Series LVQ - SMC ETech

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Series LVQ. High Purity Chemical Valve Non-Metallic Exterior. Non-metallic construction without using. -metal screws to fasten the body of the ac .tuator.
High Purity Chemical Liquid Valve Non-Metallic Exterior Series LVQ

LVC LVA

Screwless construction

LVH

PFA PTFE PVDF

LVD

w y:: Ne B Booddy : m raaggm: iapphhr D Dia torr:: tuaato A Acctu

Non-metallic construction without using metal screws to fasten the body of the actuator. Actuator

LVQ LVP LVW

Body

LQ1 LQ3 LVN LQHB TL TIL

Additional Variations for the New

LVQ Series!

TD TID

New

90° turn type

Manually operated Series LVQH

TH TIH

Flare, LQ3 integral fitting type Hyper fitting Series LVQ-Z

Insert bushing, LQ1 integral fitting type Hyper fitting Series LVQ-V

New

TLM TILM

Multi-turn type

New Tube extension integral fitting type Series LVQ-T

High purity chemical liquid valves, High back pressure (0.5 MPa) tolerant Added the LVQH series. Additional options High temperature (Max. 170°C), Buffer material FFKM, Ammonium hydroxide compatible, High flow type 649

Insert bushing/Flare, integral fitting types are available. Insert bushing, Integral fitting type

Series LVQ-V/LVQ-S Hyper fitting

New

Series LQ1 (Series LVQ-V )

Series LQ2 (Series LVQ-S )

• Insert bushing type • Quadruple seal construction

New

Flare, Integral fitting type

Series LVQ-Z Hyper fitting Flare type

Series LQ3 • Grip seal construction with Flare type • Triple seal costruction

Added manual type. New Two types of handle operation methods can be selected. 90° turn type

Multi-turn type

 Enables quick valve open/ close switching operation.

90°

Valve open

650

Valve closed

 The handle will spin loosely at the fully-open and fully-closed positions of the valve. This prevents overtightening.  An indicator enables easy visual check of the open/ closed state of the valve.  The valve opening position can be freely set using a lock nut.

Guide ring Eliminates lateral motion of the poppet which reduces internal leakage.

Piston damper Absorbs piston momentum to minimize impact-induced particle generation.

LVA

Buffer

Diaphragm (PTFE)

Protects diaphragm from deformation and damage due to back pressure.

Special diaphragm construction ensures gentle opening and closing that prevents the formation of micro-bubbles.

Offers quadruple seal construction. Nut lock mechanism—no additional tightening required. High flexural strength. Different tubing sizes can be selected.

Residual liquid is minimized by the tapered shape and integral fitting construction, allowing liquid to flow smoothly, achieving improved flow-through characteristics.

LVH LVD

Integral fitting construction

Minimal residual liquid

LVC

Body (New PFA)

LVQ LVP LVW LQ1

Compatible with chemicals such as acids, bases and super pure water.

LQ3

Space saving type

Integral fitting construction Hyper fitting/LQ1, LQ2, LQ3 series is used.

LVN

Reduction in dimension

A

LQHB TL TIL

B

TLM TILM

A

TD TID TH TIH

Piping from 8 directions are possible. Pilot port B

Model

45°

Integral fitting construction Hyper fitting/LQ1, LQ3 series is used. Can select female thread.

A

A

(mm) Reduction in dimension

Piping example

LVQ20 56.5 40.5 or more LVQ30

70

49.5 or more

LVQ40

80

61.5 or more

LVQ50 104.5 64.5 or more LVQ60 114.5 73.5 or more

Options

With flow rate adjustment

With by-pass

With flow rate adjustment & by-pass

With indicator

With indicator & by-pass

651

Variations Insert Bushing, Integral Fitting Type Series LVQ/LVQH

Series LVQ

Series LVQH

Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)

Applicable tubing O.D. Series

Metric size

3

4

6

8

10

Inch size

12

19

25 1/8 3/16 1/4 3/8 1/2 3/4

1

LVQ(H)20 LVQ(H)30 LVQ(H)40 LVQ(H)50 LVQ(H)60 With reducer

Basic size

Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection Series LVQS/LVQHS

Series LVQS

Series LVQHS

Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)

Fitting size

Series

2

3

4

5

6

LVQ(H)S20 LVQ(H)S30 LVQ(H)S40 LVQ(H)S50 LVQ(H)S60

Flare, Integral Fitting Type Series LVQ-Z/LVQH-Z

Series LVQ-Z

Series LVQH-Z

Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)

Applicable tubing O.D. Series

Metric size

3

4

6

8

10

Inch size

12

19

25 1/8 3/16 1/4 3/8 1/2 3/4

LVQ20(H)-Z LVQ30(H)-Z LVQ40(H)-Z LVQ50(H)-Z LVQ60(H)-Z

Flare, Integral Fitting Type Space Saving/Space Saving Connection Series LVQS-Z/LVQHS-Z

Series LVQS-Z

Series LVQHS-Z

Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)

Fitting size

Series

2

3

4

5

6

LVQ20(H)S-Z LVQ30(H)S-Z LVQ40(H)S-Z LVQ50(H)S-Z LVQ60(H)S-Z

Tube Extension Integral Fitting Type Series LVQ-T/LVQH-T

Series LVQ-T

Series LVQH-T

652

Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)

Tubing size Series

Metric size

6 LVQ20(H)-T LVQ30(H)-T LVQ40(H)-T LVQ50(H)-T LVQ60(H)-T

10

12

19

Inch size

25 1/4 3/8 1/2 3/4

1

1

Guide to Pamphlet on Fluoropolymer Fitting Installation Methods ∗ The pamphlets can be downloaded from the SMC home page. http://www.smcworld.com

LQ1/2 Series Installation Method M type (For short pipes) For fitting sizes 1 to 6

LVC

L type

LVA

For fitting sizes 1 to 6

LVH LVD LVQ LVP LVW

J type

For fitting sizes 1 and 2

LQ1

K type

LQ3

For fitting sizes 1 and 2

LVN LQHB TL TIL

M-E05-1

TLM TILM TD TID

LQ3 Series Installation Method

TH TIH

For fitting sizes 2 to 6

For fitting size 1

M-E06-4

653

INDEX

Insert Bushing, Integral Fitting Type

Air Operated Insert Bushing, Integral Fitting Type Hyper Fitting  Series LVQ

LQ1 LQ1, LQ2

P.656

Air Operated Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection  Series LVQS Manually Operated Insert Bushing, Integral Fitting Type Hyper Fitting  Series LVQH

LQ1 LQ1, LQ2

P.664

LQ1, LQ2

P.673

Manually Operated Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection  Series LVQHS

LQ1, LQ2

P.677

Fittings and Special Tools

Flare, Integral Fitting Type

Air Operated Flare, Integral Fitting Type Hyper Fitting  Series LVQ-Z

LQ3

P.683

Air Operated Flare, Integral Fitting Type Space Saving/Space Saving Connection  Series LVQS-Z Manually Operated Flare, Integral Fitting Type Hyper Fitting  Series LVQH-Z Manually Operated Flare, Integral Fitting Type Space Saving/Space Saving Connection  Series LVQHS-Z

654

P.682

LQ3

P.691

LQ3

P.700

LQ3

P.704

Air Operated Tube Extension Integral Fitting Type  Series LVQ-T

LQ1

Insert Bushing, Integral Fitting Type

Air Operated, 0.5 MPa Back Pressure Tolerant Insert Bushing, Integral Fitting Type Hyper Fitting  Series LVQ H Air Operated, 0.5 MPa Back Pressure Tolerant Flare, Integral Fitting Type Hyper Fitting  Series LVQ H-Z

LVC

P.709

LVA

Manually Operated Tube Extension Integral Fitting Type  Series LVQH-T

Flare, Integral Fitting Type

Tube Extension Integral Fitting Type

INDEX

LVH

P.716

LVD LVQ

LQ1

LVP

LQ1, LQ2

LVW

P.719

LQ1 LQ3

LQ3

LVN P.720

LQHB TL TIL

Applicable Fluids Specific Product Precautions

TLM TILM

P.722

TD TID

P.723, 724

TH TIH

655

Air Operated Insert Bushing, Integral Fitting Type Hyper Fitting

Series LVQ

RoHS

How to Order

LVQ 2 0 Body class

Option 2 Symbol

Pilot port type

Symbol Body class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø10 5 5 ø16 6 6 ø22

Nil

Connection tubing size 1/8" x 0.086" (3 x 2)Note)

LQ1 integral fitting LQ1 integral fitting Connection tubing size 4 x 3Note) Threaded Rc 1/8 Threaded NPT 1/8

M R N

Note) Refer to page 724 for details of the applicable tubing sizes.

N.C. N.O. Double acting

Note) Refer to variations in the table below for valve type combinations.

Nil

None

1 2 3 4 5

With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator

V S

Fitting type LQ1 LQ2

Body class 2, 3, 4, 5, 6 2, 3, 4, 5

Note) Insert bushing is used in common.

6 7 8 9 24

High back pressure (0.42 MPa)

g O.D

Type N.C.

Va

lve

PB

PA

None

J K N

For high temperature Buffer material FFKM For ammonium hydroxide

High flow type LVQ6 only

P

LVQ30

LVQ40

LVQ50

LVQ60

ø4

ø8

ø10

ø16

ø22

Metric

6

10

12

19

25

1/4

3/8

1/2

3/4

1

typ

PA

e

Inch

N.C.

AB AB A N.O. PB N.C. N.O. Double acting Double

B N.O. Double acting

acting

With flow rate adjustment

PA B

N.C.

A

N.C.

With by-pass

Double acting

N.C.

With flow rate adjustment & by-pass With reducer

PA

PA

N.C.

A Double PB N.C. Double acting acting

B

A B

PA B

A

N.C.

N.C.

With indicator

PA B

A

N.C.

N.C.

Port B (OUT) different dia. size Symbol Nil

Application Ports A & B same size

Refer to the applicable tubing size table above.

Different diameter tubings can be selected within the same body class.

High back pressure

Option

9 24

Nil

LVQ20

Basic

Note) Refer to page 724 for details of the applicable tubing sizes.

PA B

A

N.C.

N.C.

With indicator & by-pass

PA B

A

N.C.

656

Applicable option 4 5 6 7 8

Model

.

Symbol

Body class 2 3 4 5 6

Basic size

3

ameter

Orifice di

Tubin

Applicable tubing sizeNote) Connection Symbol tubing size Metric size 03 3x2 04 4x3 06 6x4 08 8x6 10 x 8 10 12 x 10 12 19 x 16 19 25 x 22 25 Inch size 03 1/8" x 0.086" 05 3/16" x 1/8" 07 1/4" x 5/32" 11 3/8" x 1/4" 13 1/2" x 3/8" 3/4" x 5/8" 19 1" x 7/8" 25

2

Note 1) Options in the same table cannot be High back pressure with flow rate adjustment combined each other. Note 2) High back pressure specifications (5 to 9) High back pressure with by-pass in Option 1 and high temperature specifiHigh back pressure with flow rate adjustment & by-pass cation (J) in Option 2 cannot be combined. High back pressure with indicator Note) Refer to variations in the table below for With indicator & by-pass valve type and option 1 combinations. Options in the same table can not be combined each other.

Variations

Fitting type Symbol

1

Option 1

Valve type 0 1 2

S 07

N.C.

Air Operated Insert Bushing, Integral Fitting Type

Series

LVQ

Standard Specifications Model

LVQ20

Metric Inch IN/OUT port Fitting type Pilot port Orifice diameter Av x 10–6 m2 Flow characteristics Cv Withstand pressure (MPa) Operating pressure Standard High temperature Standard Back pressure High back pressure (MPa) High temperature Valve leakage (cm3/min) Pilot air pressure (MPa) Pilot port size Standard Fluid temperature (°C) High temperature Ambient temperature (°C) Weight (kg)

6 1/4

Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

LVQ30

LVQ40

LVQ50

LVQ60

10 12 19 25 3/8 1/2 3/4 1 LQ1 or LQ2 LQ1 LQ1 ø4 ø8 ø10 ø16 ø22 8.4 31.2 45.6 120 192 (228) Note 2) 0.35 1.3 1.9 5 8 (9.5) Note 2) 1 –98 kPa to 0.5 MPa –98 kPa to 0.4 MPa –98 kPa to 0.3 MPa 0.3 or less 0.2 or less 0.42 or less 0.3 or less 0.2 or less 0 (With water pressure) 0.3 to 0.5 (High back pressure: 0.45 to 0.55) 1/8" (ø3), ø4, Rc 1/8, NPT 1/8 0 to 100 0 to 170 0 to 60 0.08 0.17 0.22 0.70 0.81

Tubing O.D.Note 1)

Caution For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1). (The pamphlet can be downloaded from the SMC home page.)

LVD LVQ LVP LVW LQ1 LQ3 LQHB TL

Body class

TILM

Connection tubing O.D. Metric size 3

4

6

8

10

Inch size 12

19

25

1/8

3/16

1/4

3/8

1/2

3/4

1

2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Torque (N·m)

LQ1

LQ2

0.3 to 0.4 0.8 to 1.0 1.0 to 1.2 2.5 to 3.0 5.5 to 6.0

1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 11.0 to 13.0 —

TD TID TH TIH

2 3 4 5 6 Note) Refer to page 682 for information on changing tubing sizes.

2 3 4 5 6

LVH

Different diameter tubings can be selected (within the same body class) by using a nut TIL and an insert bushing (reducer). With reducer TLM

1. Connect tubing by special tools.

Body class

LVA

LVN

Note 1) Refer to page 724 for details of the applicable tubing sizes. Note 2) ( ): High flow type

Applicable Different Diameter Tubings with Reducer

Piping

LVC

657

Series

LVQ

Construction Basic N.C.

N.O.

Double acting

PB

PB

q

q

q

PA

PA

e

e A

B

B

w rt

A

e

B

A

B

A

B

A

y

t

r

With reducer

With flow rate adjustment

With by-pass

With indicator

i u

SMC

PA

PA

SMC

B

SMC

B

B A

Component Parts No.

Description

Material

1

Actuator

2

Body

3

Diaphragm

4

Insert bushing

PFA

5

Nut

PFA

6

Collar

7

Flow rate adjuster

8

Indicator/Cover

658

u

A

PVDF PFA PTFE

PFA PVDF PP

B

SMC

A A

Air Operated Insert Bushing, Integral Fitting Type

Series

LVQ

Dimensions Basic, High back pressure N.C. valve

LVC LVA Q

LVH LVD LVQ LVP

øE

LVW

R

P

LQ1

Rc 1/8 (NPT 1/8) Sensor (vent) port LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port

Rc 1/8 (NPT 1/8) Pilot port

LQ3 LVN

F

LQHB TL TIL

K SMC

A

B

SMC

A

TLM TILM

L

G

J

B

TD TID

(H)

Pilot port Rc 1/8 (NPT 1/8) Threaded type

TH TIH

N

D

B

A

C

M

∗ Drawings show the LVQ0-S.

LVQ0- VS 

Dimensions (N.C. Valve)

(mm)

A

B

C

D

E

F

V

S

LVQ20- VS  LVQ30- VS  LVQ40- VS  LVQ50- VS  LVQ60-V∗

25.5

46

31.5

58

33.6

56.5

12

70

77

28.5

57

34.5

69

45.4

77

16.5

83

95

28.5

57

34.5

69

45.4

82.5

22

95

109

42

84

48

96

75

127

25

130

141

42

84

48

96

75

136.8

32

150



∗ The LVQ60 is available only with “V”.

G

H

Model

J

K

L

M

N

P

Q

21.8

37

5

7

15

31.3

21

25.3

R

32

50

6

7

20

37.2

25

31.2

37.5

55.5

6

7

20

37.2

25

31.2

50.2

78.2

10

7

20

50.8

38.5

45

60

88

10

7

20

50.8

38.5

45

659

LVQ

Series

Dimensions With flow rate adjustment, High back pressure with flow rate adjustment N.C. valve

Dimensions

S

LVQ20- VS -1 LVQ30- VS -1 LVQ40- VS -1 LVQ50- VS -1 LVQ60-V-1∗

83

(Max. S)

(mm)

Model

113.5 119 B

171.5

SMC

A

182.5

∗ The LVQ60 is available only with “V”.

With by-pass, High back pressure with by-pass N.C. valve

B

D

A

LVQ20

C

N M

. T)

(Max

LVQ30, LVQ40 LVQ50, LVQ60

SMC

V

N M V

SMC

B

A

D

B A

C

U

SMC

(Max. T)

Z (H)

View Z

∗ Drawings show the LVQ0-S.

Dimensions

(mm)

H

Model

A

B

C

D

M

N

T

U

V

V

S

LVQ20- VS -2 LVQ30- VS -2 LVQ40- VS -2 LVQ50- VS -2 LVQ60-V-2∗

25.5

46

31.5

58

7

15

34.3

10.6

7

64

77

25.5

51

31.5

63

7

15

36.9

16.5

10

83

95

25.5

51

31.5

63

7

15

37.9

22

10

95

109

38

76

44

88

7

20

64

25

17

130

141

38

76

44

88

7

20

66

32

17

150



∗ The LVQ60 is available only with “V”.

660

Air Operated Insert Bushing, Integral Fitting Type

LVQ

N M

LVQ20

LVC C

LVA LVH

D

B

A

With flow rate adjustment & by-pass, High back pressure with flow rate adjustment & by-pass N.C. valve

Series

LVD . T) (Max

LVQ

V

LVP

LVQ30, LVQ40 LVQ50, LVQ60

(Max. S)

LVW

N M

LQ1

V

LQ3

SMC

B A

C

LVN

SMC

D

A

SMC

(Max. T)

U

B

Z (H)

TL TIL TLM TILM View Z

TD TID ∗ Drawings show the LVQ0-S.

Dimensions

(mm)

Model

A

B

C

D

M

N

S

T

U

V

LVQ20- VS -3 LVQ30- VS -3 LVQ40- VS -3 LVQ50- VS -3 LVQ60-V-3∗

25.5

46

31.5

58

7

15

83

34.3

10.6

25.5

51

31.5

63

7

15

113.5

36.9

25.5

51

31.5

63

7

15

119

38

76

44

88

7

20

38

76

44

88

7

20

H V

S

7

64

77

16.5

10

83

95

37.9

22

10

95

109

171.5

64

25

17

130

141

182.5

66

32

17

150



∗ The LVQ60 is available only with “V”.

With indicator, High back pressure with indicator N.C. valve (mm)

Model

S

LVQ20- VS -4 LVQ30- VS -4 LVQ40- VS -4 LVQ50- VS -4 LVQ60-V-4∗

70.5 88.5

S

Dimensions

LQHB

94 134.5 144

B

SMC

A

∗ The LVQ60 is available only with “V”.

∗ Drawings show the LVQ0-S.

661

TH TIH

LVQ

Series

Dimensions

Q

Basic N.O. valve

øE

LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port

R

Rc 1/8 (NPT 1/8) Sensor (vent) port

Rc 1/8 (NPT 1/8) Pilot port

Rc 1/8 (NPT 1/8) Vent port

K

W

(F)

Rc 1/8 (NPT 1/8) Vent port

G

SMC

B

A

SMC

A

L

J

B

(H)

Pilot port Rc 1/8 (NPT 1/8) Threaded type

D

B

A

C

N M

∗ Drawings show the LVQ0-S.

Double acting valve P

LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port Rc 1/8 (NPT 1/8) Pilot port

R LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port

Rc 1/8 (NPT 1/8) Sensor (vent) port

B

SMC

Rc 1/8 (NPT 1/8) Pilot port

A

B

SMC

A

∗ Drawings show the LVQ0-S.

LVQ 12 - VS 

Dimensions (N.O. Valve, Double Acting Valve)

(mm)

A

B

C

D

E

F

V

S

LVQ2 12 - VS  LVQ3 12 - VS  LVQ4 12 - VS  LVQ5 12 - VS  LVQ6 12 -V∗

25.5

46

31.5

58

33.6

81

12

70

77

28.5

57

34.5

69

45.4

99

16.5

83

95

28.5

57

34.5

69

45.4

104.5

22

95

42

84

48

96

75

145

25

42

84

48

96

75

154.5

32

∗ The LVQ60 is available only with “V”.

662

G

H

Model

J

K

L

M

N

P

21.8

37

5

7

15

31.3

32

50

6

7

20

37.2

109

37.5

55.5

6

7

20

130

141

50.2

78.2

10

7

150



60

88

10

7

Q

R

W

21

25.3

64

25

31.2

82

37.2

25

31.2

20

50.8

38.5

45

128

20

50.8

38.5

45

137.5

87.5

Air Operated Insert Bushing, Integral Fitting Type

With by-pass Double acting valve

Series

LVQ

N M

LVC

LVQ2 12

SMC

LVH

D

B

A

C

LVA LVD (Max

LVQ

. T)

LVP

V

LVW LQ1

SMC

SMC

V

LQHB

A

U

SMC

LVN

M

LVQ3 12 , LVQ4 12 LVQ5 12 , LVQ6 12

SMC

B

LQ3

N

SMC

C

B A (Max. T)

D

Z (H)

TL TIL

TD TID TH TIH View Z

∗ Drawings show the LVQ0-S.

Dimensions (N.O Valve, Double Acting Valve)

(mm)

H

Model

A

B

C

D

M

N

T

U

V

V

S

LVQ212 - VS -2 LVQ312 - VS -2 LVQ412 - VS -2 LVQ512 - VS -2 LVQ612 -V-2∗

25.5

46

31.5

58

7

15

34.3

10.6

7

64

77

25.5

51

31.5

63

7

15

36.9

16.5

10

83

95

25.5

51

31.5

63

7

15

37.9

22

10

95

109

38

76

44

88

7

20

64

25

17

130

141

38

76

44

88

7

20

66

32

17

150



TLM TILM

∗ The LVQ60 is available only with “V”.

663

Air Operated Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection

Series LVQS

RoHS

How to Order

LVQ 2 0 S

S 07 Option 2

Body class

Symbol

Symbol Body class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø10 5 5 ø16 6 6 ø22

Pilot port type Nil

Note) Refer to page 724 for details of the applicable tubing sizes.

Valve type 0 1 2

LQ1 integral fitting Connection tubing size 1/8" x 0.086 (3 x 2)Note) LQ1 integral fitting Connection tubing size 4 x 3Note) Threaded Rc 1/8 Threaded NPT 1/8

M R N

Nil

None

1 2 3 4 5

With flow rate adjustment With flow rate adjustment & by-pass With indicator

Fitting type

Basic

Body class 2, 3, 4, 5, 6 2, 3, 4, 5

Applicable fitting size Fitting size

07 11 13 19 25

2 3 4 5 6

Body class 2 3 4 5 6

Note) Refer to page 665 for How to Order fitting parts. Select a tube with the same size as the valve side fitting.

None

J K N

For high temperature Buffer material FFKM For ammonium hydroxide

High flow type LVQ6 only

P

Note 1) Options in the same table cannot be combined each other. in Option 1 and high temperature specification (J) in Option 2 cannot be combined.

High back pressure with by-pass High back pressure with flow rate adjustment & by-pass

Note) Refer to variations in the table below for valve type and option 1 combinations. Options in the same table can not be combined each other.

High back pressure with indicator With indicator & by-pass

pe

N.C.

PB

PA

PA

N.C.

AB AB A N.O. PB N.C. N.O. Double Double acting

B N.O. Double acting

acting

With flow rate adjustment

PA B

N.C.

A N.C.

With by-pass

Double acting

N.C.

With flow rate adjustment & by-pass

PA

PA

N.C.

A Double PB N.C. Double acting acting

B

A B

PA B

A

N.C.

N.C.

With indicator

PA B

A

N.C.

N.C.

High back pressure

PA B

A

N.C.

N.C.

With indicator & by-pass

PA B

A

N.C.

664

Option

9 24

Nil

High back pressure with flow rate adjustment Note 2) High back pressure specifications (5 to 9)

Model Orifice di ameter Applic able fi tting s ize Valv Symbol e ty

Note) Insert bushing is used in common.

Symbol

Applicable option 4 5 6 7 8

Variations

Space saving connection

Fitting type LQ1 LQ2

3

High back pressure (0.42 MPa)

Type

V S

6 7 8 9 24

With by-pass

Body type

Symbol

2

Option 1

N.C. N.O. Double acting

Note) Refer to variations in the table below for valve type combinations.

S

1

N.C.

LVQ20

LVQ30

LVQ40

LVQ50

LVQ60

ø4

ø8

ø10

ø16

ø22

2

3

4

5

6

Air Operated Insert Bushing, Integral Fitting Type

Series

LVQS

How to Order Space Saving Fittings Applicable tubing sizeNote 1) Note 2) Size

No.

2 2 3 3 3 4 4 5 5

1 2 1 2 3 1 2 1 2

6 6

1 2

Applicable tubing size (mm) 6x4 4x3 10 x 8 8x6 6x4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16

Reducing

Size Symbol

2 2 2 3 3 4 4 5 5 6 6

A B C A B A B A B A B

Applicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Basic size

Reducing

LVC LVA LVH LVD

With reducer

LVQ LVP

Note 1) Select the same size as the fitting on the valve. Note 2) Refer to page 724 for details of the applicable tubing sizes.

LVW

LQ1 E LQ2 E

SN SN

61 21

LQ1 LQ3 LVN

Packaging Symbol

Nil 1

Fitting type E

T

Union elbow

Union tee

Packaging Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5

LQHB TL TIL

One (including insert bushing) of the nuts is not attached.

TLM TILM

Applicable tubing sizeNote 1) Note 2) SMC

SMC

P

U

Panel mount union

Union

SMC

SMC

Size

No.

2 2 3 3 3 4 4 5 5

1 2 1 2 3 1 2 1 2

Applicable tubing size (mm) 6x4 4x3 10 x 8 8x6 6x4 12 x 10 10 x 8 19 x 16 12 x 10

Reducing

Size Symbol

2 2 2 3 3 4 4 5 5

A B C A B A B A B

Applicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" Basic size

Reducing

With reducer

Note 1) Select the same size as the fitting on the valve. Note 2) Refer to page 724 for details of the applicable tubing sizes.

Piping Example LQ2T31-SN (Union tee)

LVQ30S-S11R Applicable tubing size 1/4" x 5/32"

LQ2E3B-SN (Union elbow) Applicable tubing size 10 x 8

Ordering Example

LVQ30S-S11R LQ2T31-SN (Union tee) LQ2E3B-SN (Union elbow)

1 1 1

Note) For shipment, the valve and fittings are individually packaged and dispatched together in 1 box.

665

TD TID TH TIH

Series

LVQS Standard Specifications LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S

Model

Connection fitting size

2

3

IN/OUT port

Fitting type

4

5

6 LQ1

LQ1 or LQ2

Pilot port

LQ1

Orifice diameter

ø4

ø8

ø10

ø16

ø22

Av x 10–6 m2 Flow characteristics Cv

8.4

31.2

45.6

120

192 (228) Note 1)

0.35

1.3

1.9

5

8 (9.5) Note 1)

Withstand pressure (MPa) Operating pressure

1

Standard

–98 kPa to 0.5 MPa

High temperature

–98 kPa to 0.4 MPa

–98 kPa to 0.3 MPa

Standard Back pressure High back pressure (MPa) High temperature

0.2 or less

0.3 or less 0.42 or less

0.2 or less

0.3 or less

Valve leakage (cm3/min)

0 (With water pressure)

Pilot air pressure (MPa)

0.3 to 0.5 (High back pressure: 0.45 to 0.55)

Pilot port size Note 2)

1/8" (ø3), ø4, Rc 1/8, NPT 1/8

Standard Fluid temperature (°C) High temperature

0 to 100 0 to 170

Ambient temperature (°C)

0 to 60

Weight (kg)

0.085

0.175

0.223

0.725

0.835

Note 1) ( ): High flow type Note 2) Refer to page 724 for details of the applicable tubing sizes.

Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

Piping

Caution 1. Take extra care with the insert bushing when connecting the fittings. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Body class

2 3 4 5 6

666

Torque (N·m)

LQ1

LQ2

0.3 to 0.4

1.5 to 2.0

0.8 to 1.0

3.0 to 3.5

1.0 to 1.2

7.5 to 9.0

2.5 to 3.0

11.0 to 13.0

5.5 to 6.0



Air Operated Insert Bushing, Integral Fitting Type

LVQS

Series

Construction Basic N.C.

N.O.

Double acting PB

PB

LVC LVA

q

q

q

LVH e B

wrt

B

LVD

PA

PA

e

A

SMC

e B

A

B

A

SMC

LVQ

A

LVP

B

A

LVW LQ1

With flow rate adjustment

With by-pass

LQ3

With indicator

LVN y

u

LQHB TL TIL TLM TILM PA

PA

TD TID

y B

SMC

A

B

B

A

B

SMC

TH TIH

A

A

Component Parts No. 1

Description Actuator

2

Body

3

Diaphragm

4

Insert bushing

5

Nut

6

Flow rate adjuster

7

Indicator/Cover

Material PVDF PFA PTFE PFA PFA PVDF PP

667

Series

LVQS

Dimensions

Q

Basic, High back pressure N.C. valve

LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port

øE Rc 1/8 (NPT 1/8) Sensor (vent) port

P

R

K

F

Rc 1/8 (NPT 1/8) Pilot port

SMC

B

A

SMC

A

L

G

J

B

(H)

Pilot port Rc 1/8 (NPT 1/8) Threaded type

N

D

B

A

C

M

∗ Drawings show the LVQ0-S.

LVQ0S-VS 

Dimensions (N.C. Valve)

(mm)

Model

A

B

C

D

E

F

LVQ20S- VS 07 LVQ30S- VS 11 LVQ40S- VS 13 LVQ50S- VS 19 LVQ60S-V25∗

25.5

46

31.5

58

33.6

56.5

12

28.5

57

34.5

69

45.4

77

28.5

57

34.5

69

45.4

82.5

42

84

48

96

75

42

84

48

96

75

∗ The LVQ60 is available only with “V”.

668

G

H

J

K

L

M

N

P

Q

21.8

37

5

7

15

31.3

21

25.3

R

V

S

89

92

16.5

106

112

32

50

6

7

20

37.2

25

31.2

22

120

126

37.5

55.5

6

7

20

37.2

25

31.2

127

25

164

168

50.2

78.2

10

7

20

50.8

38.5

45

136.8

32

177



60

88

10

7

20

50.8

38.5

45

Air Operated Insert Bushing, Integral Fitting Type

Series

LVQS

With flow rate adjustment, High back pressure with flow rate adjustment N.C. valve Dimensions

(mm)

S

LVQ20S- VS 07-1 LVQ30S- VS 11-1 LVQ40S- VS 13-1 LVQ50S- VS 19-1 LVQ60S-V25-1∗

83

LVC

(Max. S)

Model

113.5

LVA

119

LVH

171.5 B SMC A

182.5

∗ Drawing shows the LVQ0-S.

∗ The LVQ60 is available only with “V”.

LVD LVQ LVP

With by-pass, High back pressure with by-pass N.C. valve

LVW

N M

LQ1 C

LQ3 LVN

D

B

A

LVQ20S

LQHB . T)

(Max

TL TIL TLM TILM

V

TD TID

LVQ30S, LVQ40S LVQ50S, LVQ60S

TH TIH

N M V

B A

C

U

B SMC A

(Max. T)

D

Z

View Z

Dimensions

(mm)

Model

A

B

C

D

M

N

T

U

V

LVQ20S- 07-2 LVQ30S- VS 11-2 LVQ40S- VS 13-2 LVQ50S- VS 19-2 LVQ60S-V25-2∗

25.5

46

31.5

58

7

15

34.3

10.6

7

25.5

51

31.5

63

7

15

36.9

16.5

10

25.5

51

31.5

63

7

15

37.9

22

10

38

76

44

88

7

20

64

25

17

38

76

44

88

7

20

66

32

17

V S

∗ Drawings show the LVQ0-S.

∗ The LVQ60 is available only with “V”.

669

LVQS

Series

Dimensions With flow rate adjustment & by-pass, High back pressure with flow rate adjustment & by-pass N.C. valve

D

B

A

C

N M

LVQ20S

. T) (Max

N M

C

V

A

(Max. S)

LVQ30S, LVQ40S LVQ50S, LVQ60S

V

(Max. T)

U

D

B

B SMC A

Z

View Z

∗ Drawings show the LVQ0-S.

Dimensions

(mm)

Model

A

B

C

D

M

N

S

T

U

LVQ20S- VS 07-3 LVQ30S- VS 11-3 LVQ40S- VS 13-3 LVQ50S- VS 19-3 LVQ60S-V25-3∗

25.5

46

31.5

58

7

15

83

34.3

10.6

V 7

25.5

51

31.5

63

7

15

113.5

36.9

16.5

10

25.5

51

31.5

63

7

15

119

37.9

22

10

38

76

44

88

7

20

171.5

64

25

17

38

76

44

88

7

20

182.5

66

32

17

∗ The LVQ60 is available only with “V”.

With indicator, High back pressure with indicator N.C. valve (mm)

Model

S

LVQ20S- VS 07-4 LVQ30S- VS 11-4 LVQ40S- VS 13-4 LVQ50S- VS 19-4 LVQ60S-V25-4∗

70.5 88.5 94 134.5 144

∗ The LVQ60 is available only with “V”.

670

S

Dimensions

B SMC A

∗ Drawing shows the LVQ0-S.

Air Operated Insert Bushing, Integral Fitting Type

Series

LVQS

Basic N.O. valve

Q

LVC LVA

LQ1 integral fitting 1/8" (ø3), (ø4)

LVH

øE R

Pilot port

LVD

Rc 1/8 (NPT 1/8) Sensor (vent) port

Rc 1/8 (NPT 1/8) Pilot port

LVQ

Rc 1/8 (NPT 1/8) Vent port

LVP LVW LQ1

K

W

(F)

Rc 1/8 (NPT 1/8) Vent port

G

J

LQ3

B SMC A

B SMC A

L

LVN

(H)

Pilot port Rc 1/8 (NPT 1/8) Threaded type

N M

LQHB TL TIL

TD TID

D

B

A

C

TLM TILM

TH TIH ∗ Drawings show the LVQ0-S.

Double acting valve

P

LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port

R

LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port

Rc 1/8 (NPT 1/8) Pilot port

Rc 1/8 (NPT 1/8) Pilot port

Rc 1/8 (NPT 1/8) Sensor (vent) port

B SMC A

B SMC A

∗ Drawings show the LVQ0-S. 1 LVQ 2 S- VS 

Dimensions (N.O. Valve, Double Acting Valve)

Model

A

B

C

D

E

F

G

LVQ2 12 S- VS 07 LVQ3 12 S- VS 11 LVQ4 12 S- VS 13 LVQ5 12 S- VS 19 LVQ6 12 S-V25∗

25.5

46

31.5

58

33.6

81

12

28.5

57

34.5

69

45.4

99

28.5

57

34.5

69

45.4

42

84

48

96

42

84

48

96

(mm)

H V

S

J

K

L

M

N

P

Q

R

W

89

92

21.8

37

5

7

15

31.3

21

25.3

64

16.5

106

112

32

50

6

7

20

37.2

25

31.2

82

104.5

22

120

126

37.5

55.5

6

7

20

37.2

25

31.2

75

145

25

164

168

50.2

78.2

10

7

20

50.8

38.5

45

128

75

154.5

32

177



60

88

10

7

20

50.8

38.5

45

137.5

87.5

∗ The LVQ60 is available only with “V”.

671

Series

LVQS

Dimensions With by-pass Double acting valve

D

B

A

C

N M

LVQ2 12 S

. T) (Max

LVQ3 12 S, LVQ4 12 S LVQ5 12 S, LVQ6 12 S SMC

N M V

A

B A

C

U

B

V

(Max. T)

D

Z

View Z

∗ Drawings show the LVQ0-S.

Dimensions (N.O. Valve, Double Acting Valve)

(mm)

Model

A

B

C

D

M

N

T

U

LVQ2 S- 07-2 LVQ3 12 S- VS 11-2 LVQ4 12 S- VS 13-2 LVQ5 12 S- VS 19-2 LVQ6 12 S-V25-2∗

25.5

46

31.5

58

7

15

34.3

10.6

7

25.5

51

31.5

63

7

15

36.9

16.5

10

25.5

51

31.5

63

7

15

37.9

22

10

38

76

44

88

7

20

64

25

17

38

76

44

88

7

20

66

32

17

1 2

V S

∗ The LVQ60 is available only with “V”.

672

V

Manually Operated Insert Bushing, Integral Fitting Type Hyper Fitting

Series LVQH

RoHS LVC

How to Order

LVQH 2 0

LVA

S 07

LVH

1

Symbol Body class 2 2 3 3 4 4 5 5 6 6

Symbol

Orifice dia. ø4 ø8 ø10 ø16 ø22

Nil K N

V S

Fitting type LQ1 LQ2

1 4

Connection tubing size Metric size 3x2 03 4x3 04 6x4 06 8x6 08 10 x 8 10 12 x 10 12 19 x 16 19 25 x 22 25 Inch size 1/8" x 0.086" 03 3/16" x 1/8" 05 1/4" x 5/32" 07 3/8" x 1/4" 11 1/2" x 3/8" 13 3/4" x 5/8" 19 1" x 7/8" 25 Basic size

2

Body class 3 4 5 6

Threaded Threaded

LQ3

90° turn type Multi-turn type (With indicator)

LVN LQHB

NPT 1/8 Rc 1/8

TL TIL

Port B (OUT) different dia. size Nil

Application Ports A & B same size

Refer to the applicable tubing table to the left.

Different diameter tubings can be selected within the same body class.

Symbol

With reducer

Note) Refer to page 724 for details of the applicable tubing sizes.

TLM TILM TD TID TH TIH

Variations Model LVQH20 LVQH30 LVQH40 LVQH50 LVQH60 Orifice di ameter ø4 ø8 ø10 ø16 ø22 g O.D Metric . 6 10 12 19 25 Inch Symbol 1/4 3/8 1/2 3/4 1

Tubin Type

90° turn type

Multi-turn type

B

A

B

A

LVP LQ1

Vent port type Nil R

LVQ LVW

Handle operation

Body class 2, 3, 4, 5, 6 2, 3, 4, 5

Applicable tubing sizeNote) Symbol

Option None Buffer material FFKM For ammonium hydroxide

Note) Options cannot be combined each other.

Fitting type Symbol

LVD

Option

Body class

673

Series

LVQH Standard Specifications LVQH20 LVQH30 LVQH40 LVQH50 LVQH60

Model

Tubing

Metric

O.D.Note)

Inch

6

10

12

19

1/4

3/8

1/2

3/4

Fitting type

LQ1 or LQ2

25 1 LQ1

Orifice diameter

ø4

ø8

ø10

ø16

ø22

Av x 10–6 m2 Flow characteristics Cv

8.4

31.2

45.6

120

192

0.35

1.3

1.9

5

8

Withstand pressure (MPa)

1

Fluid pressure

–98 kPa to 0.5 MPa

–98 kPa to 0.4 MPa

0.3 or less

0.2 or less

Back pressure (MPa) Valve leakage (cm3/min)

0 (With water pressure)

Fluid temperature (°C)

0 to 100

Ambient temperature (°C) Weight (kg)

0 to 60

LVQH0-1

0.12

0.27

0.31

1.10

1.16

LVQH0-4

0.11

0.20

0.22

0.67

0.87

Note) Refer to page 724 for details of the applicable tubing sizes.

Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

Piping

Caution 1. Connect tubing by special tools. For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1). (The pamphlet can be downloaded from the SMC home page.)

2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Body class

2 3 4 5 6

674

Torque (N·m)

LQ1

LQ2

0.3 to 0.4

1.5 to 2.0

0.8 to 1.0

3.0 to 3.5

1.0 to 1.2

7.5 to 9.0

2.5 to 3.0

11.0 to 13.0

5.5 to 6.0



Manually Operated Insert Bushing, Integral Fitting Type

Series

LVQH

Construction 90° turn type

u

LVC LVA

q

LVH LVD LVQ

y

e

LVP LVW B

w

r

t

A

LQ1 r

t

LQ3

With reducer

LVN LQHB

Multi-turn type (With indicator)

i

TL TIL

u

TLM TILM TD TID TH TIH

B

B

A

A

Component Parts No.

Description

Material

1

Actuator

2

Body

3

Diaphragm

4

Insert bushing

PFA

5

Nut

PFA

6

Collar

PFA

7

Handle

PVDF

8

Indicator/Cover

PVDF PFA PTFE

PP

675

Series

LVQH

Dimensions 90° turn type

Locking (Valve closed)

°

Q

90

Non-locking (Valve open)

Y

Rc 1/8 (NPT 1/8) Sensor (vent) port

(F)

ø7

Dimensions

(mm)

LVQH20- VS -1 LVQH30- VS -1 LVQH40- VS -1 LVQH50- VS -1 LVQH60-V-1∗

25.5

46

31.5

58

79

28.5

57

34.5

69

28.5

57

34.5

42

84

48

42

84

G

H V

S

12

70

77

103

16.5

83

95

69

108

22

95

109

96

165

25

130

141

48

96

175

32

150



Model

J

K

L

M

N

LVQH20- VS -1 LVQH30- VS -1 LVQH40- VS -1 LVQH50- VS -1 LVQH60-V-1∗

21.8

37

5

7

15

21

Q

55

32

50

6

7

20

25

80

37.5

55.5

6

7

20

25

50.2

78.2

10

7

20

38.5

110

60

88

10

7

20

38.5

110

B

A

(H) N M

Y

80

C

F

D

D

A

C

J

B

G L

A

B

Model

∗ The LVQ60 is available only with “V”. ∗ Drawings show the LVQ0-S.

Multi-turn type (With indicator)

Valve closed direction

Valve open direction

Y

Dimensions S

Y

LVQH20- -4 LVQH30- VS -4 LVQH40- VS -4 LVQH50- VS -4 LVQH60-V-4∗

93.6

50

111.2

50

116.7

50

170.7

71

180.2

71

V S

∗ The LVQ60 is available only with “V”. ∗ Drawings show the LVQ0-S.

676

(Max. S)

(mm)

Model

B

A

Manually Operated Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection

Series LVQHS

RoHS LVC

How to Order

LVQH 2 0 S

LVA

S 07

LVH

1 Symbol Nil

Orifice dia. ø4 ø8 ø10 ø16 ø22

K N

Option None Buffer material FFKM For ammonium hydroxide

LVQ LVP

Note) Options cannot be combined each other.

Body type S

LVD

Option

Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

LVW LQ1

Handle operation

Space saving connection

1 4

LQ3

90° turn type Multi-turn type (With indicator)

LVN

Fitting type Symbol

V S

Fitting type LQ1 LQ2

Body class 2, 3, 4, 5, 6 2, 3, 4, 5

Vent port type Nil

R

Threaded Threaded

LQHB

NPT 1/8 Rc1 /8

TL TIL TLM TILM

Applicable fitting size Symbol

Fitting size

07 11 13 19 25

2 3 4 5 6

Body class 2 3 4 5 6

TD TID TH TIH

Note) Refer to page 678 for How to Order applicable fittings. Select the same size as the fitting on the valve.

Variations

Type

Model LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S Orifice di ameter Conne ø4 ø8 ø10 ø16 ø22 ction fi tting s Symb ize ol 2 3 4 5 6

90° turn type B

A

B

A

Multi-turn type

677

Series

LVQHS How to Order Space Saving Fittings Applicable tubing size Size

No.

2 2 3 3 3 4 4 5 5

1 2 1 2 3 1 2 1 2

6 6

1 2

Applicable tubing size (mm) 6x4 4x3 10 x 8 8x6 6x4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16

Reducing

Size Symbol

2 2 2 3 3 4 4 5 5 6 6

A B C A B A B A B A B

Applaicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Basic size

Reducing

With reducer

Note 1) Select the same size as the fitting on the valve.

LQ1 E LQ2 E

61 21

SN SN Packaging Symbol

Nil 1

Fitting type E

T

Union elbow

Packaging Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5

One (including insert bushing) of the nuts is not attached.

Union tee

Applicable tubing size SMC

SMC

P

U

Panel mount union

Union

SMC

SMC

Size

No.

2 2 3 3 3 4 4 5 5

1 2 1 2 3 1 2 1 2

Applicable tubing size (mm) 6x4 4x3 10 x 8 8x6 6x4 12 x 10 10 x 8 19 x 16 12 x 10

Reducing

Size Symbol

2 2 2 3 3 4 4 5 5

A B C A B A B A B

Applicable tubing size (mm) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" Basic size

Reducing

With reducer

Note 1) Select the same size as the fitting on the valve.

Piping Example LVQH30S-S11R-1

Ordering Example

LQ2T31-SN (Union tee)

Applicable tubing size 1/4" x 5/32"

LQ2E3B-SN (Union elbow) Applicable tubing size 10 x 8

678

LVQH30S-S11R-1 LQ2T31-SN (Union tee) LQ2E3B-SN (Union elbow)

1 1 1

Note) For shipment, the valve and fittings are individually packaged and dispatched together in 1 box.

Manually Operated Insert Bushing, Integral Fitting Type

Series

LVQHS

Standard Specifications LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S

Model

Connection fitting size

2

3

Fitting type

4

Orifice diameter

6

Av x 10 m2 Flow characteristics Cv

LQ1

ø4

ø8

ø10

ø16

ø22

8.4

31.2

45.6

120

192

0.35

1.3

1.9

5

8

–6

Withstand pressure (MPa) –98 kPa to 0.5 MPa

–98 kPa to 0.4 MPa

0.3 or less

0.2 or less

Back pressure (MPa) Valve leakage (cm3/min)

0 to 100

Ambient temperature (°C)

0 to 60

LVA LVD LVQ

0 (With water pressure)

Fluid temperature (°C)

LVC LVH

1

Fluid pressure

Weight (kg)

5

LQ1 or LQ2

LVP

LVQH0S-1

0.14

0.30

0.33

1.14

1.18

LVQH0S-4

0.13

0.23

0.24

0.71

0.89

LVW LQ1 LQ3

Specific Product Precautions

LVN

Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

LQHB

Piping

TLM TILM

Caution

TL TIL

TD TID

1. Take extra care with the insert bushing when connecting the fittings. TH 2. Tighten the nut to the end surface of the body. As a guide, refer to TIH the proper tightening torques shown below. Tightening Torque for Piping Body class

2 3 4 5 6

Torque (N·m)

LQ1

LQ2

0.3 to 0.4

1.5 to 2.0

0.8 to 1.0

3.0 to 3.5

1.0 to 1.2

7.5 to 9.0

2.5 to 3.0

11.0 to 13.0

5.5 to 6.0



679

Series

LVQHS

Construction 90° turn type

y

q

e

B

w

r

t

A

Multi-turn type (With indicator)

u

B

B

Component Parts No.

Description

1

Actuator

2

Body

3

Diaphragm

4

Insert bushing

5

Nut

6

Handle

7

Indicator/Cover

680

Material

PVDF PFA PTFE PFA PFA PVDF PP

y

A

A

Manually Operated Insert Bushing, Integral Fitting Type

Series

LVQHS

Dimensions 90° turn type

Locking (Valve closed)

°

90

LVC Q

LVA LVH

Non-locking (Valve open)

LVD Y

LVQ LVP Rc 1/8 (NPT 1/8)

ø7

(mm)

B

C

D

F

G

LVQH20S- VS -1 LVQH30S- VS -1 LVQH40S- VS -1 LVQH50S- VS -1 LVQH60S-V-1∗

25.5

46

31.5

58

79

28.5

57

34.5

69

103

28.5

57

34.5

69

108

42

84

48

96

42

84

48

96

Model

J

L

M

N

LVQH20S- VS -1 LVQH30S- VS -1 LVQH40S- VS -1 LVQH50S- VS -1 LVQH60S-V-1∗

21.8

5

7

15

21

55

32

6

7

20

25

80

37.5

6

7

20

25

80

50.2

10

7

20

38.5

110

60

10

7

20

38.5

110

V

S

89

92

16.5

106

112

22

120

126

165

25

164

168

175

32

177



B

LQ3

A

LVN (H)

LQHB

N M

TL TIL

Y

TLM TILM TD TID

C

A

TH TIH

D

B

Q

12

∗ The LVQ60 is available only with “V”. ∗ Drawings show the LVQ0-S.

Multi-turn type (With indicator)

Valve closed direction

Valve open direction

Y

Dimensions S

Y

LVQH20S- -4 LVQH30S- VS -4 LVQH40S- VS -4 LVQH50S- VS -4 LVQH60S-V-4∗

93.6

50

111.2

50

116.7

50

170.7

71

180.2

71

V S

∗ The LVQ60 is available only with “V”. ∗ Drawings show the LVQ0-S.

(Max. S)

(mm)

Model

LVW LQ1

H G L

A

J

Model

(F)

Dimensions

Sensor (vent) port

B

A

681

Series

LVQ

Fittings and Special Tools Fittings How to Change Tubing Sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. Parts Composition Component parts

Connection tubing O.D. Body class

Metric size 4

6

8

10

12

19

25

1/8

3/16

1/4

3/8

1/2

3/4

1

2

Collar (Insert assembly)

Nut

Insert

Basic size

Yes

Yes

No

Reducer type

Yes

Yes

Yes

Inch size

3

Caution

4

1. Connect tubing by special tools.

5

For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1). (The pamphlet can be downloaded from the SMC home page.)

6

Changing the tubing size Example) Changing the tubing from an O.D. 1/4" to O.D. 1/8" within the body class 2.

Prepare an insert bushing and nut for 1/8" O.D. tubing (LQ-2U03) and change the tubing size. (Refer to How to Order Fitting Parts.) Insert bushing

Note) Tubing is sold separately.

LQ-2B07

Insert bushing LQ-2B03

Nut

Nut

LQ-2N07

LQ-2N03

Tubing O.D. 1/4" LQ-2U07 (Basic size)

Collar

Tubing

How to Order Fitting Parts

LQ

2 U 03

∗ U type is recommended when changing tubing sizes.

Fitting type

Tubing sizeNote)

Symbol Applicable fitting Nil LQ2 1 LQ1

LQ1, LQ2

Symbol Tubing size

Body class (fittings) Symbol

Body class Applicable fitting (fittings)

2 3 4 5 6

2 3 4 5 6

For pilot port

Parts type Symbol

LQ1 LQ2

U B N

LQ1

LQ1

LQ1

Parts type Nut & Insert bushing Insert bushing Nut

1 U 03

1

Body class Applicable fitting (fittings) 1

LQ1

Parts type Symbol

U B N

682

03 04 05 06 07 06 08 10 07 11

1/8" x 0.086"(3 x 2) 4x3 3/16" x 1/8" 6x4 1/4" x 5/32" 6x4 8x6 10 x 8 1/4" x 5/32" 3/8" x 1/4"

Body class Applicable Body class Applicable Symbol Tubing size fitting (fittings) fitting (fittings) 10 x 8 10 12 x 10 12 4 2 11 3/8" x 1/4" LQ1 13 1/2" x 3/8" LQ2 12 x 10 LQ1 12 LQ2 13 1/2" x 3/8" 5 19 3/4" x 5/8", 19 x 16 3 19 3/4" x 5/8", 19 x 16 6 LQ1 25 1" x 7/8", 25 x 22

Note) Refer to page 724 for details of the applicable tubing sizes.

Tubing sizeNote 1) Note 2)

Body class (fittings) Symbol

Tubing

Tubing O.D. 1/8" LQ-2U03 (Reducer type)

Parts type Nut & Insert bushing Insert bushing Nut

Symbol

Tubing size

Body class (fittings)

03 04

1/8" x 0.086"(3 x 2) 4x3

1

Note 1) Cannot change to tubing with different diameter. Note 2) Refer to page 724 for details of the applicable tubing sizes.

Air Operated Flare, Integral Fitting Type Hyper Fitting

Series LVQ-Z

RoHS LVC

How to Order

LVQ 2 0

LVA LVH

Z 07

LVD

Option 2 Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

Orifice dia. ø4 ø8 ø10 ø16 ø22

Pilot port type Nil

M R N

With LQ3 fitting Connection tubing size 1/8" x 0.086" (3 x 2)Note) With LQ3 fitting Connection tubing size 4 x 3Note) Rc 1/8 Threaded NPT 1/8 Threaded

Note) Refer to page 724 for details of the applicable tubing sizes.

N.C. N.O. Double acting

Note) Refer to variations in the table below for valve type combinations.

Nil

None

1 2 3 4 5

With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator

6 7 8 9 24

For high temperature Buffer material FFKM For ammonium hydroxide

High flow type LVQ6 only

P

High back pressure with flow rate adjustment High back pressure with by-pass High back pressure with flow rate adjustment & by-pass High back pressure with indicator With indicator & by-pass

Model

Orifice di ameter g O.D Metric .

Tubin

2

Body class 3 4 5 6

Note) Refer to page 724 for details of the applicable tubing sizes.

Type

Va

lve

Symbol

typ

Basic N.C.

PB

PA

N.C.

N.O. Double acting

PA

Note 1) Options in the same table cannot be combined each other. Note 2) High back pressure specifications (5 to 9) in Option 1 and high temperature specification (J) in Option 2 cannot be combined. Note) Refer to variations in the table below for valve type and option 1 combinations. Options in the same table can not be combined each other.

LVQ20

LVQ30

LVQ40

LVQ50

LVQ60

ø4

ø8

ø10

ø16

ø22

6

10

12

19

25

1/4

3/8

1/2

3/4

1

N.C.

AB

acting

With flow rate adjustment

PA B

N.C.

A

N.C.

With by-pass

Double acting

N.C.

With flow rate adjustment & by-pass

PA

PA

N.C.

A Double PB N.C. Double acting acting B

A B

PA B

A

N.C.

N.C.

With indicator

PA B

A

N.C.

N.C.

High back pressure

PA B

A

N.C.

N.C.

With indicator & by-pass

PA B

A

LVQ LVP LVW LQ1 LQ3 LVN LQHB TL TIL TLM TILM TD TID TH TIH

A N.O. PB N.O. Double acting Double

AB

B

e

Inch

9 24

None

Variations

Applicable tubing sizeNote) Connection tubing size Metric size 3x2 03 4x3 04 6x4 06 8x6 08 10 x 8 10 12 x 10 12 19 x 16 19 25 x 22 25 Inch size 03 1/8" x 0.086" 1/4" x 5/32" 07 3/8" x 1/4" 11 1/2" x 3/8" 13 3/4" x 5/8" 19 1" x 7/8" 25

2

Option

J K N

High back pressure (0.42 MPa)

LQ3 integral fitting

Symbol

1

Applicable option 3 4 5 6 7 8

Nil

Option 1

Valve type 0 1 2

Symbol

N.C.

N.C.

683

Series

LVQ-Z Standard Specifications Model

Tubing

O.D.Note 1)

LVQ20

LVQ30

LVQ40

LVQ50

LVQ60

6

10

12

19

25

1/4

3/8

1/2

3/4

1

ø4

ø8

ø10

ø16

ø22

8.4

31.2

45.6

120

192 (228) Note 2)

0.35

1.3

1.9

5

8 (9.5) Note 2)

Metric Inch

Orifice diameter Av x 10–6 m2 Flow characteristics Cv Withstand pressure (MPa)

1

Operating pressure Standard High temperature

–98 kPa to 0.5 MPa

Standard Back pressure High back pressure (MPa) High temperature

0.3 or less

–98 kPa to 0.4 MPa

–98 kPa to 0.3 MPa 0.2 or less 0.42 or less 0.2 or less

0.3 or less

Valve leakage (cm3/min)

0 (With water pressure)

Pilot air pressure (MPa)

0.3 to 0.5 (High back pressure: 0.45 to 0.55) 1/8" (ø3), Rc 1/8, NPT 1/8

Pilot port size Standard Fluid temperature (°C) High temperature

0 to 100 0 to 170 0 to 60

Ambient temperature (°C) 0.08

Weight (kg)

0.18

0.22

0.72

0.87

Note 1) Refer to page 724 for details of the applicable tubing sizes. Note 2) ( ): High flow type

Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

Piping

Caution 1. Connect tubing by special tools. For information on tubing fittings and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting/Flare Type Series LQ3 Fitting Procedure” (M-E06-4). (The pamphlet can be downloaded from the SMC home page.)

2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping

684

Body class

Torque (N·m)

2 3 4 5 6

1.6 to 1.8 3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0

Air Operated Flare, Integral Fitting Type

Series

LVQ-Z

Construction Basic N.C.

N.O.

Double acting PB

PB

LVC LVA LVH

q

q

q

LVD PA

PA

e

e B B

w

r

A

B

LVP

e

A

B A

LVQ LVW

A

B

LQ1

A

LQ3 LVN

With flow rate adjustment

With by-pass

LQHB

With indicator

TL TIL TLM TILM

y

TD TID

t

TH TIH PA

PA

t B

A

B

B A

B

A A

Component Parts No.

Description

1

Actuator

2

Body

3

Diaphragm

4

Nut

5

Flow rate adjuster

6

Indicator/Cover

Material

PVDF PFA PTFE PFA PVDF PP

685

Series

LVQ-Z

Dimensions

Q

Basic, High back pressure N.C. valve

øE (P)

R Rc 1/8 (NPT 1/8) Sensor (vent) port With LQ3 fitting 1/8" (ø3, ø4) Pilot port

K

F

Rc 1/8 (NPT 1/8) Pilot port

A

A

B

L

G

J

B

(H)

Pilot port Rc 1/8 (NPT 1/8) Threaded type

N

D

B

A

C

M

LVQ0-Z

Dimensions (N.C. Valve)

(mm)

Model

A

B

C

D

E

F

LVQ20-Z LVQ30-Z LVQ40-Z LVQ50-Z LVQ60-Z

25.5

46

31.5

58

33.6

56.5

12

28.5

57

34.5

69

45.4

77

16.5

28.5

57

34.5

69

45.4

82.5

22

42

84

48

96

75

127

42

84

48

96

75

136.8

686

G

H

J

K

L

M

N

P

75

Q

21.8

37

5

7

15

53.5

21

25.3

R

103

32

50

6

7

20

59.5

25

31.2

114

37.5

55.5

6

7

20

59.5

25

31.2

25

150

50.2

78.2

10

7

20

73

38.5

45

32

167

60

88

10

7

20

73

38.5

45

Air Operated Flare, Integral Fitting Type

Series

LVQ-Z

With flow rate adjustment N.C. valve

LVC Dimensions

LVA

(mm)

LVQ20-Z-1 LVQ30-Z-1 LVQ40-Z-1 LVQ50-Z-1 LVQ60-Z-1

(Max. S)

S

Model

83 113.5

LVH LVD

119 171.5

B

A

LVQ

182.5

LVP LVW

With by-pass N.C. valve

LVQ20

N

LQ1

M

LQ3 D

B

A

C

LVN LQHB

. T)

(Max

TL TIL

LVQ30, LVQ40 LVQ50, LVQ60

TLM TILM

V

TD TID TH TIH

N M V

A

(Max. T)

D

A

B

Z

C

U

B

View Z

Dimensions

(mm)

Model

A

B

C

D

M

N

T

U

LVQ20-Z-2 LVQ30-Z-2 LVQ40-Z-2 LVQ50-Z-2 LVQ60-Z-2

25.5

46

31.5

58

7

15

34.3

10.6

V 7

25.5

51

31.5

63

7

15

36.9

16.5

10

25.5

51

31.5

63

7

15

37.9

22

10

38

76

44

88

7

20

64

25

17

38

76

44

88

7

20

66

32

17

687

Series

LVQ-Z

Dimensions LVQ20

N M

D

B

A

C

With flow rate adjustment & by-pass N.C. valve

. T) (Max

V

N M

(Max. S)

LVQ30, LVQ40 LVQ50, LVQ60

(Max. T)

D

A

U

B

A

B

C

V

Z

View Z

Dimensions

(mm)

Model

A

B

C

D

M

N

S

T

U

LVQ20-Z-3 LVQ30-Z-3 LVQ40-Z-3 LVQ50-Z-3 LVQ60-Z-3

25.5

46

31.5

58

7

15

83

34.3

10.6

V 7

25.5

51

31.5

63

7

15

113.5

36.9

16.5

10

25.5

51

31.5

63

7

15

119

37.9

22

10

38

76

44

88

7

20

171.5

64

25

17

38

76

44

88

7

20

182.5

66

32

17

With indicator N.C. valve (mm)

Model

S

LVQ20-Z-4 LVQ30-Z-4 LVQ40-Z-4 LVQ50-Z-4 LVQ60-Z-4

70.5

688

88.5

S

Dimensions

94 134.5 144

B

A

Air Operated Flare, Integral Fitting Type

Series

LVQ-Z

Basic N.O. valve

Q

LVC LVA LVH Rc 1/8 (NPT 1/8) Pilot port

øE

With LQ3 fitting 1/8" (ø3, ø4)

LVD

R

Pilot port

LVQ Rc 1/8 (NPT 1/8) Sensor (vent) port

Rc 1/8 (NPT 1/8) Vent port

W

LVP LVW

Rc 1/8 (NPT 1/8) Vent port A

(F)

B

K J G L

LQ3

Pilot port Rc 1/8 (NPT 1/8) Threaded type

A

B

LQ1 LVN

(H)

LQHB TL TIL

N M

TLM TILM TD TID D

B

A

C

TH TIH

Double acting valve (P)

With LQ3 fitting 1/8" (ø3, ø4) Pilot port

R

Rc 1/8 (NPT 1/8) Pilot port

Rc 1/8 (NPT 1/8) Pilot port

With LQ3 fitting 1/8" (ø3, ø4) Pilot port

Rc 1/8 (NPT 1/8) Sensor (vent) port

B

LVQ 12 -Z

Dimensions (N.O. Valve, Double Acting Valve)

Model

A

B

B

D

E

LVQ2 -Z LVQ312-Z LVQ412-Z LVQ512-Z LVQ612-Z

25.5

46

31.5

58

33.6

89.5

28.5

57

34.5

69

45.4

107.5

16.5

103

28.5

57

34.5

69

45.4

113

22

42

84

48

96

75

153.2

42

84

48

96

75

163

1 2

A

A

B

F

G

J

75

(mm)

K

L

M

N

P

21.8

37

5

7

15

53.5

32

50

6

7

20

59.5

114

37.5

55.5

6

7

20

25

150

50.2

78.2

10

7

32

167

60

88

10

7

12

H

Q

R

W

21

25.3

64

25

31.2

82

59.5

25

31.2

20

73

38.5

45

128

20

73

38.5

45

137.5

87.5

689

Series

LVQ-Z

Dimensions LVQ2 12

N M

D

B

A

C

With by-pass Double acting valve

(Max . T)

LVQ3 12 , LVQ4 12 LVQ5 12 , LVQ6 12

V

N M V

A

D

B A

C

U

B

(Max. T)

Z

View Z

Dimensions (N.O Valve, Double Acting Valve)

(mm)

Model

A

B

C

D

M

N

T

U

LVQ2 -Z-2 LVQ3 12 -Z-2 LVQ4 12 -Z-2 LVQ5 12 -Z-2 LVQ6 12 -Z-2

25.5

46

31.5

58

7

15

34.3

10.6

7

25.5

51

31.5

63

7

15

36.9

16.5

10

25.5

51

31.5

63

7

15

37.9

22

10

38

76

44

88

7

20

64

25

17

38

76

44

88

7

20

66

32

17

1 2

690

V

Air Operated Flare, Integral Fitting Type Space Saving/Space Saving Connection

Series LVQS-Z

RoHS LVC

How to Order

LVA LVH

LVQ 2 0 S Z 07 Orifice dia. ø4 ø8 ø10 ø16 ø22

N.C. N.O. Double acting

Body type

LQ3 integral fitting Applicable fitting size Fitting size

07 11 13 19 25

2 3 4 5 6

2

9 24

Option None

Nil

J K N

For high temperature

With LQ3 fitting Connection tubing size 1/8" x 0.086" (3 x 2)Note) With LQ3 fitting Connection tubing size 4 x 3Note) Rc 1/8 Threaded NPT 1/8 Threaded

M R N

Nil

None

1 2 3 4 5

With flow rate adjustment

P

Buffer material FFKM For ammonium hydroxide

High flow type LVQ6 only

Note 1) Options in the same table cannot be combined each other. High back pressure with flow rate adjustment Note 2) High back pressure specifications (5 to 9) High back pressure with by-pass in Option 1 and high temperature specification (J) in Option 2 cannot be combined. High back pressure with flow rate adjustment & by-pass Note) Refer to variations in the table below High back pressure with indicator for valve type and option 1 combinaWith indicator & by-pass tions. Options in the same table can not be combined each other.

2

With flow rate adjustment & by-pass With indicator High back pressure (0.42 MPa)

Variations

Model LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S Orifice di ameter Conne ø4 ø8 ø10 ø16 ø22 ction fi tting s Valv ize e ty Symbol 2 3 4 5 6 pe

Type Basic

N.C.

PA

Body class 3 4 5 6

Note) Refer to page 692 for How to Order applicable fittings. Select a tube with the same size as the valve side fitting.

6 7 8 9 24

With by-pass

Space saving connection

Symbol

1

Nil

Option 1

Note) Refer to variations in the table below for valve type combinations.

S

Symbol

Applicable option 3 4 5 6 7 8

Pilot port type

Note) Refer to page 724 for details of the applicable tubing sizes.

Valve type 0 1 2

LVD

Option 2

Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

B

With by-pass

PA

PA A B A N.C. N.C. N.C.

B

Double acting

PA B

N.C.

With flow rate adjustment & by-pass

AB

acting

With flow rate adjustment

PA

N.C.

A B

A Double PB N.C. Double acting acting PA B

A

N.C.

N.C.

With indicator

PA B

A

N.C.

N.C.

High back pressure

PA B

A

N.C.

N.C.

With indicator & by-pass

PA B

A

LVP LVW LQ1 LQ3 LVN LQHB TL TIL TLM TILM TD TID TH TIH

A N.O. PB N.O. Double acting Double

AB

N.C.

N.O. Double acting

PA

PB

N.C.

LVQ

N.C.

N.C.

691

Series

LVQS-Z How to Order Space Saving Fittings

LQ3 E

SN

6A

Packaging Symbol

Nil 1

Fitting type E Union elbow

Packaging Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5

One of the nuts is not attached.

T Union tee

Applicable tubing sizeNote 1) Note 2) Size Symbol

P Panel mount union

2 3 3 4 5 6

U Union

1 1 2 1 1 1

Applicable tubing size (mm) 6x4 10 x 8 8x6 12 x 10 19 x 16 25 x 22

Size Symbol Applicable tubing size (inch) 1/4" x 5/32" 2 A 3/8" x 1/4" 3 A 1/2" x 3/8" 4 A 3/4" x 5/8" 5 A 1" x 7/8" 6 A

Note 1) Select the same size as the fitting on the valve. Note 2) Refer to page 724 for details of the applicable tubing sizes.

Piping Example

LQ3T3A-SN (Union tee)

LVQ30S-Z11R

Ordering Example

Applicable tubing size 3/8" x 1/4"

LQ3E3A-SN (Union elbow) Applicable tubing size 3/8" x 1/4"

692

LVQ30S-Z11R LQ3T3A-SN (Union tee) LQ3E3A-SN (Union elbow)

1 1 1

Note) For shipment, the valve and fittings are individually packaged and dispatched together in 1 box.

Air Operated Flare, Integral Fitting Type

Series

LVQS-Z

Standard Specifications LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S

Model

Connection fitting size

2

3

4

5

6

Orifice diameter

ø4

ø8

ø10

ø16

ø22

Av x 10–6 m2 Flow characteristics Cv

8.4

31.2

45.6

120

192 (228) Note 1)

0.35

1.3

1.9

5

8 (9.5) Note 1)

Withstand pressure (MPa) Operating pressure

Standard

1 –98 kPa to 0.5 MPa

High temperature

–98 kPa to 0.4 MPa

0.3 or less

Back pressure High back pressure (MPa) High temperature

0.2 or less 0.2 or less

Valve leakage (cm3/min)

0 (With water pressure)

Pilot air pressure (MPa)

0.3 to 0.5 (High back pressure: 0.45 to 0.55)

Pilot port sizeNote 2)

LVP LVW

1/8" (ø3), ø4, Rc 1/8, NPT 1/8

Standard Fluid temperature (°C) High temperature

0 to 100

Ambient temperature (°C)

0 to 60

Weight (kg)

LQ1 LQ3

0 to 170 0.085

0.175

0.223

0.725

0.835

Note 1) ( ): High flow type Note 2) Refer to page 724 for details of the applicable tubing sizes.

TL TIL

Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

Piping

Caution 1. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Torque (N·m)

2 3 4 5 6

1.6 to 1.8

LVN LQHB

Specific Product Precautions

Body class

LVH LVQ

0.42 or less 0.3 or less

LVA LVD

–98 kPa to 0.3 MPa

Standard

LVC

3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0

693

TLM TILM TD TID TH TIH

Series

LVQS-Z

Construction Basic N.C.

N.O.

Double acting PB

PB

q

q

q

PA

A

wert

With flow rate adjustment

B

e

With by-pass

A

B

B

A

1/4·6

1/4·6

1/4·6

B

A

B

1/4·6

PA

e

A

With indicator

y

u

PA

PA

1/4·6

1/4·6

1/4·6

A

B

A

1/4·6

t B

1/4

B

A

Component Parts No.

Description

Material

1

Actuator

2

Body

3

Diaphragm

4

Plug

PP

5

Nut

PFA

6

Flow rate adjuster

7

Indicator/Cover

694

PVDF PFA PTFE

PVDF PP

B

A

Air Operated Flare, Integral Fitting Type

Series

LVQS-Z

Dimensions Basic, High back pressure N.C. valve

LVC 1/4·6

LVA Q

LVH LVD LVQ LVP

Rc 1/8 (NPT 1/8) Sensor (vent) port

øE

(P)

LVW

R

LQ1 With LQ3 fitting 1/8" (ø3, ø4) Pilot port

Rc 1/8 (NPT 1/8) Pilot port

LQ3

F

LVN TL TIL

L

G

J

A

1/4·6

1/4·6

K

LQHB B

1/4·6

1/4·6

A

B

(H)

TLM TILM

Pilot port Rc 1/8 (NPT 1/8) Threaded type

TD TID TH TIH

N

LVQ0S-Z

D

1/4·6

1/4·6

B

A

C

M

Dimensions (N.C. Valve)

(mm)

Model

A

B

C

D

E

F

LVQ20S-Z LVQ30S-Z LVQ40S-Z LVQ50S-Z LVQ60S-Z

25.5

46

31.5

58

33.6

56.5

28.5

57

34.5

69

45.4

28.5

57

34.5

69

45.4

42

84

48

96

75

42

84

48

96

75

G

H

J

K

L

M

N

P

12

105

77

16.5

82.5

22

127 136.8

Q

21.8

37

5

7

15

53.5

21

25.3

R

137

32

50

6

7

20

59.5

25

31.2

151

37.5

55.5

6

7

20

59.5

25

31.2

25

202

50.2

78.2

10

7

20

73

38.5

45

32

236

60

88

10

7

20

73

38.5

45

695

Series

LVQS-Z

Dimensions With flow rate adjustment, High back pressure with flow rate adjustment N.C. valve

Dimensions

(mm)

LVQ20S-Z-1 LVQ30S-Z-1 LVQ40S-Z-1 LVQ50S-Z-1 LVQ60S-Z-1

(Max. S)

S

Model

83 113.5 119

A

1/4·6

B

1/4·6

171.5 182.5

With by-pass, High back pressure with by-pass N.C. valve

N

LVQ20S

D

1/4·6

1/4·6

1/4·6

B

A

C

M

. T)

(Max

A

LVQ30S, LVQ40S LVQ50S, LVQ60S

U

1/4·6

1/4·6

B

1/4

V

N M V

View Z

Dimensions

(mm)

Model

A

B

C

D

M

N

T

U

LVQ20S-Z-2 LVQ30S-Z-2 LVQ40S-Z-2 LVQ50S-Z-2 LVQ60S-Z-2

25.5

46

31.5

58

7

15

34.3

10.6

7

25.5

51

31.5

63

7

15

36.9

16.5

10

25.5

51

31.5

63

7

15

37.9

22

10

38

76

44

88

7

20

64

25

17

38

76

44

88

7

20

66

32

17

696

V

D

3/8

(Max. T)

3/8

B

A

C

Z

Air Operated Flare, Integral Fitting Type

With flow rate adjustment & by-pass, High back pressure with flow rate adjustment & by-pass N.C. valve

Series

LVQS-Z

N M

LVC LVH

D

1/4·6

A 1/4·6

1/4·6

B

LVA

C

LVQ20S

LVD . T) (Max

LVQ

V

LVP LVW LVQ30S, LVQ40S LVQ50S, LVQ60S

LQ1 LQ3

N

LVN

M

LQHB

A

3/8

D

C

TL TIL

U

(Max. T)

1/4·6

1/4·6

B

3/8

B

A

(Max. S)

V

1/4

TD TID

Z

TH TIH

View Z

Dimensions

(mm)

Model

A

B

C

D

M

N

S

T

U

LVQ20S-Z-3 LVQ30S-Z-3 LVQ40S-Z-3 LVQ50S-Z-3 LVQ60S-Z-3

25.5

46

31.5

58

7

15

83

34.3

10.6

7

25.5

51

31.5

63

7

15

113.5

36.9

16.5

10

25.5

51

31.5

63

7

15

119

37.9

22

10

38

76

44

88

7

20

171.5

64

25

17

38

76

44

88

7

20

182.5

66

32

17

V

With indicator, High back pressure with indicator N.C. valve (mm)

Model

S

LVQ20S-Z-4 LVQ30S-Z-4 LVQ40S-Z-4 LVQ50S-Z-4 LVQ60S-Z-4

70.5 88.5

S

94 1/4·6

134.5

B

A

1/4·6

Dimensions

TLM TILM

144

697

LVQS-Z

Series

Dimensions Basic N.O. valve

Q

1/4·6

1/4·6

With LQ3 fitting 1/8" (ø3, ø4) Pilot port

øE

R

Rc 1/8 (NPT 1/8) Pilot port

Rc 1/8 (NPT 1/8) Sensor (vent) port Rc 1/8 (NPT 1/8) Vent port

K

W

(F)

Rc 1/8 (NPT 1/8) Vent port

G

1/4·6

A

1/4·6

B

L

J

A

1/4·6

1/4·6

B

(H) N

D

1/4·6

1/4·6

B

A

C

M

Double acting valve With LQ3 fitting 1/8" (ø3, ø4) Pilot port

With LQ3 fitting 1/8" (ø3, ø4)

(P)

Pilot port

Rc 1/8 (NPT 1/8) Pilot port

R

Rc 1/8 (NPT 1/8) Vent port Rc 1/8 (NPT 1/8)

1/4·6

A

A

B

Dimensions (N.O. Valve, Double Acting Valve)

Model

A

B

C

D

E

LVQ212 S-Z LVQ312 S-Z LVQ412 S-Z LVQ512 S-Z LVQ612 S-Z

25.5

46

31.5

58

33.6

89.5

28.5

57

34.5

69

45.4

107.5

28.5

57

34.5

69

45.4

42

84

48

96

42

84

48

96

698

1/4·6

1/4·6

1 LVQ2S-Z

B

1/4·6

Sensor (vent) port

F

G

H

J

12

105

16.5

137

113

22

75

153.2

75

163

(mm)

K

L

M

N

P

21.8

37

5

7

15

53.5

32

50

6

7

20

59.5

151

37.5

55.5

6

7

20

25

202

50.2

78.2

10

7

32

236

60

88

10

7

Q

R

W

21

25.3

64

25

31.2

82

59.5

25

31.2

20

73

38.5

45

128

20

73

38.5

45

137.5

87.5

Air Operated Flare, Integral Fitting Type

With by-pass Double acting valve

Series

LVQS-Z

LVQ2 12 S N

LVC

M

LVA C 1/4·6

D

A 1/4·6

1/4·6

B

LVH LVD

(Max

LVQ

. T)

LVP

V

LVW LQ1 LQ3

LVQ3 12 S, LVQ4 12 S LVQ5 12 S, LVQ6 12 S

LVN

N M

LQHB

V

TL TIL C D

3/8

A B (Max. T)

U

1/4·6

1/4·6

1/4

3/8

A

B

TLM TILM

Z

TH TIH View Z

Dimensions (N.O Valve, Double Acting Valve)

(mm)

Model

A

B

C

D

M

N

T

U

LVQ221 -S-Z-2 LVQ321 -S-Z-2 LVQ412 -S-Z-2 LVQ512 -S-Z-2 LVQ612 -S-Z-2

25.5

46

31.5

58

7

15

34.3

10.6

7

25.5

51

31.5

63

7

15

36.9

16.5

10

25.5

51

31.5

63

7

15

37.9

22

10

38

76

44

88

7

20

64

25

17

38

76

44

88

7

20

66

32

17

TD TID

V

699

Manually Operated Flare, Integral Fitting Type Hyper Fitting

Series LVQH-Z

RoHS

How to Order

LVQH 2 0

Z 07

1 Option

Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

Symbol Nil

Orifice dia. ø4 ø8 ø10 ø16 ø22

K N

Option None Buffer material FFKM For ammonium hydroxide

Note) Options cannot be combined each other.

LQ3 integral fitting

Handle operation 1 4

Applicable tubing size Connection Symbol tubing O.D. Metric size ø3 03 ø4 04 ø6 06 08 ø8 10 ø10 12 ø12 19 ø19 25 ø25 Inch size 03 1/8 07 1/4 11 3/8 13 1/2 19 3/4 25 1

2

Body class 3 4 5 6

90° turn type Multi-turn type (With indicator)

Vent port type Nil

R

Threaded NPT 1/8 Threaded Rc1 /8

Variations Model LVQH20 LVQH30 LVQH40 LVQH50 LVQH60 Orifice di ameter ø4 ø8 ø10 ø16 ø22 g O.D Metric . 6 10 12 19 25 Inch Symbol 1/4 3/8 1/2 3/4 1

Tubin Type

90° turn type B

A

B

A

Multi-turn type

700

Manually Operated Flare, Integral Fitting Type

Series

LVQH-Z

Standard Specifications LVQH20 LVQH30 LVQH40 LVQH50 LVQH60

Model

Metric

Tubing O.D.

Inch

Orifice diameter –6

Av x 10 m2 Flow characteristics Cv

6

10

12

19

1/4

3/8

1/2

3/4

1

ø4

ø8

ø10

ø16

ø22

8.4

31.2

45.6

120

192

0.35

1.3

1.9

5

8

Withstand pressure (MPa) Fluid pressure

–98 kPa to 0.5 MPa

–98 kPa to 0.4 MPa

0.3 or less

0.2 or less

Valve leakage (cm3/min)

0 to 100

Ambient temperature (°C)

0 to 60

LVA LVD LVQ

0 (With water pressure)

Fluid temperature (°C)

LVC LVH

1

Back pressure (MPa)

Weight (kg)

25

LVP

LVQH0-1

0.12

0.27

0.32

1.14

1.20

LVQH0-4

0.11

0.25

0.23

0.72

0.82

LVW LQ1 LQ3

Specific Product Precautions

LVN

Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

LQHB

Piping

TLM TILM

Caution

TL TIL

TD TID

1. Connect tubing by special tools.

TH

For information on tubing fittings and special tools, please see the pamphlet “High TIH Purity Fluoropolymer Fittings Hyper Fitting Flare Type Series LQ3 Fitting Procedure” (M-E06-4). (The pamphlet can be downloaded from the SMC home page.)

2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Body class

Torque (N·m)

2 3 4 5 6

1.6 to 1.8 3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0

701

Series

LVQH-Z

Construction 90° turn type

t

q

e

A

B

w

r

Multi-turn type (With indicator)

y

B

B

Component Parts No.

Description

1

Actuator

2

Body

3

Diaphragm

4

Nut

5

Handle

6

Indicator/Cover

702

Material

PVDF PFA PTFE PFA PVDF PP

t

A

A

Manually Operated Flare, Integral Fitting Type

Series

LVQH-Z

Dimensions 90° turn type

Locking (Valve closed)

°

90

LVC Q

LVA

Non-locking (Valve open)

LVH LVD

Y

LVQ Rc 1/8 (NPT 1/8) Sensor (vent) port

ø7 F

LVW K

LQ1

(mm)

Model

A

B

C

D

F

LVQH20-Z-1 LVQH30-Z-1 LVQH40-Z-1 LVQH50-Z-1 LVQH60-Z-1

25.5

46

31.5

58

79

28.5

57

34.5

69

103

16.5

103

28.5

57

34.5

69

108

22

114

42

84

48

96

165

25

150

42

84

48

96

175

32

167

K

L

M

N

37

5

7

15

21

55

32

50

6

7

20

25

80

37.5

55.5

6

7

20

25

80

50.2

78.2

10

7

20

38.5

110

60

88

10

7

20

38.5

110

TL TIL TLM TILM

Y

TD TID

C

J 21.8

LQHB N M

TH TIH

D

Model

LVQH20-Z-1 LVQH30-Z-1 LVQH40-Z-1 LVQH50-Z-1 LVQH60-Z-1

LVN

(H)

75

A

Q

H

B

G 12

LQ3

A

B

G L

J

Dimensions

Multi-turn type (With indicator) Valve closed direction Valve open direction

(mm)

Model

S

Y

LVQH20-Z-4 LVQH30-Z-4 LVQH40-Z-4 LVQH50-Z-4 LVQH60-Z-4

93.6

50

111.2

50

116.7

50

170.7

71

180.2

71

(Max. S)

Y

Dimensions

LVP

B

A

703

Manually Operated Flare, Integral Fitting Type Space Saving/Space Saving Connection

Series LVQHS-Z

RoHS

How to Order

LVQH 2 0 S Z 07

1 Option

Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

Symbol Nil

Orifice dia. ø4 ø8 ø10 ø16 ø22

K N

Note) Options cannot be combined each other.

Body type S

Option None Buffer material FFKM For ammonium hydroxide

Handle operation

Space saving connection

1 4

90° turn type Multi-turn type (With indicator)

LQ3 integral fitting Vent port type Nil

R

Threaded Threaded

NPT 1/8 Rc 1/8

Applicable fitting size Symbol

Fitting size

2

Body class 3 4 5 6

Inch size

07 11 13 19 25

2 3 4 5 6

Note) Refer to page 705 for How to Order applicable fittings. Select the same size as fitting on the valve.

Variations

Type

Model Orific Conne e diameter ction fi tting s Symb ize ol

90° turn type B

A

B

A

Multi-turn type

704

LVQ20S

LVQ30S

LVQ40S

LVQ50S

LVQ60S

ø4

ø8

ø10

ø16

ø22

2

3

4

5

6

Manually Operated Flare, Integral Fitting Type

Series

LVQHS-Z

How to Order Space Saving Fittings

LQ3 E

SN

6A

Packaging Symbol

Nil 1

Fitting type E Union elbow

LVC

Packaging Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5

LVA LVH

One of the nuts is not attached.

T

LVD

Union tee

Applicable tubing sizeNote 1) Note 2) Size Symbol

P Panel mount union

U Union

2 3 3 4 5 6

1 1 2 1 1 1

Applicable tubing size (mm) 6x4 10 x 8 8x6 12 x 10 19 x 16 25 x 22

Size Symbol Applicable tubing size (inch) 1/4" x 5/32" 2 A 3/8" x 1/4" 3 A 1/2" x 3/8" 4 A 3/4" x 5/8" 5 A 1" x 7/8" 6 A

LVQ LVP LVW LQ1

Note 1) Select the same size as the fitting on the valve. Note 2) Refer to page 724 for details of the applicable tubing sizes.

LQ3 LVN LQHB TL TIL TLM TILM TD TID TH TIH

Piping Example LVQH30S-Z11R-1 LQ3T3A-SN (Union tee)

Applicable tubing size 3/8" x 1/4"

LQ3E3A-SN (Union elbow) Applicable tubing size 3/8" x 1/4"

Ordering Example

LVQH30S-Z11R-1 LQ3T3A-SN (Union tee) LQ3E3A-SN (Union elbow)

1 1 1

Note) For shipment, the valve and fittings are individually packaged and dispatched together in 1 box.

705

Series

LVQHS-Z Standard Specifications LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S

Model

Connection fitting size Orifice diameter Av x 10–6 m2 Flow characteristics Cv

2

3

4

5

6

ø4

ø8

ø10

ø16

ø22

8.4

31.2

45.6

120

192

0.35

1.3

1.9

5

8

Withstand pressure (MPa) Fluid pressure

1 –98 kPa to 0.5 MPa

–98 kPa to 0.4 MPa

0.3 or less

0.2 or less

Back pressure (MPa) Valve leakage (cm3/min)

0 (With water pressure)

Fluid temperature (°C)

0 to 100

Ambient temperature (°C) Weight (kg)

0 to 60

LVQH0S-1

0.14

0.28

0.34

1.14

1.15

LVQH0S-4

0.13

0.21

0.25

0.72

0.86

Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

Piping

Caution 1. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping

706

Body class

Torque (N·m)

2 3 4 5 6

1.6 to 1.8 3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0

Manually Operated Flare, Integral Fitting Type

Series

LVQHS-Z

Construction 90° turn type

u

LVC LVA

q

LVH LVD LVQ LVP LVW LQ1

A

B

w

e

r

t

LQ3 LVN LQHB

Multi-turn type (With indicator)

y

TL TIL

u

TLM TILM TD TID

1/4·6

B

B

1/4·6

TH TIH

A

A

Component Parts No.

Description

Material

1

Actuator

2

Body

3

Diaphragm

4

Nut

PFA

5

Plug

PP

6

Indicator/Cover

7

Handle

PVDF PFA PTFE

PP PVDF

707

Series

LVQHS-Z

Dimensions 90° turn type

Locking (Valve closed)

° 90

Q

1/4·6

Non-locking (Valve open)

Y

Rc 1/8 (NPT 1/8) Sensor (vent) port

D

F

58

79

28.5

57

34.5

69

28.5

57

34.5

42

84

48

42

84

G

H

12

105

103

16.5

137

69

108

22

151

96

165

25

202

48

96

175

32

236

J

K

L

M

N

21.8

37

5

7

15

21

Q

55

32

50

6

7

20

25

80

37.5

55.5

6

7

20

25

50.2

78.2

10

7

20

38.5

110

60

88

10

7

20

38.5

110

N M

Y

1/4·6

Model

LVQH20S-Z-1 LVQH30S-Z-1 LVQH40S-Z-1 LVQH50S-Z-1 LVQH60S-Z-1

(H)

C

C 31.5

1/4·6

B 46

A

A

A 25.5

B

Model

LVQH20S-Z-1 LVQH30S-Z-1 LVQH40S-Z-1 LVQH50S-Z-1 LVQH60S-Z-1

B

80

Multi-turn type (With indicator)

Valve closed direction

1/4·6

1/4·6

Valve open direction

(mm)

S

Y

LVQH20S-Z-4 LVQH30S-Z-4 LVQH40S-Z-4 LVQH50S-Z-4 LVQH60S-Z-4

93.6

50

111.2

50

116.7

50

170.7

71

180.2

71

708

1/4·6

Model

B

A

1/4·6

Dimensions

(Max. S)

Y

D

(mm)

G L

J

1/4·6

Dimensions

1/4·6

(F)

ø7

Air Operated Tube Extension Integral Fitting Type

Series LVQ-T

RoHS LVC

How to Order

LVQ 2 0

LVA LVH

T 07

Orifice dia. ø4 ø8 ø10 ø16 ø22

Valve type 0 1 2

N.C. N.O. Double acting

Symbol Nil

Pilot port type Nil

M R N

With LQ1 fitting Connection tubing O.D. 1/8" (ø3) With LQ1 fitting Connection tubing O.D. ø4 Rc 1/8 Threaded NPT 1/8 Threaded

Nil

None

1 2 3 4

With flow rate adjustment

5 6 7 8 9

With by-pass With flow rate adjustment & by-pass With indicator

P

High back pressure (0.42 MPa) High back pressure with flow rate adjustment High back pressure with by-pass High back pressure with flow rate adjustment & by-pass High back pressure with indicator

Applicable tubing size Body class 2 3 4 5 6

ø6 ø10 ø12 ø19 ø25 1/4 3/8 1/2 3/4 1

Note) Refer to variations in the table below for valve type and option 1 combinations. Options in the same table can not be combined each other.

Model

LVQ20

LVQ30

LVQ40

LVQ50

LVQ60

ameter

ø4

ø8

ø10

ø16

ø22

Metric

6

10

12

19

25

1/4

3/8

1/2

3/4

1

Orifice di

g O.D

Type

. Va

lve

Symbol

typ

Basic N.C.

PA B

PA

e

Inch

N.C.

A N.O. PB N.O. Double acting Double AB

acting

With flow rate adjustment

PA

PA A B A N.C. N.C. N.C.

B

With by-pass

Double acting

With flow rate adjustment & by-pass

PA

PA

N.C.

A Double PB N.C. Double acting acting B

N.C.

PB

AB

N.C.

N.O. Double acting

A B

PA B

A

N.C.

N.C.

With indicator

PA B

A

N.C.

N.C.

High back pressure

LVP LVW LQ1 LQ3 LVN LQHB TL TIL TLM TILM

Tubin

Inch size

07 11 13 19 25

Note 1) Options in the same table cannot be combined each other. Note 2) High back pressure specifications (5 to 9) in Option 1 and high temperature specification (J) in Option 2 cannot be combined.

Variations

Metric size

06 10 12 19 25

LVQ

Option

9

None For high temperature Buffer material FFKM For ammonium hydroxide High flow type LVQ6 only

J K N

Tube extension fitting

Symbol

1

Applicable option 2 3 4 5 6 7 8

Option 1

Note) Refer to variations in the table below for valve type combinations.

Connection tubing O.D.

LVD

Option 2

Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

PA B

A

N.C.

N.C.

709

TD TID TH TIH

Series

LVQ-T Standard Specifications Model

LVQ20

LVQ30

LVQ40

LVQ50

LVQ60

Metric Inch Orifice diameter Av x 10–6 m2 Flow characteristics Cv Withstand pressure (MPa) Operating pressure Standard High temperature Standard Back pressure High back pressure (MPa) High temperature Valve leakage (cm3/min) Pilot air pressure (MPa) Pilot port size Standard Fluid temperature (°C) High temperature Ambient temperature (°C) Weight (kg)

6

10

12

19

25

1/4

3/8

1/2

3/4

1

ø4

ø8

ø10

ø16

ø22

8.4

31.2

45.6

120

0.35

1.3

1.9 1

5

192 (228) Note) 8 (9.5) Note)

Tubing O.D.

–98 kPa to 0.5 MPa –98 kPa to 0.4 MPa –98 kPa to 0.3 MPa 0.3 or less

0.2 or less 0.42 or less

0.3 or less

0.2 or less

0 (With water pressure) 0.3 to 0.5 (High back pressure: 0.45 to 0.55) 1/8" (ø3), ø4, Rc 1/8, NPT 1/8 0 to 100 0 to 170 0 to 60 0.08

0.15

0.16

0.60

0.70

Note) ( ): High flow type

Construction Basic N.C.

PB

PB

N.O.

Double acting

q

q

q

PA

PA

B

B

A

A

B

e w

B

A

A

e

e

With flow rate adjustment

A

B

With by-pass

With indicator

t

r

PA

PA

r B B

B

A A

Component Parts No.

Description

Material

1

Actuator

2

Body

3

Diaphragm

PTFE

4

Flow rate adjuster

PVDF

5

Indicator/Cover

710

PVDF PFA

PP

B

A A

Air Operated Tube Extension Integral Fitting Type

Series

LVQ-T

Dimensions Basic, High back pressure N.C. valve

LVC LVA Q

LVH LVD LVQ LVP øE

LVW

Rc 1/8 (NPT 1/8) Sensor (vent) port

(P)

LQ1

R

LQ3

Applicable tubing O.D. 1/8" (ø3, ø4) Pilot port

Rc 1/8 (NPT 1/8) Pilot port

LVN

F

LQHB K

TL TIL

A

TLM TILM

A

B

G

J

B

L

TD TID (H)

Pilot port Rc 1/8 (NPT 1/8) Threaded type

TH TIH

N

LVQ0-T

D

B

A

C

M

Dimensions (N.C. Valve)

(mm)

Model

A

B

C

D

E

F

G

H

J

K

L

M

N

P

LVQ20-T LVQ30-T LVQ40-T LVQ50-T LVQ60-T

25.5

46

31.5

58

33.6

56.5

12

111.5

28.5

57

34.5

69

45.4

77

16.5

28.5

57

34.5

69

45.4

82.5

22

42

84

48

96

75

127

42

84

48

96

75

137

Q

21.8

37

5

7

15

31.3

21

25.3

R

136

32

50

6

7

20

37.2

25

31.2

137

37.5

55.5

6

7

20

37.2

25

31.2

25

180

50.2

78.2

10

7

20

50.8

38.5

45

32

189

60

88

10

7

20

50.8

38.5

45

711

LVQ-T

Series

Dimensions With flow rate adjustment, High back pressure with flow rate adjustment N.C. valve

Dimensions

(Max. S)

(mm)

S

Model

LVQ20-T-1 LVQ30-T-1 LVQ40-T-1 LVQ50-T-1 LVQ60-T-1

83 113.5 119 171.5

B

A

182.5

N

LVQ20

M

B

D

A

C

With by-pass, High back pressure with by-pass N.C. valve

. T)

(Max

V

1/8

LVQ30, LVQ40 LVQ50, LVQ60

A

U

B

N M V

(Max. T)

D

B

A

C

Z

View Z

Dimensions Model

LVQ20-T-2 LVQ30-T-2 LVQ40-T-2 LVQ50-T-2 LVQ60-T-2

712

(mm)

A

B

C

D

M

N

T

U

25.5

46

31.5

58

7

15

34.3

10.6

V 7

25.5

51

31.5

63

7

15

36.9

16.5

10

25.5

51

31.5

63

7

15

37.9

22

10

38

76

44

88

7

20

64

25

17

38

76

44

88

7

20

66

32

17

Air Operated Tube Extension Integral Fitting Type

LVQ-T

N M

LVC LVA

C

LVQ20

LVH

B

D

A

With flow rate adjustment & by-pass, High back pressure with flow rate adjustment & by-pass N.C. valve

Series

LVD . T) (Max

LVQ LVP

V

LVW LQ1 LVQ30, LVQ40 LVQ50, LVQ60

LQ3

N

LVN

M

TH TIH

Z View Z

Dimensions

(mm)

Model

A

B

C

D

M

N

S

T

U

LVQ20-T-3 LVQ30-T-3 LVQ40-T-3 LVQ50-T-3 LVQ60-T-3

25.5

46

31.5

58

7

15

83

34.3

10.6

7

25.5

51

31.5

63

7

15

113.5

36.9

16.5

10

25.5

51

31.5

63

7

15

119

37.9

22

10

38

76

44

88

7

20

171.5

64

25

17

38

76

44

88

7

20

182.5

66

32

17

V

With indicator, High back pressure with indicator N.C. valve (mm)

Model

S

LVQ20-T-4 LVQ30-T-4 LVQ40-T-4 LVQ50-T-4 LVQ60-T-4

70.5

S

Dimensions

88.5 94 134.5

TLM TILM TD TID

(Max. T)

A

U

B

TL TIL D

B

1/8

LQHB C

A

(Max. S)

V

B

A

144

713

Series

LVQ-T

Dimensions

Q

Basic N.O. valve

Applicable tubing O.D. øE

1/8" (ø3), ø4 Pilot port

Rc 1/8 (NPT 1/8) Sensor (vent) port

R

Rc 1/8 (NPT 1/8) Pilot port

Rc 1/8 (NPT 1/8) Vent port

K

W

(F)

Rc 1/8 (NPT 1/8) Vent port

G

A

B

A

L

J

B

(H) N

D

B

A

C

M

Double acting valve Applicable tubing O.D.

(P)

1/8" (ø3), ø4 Pilot port

R

Applicable tubing O.D. 1/8" (ø3), ø4 Pilot port

Rc 1/8 (NPT 1/8) Pilot port

Rc 1/8 (NPT 1/8) Sensor (vent) port Rc 1/8 (NPT 1/8) Pilot port A

B

1 LVQ 2 -T

Model

LVQ212 -T LVQ312 -T LVQ412 -T LVQ512 -T LVQ612 -T

714

B

A

Dimensions (N.O. Valve, Double Acting Valve) A

B

C

D

E

F

25.5

46

31.5

58

33.6

81

28.5

57

34.5

69

45.4

99

28.5

57

34.5

69

45.4

42

84

48

96

42

84

48

96

G

(mm)

H

J

K

L

M

N

P

12

111.5

16.5

136

21.8

37

5

7

15

31.3

32

50

6

7

20

37.2

104

22

137

37.5

55.5

6

7

20

75

144.5

25

180

50.2

78.2

10

7

75

154.5

32

189

60

88

10

7

Q

R

W

21

25.3

64

25

31.2

82

37.2

25

31.2

20

50.8

38.5

45

128

20

50.8

38.5

45

137.5

87.5

Air Operated Tube Extension Integral Fitting Type

With by-pass Double acting valve

LVQ2 12

Series

LVQ-T

N M

LVC LVH

D

B

A

C

LVA

1/8

LVD (Max

LVQ

. T)

LVP

V

LVW LQ1 LVQ3 12 , LVQ4 12 LVQ5 12 , LVQ6 12

LQ3 LVN

N M

LQHB

V

U Z

(mm)

Model

A

B

C

D

M

N

T

U

LVQ2 -T-2 LVQ3 12 -T-2 LVQ4 12 -T-2 LVQ5 12 -T-2 LVQ6 12 -T-2

25.5

46

31.5

58

7

15

34.3

10.6

7

25.5

51

31.5

63

7

15

36.9

16.5

10

25.5

51

31.5

63

7

15

37.9

22

10

38

76

44

88

7

20

64

25

17

38

76

44

88

7

20

64

32

17

1 2

D View Z

Dimensions

TD TID TH TIH

(Max. T)

A

B

TLM TILM

C

A B

1/8

TL TIL

V

715

Manually Operated Tube Extension Integral Fitting Type

Series LVQH-T

RoHS

How to Order

LVQH 2 0 T 07

1 Option

Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

Symbol Nil

Orifice dia. ø4 ø8 ø10 ø16 ø22

K N

Note) Options cannot be combined each other.

Tube extension fitting

Handle operation 1 4

Applicable tubing size Symbol

Connection tubing O.D.

2

Body class 3 4 5 6

90° turn type Multi-turn type (With indicator)

Vent port type

Metric size

06 10 12 19 25

Option None Buffer material FFKM For ammonium hydroxide

Nil

ø6 ø10 ø12 ø19 ø25

Threaded Threaded

R

NPT 1/8 Rc 1/8

Inch size

07 11 13 19 25

1/4 3/8 1/2 3/4 1

Variations Tubin

g O.D

Type

Model LVQH20-T LVQH30-T LVQH40-T LVQH50-T LVQH60-T

Orifice di

.

ameter

ø4

ø8

ø10

ø16

ø22

Metric

6

10

12

19

25

1/4

3/8

1/2

3/4

1

Inch

Symbol

90° turn type B

A

B

A

Multi-turn type

716

Manually Operated Tube Extension Integral Fitting Type

Series

LVQH-T

Standard Specifications Model

LVQH20

LVQH30

LVQH40

LVQH50

LVQH60

Metric Inch Orifice diameter Av x 10–6 m2 Flow characteristics Cv Withstand pressure (MPa) Fluid pressure Back pressure (MPa) Valve leakage (cm3/min) Fluid temperature (°C) Ambient temperature (°C)

6

10

12

19

25

1/4

3/8

1/2

3/4

1

ø4

ø8

ø10

ø16

ø22

8.4

31.2

45.6

120

0.35

1.3

1.9 1

5

192 8

Tubing O.D.

LVQH0-1 LVQH0-4

Weight (kg)

–98 kPa to 0.5 MPa –98 kPa to 0.4 MPa 0.3 or less 0.2 or less 0 (With water pressure) 0 to 100 0 to 60 0.12

0.25

0.28

1.04

1.05

0.11

0.18

0.19

0.62

0.73

LVC LVA LVH LVD LVQ LVP LVW

Construction 90° turn type

LQ1

t

LQ3 LVN LQHB

q

TL TIL TLM TILM

e

B

TD TID TH TIH

A

w r y

t

Multi-turn type (With indicator)

B

B

Component Parts No.

Description

1

Actuator

2

Body

3

Diaphragm

4

Insert bushing

5

Handle

6

Indicator/Cover

A

A

Material

PVDF PFA PTFE PFA PVDF PP

717

Series

LVQH-T

Dimensions 90° turn type

Locking (Valve closed)

°

Q

90

Non-locking (Valve open)

Y

Rc 1/8 (NPT 1/8) Sensor (vent) port

(F)

ø7

B

(mm)

D

F

58

79

28.5

57

34.5

69

28.5

57

34.5

42

84

48

42

84

G

H

12

111.5

103

16.5

136

69

108

22

137

96

165

25

180

48

96

175

32

189

Model

J

K

L

M

N

LVQH20-T-1 LVQH30-T-1 LVQH40-T-1 LVQH50-T-1 LVQH60-T-1

21.8

37

5

7

15

21

Q

55

32

50

6

7

20

25

80

37.5

55.5

6

7

20

25

50.2

78.2

10

7

20

38.5

110

60

88

10

7

20

38.5

110

(H) N M

Y

C

C 31.5

D

B 46

A

A 25.5

B

Model

LVQH20-T-1 LVQH30-T-1 LVQH40-T-1 LVQH50-T-1 LVQH60-T-1

A

G L

J

Dimensions

80

Multi-turn type (With indicator)

Valve closed direction

Valve open direction

Dimensions

(mm)

Model

S

Y

LVQH20-T-4 LVQH30-T-4 LVQH40-T-4 LVQH50-T-4 LVQH60-T-4

93.6

50

111.2

50

116.7

50

170.7

71

180.2

71

718

(Max. S)

Y

B

A

Air Operated, 0.5 MPa Back Pressure Tolerant Insert Bushing, Integral Fitting Type Hyper Fitting

Series LVQH

RoHS

LVQ 2 0 H

How to Order

LVA

S 07

LVH

Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

Option 2

Orifice dia. ø4 ø8 ø10 ø16 ø22

Valve type 0 1 2

Symbol

N.C. N.O. Double acting

K N P

V S

Body class 2, 3, 4, 5, 6 2, 3, 4, 5

Applicable tubing sizeNote) Symbol

Basic size

With reducer

Note) Refer to page 724 for details of the applicable tubing sizes.

Port B (OUT) different dia. size Symbol Nil

Application Ports A & B same size

Refer to the applicable tubing table to the left.

Different diameter tubings can be selected within the same body class.

Pilot port type Nil

M R N

LQ1 integral fitting Connection tubing O.D. 1/8" (ø3) LQ1 integral fitting Connection tubing O.D. ø4 Rc 1/8 Threaded NPT 1/8 Threaded

LVP LVW LQ1 LQ3

Option 1

Note) Insert bushing is used in common.

Connection Body class tubing size 2 3 4 5 6 Metric size 03 3x2 04 4x3 06 6x4 08 8x6 10 10 x 8 12 12 x 10 19 x 16 19 25 x 22 25 Inch size 03 1/8" x 0.086" 05 3/16" x 1/8" 07 1/4" x 5/32" 11 3/8" x 1/4" 13 1/2" x 3/8" 19 3/4" x 5/8" 1" x 7/8" 25

LVD LVQ

Option None Buffer material FFKM For ammonium hydroxide High flow type LVQ6 only

Note) Options in the same table cannot be combined each other.

Fitting type Fitting type LQ1 LQ2

Applicable option 1 2 3 4 24

Nil

Note) Refer to variations in the table below for valve type combinations.

Symbol

LVC

Nil

None

1 2 3 4 24

With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator

Note) Refer to variations in the table below for valve type and option 1 combinations. Options in the same table cannot be combined each other.

With indicator & by-pass

LQHB TL TIL TLM TILM

Variations Model LVQ20H LVQ30H LVQ40H LVQ50H LVQ60H Orifice di ameter ø4 ø8 ø10 ø16 ø22 g O.D . Metric 6 10 12 19 25 Va Inch lve Symbol typ 1/4 3/8 1/2 3/4 1 e Tubin

Type Basic N.C.

PB

PA

PA

N.C.

AB AB A N.O. PB N.C. N.O. Double acting Double

B N.O. Double acting

acting

With flow rate adjustment

PA B

N.C.

A

N.C.

With by-pass

LVN

Double acting

N.C.

With flow rate adjustment & by-pass

PA

PA

N.C.

A Double PB N.C. Double acting acting B

A B

PA B

A

N.C.

N.C.

With indicator

PA B

A

N.C.

N.C.

With indicator & by-pass

PA B

A

N.C.

N.C.

719

TD TID TH TIH

Air Operated, 0.5 MPa Back Pressure Tolerant Flare, Integral Fitting Type Hyper Fitting

Series LVQH-Z

RoHS How to Order

LVQ 2 0 H Z 07 Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6

Orifice dia. ø4 ø8 ø10 ø16 ø22

0 1 2

Connection tubing size Metric size 3x2 03 4x3 04 6x4 06 8x6 08 10 x 8 10 12 x 10 12 19 x 16 19 25 x 22 25 Inch size 1/4" x 5/32" 07 3/8" x 1/4" 11 1/2" x 3/8" 13 3/4" x 5/8" 19 1" x 7/8" 25

2

Body class 3 4 5 6

Symbol

N.C. N.O. Double acting

Option None Buffer material FFKM For ammonium hydroxide High flow type LVQ6 only

K N

Note) Refer to variations in the table below for valve type combinations.

P

Note) Options in the same table cannot be combined each other.

Pilot port type Nil

M R N

With LQ3 fitting Connection tubing size 1/8" x 0.086" (3 x 2)Note) With LQ3 fitting Connection tubing size 4 x 3Note) Rc 1/8 Threaded NPT 1/8 Threaded

Note) Refer to page 724 for details of the applicable tubing sizes.

Variations Model LVQ20H Orifice di ameter ø4 g O.D . Metric 6 Va Inch lve Symbol 1/4 typ e Tubin

Type Basic N.C.

Option 1 Nil

None

1 2 3 4 24

With flow rate adjustment & by-pass

With flow rate adjustment With by-pass With indicator With indicator & by-pass

Note) Refer to variations in the table on the right for valve type and option 1 combinations. Options in the same table can not be combined each other.

PB

PA

Note) Refer to page 724 for details of the applicable tubing sizes.

N.C.

N.O. Double acting

PA

N.C.

A N.O. PB N.O. Double acting Double

AB

B

AB

acting

With flow rate adjustment

PA B

N.C.

A

N.C.

With by-pass

Double acting

N.C.

With flow rate adjustment & by-pass

PA

PA

N.C.

A Double PB N.C. Double acting acting

B

A B

PA B

A

N.C.

N.C.

With indicator

PA B

A

N.C.

N.C.

With indicator & by-pass

PA B

A

N.C.

720

Applicable option 1 2 3 4 24

Nil

Applicable tubing sizeNote) Symbol

Option 2

LQ3 integral fitting

Valve type

N.C.

LVQ30H

LVQ40H

ø8

ø10

ø16

ø22

10

12

19

25

3/8

1/2

3/4

1

LVQ50H LVQ60H

Air Operated, 0.5 MPa Back Pressure Tolerant Flare, Integral Fitting Type

Series

LVQH

Specifications LVQ20H LVQ30H LVQ40H LVQ50H LVQ60H

Model

Tubing

O.D.Note 1)

Metric Inch

Orifice diameter –6

Av x 10 m2 Flow characteristics Cv

6

10

12

19

1/4

3/8

1/2

3/4

1

ø4

ø8

ø10

ø16

ø22

8.4

31.2

45.6

120

192 (228)

0.35

1.3

1.9

5

8 (9.5)

Withstand pressure (MPa)

1

Operating pressure

–98 kPa to 0.5 MPa

Back pressure (MPa)

Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.

25

LVC

0 (With water pressure)

Pilot air pressure (MPa)

0.5 to 0.8

Pilot port size

LVQ LVP

1/8" (ø3), ø4, Rc 1/8, NPT 1/8

Fluid temperature (°C)

0 to 100

Ambient temperature (°C)

0 to 60

Weight (kg)

0.08

0.17

LVW

0.22

0.70

LQ1

0.81

LQ3

Note 1) Refer to page 724 for details of the applicable tubing sizes. Note 2) ( ): High flow type

Dimensions

LVN

Dimensions are the same as those of the standard specifications.

Piping

Applicable Different Diameter Tubings with Reducer (LVQH- VS )

Caution 1. Connect tubing by special tools. For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1) and “High Purity Fluoropolymer Fittings Hyper Fitting/Flare Type Series LQ3 Fitting Procedure” (ME06-4). (The pamphlet can be downloaded from the SMC home page.)

Metric size 4

6

8

10

12

TD TID

Inch size 19

25

1/8 3/16 1/4

3/8

1/2

3/4

1

2 3 4 6

2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Torque (N·m)

LQ1

LQ2

TL TIL

TILM

Connection tubing O.D. Body class

Note) Refer to page 682 for information on changing tubing sizes.

2 3 4 5 6

LQHB

Different diameter tubings can be selected (within the same body class) by using a nut TLM and an insert bushing (reducer). With reducer

5

Body class

LVH LVD

0.5 or less

Valve leakage (cm3/min)

LVA

LQ3

0.3 to 0.4 1.5 to 2.0 1.6 to 1.8 0.8 to 1.0 3.0 to 3.5 3.2 to 3.5 1.0 to 1.2 7.5 to 9.0 5.0 to 5.3 2.5 to 3.0 11.0 to 13.0 10.0 to 10.5 5.5 to 6.0 22.5 to 23.0 —

721

TH TIH

Series

LVQ

Applicable Fluids Material and Fluid Compatibility Check List for Air Operated Chemical Valves Chemical

Compatibility

Acetone

Note 1, 2)

Ammonium hydroxide

Note 2)

Isobutyl alcohol

Note 1, 2)

Isopropyl alcohol

Note 1, 2)

Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, 50°C or less Ethyl acetate

Note 1, 2)

Butyl acetate

Note 1, 2)

Nitric acid (except fuming nitric acid) Concentration 10% or less

Note 2)

Deionized water (pure water) Sodium hydroxide (caustic soda) Concentration 50% or less Nitrogen gas Super pure water Toluene

Note 1, 2)

Hydrofluoric acid

Note 2)

Sulfuric acid (except fuming sulfuric acid)

Note 2)

Phosphoric acid Concentration 80% or less

Table symbols

: Can be used : Can be used in certain conditions : Cannot be used

The material and fluid compatibility check list provides reference values as a guide only. Note 1) Since static electricity may be generated, implement suitable countermeasures. Note 2) Use caution as permeation may occur. The permeated fluid may effect the parts of other materials. • Compatibility is indicated for fluid temperatures of 100°C or less. • The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. • The data above is based on the information presented by the material manufacturers. • SMC is not responsible for its accuracy and any damage happened because of this data. • Use a fluid with a viscosity of 300 cp or less. Failure to do so may cause valve closing failure.

722

LVQ Air Operated Chemical Liquid Valve/Precautions 1 Series

Be sure to read this before handling.

Design / Selection

Warning

Piping

Caution

1. Confirm the specifications. Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog.

2. Fluids Operate after confirming the compatibility of the product's component materials with fluids, using the check list on page 722. Contact SMC regarding fluids other than those in the check list. Operate within the indicated fluid temperature range.

3. Maintenance space Ensure the necessary space for maintenance and inspections.

4. Fluid pressure range Keep the supplied fluid pressure within the operating pressure range specified in this catalog.

5. Ambient environment Operate within the ambient operating temperature range. After confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does not adhere to the product's exterior surfaces.

6. Liquid seals When circulating fluid Provide a relief valve in the system so that fluid does not get into the liquid seal circuit.

7. Countermeasures for static electricity Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures.

LVC

1. Preparation before piping Before piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.

Pilot port

Torque (N·m)

Rc, NPT 1/8

0.8 to 1.0

LVW

3. Metal fittings In the case of threaded pilot port, do not pipe the metal fittings which can cause damage to the thread part.

4. For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1) or “High Purity Fluoropolymer Fittings Hyper Fitting/Flare Type Series LQ3 Fitting Procedure” (M-E06-4). (The pamphlets can be downloaded from the SMC home page.)

LQ1 LQ3 LVN LQHB TL TIL TLM TILM TD TID TH TIH

Warning

Mount and operate the product after reading the manual carefully and understanding its contents. Also, keep the manual where it can be referred to as necessary.

LVD LVP

Tightening Torque for Pilot Port

1. If air leakage increases or equipment does not operate properly, stop operation. 2. Operation manual

LVH

2. Use the tightening torques shown below for LVQ the threaded pilot port.

Mounting

After mounting, perform suitable function and leak tests to confirm that the mounting is correct.

LVA

Operating Air Supply

Warning 1. Use clean air.

Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases, etc., as this may cause damage or malfunction.

723

LVQ Air Operated Chemical Liquid Valve/Precautions 2 Series

Be sure to read this before handling.

Use of Tubing

Maintenance

1. Refer to the applicable tubing sizes shown below for tubing to be used.

5. In order to obtain optimum performance from valves, perform periodic inspections to confirm that there are no leaks from valves or fittings, etc.

Caution

Warning

Applicable tubing sizes Connection tubing size

Metric sizes

Inch sizes

O.D. (mm)

Internal thickness (mm)

Standard size Tolerance Standard size Tolerance

ø3 x ø2

3.0

ø4 x ø3

4.0

ø6 x ø4

6.0

ø8 x ø6

8.0

ø10 x ø8

10.0

ø12 x ø10

12.0

ø19 x ø16

19.0

ø25 x ø22

25.0

1/8" x 0.086"

3.18

3/16" x 1/8"

4.75

1/4" x 5/32"

6.35

3/8" x 1/4"

9.53

1/2" x 3/8"

12.7

3/4" x 5/8"

19.0

1" x 7/8"

25.4

+0.2 −0.1

+0.3 −0.1

0.5

±0.06

1.0

±0.1

1.5

±0.15

Flush drainage from filters regularly.

0.5 +0.2 −0.1

+0.3 −0.1

0.8 1.2

1.6

±0.1 ±0.12 ±0.15

Operating Environment

Warning 1. Do not use in a location having an explosive atmosphere. 2. Do not use in locations where vibration or impact occurs. 3. Do not use in locations where radiated heat will be received from nearby heat sources. Maintenance

Warning 1. Maintenance should be performed in accordance with the procedures in the operation manual. Incorrect handling can cause damage or malfunction of machinery and equipment, etc.

2. Before removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system. Further, when restarting equipment after remounting or replacement, first confirm safety and then check the equipment for normal operation. 3. Perform work after removing residual chemicals and carefully replacing them with pure water or air, etc. 4. Do not disassemble the product. Products which have been disassembled cannot be guaranteed. If disassembly is necessary, contact SMC.

724

Caution 1. Removal of drainage Precautions

Warning 1. Operate within the ranges of the maximum operating pressure and back pressure.

Caution 1. Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized). 2. When operated at a very low flow rate, the product with flow rate adjustment may vibrate, etc. depending on the operating conditions. Therefore, operate only after careful examination of the flow rate, pressure and piping conditions. 3. Water hammering may occur depending on the fluid pressure conditions. In most cases, improvement is possible by adjusting the pilot pressure with a speed controller, etc., but the flow rate, pressure and piping conditions should be reviewed. 4. To adjust the flow rate with flow rate adjustment, open gradually starting from the fully closed condition. Opening is accomplished by turning the adjustment knob counterclockwise. Additionally, do not apply any unreasonable force to the adjustment handle when nearing a fully opened or closed condition. This may result in deformation of the orifice sheet surface or damage to the threaded part of the adjustment handle. The handle is in the fully closed condition when the product is shipped from the factory. 5. After long periods of nonuse, perform a test run before beginning regular operation. 6. Since the product is packaged in a clean room, use sufficient care in handling when opened.