar

PTFE

1.7 - 5 bar

3/4" - 3/4"

St’d

136 - 1820

3800 - 56000

8902 8905

148 °C 148 °C

17 NA

20 bar 70 bar

Viton PTFE

0.7 - 10 bar 0.7 - 10 bar

1/4" - 1/4" 1/4" - 1/4"

1 2 3

0.02 - 4.5 0.05 - 14.5 0.12 - 88.0

0.7 - 130 1.4 - 420 3.5 - 2540

8910 8915

148 °C 148 °C

17 NA

20 bar 70 bar

Viton PTFE

1.0 - 3.3 bar 1.0 - 3.3 bar

1/4" - 1/4" 1/4" - 1/4"

St’d St’d

22 - 570 22 - 570

600 - 14000 600 - 14000

* For models 8800, 8802, 8805, 8900, 8902, 8905 needle valves can be selected to be size 1, 2 or 3. ** For flow ranges at other conditions we refer to page 24.

20

CROSS SECTIONAL VIEW 8800

OUTLET

INLET

For all liquid flows and gas flows with variable upstream pressures

CROSS SECTIONAL VIEW 8900

OUTLET

INLET For all liquid flows and gas flows with variable downstream pressures

21

PC 8840/8940 SERIES NRS FLOW CONTROLLERS DESCRIPTION Brooks PC 8840 and PC 8940 series flow controllers are designed to maintain a constant differential pressure across an integral manual flow regulating valve. An internaldiaphragm actuated control valve is positioned by the incoming fluid pressure on one side of the diaphragm, and outlet pressure + Model 8842 spring force on the other side. Variations in the supply and/or discharge pressure disturb the balance of forces on the diaphragm, causing the control valve to open or close, thus maintaining a fixed differential across the manual flow regulating valve. They are designed to accurately adjust and maintain small gas and liquid flows. PC 8840 series are designed to control flows when downstream pressure is constant and upstream pressure is variable. PC 8940 series are

designed for constant upstream and variable downstream pressure. PC 8840 and 8940 series are supplied with an NRS (non rising stem) needle valve. It features a positive, direct means of adjusting a sliding tapered needle which virtually prevents sticking due to foreign matter in the fluid stream.

CONSTRUCTION DATA Body Brass or 316 SS Needle Valve NRS Needle Valve O-Rings Viton Connections Standard 1/4" NPT Female Optional 1/8" Tube compression 1/4" Tube compression 1/4" I.D. Hose

FLOW CONTROLLER DATA TABLE Model Temp. Pressure rating DiaPressure drop Connection Needle No. Rating Brass - 316 SS phragm min. - max. size size material inlet - outlet

8842

148 °C 17

20 bar

Viton

0.35 - 20 bar

1/4" - 1/4"

8845

148 °C NA

70 bar

PTFE

0.35 - 20 bar

1/4" - 1/4"

8942

148 °C 17

20 bar

Viton

0.35 - 10 bar

1/4" - 1/4"

8945

148 °C NA

70 bar

PTFE

0.35 - 10 bar

1/4" - 1/4"

* For flow ranges at other conditions we refer to page 24. ** When operated at Pa 1.013 bar and 20 °C. *** When operated at Pa 7.013 bar and 20 °C.

22

Flow range Flow range * l/h water ln/h air

1 2 3 4 5 6

0.01 - 0.25 0.02 - 0.44 0.04 - 1.10 0.06 - 2.70 0.20 - 8.70 0.70 - 35.0

0.01 - 7** 0.03 - 16** 0.05 - 25** 0.22 - 114** 0.52 - 260** 2.0 - 1020**

1 2 3 4 5 6

0.01 - 0.25 0.02 - 0.44 0.04 - 1.10 0.06 - 2.70 0.20 - 8.70 0.70 - 35.0

0.05 - 24*** 0.09 - 45*** 0.17 - 84*** 0.47 - 234*** 1.30 - 630*** 4.4 - 2200***

PERFORMANCE CURVE 8840 SERIES

PERFORMANCE CURVE 8940 SERIES

% of error

% of error

back pressure (constant) - atmospheric flow control characteristic at 700 ln/h air

flow control characteristic at 1500 ln/h air

+1 0 -1

+1 0 -1

flow control characteristic at 10 ln/h air flow control characteristic at 100 ln/h air

+1 0 -1

+1 0 -1

flow control characteristic at 0.5 ln/h air +1 0 -1

flow control characteristic at 5 ln/h air +1 0 -1

0

1

2

3

4

5

supply pressure in bar 0

1

2

3

4

5

back pressure in bar

Flow ranges for gas flows are based on air at 1.013 bar abs 20 °C. Pressure, temperature and flow are being measured downstream of the controller for 8800 series.

For 8900 series pressure, temperature and flow are measured upstream of the controller. When the conditions at the measurement point are other than air @ 20 °C & 1.013 bar abs, the actual flow range can be calculated using following formulas:

FLOW CONTROLLER SIZING FORMULA For liquid Q2 = Q1 x up and down stream controllers For gas up stream controllers

density 1000

Q2 = Q1 x

P out 293.15 1.293 x x 1.013 T density

For gas down stream Q2 = Q1 x controllers

P in 293.15 1.293 x x 7.013 T density

Q1 Q2 density T P out P in

= = = = = =

stated flow range from table in l(n)/h actual flow range in l(n)/h density of fluid in kg/m3(n) actual operating temperature in K outlet pressure in bar abs. inlet pressure in bar abs.

23

DIMENSIONAL DRAWING PC 8802/10/42 AND PC 8902/10/42 SERIES (mm)

DIMENSIONAL DRAWING PC 8830 (mm)

24

DIMENSIONAL DRAWING PC 8805/15/45 AND PC 8905/15/45 SERIES (mm)

PC 8601 AND 8606/07 PRESSURE REGULATORS DESCRIPTION Brooks PC 8600 Series Pressure Regulators are high precision supply pressure regulators for gas or liquid which are direct acting, relieving units that provide bubble-tight shutoff on Helium at 7 bar. The PC 8606 and 8607 have metal diaphragms to eliminate hydrocarbon outgassing prevalent with elastomer diaphragm units.

SPECIFICATIONS Spring ranges

Maximum Supply Pressure

Pressure Drop Range Maximum oper. temp. Drift

Supply Pressure Effect

Ambient temp. effect

Model 8606

0 - 0.7 bar 0 - 2.0 bar 0 - 4.0 bar 0 - 7.0 bar 0 - 10.0 bar 0 - 14.0 bar (Model PC 8601 only) 17 bar

0.7 - 17 bar Standard 60 °C Optional 177 °C Less then 1 % in first 15 minutes to total 1.5 % long term 0.7 bar increase in supply will not change output more than 0.005 bar 0.0015 bar/°C (4 bar spring range)

CONSTRUCTION DATA Body Aluminum or 316 SS Bonnet Aluminum for PC 8601 Nickel plated brass for PC 8606/07 Internal valve stem 316 SS Internal valve seat Brass/viton or 316 SS/viton Valve spring 316 SS Diaphragm Buna or viton for PC 8601 Havar for PC 8606/07 Range spring Music wire, zinc plated

PERFORMANCE CURVES FOR 8601/06/07

Flow rate variation effect on output pressure

Supply pressure variation effect on output pressure

25

DIMENSIONAL DRAWING MODEL PC 8601 (mm)

DIMENSIONAL DRAWING PC 8606/07 (mm)

26

MODEL 5866 PRESSURE MEASUREMENT AND CONTROL DESCRIPTION The model 5866 electronic pressure controller contains a highly accurate pressure transducer, a control valve and electronics. All three components are constructed around the concept of the well-proven Brooks MFC 5850 series, which make easy installation possible because of its compact design. With pressure ranges from 500 mbar to 100 bar Model 5866 most applications can be covered, preferably in combination with Brooks Mass Flow Controllers. The MFCs measure and control gas flows into a reactor and the Pressure Controller keeps the pressure in the system constant. Kvvalues up to 1.5 x 10-2, or with separation of transducer and valve with Kv-value to 2.5.

SPECIFICATIONS Performance Pressure ranges

Accuracy Repeatability Rangeability Temp. sensitivity

Any full scale range from pa 500 mbar to 300 bar ±0.5% full scale including linearity ±0.1% full scale 20 to 1 ±0.1% full scale/°C

Physical specifications Materials of Wetted parts stainless construction steel, Viton®, Buna-N®, PTFE/Kalrez®, EPDM® seals Mechanical connections NPT(F), tube compression, VCR®, VCO, or hose Electrical connection D-type connector

Specifications Protection Power supply Setpoint input/ signal output

Ratings Max. operating pressure

Temperature Leak integrity


CE-certified External ±15 Vdc required 0-5 Vdc, 0-10 Vdc, min.load 2000 Ohm, or, 0(4)-20 mA max. 500 Ohm floating load

300 bar in combination with the normally opened or closed control valve 0-65°C Outboard 1 x 10-9 mbar.l/sec Helium

OPTIONS ● Gauge pressure transducer ● Suitable for upstream or downstream pressure control ● Normally opened or normally closed control valve ● Selectable setpoint input/ pressure output ● Ultra clean construction

APPLICATIONS Applications with the Pressure Controller mostly occur in combination with Brooks Mass Flow Controllers. The Mass Flow Controllers accurately measure and control gasflows. The pressure in the system (reactor) is being kept constant, independent of the different gasflows. The Mass Flow Controllers can be configured in a blending mode, this enables consistent mixing of gas at various flow rates. The electronics of the Pressure Controller compares the measured pressure with a setpoint value. A difference between the two results in a movement of the control valve and change of flow until equilibrium is re-established.

27

MASSFLOWANDPRESSURECONTROL SYSTEM


28

MODELS 5800 Series: “S” SMART THERMAL MASS FLOW FOR GASES DESCRIPTION This series of microprocessor based field instruments is designed to meet the rigorous demands of various industries/applications. The use of digital technology ensures that the Brooks Smart series provide maximum accuracy and signal integrity. Because of its continuous self-diagnostics capabilities and protection Model 5850S against non-authorized handling, maximum reliability has been achieved. In addition it allows easy interfacing to any peripheral equipment either through analogue signals I/O and digital communication. The Brooks Digital Mass Flow Controllers provide an adjustable PID control loop which can be optimized to suit customer process conditions. Furthermore, the actual flow dynamics are controlled by the microprocessor based electronics, resulting in a smooth transition to steady-state flow in the shortest period of time. PERFORMANCE SPECIFICATIONS Flow Accuracy ± 0.7% of rate ± 0.2% full scale including linearity. (At calibration conditions) On request: ± 0.5% of rate ± 0.1% f.s. (At calibration conditions) (max. 100 l/min)

Repeatability Rangeability

± 0.25% of rate 50:1 (within specified accuracy) Controllability 100:1 (i.e. total operating range) Stability Less than ± 0.5% rate per year Temperature Effect Less than 0.015% per °C of rate shift from original calibration over 0 - 70° C Mounting Position Effect Negligible

Physical specifications Materials Wetted parts stainless of construction steel 316L with Viton®, Buna-N®, PTFE/ Kalrez® or EPDM seals Mechanical NPT(F), Tube compresconnections sion, VCR and VCO Option: Flanged DINor ANSI type available (inletfilter is standard included) Electrical connections D-type connector SPECIFICATIONS Protection CE-certified Analogue Setpoint Input *0 - 5 Vdc or 1 - 5 Vdc; > 2000 Ohm input impedance or 0 - 20 mA or 4 - 20 mA; 250 Ohm impedance

FLOW RANGES Brooks Digital series Mass Flow Products Mass Flow Controller Model:

Mass Flow Meter Model:

Flow Ranges* Min. f.s.

Max. f.s.

Units

5850 S 5851 S 5853 S

5860 S 5861 S 5863 S

0.003 20 100

30 100 2500**

ln/min ln/min ln/min

* N2 equivalent ** Min. Delta P 2.5 bar, accuracy 1% F.S. for flows above 1000 ln/min

29

More details wanted? Ask for our Product Data Sheet PDS Smart MFC

Analogue Outputs *

0 - 5 Vdc or 1 - 5 Vdc; 2000 Ohm and 0 - 20 mA or 4 - 20 mA; 375 loop resistance

Alarm (TTL) Open Collector Output (max. 100 mA, 0.25 Watt consumption). Or via communication port, when used digitally. Optional Digital Communication* RS-232-C or RS-485*, profibus-DP Baudrate 1200, 2400, 3600, 4800, 7200, 9600, 19K2, 38 K4* Power Supply External power supply is required, 24 Vdc or ± 15 Vdc can be applied.

any command (setpoint) step; virtually without any dead time, over- and undershoot. Standard factory setting: 1 second. Fast response, soft start, linear ramp-up and/or ramp-down from 200% per second down to 0.1% per second setpoint change can be accomplished.

Ratings Max. Operating Pressure 100 bar or up to flange rating specifications Model 5850S + 5860S/ 5861 S: 300 bar Temperature 0 - 70 °C Leak Integrity Outboard: 1 x 10-9 mbar l/sec. Helium

* Factory selectable: To be specified at ordering. Security Alarms: device-, process-, and environmental related alarms. If self-diagnostics detects a failure, the alarm mode (Open Collector Output via the connector or via HART® communication when digitally used) will be activated. Damping Adaptive damping from 0 to 10 seconds is possible for the analogue flowrate output signal(s). Settling Time (applicable for mass flow controllers models 5850S and 5851S). Settling time for mass flow controllers better than 0.2 seconds is possible (to within 2% full scale of final value) for

30

OPTIONS ● Can be optionally certified for use in Zone 2 environment according to the NEN 3410 and NEN-EN 50019 and DIN 57165/VDE0165 (To be specified at ordering) ● Ultra-Clean construction ● 0-10 Vdc I/O ● High temperature version to 100 °C specification ● Control mode selectable/programmable ● Software supported products: - Smart Control: configuration tool for maintenance users (see page 37) - Smart DDE: this strong driver allows system developers to implement almost 300 Brooks Smart products into one Windowsbased application (see page 38)

DIMENSIONAL DRAWINGS (mm)

Model 5850S

Model 5853S

Model 5860S

Model 5863S

31


Model 5851S

Model 5861S

32

MF Series IP65 Weatherproof SMART MASS FLOW METERS AND CONTROLLERS DESCRIPTION This series of microprocessor based field instruments is designed to meet the rigorous demands of various industries/applications. The use of digital technology ensures that the Brooks Smart series provide maximum accuracy and signal integrity. Because of its continuous self-diagnostics capabilities and protection against non-authorized handling, Model MF50S maximum reliability has been achieved. In addition it allows easy interfacing to any peripheral equipment either through analogue signals I/O and digital communication. The Brooks Digital Mass Flow Controllers provide an adjustable PID control loop which can be optimized to suit customer process conditions. Furthermore, the actual flow dynamics are controlled by the microprocessor based electronics, resulting in a smooth transition to steady-state flow in the shortest period of time. PERFORMANCE SPECIFICATIONS Flow Accuracy ± 0.7% of rate ± 0.2% full scale including linearity. (At calibration conditions) On request: ± 0.5% of rate ± 0.1% f.s. (At calibration conditions) (max. 100 l/min)

Repeatability Rangeability

± 0.25% of rate 50:1 (within specified accuracy) Controllability 100:1 (i.e. total operating range) Stability Less than ± 0.5% rate per year Temperature Effect Less than 0.015% per °C of rate shift from original calibration over 0 - 70° C Mounting Position Effect Negligible

Physical specifications Materials Wetted parts stainless of construction steel 316L with Viton®, Buna-N®, PTFE/ Kalrez® or EPDM seals Mechanical NPT(F), Tube compresconnections sion, VCR and VCO Option: Flanged DINor ANSI type available (inletfilter is standard included) Electrical connections D-type connector Weatherproof IP65 SPECIFICATIONS Protection CE-certified Analogue Setpoint Input * 0 - 5 Vdc or 1 - 5 Vdc; > 2000 Ohm input impedance or 0 - 20 mA or 4 - 20 mA; 250 Ohm impedance

FLOW RANGES Brooks Digital series Mass Flow Products Mass Flow Controller Model:

Mass Flow Meter Model:

Flow Ranges* Min. f.s.

Max. f.s.

Units

MF50 S MF51 S MF53 S

MF60 S MF61 S MF63 S MF64 S

0.003 20 100 18

30 100 1000 2160

ln/min ln/min ln/min m3n/h

* N2 equivalent

33

More details wanted? Ask for our Product Data Sheet PDS MF Series

Analogue Outputs *

0 - 5 Vdc or 1 - 5 Vdc; 2000 Ohm and 0 - 20 mA or 4 - 20 mA; 375 loop resistance

Alarm (TTL) Open Collector Output (max. 100 mA, 0.25 Watt consumption). Or via communication port, when used digitally. Optional Digital Communication* RS-232-C or RS-485*, profibus-DP Baudrate 1200, 2400, 3600, 4800, 7200, 9600, 19K2, 38 K4* Power Supply External power supply is required, 24 Vdc or ± 15 Vdc can be applied. * Factory selectable: To be specified at ordering. Security Alarms: device-, process-, and environmental related alarms. If self-diagnostics detects a failure, the alarm mode (Open Collector Output via the connector or via HART® communication when digitally used) will be activated. Damping Adaptive damping from 0 to 10 seconds is possible for the analogue flowrate output signal(s). Settling Time (applicable for mass flow controllers models MF50S and MF51S). Settling time for mass flow controllers better than 0.2 seconds is possible (to within 2% full scale of final value) for

34

any command (setpoint) step; virtually without any dead time, over- and undershoot. Standard factory setting: 1 second. Fast response, soft start, linear ramp-up and/or ramp-down from 200% per second down to 0.1% per second setpoint change can be accomplished.

Ratings Max. Operating Pressure 100 bar or up to flange rating specifications Model MF60 300 bar Temperature 0 - 70 °C Leak Integrity Outboard: 1 x 10-9 mbar l/sec. Helium

OPTIONS ● Certified for use in Zone 2 environment according to prNEN 50021: 1998 and EN50281-1-1: 1998 (To be specified at ordering) ● Control mode selectable/programmable ● Software supported products: - Smart Control: configuration tool for maintenance users (see page 37) - Smart DDE: this strong driver allows system developers to implement almost 300 times Brooks Smart products into one Windowsbased application (see page 38)

DIMENSIONAL DRAWINGS (mm) Model MF50S

CONNECTIONS 9 /16-18 UNF 1 /4” Tube compr. 1 /8” Tube compr. 1 /4” VCR 1 /4” VCO 1 /4” NPT 6mm Tube compr.

“A” dim in mm / inch

134 186 181 182 174 175 186

5.28 7.32 7.13 7.17 6.85 6.89 7.32

Model MF51S

CONNECTIONS

“A” dim mm/inch

/16-18 UNF 1 /4” Tube compr. 3 /8” Tube compr. 1 /4” VCR 1 /4” VCO

148,5 199,5 203,5 196,5 188,5

9

5.85 7.85 8.01 7.74 7.42

“A” dim mm/inch (with filter)

184,5 235,5 239,5 232,5 224,5

7.26 9.27 9.43 9.16 8.84

Model MF53S

FLANGE TYPE DIN DN 15 PN40 DIN DN25 PN40 DIN DN40 PN40 DIN DN50 PN40 ANSI 0,5” 150LBS ANSI 0,5” 300LBS ANSI 1” 150LBS ANSI 1” 300LBS ANSI 1,5” 150LBS ANSI 1,5” 300LBS ANSI 2” 150LBS ANSI 2” 300LBS

CONNECTIONS 1 /2” Tube compr. 3 /4” Tube compr. 1” Tube compr. 1 /2” VCO 3 /4” VCO 1 /2” VCR 0,5”,1”,1,5”,NPT,or 1 1 /16”-12

Model MF60S

CONNECTIONS 9 /16-18 unf 1 /4” Tube compr. 1 /8” Tube compr. 1 /4” VCR 1 /4” VCO 1 /4” NPT 6mm tube compr.

“A” dim in mm/inch

98,7 150,7 145,7 146,7 138,7 139,7 150,7

3.89 5.93 5.74 5.78 5.46 5.50 5.93

Build - in dimensions: ‘X’ mm/inch

303,8 303,8 312,8 275,8 293,8 283,8 235,8

11.96 11.96 12.31 10.86 11.57 11.17 9.28

Model MF61S

CONNECTIONS

“A” dim mm/inch

“A” dim mm/inch (with filter)

/16-18 UNF 1 /4” Tube compr. 3 /8” Tube compr. 1 /4” VCR 1 /4” VCO

113,1 164,5 167,6 161 152,8

149,1 200,5 203,6 197 188,8

9

4.45 6.48 6.60 6.34 6.02

5.87 7.89 8.01 7.75 7.43

35

DIMENSIONAL DRAWINGS (mm) Model MF63S

FLANGE TYPE DIN DN 15 PN40 DIN DN25 PN40 DIN DN40 PN40 DIN DN50 PN40 ANSI 0,5” 150LBS ANSI 0,5” 300LBS ANSI 1” 150LBS ANSI 1” 300LBS ANSI 1,5” 150LBS ANSI 1,5” 300LBS ANSI 2” 150LBS ANSI 2” 300LBS

CONNECTIONS /2” Tube compr. /4” Tube compr. 1” Tube compr. 1 /2” VCO 3 /4” VCO 1 /2” VCR 0,5”,1”,1,5”,NPT,or 1 1/16”-12

Build - in dimensions: ‘X’ mm/inch

260 260 269 232 250 240 192

1 3

10.23 10.23 10.59 9.13 9.84 9.44 7.55

Model MF64S

CONNECTIONS

1,5” NPT 2” NPT

36

A

B

280,0mm [11,0”] 42,5mm [1,67”] 290,0mm [11,4”] 47,5mm [1,87”]

CONNECTIONS

3” 4” 6” 8”

A

B

265mm [10,43”] 265mm [10,43”] 315mm [12,40”] 315mm [12,40”]

255mm [10,0”] 269mm [10,6”] 296mm [11,7”] 320mm [12,6”]

SMART CONTROL CONFIGURATION SOFTWARE DESCRIPTION Smart Control is a configuration software program of Brooks Instrument and is running under Windows rev. 3.x or Windows 95 software. It is designed to Smart Control communicate with the Brooks Smart Mass Flow Meters and Controllers using HART Protocol based commands. This enables the user to configure these devices, read flow data and change setpoints. Smart Control can communicate with up to 32 devices, max. 4 units symultaniously for setting the control parameters, selection of response characteristics like fast response, soft-start, linear ramping and commands for valve override. The Mass Flow output(s) and diagnostics of the device(s) are continuously monitored. The Brooks Smart Mass Flow Meters and Controllers can be used with Analogue I/O or Digital communication. TM

TM


The analogue outputs remains (simultanuously) activated when communicating with Smart Control.

Smart Control can be used to perform the following tasks: ● Transferring device configurations between connected devices and Smart Control ● Transferring device configuration between Smart Control and the hard disk or a floppy diskette ● Gathering data from one or up to 32 devices which are hooked up to a host computer through a multidrop network or through a point-to-point connection ● Configuring operational settings and measurement units ● Configuring control parameters in order to optimize the device for your process ● Logging of measurement data ● Reading process and output variables ● Monitoring the process for alarm conditions ● Printing of configuration data and logfiles

Up to 32 channels can be activated with RS-485 multidrop configuration, or one channel when RS-232 point-topoint has been selected.

37

SMART DDE SOFTWARE


DESCRIPTION The Smart DDE is a strong Dynamic Data Exchange software product from Brooks Instrument. It allows you to make bi-directional links Smart DDE between your Windows-based applications and the Brooks Smart mass flow products.

The Smart DDE programme is a communication interface between the Brooks models 5850S to 5864S Smart mass flow meter(s) and/or controller(s) and other applications supporting DDE. The Smart DDE programme from Brooks Instrument operates in the background. Starting the programme is an easy task: start Smart DDE from the Program Manager used under Microsoft or from your own Windows application and activate or confirm the required links. All functions necessary for setting up, maintaining and changing DDE-links can be called from your client application.

Smart DDE is designed and thoroughly tested with most commonly used programmes like Microsoft Excel (and Microsoft Word), data acquisition programmes like InTouch, TestPoint and LabVIEW (example given, see Figure 2 on next page). In addition Windows programming language like C (++), Pascal or 4GL’s and SCADA programmes like FIX DMACS work fine with Smart DDE as the DDE server.

These functions can be visualised when diagnostics are required. The links which are established and the status bar give you the details (see figure 1 below). The HELP file informs you when needed.

OPERATION Smart DDE runs under the Microsoft Windows environment (including Windows 95 and Windows NT). The Brooks Smart mass flow products can be used with analogue or digital communications. When set up for the latter, point-to-point data transmission via RS-232, and/or RS-485 bus interconnection up to 32 devices per COM-port can be accomplished easily. In addition an analogue output flow signal remains available simultaneously for ease-of-use when digital communication is selected. The transmission speed (baud rate) can be selected from 1200 up to 19k2 baud.

38

Write protection prevents unauthorised entering or handling, and the password can be changed. The Smart DDE product consists of two diskettes: one contains the Smart DDE programme, the other contains “plug and play” software. In addition you will find an installation & operating manual which lists all details. The “plug and play” software application comes in handy when you quickly want to learn how to use and apply Smart DDE. Figure 1

Figure 2

DESIGN FEATURES 1.

User-friendly and powerful Dynamic Data Exchange software programme providing communication between the Brooks digital mass flow products and Windows based high level applications software.

2.

Operates via RS-232 point-to-point transmission and/or RS-485 multidrop interconnection.

3.

BENEFITS 1.

All relevant process and device data fields of the Brooks digital mass flow products can be selected and linked to your own Windows based application.

2.

Useable for (re)configuration purposes or process control applications with on-line communication and/or data logging functions.

Communication settings supporting: COM 1...COM 9, baudrate: 1k2 ... 19k2.

3.

No additional (expensive) hardware required.

4.

RS-485 switch lines can be selected: RTS or DTR, low active and high active.

4.

Supports a wide range of RS-485 converters and interface boards.

5.

Bi-directional on-line data linkage using any Windows programming language.

5.

6.

Eliminates the communication issues between your Windows based application and the protocol of the Brooks digital mass flow products.

Combines the Brooks Smart mass flow products with your other instrumentation into your process control application software. With our Smart DDE programme you have a powerful tool which allows you to link data bi-directionally into your Windows based application(s).

6.

No knowledge required of the used HART-based command protocol. With our Smart DDE programme you get directly access to the required data fields.

39

MODEL 5850TR THERMAL MASS FLOW FOR GASES

Specifications Protection Power supply Flow output/ setpoint input Model 5850TR

Flow Accuracy Repeatability Rangeability Temperature coeff.

Any full scale range from 10 mln/min. to 20 ln/min. (based on Nitrogen equivalent) ± 1% full scale including linearity ±0.25% full scale 50 to 1 ± 0.1% full scale/°C

Physical specifications Materials of Wetted parts stainless construction steel, Viton®, Buna-N®, PTFE/Kalrez®, EPDM® seals


40

More details wanted? Ask for our Product Data Sheet PDS 5850TR

Electrical connections Mechanical connections

DESCRIPTION The Brooks model 5850TR Mass Flow Meter and Controller is an economical solution to various gas flow metering and control processes or for installation in (OEM) analytical and environmental equipment. It provides simple and direct mass flow measurement and stable control.

SPECIFICATIONS Performance Flow ranges

D-type connector NPT(F), tube compression, VCR®, VCO or hose (inlet filter is standard included)

CE-certified External (15-24 Vdc) is required 0-5 Vdc, min. load 1000 Ohm. (0) 4-20 mA min. load 350 Ohm

Ratings Max. operating pressure 100 bar Temperature 0-65°C Leak integrity Outboard 1x 10-6 mbar.l/sec Helium

OPTIONS ● Pressure ratings: 100 bar ● Normally closed or opened control valve ● Mechanically and electrically interchangeable with other mass flow controllers ● (Optionally) Certified for use in zone 2 environment according to NEN 3410 and NEN-EN 50019 ● H2S applicable to NACE MR-01-75 standards

MODELS 5800 Series: ”E” THERMAL MASS FLOW FOR GASES DESCRIPTION The Brooks “E” series (Analogue) Mass Flow Meters and Controllers are designed to operate in batch or blending processes in the (petro) chemical industry, or in fermentation biotechnology applications. Chemical Vapour Deposition (CVD), plasma etching, diffusion, sputtering and other semiconductor processes can be accomplished Model 5850E successfully (please refer to ultra clean requirements).

SPECIFICATIONS Performance Flow Accuracy Repeatability Rangeability Settling time

Temperature sensitivity

Specifications Materials of construction

Mechanical connections

Electrical connection Specifications Protection Power supply Setpoint input/ Flow output

±1% full scale including linearity ±0.25% of rate 50 to 1 Less than 3 seconds to within 2% full scale as per E17-91 standard Zero: less than ±0.075% full scale/°C Span: less than ±1.0% f.s. shift over 10-50 °C temperature range

Ratings Max. operating pressure

Temperature Leak integrity

Wetted parts stainless steel 316L, Viton®, Buna-N®, PTFE/ Kalrez®, EPDM® seals NPT(F), tube compression, VCR®, VCO, hose or flanged DIN/ ANSI optionally (inlet filter is standard included) D-type or CE connector

CE-certified External ±15 Vdc is required 0-5 Vdc, min. load 2000 Ohm

● 100 bar in combination with the normally opened or closed control valve ● 300 bar when provided as a mass flow meter in high pressure execution (models 5860 and 5861) 0-65°C Outboard 1x 10-9 mbar.l/sec Helium

FLOW RANGES Brooks (TMF) Mass Flow Products Mass Flow Mass Flow Controller Meter

Flow Range*

Model 5850 E 5851 E 5853 E

Min. f.s. 0.003 20 100

Model 5860 E 5861 E 5863 E

Max. f.s. 30 100 1000

Unit ln/min ln/min ln/min

* N2 equivalent

41

OPTIONS ● Ultra clean construction, all metal sealed ● Fast response or softstart (jumper selectable) ● Normally closed or opened control valve (model 5850E)

DIMENSIONAL DRAWINGS Please refer to pages 31 and 32: dimensions are identical to the S-series

42

● Mechanically and electrically interchangeable with other mass flow controllers ● (Optionally) certified for use in zone 2 environment according to NEN 3410 and NEN-EN 50019

MassRate™ 5700 Electronic Flow Meter

DESCRIPTION The BrooksMassRate 5700 is a gas flow meter specially designed to satisfy the needs of purge gas, process analysis and analytical flow measurement applications. TheMassRate 5700 utilizes a proven thermal mass MassRate 5700 flow sensor which provides excellent repeatability, wide turndown and an electrical output signal. It has a rugged all stainless steel construction and no moving part providing superior corrosion restistance and long- term reliability. The MassRate 5700 is an economical meter with an electrical output signal making it ideal for replacing turbine meters, variable area meters and other volumetric devices. PERFORMANCE Standard Flow Ranges (*): 0-10 mI/min 0-1 liters/min 0-20 mI/min 0-2 liters/min 0-50 mI/min 0-5 liters/min 0-100 mI/min 0-10 liters/min 0-200 mI/min 0-20 liters/min 0-500 mI/min 0-50 liters/min *Nitrogen, 760 torr Reference Pressure, Reference Temperature defined by User

More details wanted? Ask for our Product Data Sheets PDS 5850E, 5853, 5860/61, 5864 and B-5800-SEMI

Rangeability: Repeatability: Accuracy:

20:1 0.5% full scale 5% F.S. including linearity

Temperature Sensitivity: Zero: less than ±0.075% F.S. per degree C Span: less than ±1.0% F.S. shift over 10-50˚C range Pressure Sensitivity: less than 0.05% per psi (0.0073% per KPa) Mounting Attitude Sensitivity: less than 0.5% F.S. shift after rezeroing Ratings Working Pressure: Temperature Limits: Operating: Non-Operating:

up to 150 psig (1034 KPa) 5 to 65 Deg C -25 to 100 Deg C

Physical Specifications Materials: 304 and 316 Stainless Steel Connections: Mechanical: 1/4" FNPT Electrical: 5 pin post header horizontal mount AMP-171826-5. The mating connector is AMP 172053-5. Power: 11.5 to 15.5 Vdc, 50 mA Output Signal: 0-5 Vdc into 1000 ohms or greater Weight: 1 lb / 0.5 kg

43

FLOMEGA® MODELS 5881, 5882, 5891, 5892 FOR LIQUIDS DESCRIPTION The patented FLOMEGA® thru-flow liquid mass flow meter design is the heart of the system. All models are selfcontained with signal conditioning electronics and housed in weatherproof IP65 certified enclosures. In addition the Flomega Liquid Controller also includes an integrally mounted control valve and associated electronics. The Flomega Liquid Mass Flow Meter (or Controller) has been especially designed to measure and control very low flows of liquid from 0.3 to 1000 grams/hour. PERFORMANCE SPECIFICATIONS Accuracy ± 0.5% full scale (incl. linearity) measured at calibration conditions Repeatability ± 0.2% of rate Rangeability 50:1 Process temp. effects ± 0.03% f.s./°C

Ratings Viscosity limits

More details wanted? Ask for our Product Data Sheet PDS Flomega

Ambient temp. range Process temp. range

0-65°C 0 to 100°C (Model 5882/92: max. 90°C)

Pressure limits

● Up to 100 bar for the low pressure version ● Up to 400 for the high pressure version

Max. pressure difference ● Model 5881: 20 bar ● Model 5882: 40 bar Pressure drop sensor

Specifications Protection Setpoint input/ Flow signal output

● Model 5891: 10 mbar @ 100 gr/h water ● Model 5892 150 mbar @ 1000 gr/h water

or:

CE-certified 0(4)-20 mA, max. loop resistance: 375Ω @ 15 Vdc 930Ω @ 24 Vdc 0-5 Vdc, 2 mA max

Temperature output heater

0-5 Vdc for -10°C up to 90°C (model 5882/92)

Power supply

External Power Supply is required, +15Vdc or 24Vdc can be applied

Up to 200 cP (limited by max. diff. pressure)

FLOWRANGES Brooks FLOMEGA Mass Flow Meter model

Mass Flow Meter model

Min. full scale flowrate *

Max. full scale flowrate *

Units

5891

5881

15**

100

grams/hour

5892

5882

200

1000

grams/hour

* To be specified at ordering (factory selectable) (water equivalent flowranges). ** Down to 15 g/hr minimum full scale flowrate is possible @ ± 1% f.s. accuracy and ± 0.2% f.s. repeatability. Flowranges from > 30 gr/h are within specified accuracy.

44

Protection grade Settling time Controller Sensor damping output signal

Low command setpoint inhibit

IP 65 Standard: less than 5 seconds Standard less than 0,5 seconds. Adjustable (model 5882/92) from 0,1 up to 10 seconds Prevents the valve from opening when ever the setpoint is less than 1% of full scale


Inlet filter

Electrical connection

1/16", 1/8" or 1/4" tube compression fitting, NPT(F), VCR® or B.VCO fittings Material: stainless steel Mess size: 40 micron 12 pole circular connector (IP65)

OPTIONS ● Zone 2 certified (ATEX) certified to class:

II 3GD T75°C EEx nA II T4, According to to EN 50021: 1999 and EN 50281-1-1: 1998 Zone 1 certified: CENELEC approved Class: EEx-d-II B-T4 to T6 SANITARY (sterilisable) sensor, designed for food and pharmaceutical applications All stainless steel construction Soft start mode (jumper selectable on the p.c. board): 15 seconds, without over- or under shoot for 2-100% range Ex

Physical specifications Materials of construction For seals:

All wetted material: stainless steel 316L Viton®, PTFE®, EPDM®, Buna®, Kalrez®.

● ● ● ●


45

Models 5835-5838 FLOW CONTROL VALVES DESCRIPTION The mass flowmeters of Brooks Instrument can be provided with control valves in combination with integrally or remotely installed Brooks electronics. A series of control valves for use in laboratories or industrial environments can be supplied. Maximum flow (control) ranges up to max. 1000 ln/min and operating pressures up to 100 bar or Model 5835N 300 bar can be achieved.

Rating Max. operating pressure

Temperature Leak integrity Certification

● Model 5835 100 bar in combination normally opened or with the closed control valve ● Models 5835P, 5838 300 bar (norm. closed) 0-65°C Outboard: 1x 10-6 mbar.l/sec Helium ● Model 5838 approved for use in Zone 1 Class: EEx-e-IIC-T5 Cenelec no. Ex-83/2124 X

MODELS 5835N, 5835P, 5838 SPECIFICATIONS Flow ranges Kv-value Rangeability Materials of construction


Max. 20 ln/min. Max. 2 x 10-2 50 to 1 Wetted parts stainless steel, Viton®, Buna-N, PTFE/Kalrez, EPDM seals NPT(F), tube compression, VCR, VCO, or hose


Model 5835N

46

Model 5835P

Model 5838

MODELS 5836H, 5836HX

MODELS 5836, 5836X SPECIFICATIONS Flow ranges Kv-value Rangeability Materials of construction


Rating Max. operating pressure Temperature Leak integrity Certification

Max. 100 ln/min. Max. 2 x 10-1 50 to 1 Wetted parts stainless steel, Viton, Buna-N, PTFE/Kalrez, EPDM seals NPT(F), tube compression

100 bar (normally closed control valve) 0-65°C Outboard 1x 10-6 mbar.l/sec Helium ● Model 5836X Approved for use in Zone 1 Class: EEx-e-IIC-T5 Cenelec no. Ex-83/2124 X


Model 5836N

SPECIFICATIONS Flow ranges Kv-value Rangeability Materials of construction


Rating Max. operating pressure Temperature Leak integrity Certification

Max. 1000 ln/min. Max. 2.5 50 to 1 Wetted parts stainless steel, Viton, Buna-N, PTFE/Kalrez, EPDM seals NPT(F), tube compression

100 bar (normally closed control valve) 0-65°C Outboard 1x 10-6 mbar.l/sec Helium ● Model 5836HX Approved for use in Zone 1 Class: EEx-e-IIC-T5 Cenelec no. Ex-83/2124 X


Model 5836H

47

Models 0152/0154 READ OUT EQUIPMENT DESCRIPTION The Brooks microprocessor based Read Out and Control Equipment has been designed to meet the highest industry standards with user-friendly Model 0154 operation as a primary requirement. Dual channel: model 0152 and four channel: model 0154 versions are available. Both models will provide the power supply to Flomega for liquid flow applications and to the Brooks Mass Flow Meters & Controllers, Pressure Sensors & Controllers for gas applications. ± 15Vdc or +24Vdc secondary power supply modules are available. Features include membrane push buttons for setpoint, blending, valve override/local/remote control/RS-232 communication/Totalizer and Range selection. The selected functions are clearly indicated on the display. Percentage full scale or actual reading of flow/pressure units can be programmed on each channel via the menu membrane push buttons.


Display reading

Controls

Housing

Dimensions

SPECIFICATIONS Certification Power input Power output Signal input

Signal output Electrical connection

CE-certified 90-260 Vac, 50/60Hz 70W max. power 24 Vdc/2.5A or +15V/2.9A and -15V/1.4A 0-5/10 Vdc or 0(4)-20 mA (signal from transducer and remote setpoint) 0-5/10 Vdc Impedance 1 kΩ, or 0(4)-20 mA ● One 25-pin D-type connector for combined remote setpoint input and output signal; up to four (4) channels.

Ambient temperature

● One 15 pins connector for remote valve override control function ● Two, or four 15 pin D-type connectors for connecting the Mass Flow or Pressure Control Equipment ● Model 0152: 2x 20 character display ● Model 0154: 4x 20 character display with back lighting (Percentage full scale or actual reading) Membrane push buttons for setpoint, blending, valve control function, local/ remote control, menu selection per channel (including enter confirmation) and power switch Anodized aluminum and steel cover: 1/2 19" cassette, table top or panel mount 1 2 / 19" cassette, 3 HE x 42 TE (130 mm height, 220 mm width and 230 mm depth) 0-50°C

Front Panel

48

Model 1060 BROOKS VOL-U-METER GAS CALIBRATORS

DESCRIPTION Brooks Vol-U-Meter calibrators are designed especially for calibrating Mass Flow Meters and Controllers. The calibrating range of these precision Primary Standards is from 1 to approximately 24.000 mln/min., depending on sample collection time. The primary standard VolU-Meter calibration equipment is also used at Brooks Instrument. All of the Brooks mass flow meters and controllers are calibrated with these primary standards which are certified by the Dutch Weights and Measures Authority - NMi and traceable to the relevant international standards. Certification of accuracy can be furnished based upon the use of equipment and procedures traceable to the National Bureau of Standards or certified by the Dutch Weights and Measures Authority. The automatic types have electronics to measure elapsed time and temperature. The electronics can be controlled manually.


SPECIFICATIONS Protection Accuracy

Ranges Ambient temperature

Max. ambient temp. Ambient relative humidity

CE-certified ± 0,2% of indicated volume, with timing interval of 30 seconds or more for manual units, interval of 10 seconds or more for automatic units Up to 24.000 ml/min Nominal 21°C to ± 2°C to achieve rated accuracy 28°C 50 to 70% RH to minimize effects of static electricity on tube and piston

MATERIAL OF CONSTRUCTION Cylinder Borosilicate glass Piston PVC Piston seal Mercury Housing Chrome plated brass for models 1052-1054 and aluminum for other models Gaskets Buna-N Thermometer Manual types: Glass laboratory type Mercury filled Automatic types Pt-100 element Digital read out 0.1°C

CAPACITIES Manual Model number

Useable length (mm)

Capacity (ml)

Scale Increments (ml)

Automatic Model number

Capacity (ml)

1052A 1053A 1054A 1064/A 1065/A 1066/A 1067/A 1068/A

250 250 250 760 760 760 760 760

30 70 120 200 450 1200 3500 12000

1 5 10 25 50 200 500 1000

1064/B 1065/B 1066/B 1067/B 1068/B

200 450 1200 3500 12000

49

GAS CONVERSION TABLES Source J-836-D-508 Rev.14

Formula

Gasfactor

Orifice factor

Density (kg/m3)

Acetylene (Ethyne) Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane (f-13B1) 1,3-Butadiene Butane 1-Butene CIS-2-Butene Trans-2-Butene Carbon Tetrachloride Carbon Tetrafluoride (f-14) Carbonyl Fluoride Carbonyl Sulfide Chlorine Chlorine Dioxide Chlorine Trifluoride Chlorodifluoromethane (f-22) Chloroform (Trichloromethane) Chloropentafluoroethane (f-115) Chlorotrifluoroethylene Chlorotrifluoromethane (f-13) 2-Chlorobutane Cyanogen Cyanogen Chloride Cyclobutane Cyclopropane Deuterium Diborane Diboromodifluoromethane (f-12B2) 1,2-Dibromotetrafluoroethane (f-114B2) Dichlorodifluoromethane (f-12) Dichlorofluoromethane (f-21) Dichlorosilane Diedthylsilane 2,2 Dichloro- 1,1,1- Trifloroethane 1,2-Dichloroethane (Ethylene dichloride) 1,2-Dichlorotetrafluoroethane (f-114) 1,1-Difluoro-1-Chloroethane

C 2H2 Mixture C 3H4 NH3 Ar AsH3 BCL3 BF3 BrF5 BrF3 C2BrF3 CBrF3 C 4H6 C4H10 C 4H8 C 4H8 C 4H8 CCL4 CF4 COF2 COS CL2 CLO2 CLF3 CHCLF2 CHCL3 C2CLF5 C2CLF3 CCLF3 C4H9CL (CN)2 CLCN C4H8 C 3H6 D2 B2H6 CBr2F2 C2Br2F4 CCL2F2 CHCL2F SiH2CL2 C4H12Si C2HCL2F3 C2H4CL2 C2CL2F4 C2H3CLF2

0,615 0,998 0,478 0,786 1,395 0,754 0,443 0,579 0,287 0,439 0,326 0,412 0,354 0,257 0,294 0,320 0,291 0,344 0,440 0,567 0,680 0,876 0,693 0,433 0,505 0,442 0,243 0,337 0,430 0,234 0,498 0,618 0,387 0,505 0,995 0,448 0,363 0,215 0,390 0,456 0,442 0,183 0,259 0,382 0,231 0,341

0,970 1,018 1,199 0,781 1,195 1,661 2,044 1,569 2,502 2,214 2,397 2,303 1,413 1,467 1,435 1,435 1,435 2,345 1,770 1,555 1,463 1,598 1,554 1,812 1,770 2,066 2,397 2,044 1,985 1,818 1,366 1,480 1,413 1,224 0,379 1,000 2,652 2,905 2,099 1,985 1,897 1,775 2,336 1,879 2,449 1,957

1,173 1,293 1,787 0,771 1,784 3,478 5,227 3,025 7,806 6,108 7,165 6,615 2,491 2,593 2,503 2,503 2,503 6,860 3,926 2,045 2,680 3,214 3,011 4,125 3,906 5,340 7,165 5,208 4,912 4,134 2,322 2,730 2,491 1,877 0,177 1,235 8,768 10,530 5,492 4,912 4,506 3,940 6,829 4,419 7,479 4,776

50

Source J-836-D-508 Rev.14

Formula

Gasfactor

Orifice factor

Density (kg/m3)

1,1-Difluoroethane 1,1-Difluoroethylene Difluoromethane (f-32) Dimethylamine Dimethylether 2,2-Dimethylpropane Disilane Ethane Ethanol Ethylacetylene Ethyl Chloride Ethylene Ethylene Oxide Fluorine Fluoroform (f-23) Germane Germanium Tetrachloride Halothane Helium Hexafluoroacetone Hexafluorobenzine Hexafluoroethane (f-116) Hexafluoropropylene (HFP) Hexamethyldisilane (HMDS) Hexane Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide Hydrogen Sulfide Iodine Pentafluoride Isobutane Isobutene Isopentane Krypton Methane Methylacetylene Methyl Bromide 3-Methyl-1-butene Methyl Chloride Methyl Fluoride Methyl Mercaptan Methyl Silane

CH3CHF2 CH2:CF2 CF2H2 (CH3)2NH (CH3)2O C(CH3)4 Si2H6 C 2H 6 C2H 6O C4H 6 C2H5CL C2H 4 C2H 4O F2 CHF3 GeH4 GeCL4 C2HBrCLF3 He C3F6O C6F6 C2F6 C3F6 (CH2)6Si2 C6H14 H2 HBr HCL HCN HF HI H2Se H2S IF5 C4H10 C 4H 8 C5H12 Kr CH4 C3H 4 CH3Br C5H10 CH3CL CH3F CH4S CH6Si

0,415 0,458 0,627 0,370 0,392 0,247 0,332 0,490 0,394 0,365 0,408 0,619 0,589 0,924 0,529 0,649 0,268 0,257 1,386 0,219 0,632 0,255 0,249 0,139 0,204 1,008 0,987 0,983 0,744 0,998 0,953 0,837 0,850 0,283 0,260 0,289 0,211 1,382 0,763 0,473 0,646 0,252 0,687 0,761 0,588 0,393

1,536 1,512 1,360 1,269 1,281 1,613 1,493 1,038 1,282 1,384 1,516 1,000 1,254 1,163 1,584 1,653 2,766 2,654 0,378 2,434 2,577 2,219 2,312 2,404 1,757 0,269 1,695 1,141 0,973 0,845 2,144 1,695 1,108 2,819 1,440 1,435 1,605 1,729 0,763 1,196 1,834 1,584 1,347 1,102 1,313 1,283

2,940 2,860 2,411 2,013 2,055 3,244 2,779 1,357 2,057 2,388 2,879 1,261 1,965 1,695 3,127 3,418 9,574 8,814 0,178 7,414 8,309 6,139 6,663 7,208 3,847 0,090 3,645 1,639 1,179 0,893 5,789 3,613 1,539 9,907 2,596 2,503 3,222 3,708 0,717 1,782 4,236 3,127 2,308 1,518 2,146 2,061

51


Formula

Gasfactor

Orifice factor

Density (kg/m3)

Methyl Trichlorosilane Methyl Vinyl Ether Monoethyanolamine Monoethylamine (CH3CH2NH2) Monomethylamine Neon Nickel Carbonyl Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride Nitrogen Trioxide Nitrosyl Chloride Nitrous Oxide Octofluorocyclobutane Oxygen Oxygen Difluoride Ozone Perchloryl Fluoride Perfluorobutane Perfluoro-2-Butene Perfluoromethyl-vinylether (PMVE) Perfluoropropane Pentane (n-Pentane) Pentafluoroethane Phosgene Phosphine Phosphorous Pentafluoride Phosphorous Trifluoridide Propane (same as CH3CH2CH3) Propylene (Propene)* Rhenium Hexafluoride Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride Sulfur Trioxide Sulfuryl Fluoride Tetrachloromethane Tetrafluoroethylene (TFE) Tetrafluorohydrazine Trichlorofluoromethane (f-11) Trichlorosilane Trimethyloxyborane (TMB)

CH3CL3Si C 3H6O C2H7NO C 2H7 CH3NH2 Ne Ni(CO)4 NO N2 NO2 NF3 N2O3 NOCL N 2O C4F8 O2 OF2 O3 CLO3F C4F10 C4F8 PMVE C3F8 C5H12 C2HF5 COCL2 PH3 PF5 PF3 C 3H8 C 3H6 ReF6 SiH4 SiCL4 SiF4 SO2 SF6 SF4 SO3 SO2F2 CCL4 C2F4 N2F4 CCL3F SiHCL3 B(OCH3)3

0,267 0,377 0,305 0,359 0,565 1,398 0,212 0,995 1,000 0,758 0,501 0,443 0,644 0,752 0,169 0,988 0,672 0,738 0,448 0,738 0,268 0,296 0,179 0,212 0,287 0,504 0,783 0,346 0,495 0,343 0,401 0,230 0,625 0,310 0,395 0,728 0,270 0,353 0,535 0,423 0,344 0,361 0,367 0,374 0,329 0,300

2,310 1,435 1,477 1,269 1,067 0,847 2,371 1,030 1,000 1,713 1,598 1,649 1,529 1,259 2,672 1,067 1,388 1,310 1,905 2,918 2,672 2,029 2,591 1,605 2,070 1,881 1,100 2,109 1,770 1,274 1,234 3,279 1,070 2,462 1,931 1,529 2,348 1,957 1,691 1,931 2,345 1,905 1,926 2,244 2,201 1,929

6,675 2,567 2,728 2,013 1,420 0,902 7,008 1,339 1,251 2,052 3,168 3,389 2,913 1,964 8,933 1,429 2,402 2,138 4,571 10,610 8,933 5,131 8,396 3,222 5,360 4,418 1,517 5,620 3,906 2,008 1,875 13,410 1,440 7,579 4,648 2,858 6,516 4,776 3,575 4,648 6,858 4,526 4,624 6,281 6,038 4,638

52

-

-

-


Formula

Gasfactor

Orifice factor

Density (kg/m3)

1,1,2-Trichloro-1,1,2-Triflouroet (f-113) Trimethylamine Tungsten Hexafluoride Uranium Hexafluoride Vinyl Bromide Vinyl Chloride Vinyl Fluoride Water Vapor Xenon

C2CL3F3 (CH3)3N WF6 UF6 C2H3Br C2H3CL C 2H 3 F H2O Xe

0,231 0,316 0,227 0,220 0,524 0,542 0,576 0,861 1,383

2,520 1,467 3,264 3,548 1,985 1,492 1,281 0,802 2,180

7,920 2,639 13,280 15,700 4,772 2,788 2,046 0,804 5,851

The specific heat (and sensor conversion factor) of most gases is not strongly pressure and/or temperature dependent. However, gas conditions that vary widely from these reference conditions, may cause an additional error due to the change in specific heat caused by temperature and/or pressure. Therefore, to achieve specified accuracy, calibration as close as process conditions is preferred. Use of the conversion table. The gas conversion table is used to determine Nitrogen equivalent flowrates (required for model sizing or used to calculate the flowrate of gases other than the preselected gas). Sizing To determine the Nitrogen gas equivalent flowrate, divide the process gas flow rate by the appropriate sensor conversion factor. Change process gas The mass flow meter or controller is factory calibrated to a preselected gas, pressure and flowrange. To change to another process gas, multiply the output reading by the sensor conversion factor, when the flowmeter has been calibrated on Nitrogen. (Nitrogen gas has been selected as a reference in this conversion list). For calculation examples see page 54.

ORIFICE SELECTION Models 5850 series MFC and 5866 press. contr.

ORIFICE SELECTION Model 5851E Mass Flow Controller

Kv-value

Orifice size

Kv-value

Orifice size

5.10-6 2.10-5 5.10-5 11.10-5 18.0-5 4.10-4 9.10-4 2.10-3 4,7.10-3 10,5.10-3 14.10-3 35.10-3 40.10-3 55.10-3 62.10-3 80.10-3 10,5.10-2 14,2.10-2 15.10-2

(inches) .0013 .002 .003 .004 .005 .007 .010 .014 .020 .028 .032 .048 .052 .062* .067 .078* .093* .116* .120*

11.10-5 36.10-5 73.10-5 14.10-4 28.10-4 52.10-4 86.10-4 13.10-3 19.10-3 25.10-3 33.10-3 44.10-3 56.10-3 67.10-3 75.10-3 86.10-3 10,5.10-2 12,8.10-2 15.10-2 18,2.10-2

(inches) .0040 .0067 .0091 .0120 .0160 .0210 .0260 .0310 .0360 .0410 .0465 .0550 .0635 .0700 .0760 .0820 .0935 .1065 .1200 .1405

* Not available for model 5850TR

Max. pressure drop allowed (bar) 100 100 100 100 100 100 45 38 22 16 12 6 5 4 4 3 2 1.5 1.5

Max. pressure drop allowed (bar) 100 100 45 35 26 22 18 13 11 10 6 5 4 4 3 3 2 1.5 1.5 1.5

53

For proper valve sizing following information must be available: ● Upstream pressure : ● Downstream pressure : ● Gas temperature :

P1 min. (bar abs) P2 min. (bar abs) T (Kelvin)

● Maximum flow : Q ● Gas density : ρ

(m3n/h) (kg/m3n)

Depending on the ratio between P1 and P2 we have to make different calculations:

P2

ρxT

Qmax

If:

>

0,5

use:

Kv =

x

P1

514

P2

(P1 - P2) x P2

Qmax

If: