Secondary ion mass spectrometry depth profiling of nanometer-scalep ...

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SIMS depth profiling of nanometer-scale p*-n junctions 334. 10""2 I 'rrrr -| '1 'rr107. - 6keV/lElScm2 FIB Ga+ -—> Si. 3 21 is 1° Concentration m 63 ____ _- m.