Single-Material MEMS and NEMS Using Polycrystalline Diamond

Single-Material MEMS and NEMS Using Polycrystalline Diamond www.egr.msu.edu/~aslam

DEAN M. ASLAM ELECTRICAL AND COMPUTER ENGINEERING, MICHIGAN STATE UNIVERSITY E. LANSING, MI 48824 USA

CORNELL PRINCIPAL ; 11/14/00 NSF--ERC NSF For Wireless Integrated MicroSystems (WIMS)

Work done by: Hoyin Chan Zongliang Cao Mike Varney Sean Hatch

TALK OVERVIEW

NATURE/MAN MADE MEMS/NEMS SINGLE MATERIAL MEMS/NEMS EXAMPLES OF SMM Michigan State U CAMPUS

STATIC CHARGE ENERGY SCAVENGING


NATURE MADE NANOSYSTEM

E Coli: senses food, food O2, Temp, Ph

MOLECULAR SENSING & ACTUATION Red: Counterclockwise flagellar rotation Green: Clockwise flagellar rotation Gray: Inactive Attractant

MCP: Methyl-accepting y p g Chemotaxis Proteins, called chemoreceptors

Signaling Proteins: A – CheA;

B – CheB; Y – CheY; W - CheW

http://en.wikipedia.org/wiki/ htt // iki di / iki/ Escherichia_coli

METHYLATION AFFECTS GENE BEHAVIOR John S S. Parkinson Parkinson, JJ. Bacteriolohy, Bacteriolohy 85 (5), 21492–1494 (2003).


MAN MADE

Cell Phone with Projection Display

Drone

Remote Controlled Beatle

PROF. MAHARBIZ, UC Berkeley


WHAT IS NEEDED? MICRO AND NANO SYSTEM INTEGRATION

64 electrode sites on 200 µm centers in 1 mm3 volume of tissue, containing a MOSIS chip with 16 1000x amplifiers for buffering the recorded signals.

Ken Wise

T. Zell ers

Cortical Micro-system with microprocessor, amplifier and Wireless Chips

WIMS PAC CKAGING

The sites are connected to the amplifiers by a parylene cable leading to the electronics module equipped with processor and wireless interface.

CHALLENGES?

REDUCTION IN COST AND SIZE NEW MATERIALS & CONCEPTS

POLY-CRYSTALLINE POLY CRYSTALLINE DIAMOND SINGLE MATERIAL MEMS/NEMS

BIOLOGICAL SENSORS ENVIRONMENTAL SENSORS WIRELESS INTERFACE MICROCONTROLLER BATTERY

WIMS CUBE

FLUIDIC ELECTRICAL

1 cc Although a number diamond micro and nano structures have been reported in the last 20 years,

this work reports reports, for the first time time, single material MEMS (SMM)


Protein Building Blocks: Amino Acids

∏-bond

C spp2

Amino Group

R ►Variable Group

www.biochem.ariz ona.edu/classes/bi oc462/462bh2008/ 462bh 462bhonorsproject j t s/462bhonors2007 /gsantarelli/Conclu sion.html

C

Carboxyl Group

sp3 C

Glucose

H O

http://www.nlm.nih.gov/medlinepl us/ency/imagepages/19825.htm

• FLEXIBLE BUILDING BLOCKS ► sp, sp2, sp3 • ARE NATURE-MADE SYSTEMS SINGLE-MATERIAL? CORNELL PRINCIPAL; 11/14/00 NSF--ERC For Wireless Integrated MicroSystems (WIMS) NSF

CARBON IS UNIQUE

2s 2 z 2p

2py 2px

Mix one s and three p orbitals ► s1p3

sp3

sp2 Bond Diamond


sp3 Methane

DIAMOND ON Si ► SEED (Diamond Powder) ► GROW DIAMOND ►TEST FILM ► MEMS/NEMS SEEDING USING DIAMOND LOADED DIAMOND-LOADED PHOTORESIST

Seeding/Catalyst Si wafer

PLASMA REACTOR 80μm

D PR

CXHY

H2

ENERGY CH3

H

HOT SUBSTRATE (400 - 1000 C, 0.1 - 150 torr)

MPCVD

DPR SiO2

Si Intensity

6000

DIAMOND PEAK

5000 4000 3000 2000

1200

FILM QUALITY • RAMAN • AFM • SEM

1300 1400 1500 1600 Wavenumber Shift(1/cm)


Brief Review of Carbon Sensors, MEMS/NEMS COCHLEAR PROBE WITH DIAMOND SENSORS Swiss center for electronics and microtechnology, Inc.

UV Sensor, quant. Eff. Near 1

Nanocrystalline diamond (Argonne) DIAMOND MEMS AT MSU DIAMOND AFM TIP

Diamond Nano Resonators DIAMOND PIEZORESISTIVE RFMEMS, MSU Swiss center for electronics Torsional Resonator

‐ ADJUSTABLE OUTPUT IMPEDANCE and microtechnology, Inc. ‐ HIGH SENSITIVITY

OXYGEN SENSOR Highest Q of 86,603 at 0.805 MHz for L = 30 μm 100 nm Resonator CORNELL PRINCIPAL ; 11/14/00 NSF--ERC NSF For Wireless Integrated MicroSystems (WIMS)

SINGLE MATERIAL MEMS/NEMS What is Single Material MEMS (SMM)? Sensor

Basic Concept: Undoped Poly-C (1013 Ω·cm) ► Mechanical Material Lightly-doped Lightly doped Poly Poly-C C (p, 1 1-10 10 Ω Ω·cm) cm) ► Sensor Highly-doped Poly-C (p+, 10-3 Ω·cm) ► Interconnect

p+ Poly-C Undoped Poly-C

Mechanical/Substrate Material

Why Diamond SMM? Unique Properties of Poly-C:

p Poly-C

Interconnect

Electrochemical Potential Window = 3 V (-1 to +2) Eg= 5.5 eV Dielectric Constant = 5.7 Saturation Velocity = 2.7 x 107 cms-1 Chemical Inertness & Stability Young’s Modulus = 1012 Pa Background Current = 1 nA Breakdown Field = 10 MVcm-1 K = 20 WK-1cm-1 Resistant to Fouling µp= 1,600 cm2V-1s-1

Example of Diamond SMM RFMEMS Resonator


CHALLENGES IN FABRICATION OF SMM FABRICATION INSULATING DIAMOND: DIAMOND USING O2 IN THE GROWTH ENVIRONMENT

► ρ = 1013 Ω·cm

DRY ETCHING OF DIAMOND


EXAMPLES OF DIAMOND SMM STRUCTURES

NEURAL APPLICATIONS: BCI NEURAL PROBE


Electrical

Chemical

ELECTRICAL AND CHEMICAL DETECTION Chemical

Electrochemical potential window


Electrical


Wo orking Elec ctrode

Refe erence Electrode

Counter Electrode

SMM CHEMICAL NEURAL PROBE

OTHER SMM STRUCTURES UNDER STUDY

HOW TO POWER SMM? ZERO-ENERGY SMM? CORNELL PRINCIPAL ; 11/14/00 NSF--ERC NSF For Wireless Integrated MicroSystems (WIMS)

Zero-Energy SMM Systems y

Khalil Najafi

Static Charge Energy Scavenging

How Much Energy gy is Available?


ZERO-ENERGY MEMS/NEMS Energy Scavenging From Human Body Energy Available

Energy Scavenged


SMM Bio‐Probes for Sensing and Pathogen Detection RESEARCH GOALS:

MIGRAINE HEADACHS

CANCER

EPILEPSI

DEPRESSION,, ANGER
