Series LVQ. High Purity Chemical Valve Non-Metallic Exterior. Non-metallic
construction without using. -metal screws to fasten the body of the ac .tuator.
High Purity Chemical Liquid Valve Non-Metallic Exterior Series LVQ
LVC LVA
Screwless construction
LVH
PFA PTFE PVDF
LVD
w y:: Ne B Booddy : m raaggm: iapphhr D Dia torr:: tuaato A Acctu
Non-metallic construction without using metal screws to fasten the body of the actuator. Actuator
LVQ LVP LVW
Body
LQ1 LQ3 LVN LQHB TL TIL
Additional Variations for the New
LVQ Series!
TD TID
New
90° turn type
Manually operated Series LVQH
TH TIH
Flare, LQ3 integral fitting type Hyper fitting Series LVQ-Z
Insert bushing, LQ1 integral fitting type Hyper fitting Series LVQ-V
New
TLM TILM
Multi-turn type
New Tube extension integral fitting type Series LVQ-T
High purity chemical liquid valves, High back pressure (0.5 MPa) tolerant Added the LVQH series. Additional options High temperature (Max. 170°C), Buffer material FFKM, Ammonium hydroxide compatible, High flow type 649
Insert bushing/Flare, integral fitting types are available. Insert bushing, Integral fitting type
Series LVQ-V/LVQ-S Hyper fitting
New
Series LQ1 (Series LVQ-V )
Series LQ2 (Series LVQ-S )
• Insert bushing type • Quadruple seal construction
New
Flare, Integral fitting type
Series LVQ-Z Hyper fitting Flare type
Series LQ3 • Grip seal construction with Flare type • Triple seal costruction
Added manual type. New Two types of handle operation methods can be selected. 90° turn type
Multi-turn type
Enables quick valve open/ close switching operation.
90°
Valve open
650
Valve closed
The handle will spin loosely at the fully-open and fully-closed positions of the valve. This prevents overtightening. An indicator enables easy visual check of the open/ closed state of the valve. The valve opening position can be freely set using a lock nut.
Guide ring Eliminates lateral motion of the poppet which reduces internal leakage.
Piston damper Absorbs piston momentum to minimize impact-induced particle generation.
LVA
Buffer
Diaphragm (PTFE)
Protects diaphragm from deformation and damage due to back pressure.
Special diaphragm construction ensures gentle opening and closing that prevents the formation of micro-bubbles.
Offers quadruple seal construction. Nut lock mechanism—no additional tightening required. High flexural strength. Different tubing sizes can be selected.
Residual liquid is minimized by the tapered shape and integral fitting construction, allowing liquid to flow smoothly, achieving improved flow-through characteristics.
LVH LVD
Integral fitting construction
Minimal residual liquid
LVC
Body (New PFA)
LVQ LVP LVW LQ1
Compatible with chemicals such as acids, bases and super pure water.
LQ3
Space saving type
Integral fitting construction Hyper fitting/LQ1, LQ2, LQ3 series is used.
LVN
Reduction in dimension
A
LQHB TL TIL
B
TLM TILM
A
TD TID TH TIH
Piping from 8 directions are possible. Pilot port B
Model
45°
Integral fitting construction Hyper fitting/LQ1, LQ3 series is used. Can select female thread.
A
A
(mm) Reduction in dimension
Piping example
LVQ20 56.5 40.5 or more LVQ30
70
49.5 or more
LVQ40
80
61.5 or more
LVQ50 104.5 64.5 or more LVQ60 114.5 73.5 or more
Options
With flow rate adjustment
With by-pass
With flow rate adjustment & by-pass
With indicator
With indicator & by-pass
651
Variations Insert Bushing, Integral Fitting Type Series LVQ/LVQH
Series LVQ
Series LVQH
Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)
Applicable tubing O.D. Series
Metric size
3
4
6
8
10
Inch size
12
19
25 1/8 3/16 1/4 3/8 1/2 3/4
1
LVQ(H)20 LVQ(H)30 LVQ(H)40 LVQ(H)50 LVQ(H)60 With reducer
Basic size
Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection Series LVQS/LVQHS
Series LVQS
Series LVQHS
Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)
Fitting size
Series
2
3
4
5
6
LVQ(H)S20 LVQ(H)S30 LVQ(H)S40 LVQ(H)S50 LVQ(H)S60
Flare, Integral Fitting Type Series LVQ-Z/LVQH-Z
Series LVQ-Z
Series LVQH-Z
Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)
Applicable tubing O.D. Series
Metric size
3
4
6
8
10
Inch size
12
19
25 1/8 3/16 1/4 3/8 1/2 3/4
LVQ20(H)-Z LVQ30(H)-Z LVQ40(H)-Z LVQ50(H)-Z LVQ60(H)-Z
Flare, Integral Fitting Type Space Saving/Space Saving Connection Series LVQS-Z/LVQHS-Z
Series LVQS-Z
Series LVQHS-Z
Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)
Fitting size
Series
2
3
4
5
6
LVQ20(H)S-Z LVQ30(H)S-Z LVQ40(H)S-Z LVQ50(H)S-Z LVQ60(H)S-Z
Tube Extension Integral Fitting Type Series LVQ-T/LVQH-T
Series LVQ-T
Series LVQH-T
652
Flow Orifice characteristics diameter Av x 10–6 m2 (Cv) 8.4 ø4 (0.35) 31.2 ø8 (1.3) 45.6 ø10 (1.9) 120 ø16 (5) 192 ø22 (8)
Tubing size Series
Metric size
6 LVQ20(H)-T LVQ30(H)-T LVQ40(H)-T LVQ50(H)-T LVQ60(H)-T
10
12
19
Inch size
25 1/4 3/8 1/2 3/4
1
1
Guide to Pamphlet on Fluoropolymer Fitting Installation Methods ∗ The pamphlets can be downloaded from the SMC home page. http://www.smcworld.com
LQ1/2 Series Installation Method M type (For short pipes) For fitting sizes 1 to 6
LVC
L type
LVA
For fitting sizes 1 to 6
LVH LVD LVQ LVP LVW
J type
For fitting sizes 1 and 2
LQ1
K type
LQ3
For fitting sizes 1 and 2
LVN LQHB TL TIL
M-E05-1
TLM TILM TD TID
LQ3 Series Installation Method
TH TIH
For fitting sizes 2 to 6
For fitting size 1
M-E06-4
653
INDEX
Insert Bushing, Integral Fitting Type
Air Operated Insert Bushing, Integral Fitting Type Hyper Fitting Series LVQ
LQ1 LQ1, LQ2
P.656
Air Operated Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection Series LVQS Manually Operated Insert Bushing, Integral Fitting Type Hyper Fitting Series LVQH
LQ1 LQ1, LQ2
P.664
LQ1, LQ2
P.673
Manually Operated Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection Series LVQHS
LQ1, LQ2
P.677
Fittings and Special Tools
Flare, Integral Fitting Type
Air Operated Flare, Integral Fitting Type Hyper Fitting Series LVQ-Z
LQ3
P.683
Air Operated Flare, Integral Fitting Type Space Saving/Space Saving Connection Series LVQS-Z Manually Operated Flare, Integral Fitting Type Hyper Fitting Series LVQH-Z Manually Operated Flare, Integral Fitting Type Space Saving/Space Saving Connection Series LVQHS-Z
654
P.682
LQ3
P.691
LQ3
P.700
LQ3
P.704
Air Operated Tube Extension Integral Fitting Type Series LVQ-T
LQ1
Insert Bushing, Integral Fitting Type
Air Operated, 0.5 MPa Back Pressure Tolerant Insert Bushing, Integral Fitting Type Hyper Fitting Series LVQ H Air Operated, 0.5 MPa Back Pressure Tolerant Flare, Integral Fitting Type Hyper Fitting Series LVQ H-Z
LVC
P.709
LVA
Manually Operated Tube Extension Integral Fitting Type Series LVQH-T
Flare, Integral Fitting Type
Tube Extension Integral Fitting Type
INDEX
LVH
P.716
LVD LVQ
LQ1
LVP
LQ1, LQ2
LVW
P.719
LQ1 LQ3
LQ3
LVN P.720
LQHB TL TIL
Applicable Fluids Specific Product Precautions
TLM TILM
P.722
TD TID
P.723, 724
TH TIH
655
Air Operated Insert Bushing, Integral Fitting Type Hyper Fitting
Series LVQ
RoHS
How to Order
LVQ 2 0 Body class
Option 2 Symbol
Pilot port type
Symbol Body class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø10 5 5 ø16 6 6 ø22
Nil
Connection tubing size 1/8" x 0.086" (3 x 2)Note)
LQ1 integral fitting LQ1 integral fitting Connection tubing size 4 x 3Note) Threaded Rc 1/8 Threaded NPT 1/8
M R N
Note) Refer to page 724 for details of the applicable tubing sizes.
N.C. N.O. Double acting
Note) Refer to variations in the table below for valve type combinations.
Nil
None
1 2 3 4 5
With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator
V S
Fitting type LQ1 LQ2
Body class 2, 3, 4, 5, 6 2, 3, 4, 5
Note) Insert bushing is used in common.
6 7 8 9 24
High back pressure (0.42 MPa)
g O.D
Type N.C.
Va
lve
PB
PA
None
J K N
For high temperature Buffer material FFKM For ammonium hydroxide
High flow type LVQ6 only
P
LVQ30
LVQ40
LVQ50
LVQ60
ø4
ø8
ø10
ø16
ø22
Metric
6
10
12
19
25
1/4
3/8
1/2
3/4
1
typ
PA
e
Inch
N.C.
AB AB A N.O. PB N.C. N.O. Double acting Double
B N.O. Double acting
acting
With flow rate adjustment
PA B
N.C.
A
N.C.
With by-pass
Double acting
N.C.
With flow rate adjustment & by-pass With reducer
PA
PA
N.C.
A Double PB N.C. Double acting acting
B
A B
PA B
A
N.C.
N.C.
With indicator
PA B
A
N.C.
N.C.
Port B (OUT) different dia. size Symbol Nil
Application Ports A & B same size
Refer to the applicable tubing size table above.
Different diameter tubings can be selected within the same body class.
High back pressure
Option
9 24
Nil
LVQ20
Basic
Note) Refer to page 724 for details of the applicable tubing sizes.
PA B
A
N.C.
N.C.
With indicator & by-pass
PA B
A
N.C.
656
Applicable option 4 5 6 7 8
Model
.
Symbol
Body class 2 3 4 5 6
Basic size
3
ameter
Orifice di
Tubin
Applicable tubing sizeNote) Connection Symbol tubing size Metric size 03 3x2 04 4x3 06 6x4 08 8x6 10 x 8 10 12 x 10 12 19 x 16 19 25 x 22 25 Inch size 03 1/8" x 0.086" 05 3/16" x 1/8" 07 1/4" x 5/32" 11 3/8" x 1/4" 13 1/2" x 3/8" 3/4" x 5/8" 19 1" x 7/8" 25
2
Note 1) Options in the same table cannot be High back pressure with flow rate adjustment combined each other. Note 2) High back pressure specifications (5 to 9) High back pressure with by-pass in Option 1 and high temperature specifiHigh back pressure with flow rate adjustment & by-pass cation (J) in Option 2 cannot be combined. High back pressure with indicator Note) Refer to variations in the table below for With indicator & by-pass valve type and option 1 combinations. Options in the same table can not be combined each other.
Variations
Fitting type Symbol
1
Option 1
Valve type 0 1 2
S 07
N.C.
Air Operated Insert Bushing, Integral Fitting Type
Series
LVQ
Standard Specifications Model
LVQ20
Metric Inch IN/OUT port Fitting type Pilot port Orifice diameter Av x 10–6 m2 Flow characteristics Cv Withstand pressure (MPa) Operating pressure Standard High temperature Standard Back pressure High back pressure (MPa) High temperature Valve leakage (cm3/min) Pilot air pressure (MPa) Pilot port size Standard Fluid temperature (°C) High temperature Ambient temperature (°C) Weight (kg)
6 1/4
Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
LVQ30
LVQ40
LVQ50
LVQ60
10 12 19 25 3/8 1/2 3/4 1 LQ1 or LQ2 LQ1 LQ1 ø4 ø8 ø10 ø16 ø22 8.4 31.2 45.6 120 192 (228) Note 2) 0.35 1.3 1.9 5 8 (9.5) Note 2) 1 –98 kPa to 0.5 MPa –98 kPa to 0.4 MPa –98 kPa to 0.3 MPa 0.3 or less 0.2 or less 0.42 or less 0.3 or less 0.2 or less 0 (With water pressure) 0.3 to 0.5 (High back pressure: 0.45 to 0.55) 1/8" (ø3), ø4, Rc 1/8, NPT 1/8 0 to 100 0 to 170 0 to 60 0.08 0.17 0.22 0.70 0.81
Tubing O.D.Note 1)
Caution For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1). (The pamphlet can be downloaded from the SMC home page.)
LVD LVQ LVP LVW LQ1 LQ3 LQHB TL
Body class
TILM
Connection tubing O.D. Metric size 3
4
6
8
10
Inch size 12
19
25
1/8
3/16
1/4
3/8
1/2
3/4
1
2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Torque (N·m)
LQ1
LQ2
0.3 to 0.4 0.8 to 1.0 1.0 to 1.2 2.5 to 3.0 5.5 to 6.0
1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 11.0 to 13.0 —
TD TID TH TIH
2 3 4 5 6 Note) Refer to page 682 for information on changing tubing sizes.
2 3 4 5 6
LVH
Different diameter tubings can be selected (within the same body class) by using a nut TIL and an insert bushing (reducer). With reducer TLM
1. Connect tubing by special tools.
Body class
LVA
LVN
Note 1) Refer to page 724 for details of the applicable tubing sizes. Note 2) ( ): High flow type
Applicable Different Diameter Tubings with Reducer
Piping
LVC
657
Series
LVQ
Construction Basic N.C.
N.O.
Double acting
PB
PB
q
q
q
PA
PA
e
e A
B
B
w rt
A
e
B
A
B
A
B
A
y
t
r
With reducer
With flow rate adjustment
With by-pass
With indicator
i u
SMC
PA
PA
SMC
B
SMC
B
B A
Component Parts No.
Description
Material
1
Actuator
2
Body
3
Diaphragm
4
Insert bushing
PFA
5
Nut
PFA
6
Collar
7
Flow rate adjuster
8
Indicator/Cover
658
u
A
PVDF PFA PTFE
PFA PVDF PP
B
SMC
A A
Air Operated Insert Bushing, Integral Fitting Type
Series
LVQ
Dimensions Basic, High back pressure N.C. valve
LVC LVA Q
LVH LVD LVQ LVP
øE
LVW
R
P
LQ1
Rc 1/8 (NPT 1/8) Sensor (vent) port LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port
Rc 1/8 (NPT 1/8) Pilot port
LQ3 LVN
F
LQHB TL TIL
K SMC
A
B
SMC
A
TLM TILM
L
G
J
B
TD TID
(H)
Pilot port Rc 1/8 (NPT 1/8) Threaded type
TH TIH
N
D
B
A
C
M
∗ Drawings show the LVQ0-S.
LVQ0- VS
Dimensions (N.C. Valve)
(mm)
A
B
C
D
E
F
V
S
LVQ20- VS LVQ30- VS LVQ40- VS LVQ50- VS LVQ60-V∗
25.5
46
31.5
58
33.6
56.5
12
70
77
28.5
57
34.5
69
45.4
77
16.5
83
95
28.5
57
34.5
69
45.4
82.5
22
95
109
42
84
48
96
75
127
25
130
141
42
84
48
96
75
136.8
32
150
—
∗ The LVQ60 is available only with “V”.
G
H
Model
J
K
L
M
N
P
Q
21.8
37
5
7
15
31.3
21
25.3
R
32
50
6
7
20
37.2
25
31.2
37.5
55.5
6
7
20
37.2
25
31.2
50.2
78.2
10
7
20
50.8
38.5
45
60
88
10
7
20
50.8
38.5
45
659
LVQ
Series
Dimensions With flow rate adjustment, High back pressure with flow rate adjustment N.C. valve
Dimensions
S
LVQ20- VS -1 LVQ30- VS -1 LVQ40- VS -1 LVQ50- VS -1 LVQ60-V-1∗
83
(Max. S)
(mm)
Model
113.5 119 B
171.5
SMC
A
182.5
∗ The LVQ60 is available only with “V”.
With by-pass, High back pressure with by-pass N.C. valve
B
D
A
LVQ20
C
N M
. T)
(Max
LVQ30, LVQ40 LVQ50, LVQ60
SMC
V
N M V
SMC
B
A
D
B A
C
U
SMC
(Max. T)
Z (H)
View Z
∗ Drawings show the LVQ0-S.
Dimensions
(mm)
H
Model
A
B
C
D
M
N
T
U
V
V
S
LVQ20- VS -2 LVQ30- VS -2 LVQ40- VS -2 LVQ50- VS -2 LVQ60-V-2∗
25.5
46
31.5
58
7
15
34.3
10.6
7
64
77
25.5
51
31.5
63
7
15
36.9
16.5
10
83
95
25.5
51
31.5
63
7
15
37.9
22
10
95
109
38
76
44
88
7
20
64
25
17
130
141
38
76
44
88
7
20
66
32
17
150
—
∗ The LVQ60 is available only with “V”.
660
Air Operated Insert Bushing, Integral Fitting Type
LVQ
N M
LVQ20
LVC C
LVA LVH
D
B
A
With flow rate adjustment & by-pass, High back pressure with flow rate adjustment & by-pass N.C. valve
Series
LVD . T) (Max
LVQ
V
LVP
LVQ30, LVQ40 LVQ50, LVQ60
(Max. S)
LVW
N M
LQ1
V
LQ3
SMC
B A
C
LVN
SMC
D
A
SMC
(Max. T)
U
B
Z (H)
TL TIL TLM TILM View Z
TD TID ∗ Drawings show the LVQ0-S.
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
V
LVQ20- VS -3 LVQ30- VS -3 LVQ40- VS -3 LVQ50- VS -3 LVQ60-V-3∗
25.5
46
31.5
58
7
15
83
34.3
10.6
25.5
51
31.5
63
7
15
113.5
36.9
25.5
51
31.5
63
7
15
119
38
76
44
88
7
20
38
76
44
88
7
20
H V
S
7
64
77
16.5
10
83
95
37.9
22
10
95
109
171.5
64
25
17
130
141
182.5
66
32
17
150
—
∗ The LVQ60 is available only with “V”.
With indicator, High back pressure with indicator N.C. valve (mm)
Model
S
LVQ20- VS -4 LVQ30- VS -4 LVQ40- VS -4 LVQ50- VS -4 LVQ60-V-4∗
70.5 88.5
S
Dimensions
LQHB
94 134.5 144
B
SMC
A
∗ The LVQ60 is available only with “V”.
∗ Drawings show the LVQ0-S.
661
TH TIH
LVQ
Series
Dimensions
Q
Basic N.O. valve
øE
LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port
R
Rc 1/8 (NPT 1/8) Sensor (vent) port
Rc 1/8 (NPT 1/8) Pilot port
Rc 1/8 (NPT 1/8) Vent port
K
W
(F)
Rc 1/8 (NPT 1/8) Vent port
G
SMC
B
A
SMC
A
L
J
B
(H)
Pilot port Rc 1/8 (NPT 1/8) Threaded type
D
B
A
C
N M
∗ Drawings show the LVQ0-S.
Double acting valve P
LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port Rc 1/8 (NPT 1/8) Pilot port
R LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port
Rc 1/8 (NPT 1/8) Sensor (vent) port
B
SMC
Rc 1/8 (NPT 1/8) Pilot port
A
B
SMC
A
∗ Drawings show the LVQ0-S.
LVQ 12 - VS
Dimensions (N.O. Valve, Double Acting Valve)
(mm)
A
B
C
D
E
F
V
S
LVQ2 12 - VS LVQ3 12 - VS LVQ4 12 - VS LVQ5 12 - VS LVQ6 12 -V∗
25.5
46
31.5
58
33.6
81
12
70
77
28.5
57
34.5
69
45.4
99
16.5
83
95
28.5
57
34.5
69
45.4
104.5
22
95
42
84
48
96
75
145
25
42
84
48
96
75
154.5
32
∗ The LVQ60 is available only with “V”.
662
G
H
Model
J
K
L
M
N
P
21.8
37
5
7
15
31.3
32
50
6
7
20
37.2
109
37.5
55.5
6
7
20
130
141
50.2
78.2
10
7
150
—
60
88
10
7
Q
R
W
21
25.3
64
25
31.2
82
37.2
25
31.2
20
50.8
38.5
45
128
20
50.8
38.5
45
137.5
87.5
Air Operated Insert Bushing, Integral Fitting Type
With by-pass Double acting valve
Series
LVQ
N M
LVC
LVQ2 12
SMC
LVH
D
B
A
C
LVA LVD (Max
LVQ
. T)
LVP
V
LVW LQ1
SMC
SMC
V
LQHB
A
U
SMC
LVN
M
LVQ3 12 , LVQ4 12 LVQ5 12 , LVQ6 12
SMC
B
LQ3
N
SMC
C
B A (Max. T)
D
Z (H)
TL TIL
TD TID TH TIH View Z
∗ Drawings show the LVQ0-S.
Dimensions (N.O Valve, Double Acting Valve)
(mm)
H
Model
A
B
C
D
M
N
T
U
V
V
S
LVQ212 - VS -2 LVQ312 - VS -2 LVQ412 - VS -2 LVQ512 - VS -2 LVQ612 -V-2∗
25.5
46
31.5
58
7
15
34.3
10.6
7
64
77
25.5
51
31.5
63
7
15
36.9
16.5
10
83
95
25.5
51
31.5
63
7
15
37.9
22
10
95
109
38
76
44
88
7
20
64
25
17
130
141
38
76
44
88
7
20
66
32
17
150
—
TLM TILM
∗ The LVQ60 is available only with “V”.
663
Air Operated Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection
Series LVQS
RoHS
How to Order
LVQ 2 0 S
S 07 Option 2
Body class
Symbol
Symbol Body class Orifice dia. 2 2 ø4 3 3 ø8 4 4 ø10 5 5 ø16 6 6 ø22
Pilot port type Nil
Note) Refer to page 724 for details of the applicable tubing sizes.
Valve type 0 1 2
LQ1 integral fitting Connection tubing size 1/8" x 0.086 (3 x 2)Note) LQ1 integral fitting Connection tubing size 4 x 3Note) Threaded Rc 1/8 Threaded NPT 1/8
M R N
Nil
None
1 2 3 4 5
With flow rate adjustment With flow rate adjustment & by-pass With indicator
Fitting type
Basic
Body class 2, 3, 4, 5, 6 2, 3, 4, 5
Applicable fitting size Fitting size
07 11 13 19 25
2 3 4 5 6
Body class 2 3 4 5 6
Note) Refer to page 665 for How to Order fitting parts. Select a tube with the same size as the valve side fitting.
None
J K N
For high temperature Buffer material FFKM For ammonium hydroxide
High flow type LVQ6 only
P
Note 1) Options in the same table cannot be combined each other. in Option 1 and high temperature specification (J) in Option 2 cannot be combined.
High back pressure with by-pass High back pressure with flow rate adjustment & by-pass
Note) Refer to variations in the table below for valve type and option 1 combinations. Options in the same table can not be combined each other.
High back pressure with indicator With indicator & by-pass
pe
N.C.
PB
PA
PA
N.C.
AB AB A N.O. PB N.C. N.O. Double Double acting
B N.O. Double acting
acting
With flow rate adjustment
PA B
N.C.
A N.C.
With by-pass
Double acting
N.C.
With flow rate adjustment & by-pass
PA
PA
N.C.
A Double PB N.C. Double acting acting
B
A B
PA B
A
N.C.
N.C.
With indicator
PA B
A
N.C.
N.C.
High back pressure
PA B
A
N.C.
N.C.
With indicator & by-pass
PA B
A
N.C.
664
Option
9 24
Nil
High back pressure with flow rate adjustment Note 2) High back pressure specifications (5 to 9)
Model Orifice di ameter Applic able fi tting s ize Valv Symbol e ty
Note) Insert bushing is used in common.
Symbol
Applicable option 4 5 6 7 8
Variations
Space saving connection
Fitting type LQ1 LQ2
3
High back pressure (0.42 MPa)
Type
V S
6 7 8 9 24
With by-pass
Body type
Symbol
2
Option 1
N.C. N.O. Double acting
Note) Refer to variations in the table below for valve type combinations.
S
1
N.C.
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
ø4
ø8
ø10
ø16
ø22
2
3
4
5
6
Air Operated Insert Bushing, Integral Fitting Type
Series
LVQS
How to Order Space Saving Fittings Applicable tubing sizeNote 1) Note 2) Size
No.
2 2 3 3 3 4 4 5 5
1 2 1 2 3 1 2 1 2
6 6
1 2
Applicable tubing size (mm) 6x4 4x3 10 x 8 8x6 6x4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16
Reducing
Size Symbol
2 2 2 3 3 4 4 5 5 6 6
A B C A B A B A B A B
Applicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Basic size
Reducing
LVC LVA LVH LVD
With reducer
LVQ LVP
Note 1) Select the same size as the fitting on the valve. Note 2) Refer to page 724 for details of the applicable tubing sizes.
LVW
LQ1 E LQ2 E
SN SN
61 21
LQ1 LQ3 LVN
Packaging Symbol
Nil 1
Fitting type E
T
Union elbow
Union tee
Packaging Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5
LQHB TL TIL
One (including insert bushing) of the nuts is not attached.
TLM TILM
Applicable tubing sizeNote 1) Note 2) SMC
SMC
P
U
Panel mount union
Union
SMC
SMC
Size
No.
2 2 3 3 3 4 4 5 5
1 2 1 2 3 1 2 1 2
Applicable tubing size (mm) 6x4 4x3 10 x 8 8x6 6x4 12 x 10 10 x 8 19 x 16 12 x 10
Reducing
Size Symbol
2 2 2 3 3 4 4 5 5
A B C A B A B A B
Applicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" Basic size
Reducing
With reducer
Note 1) Select the same size as the fitting on the valve. Note 2) Refer to page 724 for details of the applicable tubing sizes.
Piping Example LQ2T31-SN (Union tee)
LVQ30S-S11R Applicable tubing size 1/4" x 5/32"
LQ2E3B-SN (Union elbow) Applicable tubing size 10 x 8
Ordering Example
LVQ30S-S11R LQ2T31-SN (Union tee) LQ2E3B-SN (Union elbow)
1 1 1
Note) For shipment, the valve and fittings are individually packaged and dispatched together in 1 box.
665
TD TID TH TIH
Series
LVQS Standard Specifications LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S
Model
Connection fitting size
2
3
IN/OUT port
Fitting type
4
5
6 LQ1
LQ1 or LQ2
Pilot port
LQ1
Orifice diameter
ø4
ø8
ø10
ø16
ø22
Av x 10–6 m2 Flow characteristics Cv
8.4
31.2
45.6
120
192 (228) Note 1)
0.35
1.3
1.9
5
8 (9.5) Note 1)
Withstand pressure (MPa) Operating pressure
1
Standard
–98 kPa to 0.5 MPa
High temperature
–98 kPa to 0.4 MPa
–98 kPa to 0.3 MPa
Standard Back pressure High back pressure (MPa) High temperature
0.2 or less
0.3 or less 0.42 or less
0.2 or less
0.3 or less
Valve leakage (cm3/min)
0 (With water pressure)
Pilot air pressure (MPa)
0.3 to 0.5 (High back pressure: 0.45 to 0.55)
Pilot port size Note 2)
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
Standard Fluid temperature (°C) High temperature
0 to 100 0 to 170
Ambient temperature (°C)
0 to 60
Weight (kg)
0.085
0.175
0.223
0.725
0.835
Note 1) ( ): High flow type Note 2) Refer to page 724 for details of the applicable tubing sizes.
Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
Piping
Caution 1. Take extra care with the insert bushing when connecting the fittings. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Body class
2 3 4 5 6
666
Torque (N·m)
LQ1
LQ2
0.3 to 0.4
1.5 to 2.0
0.8 to 1.0
3.0 to 3.5
1.0 to 1.2
7.5 to 9.0
2.5 to 3.0
11.0 to 13.0
5.5 to 6.0
—
Air Operated Insert Bushing, Integral Fitting Type
LVQS
Series
Construction Basic N.C.
N.O.
Double acting PB
PB
LVC LVA
q
q
q
LVH e B
wrt
B
LVD
PA
PA
e
A
SMC
e B
A
B
A
SMC
LVQ
A
LVP
B
A
LVW LQ1
With flow rate adjustment
With by-pass
LQ3
With indicator
LVN y
u
LQHB TL TIL TLM TILM PA
PA
TD TID
y B
SMC
A
B
B
A
B
SMC
TH TIH
A
A
Component Parts No. 1
Description Actuator
2
Body
3
Diaphragm
4
Insert bushing
5
Nut
6
Flow rate adjuster
7
Indicator/Cover
Material PVDF PFA PTFE PFA PFA PVDF PP
667
Series
LVQS
Dimensions
Q
Basic, High back pressure N.C. valve
LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port
øE Rc 1/8 (NPT 1/8) Sensor (vent) port
P
R
K
F
Rc 1/8 (NPT 1/8) Pilot port
SMC
B
A
SMC
A
L
G
J
B
(H)
Pilot port Rc 1/8 (NPT 1/8) Threaded type
N
D
B
A
C
M
∗ Drawings show the LVQ0-S.
LVQ0S-VS
Dimensions (N.C. Valve)
(mm)
Model
A
B
C
D
E
F
LVQ20S- VS 07 LVQ30S- VS 11 LVQ40S- VS 13 LVQ50S- VS 19 LVQ60S-V25∗
25.5
46
31.5
58
33.6
56.5
12
28.5
57
34.5
69
45.4
77
28.5
57
34.5
69
45.4
82.5
42
84
48
96
75
42
84
48
96
75
∗ The LVQ60 is available only with “V”.
668
G
H
J
K
L
M
N
P
Q
21.8
37
5
7
15
31.3
21
25.3
R
V
S
89
92
16.5
106
112
32
50
6
7
20
37.2
25
31.2
22
120
126
37.5
55.5
6
7
20
37.2
25
31.2
127
25
164
168
50.2
78.2
10
7
20
50.8
38.5
45
136.8
32
177
—
60
88
10
7
20
50.8
38.5
45
Air Operated Insert Bushing, Integral Fitting Type
Series
LVQS
With flow rate adjustment, High back pressure with flow rate adjustment N.C. valve Dimensions
(mm)
S
LVQ20S- VS 07-1 LVQ30S- VS 11-1 LVQ40S- VS 13-1 LVQ50S- VS 19-1 LVQ60S-V25-1∗
83
LVC
(Max. S)
Model
113.5
LVA
119
LVH
171.5 B SMC A
182.5
∗ Drawing shows the LVQ0-S.
∗ The LVQ60 is available only with “V”.
LVD LVQ LVP
With by-pass, High back pressure with by-pass N.C. valve
LVW
N M
LQ1 C
LQ3 LVN
D
B
A
LVQ20S
LQHB . T)
(Max
TL TIL TLM TILM
V
TD TID
LVQ30S, LVQ40S LVQ50S, LVQ60S
TH TIH
N M V
B A
C
U
B SMC A
(Max. T)
D
Z
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
T
U
V
LVQ20S- 07-2 LVQ30S- VS 11-2 LVQ40S- VS 13-2 LVQ50S- VS 19-2 LVQ60S-V25-2∗
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
V S
∗ Drawings show the LVQ0-S.
∗ The LVQ60 is available only with “V”.
669
LVQS
Series
Dimensions With flow rate adjustment & by-pass, High back pressure with flow rate adjustment & by-pass N.C. valve
D
B
A
C
N M
LVQ20S
. T) (Max
N M
C
V
A
(Max. S)
LVQ30S, LVQ40S LVQ50S, LVQ60S
V
(Max. T)
U
D
B
B SMC A
Z
View Z
∗ Drawings show the LVQ0-S.
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
LVQ20S- VS 07-3 LVQ30S- VS 11-3 LVQ40S- VS 13-3 LVQ50S- VS 19-3 LVQ60S-V25-3∗
25.5
46
31.5
58
7
15
83
34.3
10.6
V 7
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
25.5
51
31.5
63
7
15
119
37.9
22
10
38
76
44
88
7
20
171.5
64
25
17
38
76
44
88
7
20
182.5
66
32
17
∗ The LVQ60 is available only with “V”.
With indicator, High back pressure with indicator N.C. valve (mm)
Model
S
LVQ20S- VS 07-4 LVQ30S- VS 11-4 LVQ40S- VS 13-4 LVQ50S- VS 19-4 LVQ60S-V25-4∗
70.5 88.5 94 134.5 144
∗ The LVQ60 is available only with “V”.
670
S
Dimensions
B SMC A
∗ Drawing shows the LVQ0-S.
Air Operated Insert Bushing, Integral Fitting Type
Series
LVQS
Basic N.O. valve
Q
LVC LVA
LQ1 integral fitting 1/8" (ø3), (ø4)
LVH
øE R
Pilot port
LVD
Rc 1/8 (NPT 1/8) Sensor (vent) port
Rc 1/8 (NPT 1/8) Pilot port
LVQ
Rc 1/8 (NPT 1/8) Vent port
LVP LVW LQ1
K
W
(F)
Rc 1/8 (NPT 1/8) Vent port
G
J
LQ3
B SMC A
B SMC A
L
LVN
(H)
Pilot port Rc 1/8 (NPT 1/8) Threaded type
N M
LQHB TL TIL
TD TID
D
B
A
C
TLM TILM
TH TIH ∗ Drawings show the LVQ0-S.
Double acting valve
P
LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port
R
LQ1 integral fitting 1/8" (ø3), (ø4) Pilot port
Rc 1/8 (NPT 1/8) Pilot port
Rc 1/8 (NPT 1/8) Pilot port
Rc 1/8 (NPT 1/8) Sensor (vent) port
B SMC A
B SMC A
∗ Drawings show the LVQ0-S. 1 LVQ 2 S- VS
Dimensions (N.O. Valve, Double Acting Valve)
Model
A
B
C
D
E
F
G
LVQ2 12 S- VS 07 LVQ3 12 S- VS 11 LVQ4 12 S- VS 13 LVQ5 12 S- VS 19 LVQ6 12 S-V25∗
25.5
46
31.5
58
33.6
81
12
28.5
57
34.5
69
45.4
99
28.5
57
34.5
69
45.4
42
84
48
96
42
84
48
96
(mm)
H V
S
J
K
L
M
N
P
Q
R
W
89
92
21.8
37
5
7
15
31.3
21
25.3
64
16.5
106
112
32
50
6
7
20
37.2
25
31.2
82
104.5
22
120
126
37.5
55.5
6
7
20
37.2
25
31.2
75
145
25
164
168
50.2
78.2
10
7
20
50.8
38.5
45
128
75
154.5
32
177
—
60
88
10
7
20
50.8
38.5
45
137.5
87.5
∗ The LVQ60 is available only with “V”.
671
Series
LVQS
Dimensions With by-pass Double acting valve
D
B
A
C
N M
LVQ2 12 S
. T) (Max
LVQ3 12 S, LVQ4 12 S LVQ5 12 S, LVQ6 12 S SMC
N M V
A
B A
C
U
B
V
(Max. T)
D
Z
View Z
∗ Drawings show the LVQ0-S.
Dimensions (N.O. Valve, Double Acting Valve)
(mm)
Model
A
B
C
D
M
N
T
U
LVQ2 S- 07-2 LVQ3 12 S- VS 11-2 LVQ4 12 S- VS 13-2 LVQ5 12 S- VS 19-2 LVQ6 12 S-V25-2∗
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
1 2
V S
∗ The LVQ60 is available only with “V”.
672
V
Manually Operated Insert Bushing, Integral Fitting Type Hyper Fitting
Series LVQH
RoHS LVC
How to Order
LVQH 2 0
LVA
S 07
LVH
1
Symbol Body class 2 2 3 3 4 4 5 5 6 6
Symbol
Orifice dia. ø4 ø8 ø10 ø16 ø22
Nil K N
V S
Fitting type LQ1 LQ2
1 4
Connection tubing size Metric size 3x2 03 4x3 04 6x4 06 8x6 08 10 x 8 10 12 x 10 12 19 x 16 19 25 x 22 25 Inch size 1/8" x 0.086" 03 3/16" x 1/8" 05 1/4" x 5/32" 07 3/8" x 1/4" 11 1/2" x 3/8" 13 3/4" x 5/8" 19 1" x 7/8" 25 Basic size
2
Body class 3 4 5 6
Threaded Threaded
LQ3
90° turn type Multi-turn type (With indicator)
LVN LQHB
NPT 1/8 Rc 1/8
TL TIL
Port B (OUT) different dia. size Nil
Application Ports A & B same size
Refer to the applicable tubing table to the left.
Different diameter tubings can be selected within the same body class.
Symbol
With reducer
Note) Refer to page 724 for details of the applicable tubing sizes.
TLM TILM TD TID TH TIH
Variations Model LVQH20 LVQH30 LVQH40 LVQH50 LVQH60 Orifice di ameter ø4 ø8 ø10 ø16 ø22 g O.D Metric . 6 10 12 19 25 Inch Symbol 1/4 3/8 1/2 3/4 1
Tubin Type
90° turn type
Multi-turn type
B
A
B
A
LVP LQ1
Vent port type Nil R
LVQ LVW
Handle operation
Body class 2, 3, 4, 5, 6 2, 3, 4, 5
Applicable tubing sizeNote) Symbol
Option None Buffer material FFKM For ammonium hydroxide
Note) Options cannot be combined each other.
Fitting type Symbol
LVD
Option
Body class
673
Series
LVQH Standard Specifications LVQH20 LVQH30 LVQH40 LVQH50 LVQH60
Model
Tubing
Metric
O.D.Note)
Inch
6
10
12
19
1/4
3/8
1/2
3/4
Fitting type
LQ1 or LQ2
25 1 LQ1
Orifice diameter
ø4
ø8
ø10
ø16
ø22
Av x 10–6 m2 Flow characteristics Cv
8.4
31.2
45.6
120
192
0.35
1.3
1.9
5
8
Withstand pressure (MPa)
1
Fluid pressure
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
Back pressure (MPa) Valve leakage (cm3/min)
0 (With water pressure)
Fluid temperature (°C)
0 to 100
Ambient temperature (°C) Weight (kg)
0 to 60
LVQH0-1
0.12
0.27
0.31
1.10
1.16
LVQH0-4
0.11
0.20
0.22
0.67
0.87
Note) Refer to page 724 for details of the applicable tubing sizes.
Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
Piping
Caution 1. Connect tubing by special tools. For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1). (The pamphlet can be downloaded from the SMC home page.)
2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Body class
2 3 4 5 6
674
Torque (N·m)
LQ1
LQ2
0.3 to 0.4
1.5 to 2.0
0.8 to 1.0
3.0 to 3.5
1.0 to 1.2
7.5 to 9.0
2.5 to 3.0
11.0 to 13.0
5.5 to 6.0
—
Manually Operated Insert Bushing, Integral Fitting Type
Series
LVQH
Construction 90° turn type
u
LVC LVA
q
LVH LVD LVQ
y
e
LVP LVW B
w
r
t
A
LQ1 r
t
LQ3
With reducer
LVN LQHB
Multi-turn type (With indicator)
i
TL TIL
u
TLM TILM TD TID TH TIH
B
B
A
A
Component Parts No.
Description
Material
1
Actuator
2
Body
3
Diaphragm
4
Insert bushing
PFA
5
Nut
PFA
6
Collar
PFA
7
Handle
PVDF
8
Indicator/Cover
PVDF PFA PTFE
PP
675
Series
LVQH
Dimensions 90° turn type
Locking (Valve closed)
°
Q
90
Non-locking (Valve open)
Y
Rc 1/8 (NPT 1/8) Sensor (vent) port
(F)
ø7
Dimensions
(mm)
LVQH20- VS -1 LVQH30- VS -1 LVQH40- VS -1 LVQH50- VS -1 LVQH60-V-1∗
25.5
46
31.5
58
79
28.5
57
34.5
69
28.5
57
34.5
42
84
48
42
84
G
H V
S
12
70
77
103
16.5
83
95
69
108
22
95
109
96
165
25
130
141
48
96
175
32
150
—
Model
J
K
L
M
N
LVQH20- VS -1 LVQH30- VS -1 LVQH40- VS -1 LVQH50- VS -1 LVQH60-V-1∗
21.8
37
5
7
15
21
Q
55
32
50
6
7
20
25
80
37.5
55.5
6
7
20
25
50.2
78.2
10
7
20
38.5
110
60
88
10
7
20
38.5
110
B
A
(H) N M
Y
80
C
F
D
D
A
C
J
B
G L
A
B
Model
∗ The LVQ60 is available only with “V”. ∗ Drawings show the LVQ0-S.
Multi-turn type (With indicator)
Valve closed direction
Valve open direction
Y
Dimensions S
Y
LVQH20- -4 LVQH30- VS -4 LVQH40- VS -4 LVQH50- VS -4 LVQH60-V-4∗
93.6
50
111.2
50
116.7
50
170.7
71
180.2
71
V S
∗ The LVQ60 is available only with “V”. ∗ Drawings show the LVQ0-S.
676
(Max. S)
(mm)
Model
B
A
Manually Operated Insert Bushing, Integral Fitting Type Space Saving/Space Saving Connection
Series LVQHS
RoHS LVC
How to Order
LVQH 2 0 S
LVA
S 07
LVH
1 Symbol Nil
Orifice dia. ø4 ø8 ø10 ø16 ø22
K N
Option None Buffer material FFKM For ammonium hydroxide
LVQ LVP
Note) Options cannot be combined each other.
Body type S
LVD
Option
Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
LVW LQ1
Handle operation
Space saving connection
1 4
LQ3
90° turn type Multi-turn type (With indicator)
LVN
Fitting type Symbol
V S
Fitting type LQ1 LQ2
Body class 2, 3, 4, 5, 6 2, 3, 4, 5
Vent port type Nil
R
Threaded Threaded
LQHB
NPT 1/8 Rc1 /8
TL TIL TLM TILM
Applicable fitting size Symbol
Fitting size
07 11 13 19 25
2 3 4 5 6
Body class 2 3 4 5 6
TD TID TH TIH
Note) Refer to page 678 for How to Order applicable fittings. Select the same size as the fitting on the valve.
Variations
Type
Model LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S Orifice di ameter Conne ø4 ø8 ø10 ø16 ø22 ction fi tting s Symb ize ol 2 3 4 5 6
90° turn type B
A
B
A
Multi-turn type
677
Series
LVQHS How to Order Space Saving Fittings Applicable tubing size Size
No.
2 2 3 3 3 4 4 5 5
1 2 1 2 3 1 2 1 2
6 6
1 2
Applicable tubing size (mm) 6x4 4x3 10 x 8 8x6 6x4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16
Reducing
Size Symbol
2 2 2 3 3 4 4 5 5 6 6
A B C A B A B A B A B
Applaicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Basic size
Reducing
With reducer
Note 1) Select the same size as the fitting on the valve.
LQ1 E LQ2 E
61 21
SN SN Packaging Symbol
Nil 1
Fitting type E
T
Union elbow
Packaging Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5
One (including insert bushing) of the nuts is not attached.
Union tee
Applicable tubing size SMC
SMC
P
U
Panel mount union
Union
SMC
SMC
Size
No.
2 2 3 3 3 4 4 5 5
1 2 1 2 3 1 2 1 2
Applicable tubing size (mm) 6x4 4x3 10 x 8 8x6 6x4 12 x 10 10 x 8 19 x 16 12 x 10
Reducing
Size Symbol
2 2 2 3 3 4 4 5 5
A B C A B A B A B
Applicable tubing size (mm) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" Basic size
Reducing
With reducer
Note 1) Select the same size as the fitting on the valve.
Piping Example LVQH30S-S11R-1
Ordering Example
LQ2T31-SN (Union tee)
Applicable tubing size 1/4" x 5/32"
LQ2E3B-SN (Union elbow) Applicable tubing size 10 x 8
678
LVQH30S-S11R-1 LQ2T31-SN (Union tee) LQ2E3B-SN (Union elbow)
1 1 1
Note) For shipment, the valve and fittings are individually packaged and dispatched together in 1 box.
Manually Operated Insert Bushing, Integral Fitting Type
Series
LVQHS
Standard Specifications LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S
Model
Connection fitting size
2
3
Fitting type
4
Orifice diameter
6
Av x 10 m2 Flow characteristics Cv
LQ1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192
0.35
1.3
1.9
5
8
–6
Withstand pressure (MPa) –98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
Back pressure (MPa) Valve leakage (cm3/min)
0 to 100
Ambient temperature (°C)
0 to 60
LVA LVD LVQ
0 (With water pressure)
Fluid temperature (°C)
LVC LVH
1
Fluid pressure
Weight (kg)
5
LQ1 or LQ2
LVP
LVQH0S-1
0.14
0.30
0.33
1.14
1.18
LVQH0S-4
0.13
0.23
0.24
0.71
0.89
LVW LQ1 LQ3
Specific Product Precautions
LVN
Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
LQHB
Piping
TLM TILM
Caution
TL TIL
TD TID
1. Take extra care with the insert bushing when connecting the fittings. TH 2. Tighten the nut to the end surface of the body. As a guide, refer to TIH the proper tightening torques shown below. Tightening Torque for Piping Body class
2 3 4 5 6
Torque (N·m)
LQ1
LQ2
0.3 to 0.4
1.5 to 2.0
0.8 to 1.0
3.0 to 3.5
1.0 to 1.2
7.5 to 9.0
2.5 to 3.0
11.0 to 13.0
5.5 to 6.0
—
679
Series
LVQHS
Construction 90° turn type
y
q
e
B
w
r
t
A
Multi-turn type (With indicator)
u
B
B
Component Parts No.
Description
1
Actuator
2
Body
3
Diaphragm
4
Insert bushing
5
Nut
6
Handle
7
Indicator/Cover
680
Material
PVDF PFA PTFE PFA PFA PVDF PP
y
A
A
Manually Operated Insert Bushing, Integral Fitting Type
Series
LVQHS
Dimensions 90° turn type
Locking (Valve closed)
°
90
LVC Q
LVA LVH
Non-locking (Valve open)
LVD Y
LVQ LVP Rc 1/8 (NPT 1/8)
ø7
(mm)
B
C
D
F
G
LVQH20S- VS -1 LVQH30S- VS -1 LVQH40S- VS -1 LVQH50S- VS -1 LVQH60S-V-1∗
25.5
46
31.5
58
79
28.5
57
34.5
69
103
28.5
57
34.5
69
108
42
84
48
96
42
84
48
96
Model
J
L
M
N
LVQH20S- VS -1 LVQH30S- VS -1 LVQH40S- VS -1 LVQH50S- VS -1 LVQH60S-V-1∗
21.8
5
7
15
21
55
32
6
7
20
25
80
37.5
6
7
20
25
80
50.2
10
7
20
38.5
110
60
10
7
20
38.5
110
V
S
89
92
16.5
106
112
22
120
126
165
25
164
168
175
32
177
—
B
LQ3
A
LVN (H)
LQHB
N M
TL TIL
Y
TLM TILM TD TID
C
A
TH TIH
D
B
Q
12
∗ The LVQ60 is available only with “V”. ∗ Drawings show the LVQ0-S.
Multi-turn type (With indicator)
Valve closed direction
Valve open direction
Y
Dimensions S
Y
LVQH20S- -4 LVQH30S- VS -4 LVQH40S- VS -4 LVQH50S- VS -4 LVQH60S-V-4∗
93.6
50
111.2
50
116.7
50
170.7
71
180.2
71
V S
∗ The LVQ60 is available only with “V”. ∗ Drawings show the LVQ0-S.
(Max. S)
(mm)
Model
LVW LQ1
H G L
A
J
Model
(F)
Dimensions
Sensor (vent) port
B
A
681
Series
LVQ
Fittings and Special Tools Fittings How to Change Tubing Sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. Parts Composition Component parts
Connection tubing O.D. Body class
Metric size 4
6
8
10
12
19
25
1/8
3/16
1/4
3/8
1/2
3/4
1
2
Collar (Insert assembly)
Nut
Insert
Basic size
Yes
Yes
No
Reducer type
Yes
Yes
Yes
Inch size
3
Caution
4
1. Connect tubing by special tools.
5
For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1). (The pamphlet can be downloaded from the SMC home page.)
6
Changing the tubing size Example) Changing the tubing from an O.D. 1/4" to O.D. 1/8" within the body class 2.
Prepare an insert bushing and nut for 1/8" O.D. tubing (LQ-2U03) and change the tubing size. (Refer to How to Order Fitting Parts.) Insert bushing
Note) Tubing is sold separately.
LQ-2B07
Insert bushing LQ-2B03
Nut
Nut
LQ-2N07
LQ-2N03
Tubing O.D. 1/4" LQ-2U07 (Basic size)
Collar
Tubing
How to Order Fitting Parts
LQ
2 U 03
∗ U type is recommended when changing tubing sizes.
Fitting type
Tubing sizeNote)
Symbol Applicable fitting Nil LQ2 1 LQ1
LQ1, LQ2
Symbol Tubing size
Body class (fittings) Symbol
Body class Applicable fitting (fittings)
2 3 4 5 6
2 3 4 5 6
For pilot port
Parts type Symbol
LQ1 LQ2
U B N
LQ1
LQ1
LQ1
Parts type Nut & Insert bushing Insert bushing Nut
1 U 03
1
Body class Applicable fitting (fittings) 1
LQ1
Parts type Symbol
U B N
682
03 04 05 06 07 06 08 10 07 11
1/8" x 0.086"(3 x 2) 4x3 3/16" x 1/8" 6x4 1/4" x 5/32" 6x4 8x6 10 x 8 1/4" x 5/32" 3/8" x 1/4"
Body class Applicable Body class Applicable Symbol Tubing size fitting (fittings) fitting (fittings) 10 x 8 10 12 x 10 12 4 2 11 3/8" x 1/4" LQ1 13 1/2" x 3/8" LQ2 12 x 10 LQ1 12 LQ2 13 1/2" x 3/8" 5 19 3/4" x 5/8", 19 x 16 3 19 3/4" x 5/8", 19 x 16 6 LQ1 25 1" x 7/8", 25 x 22
Note) Refer to page 724 for details of the applicable tubing sizes.
Tubing sizeNote 1) Note 2)
Body class (fittings) Symbol
Tubing
Tubing O.D. 1/8" LQ-2U03 (Reducer type)
Parts type Nut & Insert bushing Insert bushing Nut
Symbol
Tubing size
Body class (fittings)
03 04
1/8" x 0.086"(3 x 2) 4x3
1
Note 1) Cannot change to tubing with different diameter. Note 2) Refer to page 724 for details of the applicable tubing sizes.
Air Operated Flare, Integral Fitting Type Hyper Fitting
Series LVQ-Z
RoHS LVC
How to Order
LVQ 2 0
LVA LVH
Z 07
LVD
Option 2 Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
Orifice dia. ø4 ø8 ø10 ø16 ø22
Pilot port type Nil
M R N
With LQ3 fitting Connection tubing size 1/8" x 0.086" (3 x 2)Note) With LQ3 fitting Connection tubing size 4 x 3Note) Rc 1/8 Threaded NPT 1/8 Threaded
Note) Refer to page 724 for details of the applicable tubing sizes.
N.C. N.O. Double acting
Note) Refer to variations in the table below for valve type combinations.
Nil
None
1 2 3 4 5
With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator
6 7 8 9 24
For high temperature Buffer material FFKM For ammonium hydroxide
High flow type LVQ6 only
P
High back pressure with flow rate adjustment High back pressure with by-pass High back pressure with flow rate adjustment & by-pass High back pressure with indicator With indicator & by-pass
Model
Orifice di ameter g O.D Metric .
Tubin
2
Body class 3 4 5 6
Note) Refer to page 724 for details of the applicable tubing sizes.
Type
Va
lve
Symbol
typ
Basic N.C.
PB
PA
N.C.
N.O. Double acting
PA
Note 1) Options in the same table cannot be combined each other. Note 2) High back pressure specifications (5 to 9) in Option 1 and high temperature specification (J) in Option 2 cannot be combined. Note) Refer to variations in the table below for valve type and option 1 combinations. Options in the same table can not be combined each other.
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
ø4
ø8
ø10
ø16
ø22
6
10
12
19
25
1/4
3/8
1/2
3/4
1
N.C.
AB
acting
With flow rate adjustment
PA B
N.C.
A
N.C.
With by-pass
Double acting
N.C.
With flow rate adjustment & by-pass
PA
PA
N.C.
A Double PB N.C. Double acting acting B
A B
PA B
A
N.C.
N.C.
With indicator
PA B
A
N.C.
N.C.
High back pressure
PA B
A
N.C.
N.C.
With indicator & by-pass
PA B
A
LVQ LVP LVW LQ1 LQ3 LVN LQHB TL TIL TLM TILM TD TID TH TIH
A N.O. PB N.O. Double acting Double
AB
B
e
Inch
9 24
None
Variations
Applicable tubing sizeNote) Connection tubing size Metric size 3x2 03 4x3 04 6x4 06 8x6 08 10 x 8 10 12 x 10 12 19 x 16 19 25 x 22 25 Inch size 03 1/8" x 0.086" 1/4" x 5/32" 07 3/8" x 1/4" 11 1/2" x 3/8" 13 3/4" x 5/8" 19 1" x 7/8" 25
2
Option
J K N
High back pressure (0.42 MPa)
LQ3 integral fitting
Symbol
1
Applicable option 3 4 5 6 7 8
Nil
Option 1
Valve type 0 1 2
Symbol
N.C.
N.C.
683
Series
LVQ-Z Standard Specifications Model
Tubing
O.D.Note 1)
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
6
10
12
19
25
1/4
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192 (228) Note 2)
0.35
1.3
1.9
5
8 (9.5) Note 2)
Metric Inch
Orifice diameter Av x 10–6 m2 Flow characteristics Cv Withstand pressure (MPa)
1
Operating pressure Standard High temperature
–98 kPa to 0.5 MPa
Standard Back pressure High back pressure (MPa) High temperature
0.3 or less
–98 kPa to 0.4 MPa
–98 kPa to 0.3 MPa 0.2 or less 0.42 or less 0.2 or less
0.3 or less
Valve leakage (cm3/min)
0 (With water pressure)
Pilot air pressure (MPa)
0.3 to 0.5 (High back pressure: 0.45 to 0.55) 1/8" (ø3), Rc 1/8, NPT 1/8
Pilot port size Standard Fluid temperature (°C) High temperature
0 to 100 0 to 170 0 to 60
Ambient temperature (°C) 0.08
Weight (kg)
0.18
0.22
0.72
0.87
Note 1) Refer to page 724 for details of the applicable tubing sizes. Note 2) ( ): High flow type
Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
Piping
Caution 1. Connect tubing by special tools. For information on tubing fittings and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting/Flare Type Series LQ3 Fitting Procedure” (M-E06-4). (The pamphlet can be downloaded from the SMC home page.)
2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping
684
Body class
Torque (N·m)
2 3 4 5 6
1.6 to 1.8 3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0
Air Operated Flare, Integral Fitting Type
Series
LVQ-Z
Construction Basic N.C.
N.O.
Double acting PB
PB
LVC LVA LVH
q
q
q
LVD PA
PA
e
e B B
w
r
A
B
LVP
e
A
B A
LVQ LVW
A
B
LQ1
A
LQ3 LVN
With flow rate adjustment
With by-pass
LQHB
With indicator
TL TIL TLM TILM
y
TD TID
t
TH TIH PA
PA
t B
A
B
B A
B
A A
Component Parts No.
Description
1
Actuator
2
Body
3
Diaphragm
4
Nut
5
Flow rate adjuster
6
Indicator/Cover
Material
PVDF PFA PTFE PFA PVDF PP
685
Series
LVQ-Z
Dimensions
Q
Basic, High back pressure N.C. valve
øE (P)
R Rc 1/8 (NPT 1/8) Sensor (vent) port With LQ3 fitting 1/8" (ø3, ø4) Pilot port
K
F
Rc 1/8 (NPT 1/8) Pilot port
A
A
B
L
G
J
B
(H)
Pilot port Rc 1/8 (NPT 1/8) Threaded type
N
D
B
A
C
M
LVQ0-Z
Dimensions (N.C. Valve)
(mm)
Model
A
B
C
D
E
F
LVQ20-Z LVQ30-Z LVQ40-Z LVQ50-Z LVQ60-Z
25.5
46
31.5
58
33.6
56.5
12
28.5
57
34.5
69
45.4
77
16.5
28.5
57
34.5
69
45.4
82.5
22
42
84
48
96
75
127
42
84
48
96
75
136.8
686
G
H
J
K
L
M
N
P
75
Q
21.8
37
5
7
15
53.5
21
25.3
R
103
32
50
6
7
20
59.5
25
31.2
114
37.5
55.5
6
7
20
59.5
25
31.2
25
150
50.2
78.2
10
7
20
73
38.5
45
32
167
60
88
10
7
20
73
38.5
45
Air Operated Flare, Integral Fitting Type
Series
LVQ-Z
With flow rate adjustment N.C. valve
LVC Dimensions
LVA
(mm)
LVQ20-Z-1 LVQ30-Z-1 LVQ40-Z-1 LVQ50-Z-1 LVQ60-Z-1
(Max. S)
S
Model
83 113.5
LVH LVD
119 171.5
B
A
LVQ
182.5
LVP LVW
With by-pass N.C. valve
LVQ20
N
LQ1
M
LQ3 D
B
A
C
LVN LQHB
. T)
(Max
TL TIL
LVQ30, LVQ40 LVQ50, LVQ60
TLM TILM
V
TD TID TH TIH
N M V
A
(Max. T)
D
A
B
Z
C
U
B
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
T
U
LVQ20-Z-2 LVQ30-Z-2 LVQ40-Z-2 LVQ50-Z-2 LVQ60-Z-2
25.5
46
31.5
58
7
15
34.3
10.6
V 7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
687
Series
LVQ-Z
Dimensions LVQ20
N M
D
B
A
C
With flow rate adjustment & by-pass N.C. valve
. T) (Max
V
N M
(Max. S)
LVQ30, LVQ40 LVQ50, LVQ60
(Max. T)
D
A
U
B
A
B
C
V
Z
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
LVQ20-Z-3 LVQ30-Z-3 LVQ40-Z-3 LVQ50-Z-3 LVQ60-Z-3
25.5
46
31.5
58
7
15
83
34.3
10.6
V 7
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
25.5
51
31.5
63
7
15
119
37.9
22
10
38
76
44
88
7
20
171.5
64
25
17
38
76
44
88
7
20
182.5
66
32
17
With indicator N.C. valve (mm)
Model
S
LVQ20-Z-4 LVQ30-Z-4 LVQ40-Z-4 LVQ50-Z-4 LVQ60-Z-4
70.5
688
88.5
S
Dimensions
94 134.5 144
B
A
Air Operated Flare, Integral Fitting Type
Series
LVQ-Z
Basic N.O. valve
Q
LVC LVA LVH Rc 1/8 (NPT 1/8) Pilot port
øE
With LQ3 fitting 1/8" (ø3, ø4)
LVD
R
Pilot port
LVQ Rc 1/8 (NPT 1/8) Sensor (vent) port
Rc 1/8 (NPT 1/8) Vent port
W
LVP LVW
Rc 1/8 (NPT 1/8) Vent port A
(F)
B
K J G L
LQ3
Pilot port Rc 1/8 (NPT 1/8) Threaded type
A
B
LQ1 LVN
(H)
LQHB TL TIL
N M
TLM TILM TD TID D
B
A
C
TH TIH
Double acting valve (P)
With LQ3 fitting 1/8" (ø3, ø4) Pilot port
R
Rc 1/8 (NPT 1/8) Pilot port
Rc 1/8 (NPT 1/8) Pilot port
With LQ3 fitting 1/8" (ø3, ø4) Pilot port
Rc 1/8 (NPT 1/8) Sensor (vent) port
B
LVQ 12 -Z
Dimensions (N.O. Valve, Double Acting Valve)
Model
A
B
B
D
E
LVQ2 -Z LVQ312-Z LVQ412-Z LVQ512-Z LVQ612-Z
25.5
46
31.5
58
33.6
89.5
28.5
57
34.5
69
45.4
107.5
16.5
103
28.5
57
34.5
69
45.4
113
22
42
84
48
96
75
153.2
42
84
48
96
75
163
1 2
A
A
B
F
G
J
75
(mm)
K
L
M
N
P
21.8
37
5
7
15
53.5
32
50
6
7
20
59.5
114
37.5
55.5
6
7
20
25
150
50.2
78.2
10
7
32
167
60
88
10
7
12
H
Q
R
W
21
25.3
64
25
31.2
82
59.5
25
31.2
20
73
38.5
45
128
20
73
38.5
45
137.5
87.5
689
Series
LVQ-Z
Dimensions LVQ2 12
N M
D
B
A
C
With by-pass Double acting valve
(Max . T)
LVQ3 12 , LVQ4 12 LVQ5 12 , LVQ6 12
V
N M V
A
D
B A
C
U
B
(Max. T)
Z
View Z
Dimensions (N.O Valve, Double Acting Valve)
(mm)
Model
A
B
C
D
M
N
T
U
LVQ2 -Z-2 LVQ3 12 -Z-2 LVQ4 12 -Z-2 LVQ5 12 -Z-2 LVQ6 12 -Z-2
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
1 2
690
V
Air Operated Flare, Integral Fitting Type Space Saving/Space Saving Connection
Series LVQS-Z
RoHS LVC
How to Order
LVA LVH
LVQ 2 0 S Z 07 Orifice dia. ø4 ø8 ø10 ø16 ø22
N.C. N.O. Double acting
Body type
LQ3 integral fitting Applicable fitting size Fitting size
07 11 13 19 25
2 3 4 5 6
2
9 24
Option None
Nil
J K N
For high temperature
With LQ3 fitting Connection tubing size 1/8" x 0.086" (3 x 2)Note) With LQ3 fitting Connection tubing size 4 x 3Note) Rc 1/8 Threaded NPT 1/8 Threaded
M R N
Nil
None
1 2 3 4 5
With flow rate adjustment
P
Buffer material FFKM For ammonium hydroxide
High flow type LVQ6 only
Note 1) Options in the same table cannot be combined each other. High back pressure with flow rate adjustment Note 2) High back pressure specifications (5 to 9) High back pressure with by-pass in Option 1 and high temperature specification (J) in Option 2 cannot be combined. High back pressure with flow rate adjustment & by-pass Note) Refer to variations in the table below High back pressure with indicator for valve type and option 1 combinaWith indicator & by-pass tions. Options in the same table can not be combined each other.
2
With flow rate adjustment & by-pass With indicator High back pressure (0.42 MPa)
Variations
Model LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S Orifice di ameter Conne ø4 ø8 ø10 ø16 ø22 ction fi tting s Valv ize e ty Symbol 2 3 4 5 6 pe
Type Basic
N.C.
PA
Body class 3 4 5 6
Note) Refer to page 692 for How to Order applicable fittings. Select a tube with the same size as the valve side fitting.
6 7 8 9 24
With by-pass
Space saving connection
Symbol
1
Nil
Option 1
Note) Refer to variations in the table below for valve type combinations.
S
Symbol
Applicable option 3 4 5 6 7 8
Pilot port type
Note) Refer to page 724 for details of the applicable tubing sizes.
Valve type 0 1 2
LVD
Option 2
Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
B
With by-pass
PA
PA A B A N.C. N.C. N.C.
B
Double acting
PA B
N.C.
With flow rate adjustment & by-pass
AB
acting
With flow rate adjustment
PA
N.C.
A B
A Double PB N.C. Double acting acting PA B
A
N.C.
N.C.
With indicator
PA B
A
N.C.
N.C.
High back pressure
PA B
A
N.C.
N.C.
With indicator & by-pass
PA B
A
LVP LVW LQ1 LQ3 LVN LQHB TL TIL TLM TILM TD TID TH TIH
A N.O. PB N.O. Double acting Double
AB
N.C.
N.O. Double acting
PA
PB
N.C.
LVQ
N.C.
N.C.
691
Series
LVQS-Z How to Order Space Saving Fittings
LQ3 E
SN
6A
Packaging Symbol
Nil 1
Fitting type E Union elbow
Packaging Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5
One of the nuts is not attached.
T Union tee
Applicable tubing sizeNote 1) Note 2) Size Symbol
P Panel mount union
2 3 3 4 5 6
U Union
1 1 2 1 1 1
Applicable tubing size (mm) 6x4 10 x 8 8x6 12 x 10 19 x 16 25 x 22
Size Symbol Applicable tubing size (inch) 1/4" x 5/32" 2 A 3/8" x 1/4" 3 A 1/2" x 3/8" 4 A 3/4" x 5/8" 5 A 1" x 7/8" 6 A
Note 1) Select the same size as the fitting on the valve. Note 2) Refer to page 724 for details of the applicable tubing sizes.
Piping Example
LQ3T3A-SN (Union tee)
LVQ30S-Z11R
Ordering Example
Applicable tubing size 3/8" x 1/4"
LQ3E3A-SN (Union elbow) Applicable tubing size 3/8" x 1/4"
692
LVQ30S-Z11R LQ3T3A-SN (Union tee) LQ3E3A-SN (Union elbow)
1 1 1
Note) For shipment, the valve and fittings are individually packaged and dispatched together in 1 box.
Air Operated Flare, Integral Fitting Type
Series
LVQS-Z
Standard Specifications LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S
Model
Connection fitting size
2
3
4
5
6
Orifice diameter
ø4
ø8
ø10
ø16
ø22
Av x 10–6 m2 Flow characteristics Cv
8.4
31.2
45.6
120
192 (228) Note 1)
0.35
1.3
1.9
5
8 (9.5) Note 1)
Withstand pressure (MPa) Operating pressure
Standard
1 –98 kPa to 0.5 MPa
High temperature
–98 kPa to 0.4 MPa
0.3 or less
Back pressure High back pressure (MPa) High temperature
0.2 or less 0.2 or less
Valve leakage (cm3/min)
0 (With water pressure)
Pilot air pressure (MPa)
0.3 to 0.5 (High back pressure: 0.45 to 0.55)
Pilot port sizeNote 2)
LVP LVW
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
Standard Fluid temperature (°C) High temperature
0 to 100
Ambient temperature (°C)
0 to 60
Weight (kg)
LQ1 LQ3
0 to 170 0.085
0.175
0.223
0.725
0.835
Note 1) ( ): High flow type Note 2) Refer to page 724 for details of the applicable tubing sizes.
TL TIL
Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
Piping
Caution 1. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Torque (N·m)
2 3 4 5 6
1.6 to 1.8
LVN LQHB
Specific Product Precautions
Body class
LVH LVQ
0.42 or less 0.3 or less
LVA LVD
–98 kPa to 0.3 MPa
Standard
LVC
3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0
693
TLM TILM TD TID TH TIH
Series
LVQS-Z
Construction Basic N.C.
N.O.
Double acting PB
PB
q
q
q
PA
A
wert
With flow rate adjustment
B
e
With by-pass
A
B
B
A
1/4·6
1/4·6
1/4·6
B
A
B
1/4·6
PA
e
A
With indicator
y
u
PA
PA
1/4·6
1/4·6
1/4·6
A
B
A
1/4·6
t B
1/4
B
A
Component Parts No.
Description
Material
1
Actuator
2
Body
3
Diaphragm
4
Plug
PP
5
Nut
PFA
6
Flow rate adjuster
7
Indicator/Cover
694
PVDF PFA PTFE
PVDF PP
B
A
Air Operated Flare, Integral Fitting Type
Series
LVQS-Z
Dimensions Basic, High back pressure N.C. valve
LVC 1/4·6
LVA Q
LVH LVD LVQ LVP
Rc 1/8 (NPT 1/8) Sensor (vent) port
øE
(P)
LVW
R
LQ1 With LQ3 fitting 1/8" (ø3, ø4) Pilot port
Rc 1/8 (NPT 1/8) Pilot port
LQ3
F
LVN TL TIL
L
G
J
A
1/4·6
1/4·6
K
LQHB B
1/4·6
1/4·6
A
B
(H)
TLM TILM
Pilot port Rc 1/8 (NPT 1/8) Threaded type
TD TID TH TIH
N
LVQ0S-Z
D
1/4·6
1/4·6
B
A
C
M
Dimensions (N.C. Valve)
(mm)
Model
A
B
C
D
E
F
LVQ20S-Z LVQ30S-Z LVQ40S-Z LVQ50S-Z LVQ60S-Z
25.5
46
31.5
58
33.6
56.5
28.5
57
34.5
69
45.4
28.5
57
34.5
69
45.4
42
84
48
96
75
42
84
48
96
75
G
H
J
K
L
M
N
P
12
105
77
16.5
82.5
22
127 136.8
Q
21.8
37
5
7
15
53.5
21
25.3
R
137
32
50
6
7
20
59.5
25
31.2
151
37.5
55.5
6
7
20
59.5
25
31.2
25
202
50.2
78.2
10
7
20
73
38.5
45
32
236
60
88
10
7
20
73
38.5
45
695
Series
LVQS-Z
Dimensions With flow rate adjustment, High back pressure with flow rate adjustment N.C. valve
Dimensions
(mm)
LVQ20S-Z-1 LVQ30S-Z-1 LVQ40S-Z-1 LVQ50S-Z-1 LVQ60S-Z-1
(Max. S)
S
Model
83 113.5 119
A
1/4·6
B
1/4·6
171.5 182.5
With by-pass, High back pressure with by-pass N.C. valve
N
LVQ20S
D
1/4·6
1/4·6
1/4·6
B
A
C
M
. T)
(Max
A
LVQ30S, LVQ40S LVQ50S, LVQ60S
U
1/4·6
1/4·6
B
1/4
V
N M V
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
T
U
LVQ20S-Z-2 LVQ30S-Z-2 LVQ40S-Z-2 LVQ50S-Z-2 LVQ60S-Z-2
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
696
V
D
3/8
(Max. T)
3/8
B
A
C
Z
Air Operated Flare, Integral Fitting Type
With flow rate adjustment & by-pass, High back pressure with flow rate adjustment & by-pass N.C. valve
Series
LVQS-Z
N M
LVC LVH
D
1/4·6
A 1/4·6
1/4·6
B
LVA
C
LVQ20S
LVD . T) (Max
LVQ
V
LVP LVW LVQ30S, LVQ40S LVQ50S, LVQ60S
LQ1 LQ3
N
LVN
M
LQHB
A
3/8
D
C
TL TIL
U
(Max. T)
1/4·6
1/4·6
B
3/8
B
A
(Max. S)
V
1/4
TD TID
Z
TH TIH
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
LVQ20S-Z-3 LVQ30S-Z-3 LVQ40S-Z-3 LVQ50S-Z-3 LVQ60S-Z-3
25.5
46
31.5
58
7
15
83
34.3
10.6
7
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
25.5
51
31.5
63
7
15
119
37.9
22
10
38
76
44
88
7
20
171.5
64
25
17
38
76
44
88
7
20
182.5
66
32
17
V
With indicator, High back pressure with indicator N.C. valve (mm)
Model
S
LVQ20S-Z-4 LVQ30S-Z-4 LVQ40S-Z-4 LVQ50S-Z-4 LVQ60S-Z-4
70.5 88.5
S
94 1/4·6
134.5
B
A
1/4·6
Dimensions
TLM TILM
144
697
LVQS-Z
Series
Dimensions Basic N.O. valve
Q
1/4·6
1/4·6
With LQ3 fitting 1/8" (ø3, ø4) Pilot port
øE
R
Rc 1/8 (NPT 1/8) Pilot port
Rc 1/8 (NPT 1/8) Sensor (vent) port Rc 1/8 (NPT 1/8) Vent port
K
W
(F)
Rc 1/8 (NPT 1/8) Vent port
G
1/4·6
A
1/4·6
B
L
J
A
1/4·6
1/4·6
B
(H) N
D
1/4·6
1/4·6
B
A
C
M
Double acting valve With LQ3 fitting 1/8" (ø3, ø4) Pilot port
With LQ3 fitting 1/8" (ø3, ø4)
(P)
Pilot port
Rc 1/8 (NPT 1/8) Pilot port
R
Rc 1/8 (NPT 1/8) Vent port Rc 1/8 (NPT 1/8)
1/4·6
A
A
B
Dimensions (N.O. Valve, Double Acting Valve)
Model
A
B
C
D
E
LVQ212 S-Z LVQ312 S-Z LVQ412 S-Z LVQ512 S-Z LVQ612 S-Z
25.5
46
31.5
58
33.6
89.5
28.5
57
34.5
69
45.4
107.5
28.5
57
34.5
69
45.4
42
84
48
96
42
84
48
96
698
1/4·6
1/4·6
1 LVQ2S-Z
B
1/4·6
Sensor (vent) port
F
G
H
J
12
105
16.5
137
113
22
75
153.2
75
163
(mm)
K
L
M
N
P
21.8
37
5
7
15
53.5
32
50
6
7
20
59.5
151
37.5
55.5
6
7
20
25
202
50.2
78.2
10
7
32
236
60
88
10
7
Q
R
W
21
25.3
64
25
31.2
82
59.5
25
31.2
20
73
38.5
45
128
20
73
38.5
45
137.5
87.5
Air Operated Flare, Integral Fitting Type
With by-pass Double acting valve
Series
LVQS-Z
LVQ2 12 S N
LVC
M
LVA C 1/4·6
D
A 1/4·6
1/4·6
B
LVH LVD
(Max
LVQ
. T)
LVP
V
LVW LQ1 LQ3
LVQ3 12 S, LVQ4 12 S LVQ5 12 S, LVQ6 12 S
LVN
N M
LQHB
V
TL TIL C D
3/8
A B (Max. T)
U
1/4·6
1/4·6
1/4
3/8
A
B
TLM TILM
Z
TH TIH View Z
Dimensions (N.O Valve, Double Acting Valve)
(mm)
Model
A
B
C
D
M
N
T
U
LVQ221 -S-Z-2 LVQ321 -S-Z-2 LVQ412 -S-Z-2 LVQ512 -S-Z-2 LVQ612 -S-Z-2
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
TD TID
V
699
Manually Operated Flare, Integral Fitting Type Hyper Fitting
Series LVQH-Z
RoHS
How to Order
LVQH 2 0
Z 07
1 Option
Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
Symbol Nil
Orifice dia. ø4 ø8 ø10 ø16 ø22
K N
Option None Buffer material FFKM For ammonium hydroxide
Note) Options cannot be combined each other.
LQ3 integral fitting
Handle operation 1 4
Applicable tubing size Connection Symbol tubing O.D. Metric size ø3 03 ø4 04 ø6 06 08 ø8 10 ø10 12 ø12 19 ø19 25 ø25 Inch size 03 1/8 07 1/4 11 3/8 13 1/2 19 3/4 25 1
2
Body class 3 4 5 6
90° turn type Multi-turn type (With indicator)
Vent port type Nil
R
Threaded NPT 1/8 Threaded Rc1 /8
Variations Model LVQH20 LVQH30 LVQH40 LVQH50 LVQH60 Orifice di ameter ø4 ø8 ø10 ø16 ø22 g O.D Metric . 6 10 12 19 25 Inch Symbol 1/4 3/8 1/2 3/4 1
Tubin Type
90° turn type B
A
B
A
Multi-turn type
700
Manually Operated Flare, Integral Fitting Type
Series
LVQH-Z
Standard Specifications LVQH20 LVQH30 LVQH40 LVQH50 LVQH60
Model
Metric
Tubing O.D.
Inch
Orifice diameter –6
Av x 10 m2 Flow characteristics Cv
6
10
12
19
1/4
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192
0.35
1.3
1.9
5
8
Withstand pressure (MPa) Fluid pressure
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
Valve leakage (cm3/min)
0 to 100
Ambient temperature (°C)
0 to 60
LVA LVD LVQ
0 (With water pressure)
Fluid temperature (°C)
LVC LVH
1
Back pressure (MPa)
Weight (kg)
25
LVP
LVQH0-1
0.12
0.27
0.32
1.14
1.20
LVQH0-4
0.11
0.25
0.23
0.72
0.82
LVW LQ1 LQ3
Specific Product Precautions
LVN
Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
LQHB
Piping
TLM TILM
Caution
TL TIL
TD TID
1. Connect tubing by special tools.
TH
For information on tubing fittings and special tools, please see the pamphlet “High TIH Purity Fluoropolymer Fittings Hyper Fitting Flare Type Series LQ3 Fitting Procedure” (M-E06-4). (The pamphlet can be downloaded from the SMC home page.)
2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Body class
Torque (N·m)
2 3 4 5 6
1.6 to 1.8 3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0
701
Series
LVQH-Z
Construction 90° turn type
t
q
e
A
B
w
r
Multi-turn type (With indicator)
y
B
B
Component Parts No.
Description
1
Actuator
2
Body
3
Diaphragm
4
Nut
5
Handle
6
Indicator/Cover
702
Material
PVDF PFA PTFE PFA PVDF PP
t
A
A
Manually Operated Flare, Integral Fitting Type
Series
LVQH-Z
Dimensions 90° turn type
Locking (Valve closed)
°
90
LVC Q
LVA
Non-locking (Valve open)
LVH LVD
Y
LVQ Rc 1/8 (NPT 1/8) Sensor (vent) port
ø7 F
LVW K
LQ1
(mm)
Model
A
B
C
D
F
LVQH20-Z-1 LVQH30-Z-1 LVQH40-Z-1 LVQH50-Z-1 LVQH60-Z-1
25.5
46
31.5
58
79
28.5
57
34.5
69
103
16.5
103
28.5
57
34.5
69
108
22
114
42
84
48
96
165
25
150
42
84
48
96
175
32
167
K
L
M
N
37
5
7
15
21
55
32
50
6
7
20
25
80
37.5
55.5
6
7
20
25
80
50.2
78.2
10
7
20
38.5
110
60
88
10
7
20
38.5
110
TL TIL TLM TILM
Y
TD TID
C
J 21.8
LQHB N M
TH TIH
D
Model
LVQH20-Z-1 LVQH30-Z-1 LVQH40-Z-1 LVQH50-Z-1 LVQH60-Z-1
LVN
(H)
75
A
Q
H
B
G 12
LQ3
A
B
G L
J
Dimensions
Multi-turn type (With indicator) Valve closed direction Valve open direction
(mm)
Model
S
Y
LVQH20-Z-4 LVQH30-Z-4 LVQH40-Z-4 LVQH50-Z-4 LVQH60-Z-4
93.6
50
111.2
50
116.7
50
170.7
71
180.2
71
(Max. S)
Y
Dimensions
LVP
B
A
703
Manually Operated Flare, Integral Fitting Type Space Saving/Space Saving Connection
Series LVQHS-Z
RoHS
How to Order
LVQH 2 0 S Z 07
1 Option
Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
Symbol Nil
Orifice dia. ø4 ø8 ø10 ø16 ø22
K N
Note) Options cannot be combined each other.
Body type S
Option None Buffer material FFKM For ammonium hydroxide
Handle operation
Space saving connection
1 4
90° turn type Multi-turn type (With indicator)
LQ3 integral fitting Vent port type Nil
R
Threaded Threaded
NPT 1/8 Rc 1/8
Applicable fitting size Symbol
Fitting size
2
Body class 3 4 5 6
Inch size
07 11 13 19 25
2 3 4 5 6
Note) Refer to page 705 for How to Order applicable fittings. Select the same size as fitting on the valve.
Variations
Type
Model Orific Conne e diameter ction fi tting s Symb ize ol
90° turn type B
A
B
A
Multi-turn type
704
LVQ20S
LVQ30S
LVQ40S
LVQ50S
LVQ60S
ø4
ø8
ø10
ø16
ø22
2
3
4
5
6
Manually Operated Flare, Integral Fitting Type
Series
LVQHS-Z
How to Order Space Saving Fittings
LQ3 E
SN
6A
Packaging Symbol
Nil 1
Fitting type E Union elbow
LVC
Packaging Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5
LVA LVH
One of the nuts is not attached.
T
LVD
Union tee
Applicable tubing sizeNote 1) Note 2) Size Symbol
P Panel mount union
U Union
2 3 3 4 5 6
1 1 2 1 1 1
Applicable tubing size (mm) 6x4 10 x 8 8x6 12 x 10 19 x 16 25 x 22
Size Symbol Applicable tubing size (inch) 1/4" x 5/32" 2 A 3/8" x 1/4" 3 A 1/2" x 3/8" 4 A 3/4" x 5/8" 5 A 1" x 7/8" 6 A
LVQ LVP LVW LQ1
Note 1) Select the same size as the fitting on the valve. Note 2) Refer to page 724 for details of the applicable tubing sizes.
LQ3 LVN LQHB TL TIL TLM TILM TD TID TH TIH
Piping Example LVQH30S-Z11R-1 LQ3T3A-SN (Union tee)
Applicable tubing size 3/8" x 1/4"
LQ3E3A-SN (Union elbow) Applicable tubing size 3/8" x 1/4"
Ordering Example
LVQH30S-Z11R-1 LQ3T3A-SN (Union tee) LQ3E3A-SN (Union elbow)
1 1 1
Note) For shipment, the valve and fittings are individually packaged and dispatched together in 1 box.
705
Series
LVQHS-Z Standard Specifications LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S
Model
Connection fitting size Orifice diameter Av x 10–6 m2 Flow characteristics Cv
2
3
4
5
6
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192
0.35
1.3
1.9
5
8
Withstand pressure (MPa) Fluid pressure
1 –98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
Back pressure (MPa) Valve leakage (cm3/min)
0 (With water pressure)
Fluid temperature (°C)
0 to 100
Ambient temperature (°C) Weight (kg)
0 to 60
LVQH0S-1
0.14
0.28
0.34
1.14
1.15
LVQH0S-4
0.13
0.21
0.25
0.72
0.86
Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
Piping
Caution 1. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping
706
Body class
Torque (N·m)
2 3 4 5 6
1.6 to 1.8 3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0
Manually Operated Flare, Integral Fitting Type
Series
LVQHS-Z
Construction 90° turn type
u
LVC LVA
q
LVH LVD LVQ LVP LVW LQ1
A
B
w
e
r
t
LQ3 LVN LQHB
Multi-turn type (With indicator)
y
TL TIL
u
TLM TILM TD TID
1/4·6
B
B
1/4·6
TH TIH
A
A
Component Parts No.
Description
Material
1
Actuator
2
Body
3
Diaphragm
4
Nut
PFA
5
Plug
PP
6
Indicator/Cover
7
Handle
PVDF PFA PTFE
PP PVDF
707
Series
LVQHS-Z
Dimensions 90° turn type
Locking (Valve closed)
° 90
Q
1/4·6
Non-locking (Valve open)
Y
Rc 1/8 (NPT 1/8) Sensor (vent) port
D
F
58
79
28.5
57
34.5
69
28.5
57
34.5
42
84
48
42
84
G
H
12
105
103
16.5
137
69
108
22
151
96
165
25
202
48
96
175
32
236
J
K
L
M
N
21.8
37
5
7
15
21
Q
55
32
50
6
7
20
25
80
37.5
55.5
6
7
20
25
50.2
78.2
10
7
20
38.5
110
60
88
10
7
20
38.5
110
N M
Y
1/4·6
Model
LVQH20S-Z-1 LVQH30S-Z-1 LVQH40S-Z-1 LVQH50S-Z-1 LVQH60S-Z-1
(H)
C
C 31.5
1/4·6
B 46
A
A
A 25.5
B
Model
LVQH20S-Z-1 LVQH30S-Z-1 LVQH40S-Z-1 LVQH50S-Z-1 LVQH60S-Z-1
B
80
Multi-turn type (With indicator)
Valve closed direction
1/4·6
1/4·6
Valve open direction
(mm)
S
Y
LVQH20S-Z-4 LVQH30S-Z-4 LVQH40S-Z-4 LVQH50S-Z-4 LVQH60S-Z-4
93.6
50
111.2
50
116.7
50
170.7
71
180.2
71
708
1/4·6
Model
B
A
1/4·6
Dimensions
(Max. S)
Y
D
(mm)
G L
J
1/4·6
Dimensions
1/4·6
(F)
ø7
Air Operated Tube Extension Integral Fitting Type
Series LVQ-T
RoHS LVC
How to Order
LVQ 2 0
LVA LVH
T 07
Orifice dia. ø4 ø8 ø10 ø16 ø22
Valve type 0 1 2
N.C. N.O. Double acting
Symbol Nil
Pilot port type Nil
M R N
With LQ1 fitting Connection tubing O.D. 1/8" (ø3) With LQ1 fitting Connection tubing O.D. ø4 Rc 1/8 Threaded NPT 1/8 Threaded
Nil
None
1 2 3 4
With flow rate adjustment
5 6 7 8 9
With by-pass With flow rate adjustment & by-pass With indicator
P
High back pressure (0.42 MPa) High back pressure with flow rate adjustment High back pressure with by-pass High back pressure with flow rate adjustment & by-pass High back pressure with indicator
Applicable tubing size Body class 2 3 4 5 6
ø6 ø10 ø12 ø19 ø25 1/4 3/8 1/2 3/4 1
Note) Refer to variations in the table below for valve type and option 1 combinations. Options in the same table can not be combined each other.
Model
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
ameter
ø4
ø8
ø10
ø16
ø22
Metric
6
10
12
19
25
1/4
3/8
1/2
3/4
1
Orifice di
g O.D
Type
. Va
lve
Symbol
typ
Basic N.C.
PA B
PA
e
Inch
N.C.
A N.O. PB N.O. Double acting Double AB
acting
With flow rate adjustment
PA
PA A B A N.C. N.C. N.C.
B
With by-pass
Double acting
With flow rate adjustment & by-pass
PA
PA
N.C.
A Double PB N.C. Double acting acting B
N.C.
PB
AB
N.C.
N.O. Double acting
A B
PA B
A
N.C.
N.C.
With indicator
PA B
A
N.C.
N.C.
High back pressure
LVP LVW LQ1 LQ3 LVN LQHB TL TIL TLM TILM
Tubin
Inch size
07 11 13 19 25
Note 1) Options in the same table cannot be combined each other. Note 2) High back pressure specifications (5 to 9) in Option 1 and high temperature specification (J) in Option 2 cannot be combined.
Variations
Metric size
06 10 12 19 25
LVQ
Option
9
None For high temperature Buffer material FFKM For ammonium hydroxide High flow type LVQ6 only
J K N
Tube extension fitting
Symbol
1
Applicable option 2 3 4 5 6 7 8
Option 1
Note) Refer to variations in the table below for valve type combinations.
Connection tubing O.D.
LVD
Option 2
Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
PA B
A
N.C.
N.C.
709
TD TID TH TIH
Series
LVQ-T Standard Specifications Model
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
Metric Inch Orifice diameter Av x 10–6 m2 Flow characteristics Cv Withstand pressure (MPa) Operating pressure Standard High temperature Standard Back pressure High back pressure (MPa) High temperature Valve leakage (cm3/min) Pilot air pressure (MPa) Pilot port size Standard Fluid temperature (°C) High temperature Ambient temperature (°C) Weight (kg)
6
10
12
19
25
1/4
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
0.35
1.3
1.9 1
5
192 (228) Note) 8 (9.5) Note)
Tubing O.D.
–98 kPa to 0.5 MPa –98 kPa to 0.4 MPa –98 kPa to 0.3 MPa 0.3 or less
0.2 or less 0.42 or less
0.3 or less
0.2 or less
0 (With water pressure) 0.3 to 0.5 (High back pressure: 0.45 to 0.55) 1/8" (ø3), ø4, Rc 1/8, NPT 1/8 0 to 100 0 to 170 0 to 60 0.08
0.15
0.16
0.60
0.70
Note) ( ): High flow type
Construction Basic N.C.
PB
PB
N.O.
Double acting
q
q
q
PA
PA
B
B
A
A
B
e w
B
A
A
e
e
With flow rate adjustment
A
B
With by-pass
With indicator
t
r
PA
PA
r B B
B
A A
Component Parts No.
Description
Material
1
Actuator
2
Body
3
Diaphragm
PTFE
4
Flow rate adjuster
PVDF
5
Indicator/Cover
710
PVDF PFA
PP
B
A A
Air Operated Tube Extension Integral Fitting Type
Series
LVQ-T
Dimensions Basic, High back pressure N.C. valve
LVC LVA Q
LVH LVD LVQ LVP øE
LVW
Rc 1/8 (NPT 1/8) Sensor (vent) port
(P)
LQ1
R
LQ3
Applicable tubing O.D. 1/8" (ø3, ø4) Pilot port
Rc 1/8 (NPT 1/8) Pilot port
LVN
F
LQHB K
TL TIL
A
TLM TILM
A
B
G
J
B
L
TD TID (H)
Pilot port Rc 1/8 (NPT 1/8) Threaded type
TH TIH
N
LVQ0-T
D
B
A
C
M
Dimensions (N.C. Valve)
(mm)
Model
A
B
C
D
E
F
G
H
J
K
L
M
N
P
LVQ20-T LVQ30-T LVQ40-T LVQ50-T LVQ60-T
25.5
46
31.5
58
33.6
56.5
12
111.5
28.5
57
34.5
69
45.4
77
16.5
28.5
57
34.5
69
45.4
82.5
22
42
84
48
96
75
127
42
84
48
96
75
137
Q
21.8
37
5
7
15
31.3
21
25.3
R
136
32
50
6
7
20
37.2
25
31.2
137
37.5
55.5
6
7
20
37.2
25
31.2
25
180
50.2
78.2
10
7
20
50.8
38.5
45
32
189
60
88
10
7
20
50.8
38.5
45
711
LVQ-T
Series
Dimensions With flow rate adjustment, High back pressure with flow rate adjustment N.C. valve
Dimensions
(Max. S)
(mm)
S
Model
LVQ20-T-1 LVQ30-T-1 LVQ40-T-1 LVQ50-T-1 LVQ60-T-1
83 113.5 119 171.5
B
A
182.5
N
LVQ20
M
B
D
A
C
With by-pass, High back pressure with by-pass N.C. valve
. T)
(Max
V
1/8
LVQ30, LVQ40 LVQ50, LVQ60
A
U
B
N M V
(Max. T)
D
B
A
C
Z
View Z
Dimensions Model
LVQ20-T-2 LVQ30-T-2 LVQ40-T-2 LVQ50-T-2 LVQ60-T-2
712
(mm)
A
B
C
D
M
N
T
U
25.5
46
31.5
58
7
15
34.3
10.6
V 7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
Air Operated Tube Extension Integral Fitting Type
LVQ-T
N M
LVC LVA
C
LVQ20
LVH
B
D
A
With flow rate adjustment & by-pass, High back pressure with flow rate adjustment & by-pass N.C. valve
Series
LVD . T) (Max
LVQ LVP
V
LVW LQ1 LVQ30, LVQ40 LVQ50, LVQ60
LQ3
N
LVN
M
TH TIH
Z View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
LVQ20-T-3 LVQ30-T-3 LVQ40-T-3 LVQ50-T-3 LVQ60-T-3
25.5
46
31.5
58
7
15
83
34.3
10.6
7
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
25.5
51
31.5
63
7
15
119
37.9
22
10
38
76
44
88
7
20
171.5
64
25
17
38
76
44
88
7
20
182.5
66
32
17
V
With indicator, High back pressure with indicator N.C. valve (mm)
Model
S
LVQ20-T-4 LVQ30-T-4 LVQ40-T-4 LVQ50-T-4 LVQ60-T-4
70.5
S
Dimensions
88.5 94 134.5
TLM TILM TD TID
(Max. T)
A
U
B
TL TIL D
B
1/8
LQHB C
A
(Max. S)
V
B
A
144
713
Series
LVQ-T
Dimensions
Q
Basic N.O. valve
Applicable tubing O.D. øE
1/8" (ø3), ø4 Pilot port
Rc 1/8 (NPT 1/8) Sensor (vent) port
R
Rc 1/8 (NPT 1/8) Pilot port
Rc 1/8 (NPT 1/8) Vent port
K
W
(F)
Rc 1/8 (NPT 1/8) Vent port
G
A
B
A
L
J
B
(H) N
D
B
A
C
M
Double acting valve Applicable tubing O.D.
(P)
1/8" (ø3), ø4 Pilot port
R
Applicable tubing O.D. 1/8" (ø3), ø4 Pilot port
Rc 1/8 (NPT 1/8) Pilot port
Rc 1/8 (NPT 1/8) Sensor (vent) port Rc 1/8 (NPT 1/8) Pilot port A
B
1 LVQ 2 -T
Model
LVQ212 -T LVQ312 -T LVQ412 -T LVQ512 -T LVQ612 -T
714
B
A
Dimensions (N.O. Valve, Double Acting Valve) A
B
C
D
E
F
25.5
46
31.5
58
33.6
81
28.5
57
34.5
69
45.4
99
28.5
57
34.5
69
45.4
42
84
48
96
42
84
48
96
G
(mm)
H
J
K
L
M
N
P
12
111.5
16.5
136
21.8
37
5
7
15
31.3
32
50
6
7
20
37.2
104
22
137
37.5
55.5
6
7
20
75
144.5
25
180
50.2
78.2
10
7
75
154.5
32
189
60
88
10
7
Q
R
W
21
25.3
64
25
31.2
82
37.2
25
31.2
20
50.8
38.5
45
128
20
50.8
38.5
45
137.5
87.5
Air Operated Tube Extension Integral Fitting Type
With by-pass Double acting valve
LVQ2 12
Series
LVQ-T
N M
LVC LVH
D
B
A
C
LVA
1/8
LVD (Max
LVQ
. T)
LVP
V
LVW LQ1 LVQ3 12 , LVQ4 12 LVQ5 12 , LVQ6 12
LQ3 LVN
N M
LQHB
V
U Z
(mm)
Model
A
B
C
D
M
N
T
U
LVQ2 -T-2 LVQ3 12 -T-2 LVQ4 12 -T-2 LVQ5 12 -T-2 LVQ6 12 -T-2
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
64
32
17
1 2
D View Z
Dimensions
TD TID TH TIH
(Max. T)
A
B
TLM TILM
C
A B
1/8
TL TIL
V
715
Manually Operated Tube Extension Integral Fitting Type
Series LVQH-T
RoHS
How to Order
LVQH 2 0 T 07
1 Option
Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
Symbol Nil
Orifice dia. ø4 ø8 ø10 ø16 ø22
K N
Note) Options cannot be combined each other.
Tube extension fitting
Handle operation 1 4
Applicable tubing size Symbol
Connection tubing O.D.
2
Body class 3 4 5 6
90° turn type Multi-turn type (With indicator)
Vent port type
Metric size
06 10 12 19 25
Option None Buffer material FFKM For ammonium hydroxide
Nil
ø6 ø10 ø12 ø19 ø25
Threaded Threaded
R
NPT 1/8 Rc 1/8
Inch size
07 11 13 19 25
1/4 3/8 1/2 3/4 1
Variations Tubin
g O.D
Type
Model LVQH20-T LVQH30-T LVQH40-T LVQH50-T LVQH60-T
Orifice di
.
ameter
ø4
ø8
ø10
ø16
ø22
Metric
6
10
12
19
25
1/4
3/8
1/2
3/4
1
Inch
Symbol
90° turn type B
A
B
A
Multi-turn type
716
Manually Operated Tube Extension Integral Fitting Type
Series
LVQH-T
Standard Specifications Model
LVQH20
LVQH30
LVQH40
LVQH50
LVQH60
Metric Inch Orifice diameter Av x 10–6 m2 Flow characteristics Cv Withstand pressure (MPa) Fluid pressure Back pressure (MPa) Valve leakage (cm3/min) Fluid temperature (°C) Ambient temperature (°C)
6
10
12
19
25
1/4
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
0.35
1.3
1.9 1
5
192 8
Tubing O.D.
LVQH0-1 LVQH0-4
Weight (kg)
–98 kPa to 0.5 MPa –98 kPa to 0.4 MPa 0.3 or less 0.2 or less 0 (With water pressure) 0 to 100 0 to 60 0.12
0.25
0.28
1.04
1.05
0.11
0.18
0.19
0.62
0.73
LVC LVA LVH LVD LVQ LVP LVW
Construction 90° turn type
LQ1
t
LQ3 LVN LQHB
q
TL TIL TLM TILM
e
B
TD TID TH TIH
A
w r y
t
Multi-turn type (With indicator)
B
B
Component Parts No.
Description
1
Actuator
2
Body
3
Diaphragm
4
Insert bushing
5
Handle
6
Indicator/Cover
A
A
Material
PVDF PFA PTFE PFA PVDF PP
717
Series
LVQH-T
Dimensions 90° turn type
Locking (Valve closed)
°
Q
90
Non-locking (Valve open)
Y
Rc 1/8 (NPT 1/8) Sensor (vent) port
(F)
ø7
B
(mm)
D
F
58
79
28.5
57
34.5
69
28.5
57
34.5
42
84
48
42
84
G
H
12
111.5
103
16.5
136
69
108
22
137
96
165
25
180
48
96
175
32
189
Model
J
K
L
M
N
LVQH20-T-1 LVQH30-T-1 LVQH40-T-1 LVQH50-T-1 LVQH60-T-1
21.8
37
5
7
15
21
Q
55
32
50
6
7
20
25
80
37.5
55.5
6
7
20
25
50.2
78.2
10
7
20
38.5
110
60
88
10
7
20
38.5
110
(H) N M
Y
C
C 31.5
D
B 46
A
A 25.5
B
Model
LVQH20-T-1 LVQH30-T-1 LVQH40-T-1 LVQH50-T-1 LVQH60-T-1
A
G L
J
Dimensions
80
Multi-turn type (With indicator)
Valve closed direction
Valve open direction
Dimensions
(mm)
Model
S
Y
LVQH20-T-4 LVQH30-T-4 LVQH40-T-4 LVQH50-T-4 LVQH60-T-4
93.6
50
111.2
50
116.7
50
170.7
71
180.2
71
718
(Max. S)
Y
B
A
Air Operated, 0.5 MPa Back Pressure Tolerant Insert Bushing, Integral Fitting Type Hyper Fitting
Series LVQH
RoHS
LVQ 2 0 H
How to Order
LVA
S 07
LVH
Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
Option 2
Orifice dia. ø4 ø8 ø10 ø16 ø22
Valve type 0 1 2
Symbol
N.C. N.O. Double acting
K N P
V S
Body class 2, 3, 4, 5, 6 2, 3, 4, 5
Applicable tubing sizeNote) Symbol
Basic size
With reducer
Note) Refer to page 724 for details of the applicable tubing sizes.
Port B (OUT) different dia. size Symbol Nil
Application Ports A & B same size
Refer to the applicable tubing table to the left.
Different diameter tubings can be selected within the same body class.
Pilot port type Nil
M R N
LQ1 integral fitting Connection tubing O.D. 1/8" (ø3) LQ1 integral fitting Connection tubing O.D. ø4 Rc 1/8 Threaded NPT 1/8 Threaded
LVP LVW LQ1 LQ3
Option 1
Note) Insert bushing is used in common.
Connection Body class tubing size 2 3 4 5 6 Metric size 03 3x2 04 4x3 06 6x4 08 8x6 10 10 x 8 12 12 x 10 19 x 16 19 25 x 22 25 Inch size 03 1/8" x 0.086" 05 3/16" x 1/8" 07 1/4" x 5/32" 11 3/8" x 1/4" 13 1/2" x 3/8" 19 3/4" x 5/8" 1" x 7/8" 25
LVD LVQ
Option None Buffer material FFKM For ammonium hydroxide High flow type LVQ6 only
Note) Options in the same table cannot be combined each other.
Fitting type Fitting type LQ1 LQ2
Applicable option 1 2 3 4 24
Nil
Note) Refer to variations in the table below for valve type combinations.
Symbol
LVC
Nil
None
1 2 3 4 24
With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator
Note) Refer to variations in the table below for valve type and option 1 combinations. Options in the same table cannot be combined each other.
With indicator & by-pass
LQHB TL TIL TLM TILM
Variations Model LVQ20H LVQ30H LVQ40H LVQ50H LVQ60H Orifice di ameter ø4 ø8 ø10 ø16 ø22 g O.D . Metric 6 10 12 19 25 Va Inch lve Symbol typ 1/4 3/8 1/2 3/4 1 e Tubin
Type Basic N.C.
PB
PA
PA
N.C.
AB AB A N.O. PB N.C. N.O. Double acting Double
B N.O. Double acting
acting
With flow rate adjustment
PA B
N.C.
A
N.C.
With by-pass
LVN
Double acting
N.C.
With flow rate adjustment & by-pass
PA
PA
N.C.
A Double PB N.C. Double acting acting B
A B
PA B
A
N.C.
N.C.
With indicator
PA B
A
N.C.
N.C.
With indicator & by-pass
PA B
A
N.C.
N.C.
719
TD TID TH TIH
Air Operated, 0.5 MPa Back Pressure Tolerant Flare, Integral Fitting Type Hyper Fitting
Series LVQH-Z
RoHS How to Order
LVQ 2 0 H Z 07 Body class Symbol Body class 2 2 3 3 4 4 5 5 6 6
Orifice dia. ø4 ø8 ø10 ø16 ø22
0 1 2
Connection tubing size Metric size 3x2 03 4x3 04 6x4 06 8x6 08 10 x 8 10 12 x 10 12 19 x 16 19 25 x 22 25 Inch size 1/4" x 5/32" 07 3/8" x 1/4" 11 1/2" x 3/8" 13 3/4" x 5/8" 19 1" x 7/8" 25
2
Body class 3 4 5 6
Symbol
N.C. N.O. Double acting
Option None Buffer material FFKM For ammonium hydroxide High flow type LVQ6 only
K N
Note) Refer to variations in the table below for valve type combinations.
P
Note) Options in the same table cannot be combined each other.
Pilot port type Nil
M R N
With LQ3 fitting Connection tubing size 1/8" x 0.086" (3 x 2)Note) With LQ3 fitting Connection tubing size 4 x 3Note) Rc 1/8 Threaded NPT 1/8 Threaded
Note) Refer to page 724 for details of the applicable tubing sizes.
Variations Model LVQ20H Orifice di ameter ø4 g O.D . Metric 6 Va Inch lve Symbol 1/4 typ e Tubin
Type Basic N.C.
Option 1 Nil
None
1 2 3 4 24
With flow rate adjustment & by-pass
With flow rate adjustment With by-pass With indicator With indicator & by-pass
Note) Refer to variations in the table on the right for valve type and option 1 combinations. Options in the same table can not be combined each other.
PB
PA
Note) Refer to page 724 for details of the applicable tubing sizes.
N.C.
N.O. Double acting
PA
N.C.
A N.O. PB N.O. Double acting Double
AB
B
AB
acting
With flow rate adjustment
PA B
N.C.
A
N.C.
With by-pass
Double acting
N.C.
With flow rate adjustment & by-pass
PA
PA
N.C.
A Double PB N.C. Double acting acting
B
A B
PA B
A
N.C.
N.C.
With indicator
PA B
A
N.C.
N.C.
With indicator & by-pass
PA B
A
N.C.
720
Applicable option 1 2 3 4 24
Nil
Applicable tubing sizeNote) Symbol
Option 2
LQ3 integral fitting
Valve type
N.C.
LVQ30H
LVQ40H
ø8
ø10
ø16
ø22
10
12
19
25
3/8
1/2
3/4
1
LVQ50H LVQ60H
Air Operated, 0.5 MPa Back Pressure Tolerant Flare, Integral Fitting Type
Series
LVQH
Specifications LVQ20H LVQ30H LVQ40H LVQ50H LVQ60H
Model
Tubing
O.D.Note 1)
Metric Inch
Orifice diameter –6
Av x 10 m2 Flow characteristics Cv
6
10
12
19
1/4
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192 (228)
0.35
1.3
1.9
5
8 (9.5)
Withstand pressure (MPa)
1
Operating pressure
–98 kPa to 0.5 MPa
Back pressure (MPa)
Specific Product Precautions Be sure to read before handling. Refer to front matter 41 for Safety Instructions and pages 723 and 724 for Air Operated Chemical Liquid Valve Precautions.
25
LVC
0 (With water pressure)
Pilot air pressure (MPa)
0.5 to 0.8
Pilot port size
LVQ LVP
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
Fluid temperature (°C)
0 to 100
Ambient temperature (°C)
0 to 60
Weight (kg)
0.08
0.17
LVW
0.22
0.70
LQ1
0.81
LQ3
Note 1) Refer to page 724 for details of the applicable tubing sizes. Note 2) ( ): High flow type
Dimensions
LVN
Dimensions are the same as those of the standard specifications.
Piping
Applicable Different Diameter Tubings with Reducer (LVQH- VS )
Caution 1. Connect tubing by special tools. For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1) and “High Purity Fluoropolymer Fittings Hyper Fitting/Flare Type Series LQ3 Fitting Procedure” (ME06-4). (The pamphlet can be downloaded from the SMC home page.)
Metric size 4
6
8
10
12
TD TID
Inch size 19
25
1/8 3/16 1/4
3/8
1/2
3/4
1
2 3 4 6
2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. Tightening Torque for Piping Torque (N·m)
LQ1
LQ2
TL TIL
TILM
Connection tubing O.D. Body class
Note) Refer to page 682 for information on changing tubing sizes.
2 3 4 5 6
LQHB
Different diameter tubings can be selected (within the same body class) by using a nut TLM and an insert bushing (reducer). With reducer
5
Body class
LVH LVD
0.5 or less
Valve leakage (cm3/min)
LVA
LQ3
0.3 to 0.4 1.5 to 2.0 1.6 to 1.8 0.8 to 1.0 3.0 to 3.5 3.2 to 3.5 1.0 to 1.2 7.5 to 9.0 5.0 to 5.3 2.5 to 3.0 11.0 to 13.0 10.0 to 10.5 5.5 to 6.0 22.5 to 23.0 —
721
TH TIH
Series
LVQ
Applicable Fluids Material and Fluid Compatibility Check List for Air Operated Chemical Valves Chemical
Compatibility
Acetone
Note 1, 2)
Ammonium hydroxide
Note 2)
Isobutyl alcohol
Note 1, 2)
Isopropyl alcohol
Note 1, 2)
Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, 50°C or less Ethyl acetate
Note 1, 2)
Butyl acetate
Note 1, 2)
Nitric acid (except fuming nitric acid) Concentration 10% or less
Note 2)
Deionized water (pure water) Sodium hydroxide (caustic soda) Concentration 50% or less Nitrogen gas Super pure water Toluene
Note 1, 2)
Hydrofluoric acid
Note 2)
Sulfuric acid (except fuming sulfuric acid)
Note 2)
Phosphoric acid Concentration 80% or less
Table symbols
: Can be used : Can be used in certain conditions : Cannot be used
The material and fluid compatibility check list provides reference values as a guide only. Note 1) Since static electricity may be generated, implement suitable countermeasures. Note 2) Use caution as permeation may occur. The permeated fluid may effect the parts of other materials. • Compatibility is indicated for fluid temperatures of 100°C or less. • The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. • The data above is based on the information presented by the material manufacturers. • SMC is not responsible for its accuracy and any damage happened because of this data. • Use a fluid with a viscosity of 300 cp or less. Failure to do so may cause valve closing failure.
722
LVQ Air Operated Chemical Liquid Valve/Precautions 1 Series
Be sure to read this before handling.
Design / Selection
Warning
Piping
Caution
1. Confirm the specifications. Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog.
2. Fluids Operate after confirming the compatibility of the product's component materials with fluids, using the check list on page 722. Contact SMC regarding fluids other than those in the check list. Operate within the indicated fluid temperature range.
3. Maintenance space Ensure the necessary space for maintenance and inspections.
4. Fluid pressure range Keep the supplied fluid pressure within the operating pressure range specified in this catalog.
5. Ambient environment Operate within the ambient operating temperature range. After confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does not adhere to the product's exterior surfaces.
6. Liquid seals When circulating fluid Provide a relief valve in the system so that fluid does not get into the liquid seal circuit.
7. Countermeasures for static electricity Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures.
LVC
1. Preparation before piping Before piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.
Pilot port
Torque (N·m)
Rc, NPT 1/8
0.8 to 1.0
LVW
3. Metal fittings In the case of threaded pilot port, do not pipe the metal fittings which can cause damage to the thread part.
4. For information on tubing connection and special tools, please see the pamphlet “High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions” (M-E05-1) or “High Purity Fluoropolymer Fittings Hyper Fitting/Flare Type Series LQ3 Fitting Procedure” (M-E06-4). (The pamphlets can be downloaded from the SMC home page.)
LQ1 LQ3 LVN LQHB TL TIL TLM TILM TD TID TH TIH
Warning
Mount and operate the product after reading the manual carefully and understanding its contents. Also, keep the manual where it can be referred to as necessary.
LVD LVP
Tightening Torque for Pilot Port
1. If air leakage increases or equipment does not operate properly, stop operation. 2. Operation manual
LVH
2. Use the tightening torques shown below for LVQ the threaded pilot port.
Mounting
After mounting, perform suitable function and leak tests to confirm that the mounting is correct.
LVA
Operating Air Supply
Warning 1. Use clean air.
Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases, etc., as this may cause damage or malfunction.
723
LVQ Air Operated Chemical Liquid Valve/Precautions 2 Series
Be sure to read this before handling.
Use of Tubing
Maintenance
1. Refer to the applicable tubing sizes shown below for tubing to be used.
5. In order to obtain optimum performance from valves, perform periodic inspections to confirm that there are no leaks from valves or fittings, etc.
Caution
Warning
Applicable tubing sizes Connection tubing size
Metric sizes
Inch sizes
O.D. (mm)
Internal thickness (mm)
Standard size Tolerance Standard size Tolerance
ø3 x ø2
3.0
ø4 x ø3
4.0
ø6 x ø4
6.0
ø8 x ø6
8.0
ø10 x ø8
10.0
ø12 x ø10
12.0
ø19 x ø16
19.0
ø25 x ø22
25.0
1/8" x 0.086"
3.18
3/16" x 1/8"
4.75
1/4" x 5/32"
6.35
3/8" x 1/4"
9.53
1/2" x 3/8"
12.7
3/4" x 5/8"
19.0
1" x 7/8"
25.4
+0.2 −0.1
+0.3 −0.1
0.5
±0.06
1.0
±0.1
1.5
±0.15
Flush drainage from filters regularly.
0.5 +0.2 −0.1
+0.3 −0.1
0.8 1.2
1.6
±0.1 ±0.12 ±0.15
Operating Environment
Warning 1. Do not use in a location having an explosive atmosphere. 2. Do not use in locations where vibration or impact occurs. 3. Do not use in locations where radiated heat will be received from nearby heat sources. Maintenance
Warning 1. Maintenance should be performed in accordance with the procedures in the operation manual. Incorrect handling can cause damage or malfunction of machinery and equipment, etc.
2. Before removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system. Further, when restarting equipment after remounting or replacement, first confirm safety and then check the equipment for normal operation. 3. Perform work after removing residual chemicals and carefully replacing them with pure water or air, etc. 4. Do not disassemble the product. Products which have been disassembled cannot be guaranteed. If disassembly is necessary, contact SMC.
724
Caution 1. Removal of drainage Precautions
Warning 1. Operate within the ranges of the maximum operating pressure and back pressure.
Caution 1. Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized). 2. When operated at a very low flow rate, the product with flow rate adjustment may vibrate, etc. depending on the operating conditions. Therefore, operate only after careful examination of the flow rate, pressure and piping conditions. 3. Water hammering may occur depending on the fluid pressure conditions. In most cases, improvement is possible by adjusting the pilot pressure with a speed controller, etc., but the flow rate, pressure and piping conditions should be reviewed. 4. To adjust the flow rate with flow rate adjustment, open gradually starting from the fully closed condition. Opening is accomplished by turning the adjustment knob counterclockwise. Additionally, do not apply any unreasonable force to the adjustment handle when nearing a fully opened or closed condition. This may result in deformation of the orifice sheet surface or damage to the threaded part of the adjustment handle. The handle is in the fully closed condition when the product is shipped from the factory. 5. After long periods of nonuse, perform a test run before beginning regular operation. 6. Since the product is packaged in a clean room, use sufficient care in handling when opened.