May 5, 2009 - 80's: first UHF low power applications. ⢠90's: (Vertical) ..... FOR ACCELERATOR APPLICATIONS. 2.5 kW. Amp. 10-way divider. 315W. Amp.
Vancouver, May 5th 2009, PAC09 - TU4RAI01
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
1
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Marco Di Giacomo
ACKNOWLEDGEMENTS
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
E. Jensen, M. Pasini and M. Paoluzzi (CERN), J. Lyles (LANL), M. Gaspar (SLS), P. Marchand and R. Lopes (Synchrotron Soleil), S. Belomestnykh (Cornell), P. Dupire (Bruker Biospin), S. Heisen and A. Wolfang (AFT GmbH), W. Matziol (VALVO GmbH), M. Pesce (Res Ingenium), M. Rossi (DB Elettronica), …………………………… Sorry for those I missed ….
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
F. Scarpa, A. Facco (INFN/LNL), N. Schiaccianoci and M. Ducci (ST Microelectronics),
Contents
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
• Acknowledgements
•
Historical Introduction
•
Commercial Applications and Available Devices
•
RF Power Mosfet Manufacturing Process
• Solid State Amplifier Architecture • Splitter/Combiners • Circulators • Examples of Accelerator Applications • Conclusion
3
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• Silicon Technology
Introduction
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
First RF silicon device: Bipolar Junction Transistor (BJT) but : • thermal runaway => temperature compensated bias circuits • secondary breakdown => reduced safe operating areas. Vacuum electron tubes were preferred for medium and high power applications SS amplifiers were mainly used as driver stages with output CW power up to some hundreds watts at few hundreds MHz.
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Solid state amplifiers are based on transistors instead of vacuum electron tubes as active device.
Introduction
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Revolution: Metal Oxide Semiconductor Field Effect Transistor (MOSFET)
But manufacturing only permitted by the development of the integrated circuit technology, (1963, Bell Laboratories, Atalla and Khang). • 70’s: Vertical Mosfets (VMOS) • 80’s: first UHF low power applications • 90’s: (Vertical) Diffusion Mosfets (DMOS) and Lateral Diffusion Mosfets (LDMOS, Motorola). 5
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• BJT patent: 1948 by William Shockley • Mosfet patent: 1933 Julius Edgar Lilienfeld Higher gain, VSWR, lower noise, no drawbacks
RF Transistor Applications
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
RF Power silicon technology has been strongly boosted by several applications, mainly divided in five big sectors: ~1000 M$ in 2008.
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Transistor technology
Impressive progress during last 20 years Today, the whole band for accelerator applications is covered Some of the presently available output RF Power/transistor vs Frequency dotted line : pulsed mode (~20%) performances mdg March 2009
1100 1000 900 800 700
BLF574 2008 600 CW
600 SD2942 2006 SP2 88 MHz
500
BLF888 2008 110W CW
DMD1029 2006 Eurisol 352 MHz different narrow band devices from 2.4 to 6 GHz
400 300
MRF6V43 2008 CW
200 100
BLF 548 1992 Soleil 352 MHz
0 10
100
MHz
1000
10000
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Marco Di Giacomo - PAC09 - TU4RAI01
Power (Watt)
Laboratoire commun CEA/DSM - CNRS/IN2P3
NXP Semelab ST Mcroelectronics Freescale
MRF6VP21 2008 125W CW
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Transistor technology Performance issues: Electrostatic Protections (ESD) VSWR Gain Breakdown Voltage Efficiency
Cost issues Wafer sizes Manufacturing process Thermal conducting plastic packages
80% 70% 60% 50% 40% 30% 20% 10% 0%
FET GaAs LDMOS
50 V 28 V 12 V
0
1000
2000
3000
4000
5000
6000
7000
MHz
GaN couples the high frequency capability of GaAs and the high power and voltage capabilities of Si LDMOS
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Drain efficiency at highest frequencies
RF power Mosfet manufacturing process
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Process Diffusing Sawing Stratching Picking Wire bonding Closing
Die Picking
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Manufacturing Small Scale Integration: few thousands of device/wafer 6” and 8” Si wafers (thickness: 0.1 to 0.25 mm)
Contents
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
•
Historical Introduction
•
Commercial Applications and available devices
•
RF power Mosfet manufacturing process
• SS amplifier architecture • Splitter/Combiners • Circulators • Accelerator applications • Conclusion • Acknowledgements / References 10
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• Solid State Technology
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Amplifier Architecture
Control and protections
Ohm
Input matching stage
BIAS CIRCUIT
RF MOSFET
Output matching stage
SD2942 ® STMicroelectronics
14 12
r in
j in
10
r dl
j dl
8 6 4 2 0 -2 -4 -6 0
50
100
150
200
250
300
MHz
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Power Amplifier elementary stage: pallet Very low input and output impedances 1 transistor/pallet Input and output transformers highly th. conducting metallic ground plane
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Amplifier Architecture
• 140 W pallet – • 0,5 to 6 MHz • VSWR>10 without circulator • 1 transistors/pallet • © CERN, M. Paoluzzi
• • • •
330 W module 352 or 500 MHz, different devices 1 transistor/pallet 1 circulator/transistor
• © Synchrotron SOLEIL - Ti Ruan 12
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Laboratoire commun CEA/DSM - CNRS/IN2P3
Pallet Examples
Amplifier Architecture
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Pallet Examples
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Laboratoire commun CEA/DSM - CNRS/IN2P3
800W pallet 88 to108 MHz 2 transistors/pallet © DB ELETTRONICA For SPIRAL2
Amplifier Architecture
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
2 x 500W pallets 4 transistors/pallet 1 kW pulsed RF module – 1.3 GHz © BRUKER 2008 For ELBE, Dresden-Rossendorlf
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Laboratoire commun CEA/DSM - CNRS/IN2P3
Module Examples
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Amplifier Architecture Splitting/Combining
• Management of reflected power required by accelerator applications • Isolated dividers and couplers (case1) can be used to avoid oscillations or other phenomena which could bring to the transistor destruction. • Circulators can also be used to decouple each amplifier, making it unconditionally stable, and in this case non isolated splitter/combiners can be used (case2). • At low frequencies, transistor operated at ~50% of its possibilities driver
C
A1
÷
S AN
A1 driver
C
÷
S AN
C
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Laboratoire commun CEA/DSM - CNRS/IN2P3
• Several blocks combined together to obtain higher output power, • Arrangement depends on application to fit the required amount of RF power • N-way splitters and combiners required
Amplifier Architecture
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Combining Arrangement Examples 25kW combiner
2-way divider
10-way divider
50kW combiner
Pi=50W
Po=50kW
315W Amp
50kW directional coupler
2.5 kW Amp
2.5 kW Amp
8-way divider
315W Amp
2.5kW combiner
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Soleil – 352 MHz 50 kW Amp
Amplifier Architecture
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Combining Arrangement Considerations
• In case of failure of a few transistors, the solid state architecture grants significant amount of power being still available. • In principle, it is possible to replace a broken module without interrupting the amplifier operation.
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Laboratoire commun CEA/DSM - CNRS/IN2P3
• Any arrangement is possible to fit the single project requirements
Contents
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
• SS Technology •
Historical Introduction
•
Commercial Applications and available devices
•
RF power Mosfet manufacturing process
• Splitter/Combiners • Circulators • Accelerator applications • Conclusion • Acknowledgements / References 18
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• SS amplifier architecture
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
• Design based on quarter wave sections of transmission lines : => narrow band but some tricks exist to wide the operating bandwidth. • At lower frequencies, they can be realised with lumped elements. 19
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• Passive, multiport, reciprocal: => the same device can be used to divide or combine signals.
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Y (or star) junction: N Ways
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• simplest way to split/combine signals • two different schemes, well adapted to coax or micro strips • in-phase signals, no resistor
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Laboratoire commun CEA/DSM - CNRS/IN2P3
10-way divider
200 kW
100 kW
25 kW
8-way divider
2-way divider
2.5 kW
©Synchrotron Soleil
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Marco Di Giacomo - PAC09 - TU4RAI01
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
The Y junction has the advantages of requiring no resistors and in phase signals, but: • It doesn’t isolate the ports, whose impedance depends on the matching conditions on the other arms. • It can be used only with unconditionally stable amplifier modules, embedding circulators to decouple direct and reverse powers. Isolated combiners use one or more resistors to absorb non combined power. The resistor can be embedded in the network as in the Wilkinson 22
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Splitter/Combiners
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
a)
b)
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Wilkinson: N-Ways
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Wilkinson
Resistor has no effect on in-phase and equal amplitude signals but allows the 3 ports to be matched while isolating ports 2 and 3 for different values of phase or amplitude. Resistor is embedded into the network, and must provide a short phase length for the scheme to work. At high power or frequency, the Gysel combiner is preferred. 24
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
The simplest configuration bandwidth is very narrow but it can be enlarged by placing a transmission line section on the input arm
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
2-way scheme
2.5 kW, 5-ways, 211 MHz ©RES INGENIUM
5-way scheme
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Gysel: N-Ways
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
The terminations in a Gysel are equal to Z0, and can be high-power loads. They can be external to the power splitter as any length of Z0 transmission line can be added between the loads and the splitter. It is also possible to measure the two resistors in parallel, even if they are grounded to the substrate. The Gysel scheme is largely used for N-way combiners in the 80 to 200 MHz range of frequency, avoiding the use of circulators on each pallet. It can be easily realised in microstrip or in in-air structures
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Gysel
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
3 kW, 4-ways 88÷108 MHz ©DB Elettronica
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Gysel
Splitter/Combiners
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
20 kW – 88÷108 MHz -3 dB coupled line 2-way combiner ©DB Elettronica
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
-3dB Hybrid: 2-Way works with 90°phase signals and Zc resistor
Contents
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
• Acknowledgements / References
•
Historical Introduction
•
Commercial Applications and available devices
•
RF power Mosfet manufacturing process
• Solid state amplifier architecture • Splitter/Combiners
• Circulators • Accelerator applications • Conclusion 29
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• Solid State Technology
Circulators
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Diplexer application and Isolator if a dummy load replaces the receiver 30
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Circulators are passive, multiport, non reciprocal devices transferring the power from one port to another in a prescribed order. 3-port circulators are the most common in accelerator application
Circulators
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Several circulator types exist but
When using coaxial connectors, the 3-plate configuration is normally used, where two plates of ferrite are put between the inner and outer conductors.
120° symmetry
31
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
the junction one is the most commonly used as it can be implemented on strip (low power) or in-air (high power) lines as well as on waveguides.
Circulators
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
32
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• The line entering each port is split in two equal branches going towards the other two ports (120°symmetry). • Due to the interaction with the magnetised ferrite, the split entering waves at port 1, have different speeds such as they are in-phase when they arrive at port 2 (where they recombine) and in opposite phase at port 3 where they cancel.
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Circulators 3 plate configuration Medium power Microstrip inner conductor: matching networks cavity
2) Ferrite disk
4) Pemanent magnet disk
3) Outer conductor 5) Closed package
© VALVO GmbH 33
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Laboratoire commun CEA/DSM - CNRS/IN2P3
1) • •
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Circulators
3 plates - High power: 60 kW, 88 MHz (Spiral 2)
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Laboratoire commun CEA/DSM - CNRS/IN2P3
Ferrite plate
Contents
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
• Acknowledgements
•
Historical Introduction
•
Commercial Applications and available devices
•
RF power Mosfet manufacturing process
• Solid state amplifier architecture • Splitter/Combiners • Circulators
• Examples of Accelerator Applications • Conclusion
35
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• Solid State Technology
Applications
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Solid state amplifiers have been built or are foreseen for very different applications, let me choose the following examples:
• Master generator amplifier: Lansce … (‘94, BJT, 0.9 kW, 805 MHz) • NC ion injectors: CERN, JPARK, GSI, … (LF, up to several kW) • Ions SC linac: Atlas, Alpi, SPIRAL2 2, FRIB … (up to tens of kW) • Protons, Deuteron SC Linacs: Saraf, Eurisol … (up to tens of kW) • Light sources : SOLEIL, LNLS, SLS … (up to hundreds of kW) • …………………………………………. and many others. 36
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Laboratoire commun CEA/DSM - CNRS/IN2P3
(Italic: not yet in operation: under construction or foreseen)
Applications
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
37
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Laboratoire commun CEA/DSM - CNRS/IN2P3
© LANSCE 1994, J.Lyles 900W CW module – 805 MHz 4x240W pallets 2 BJTs/pallet
Applications
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
J-PARK : 8 and 4 kW units (Thanks to Dr C. Ohmori)
CERN DESIGN 1 kW rack (© M. Paoluzzi)
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Laboratoire commun CEA/DSM - CNRS/IN2P3
CERN LEIR AND J-PARK : 0,5 – 6 MHz, no circulators 1 kW racks 9 pallets/rack up to 8 kW amplifiers
800W Power Supply 800W
Power Supply
Σ ÷
800W Power Supply 800W
Control logic Water cooled 3 kW Solid State Rack
Linac amplifier power budget
mdg 03/09/08
25 Beam Loading or cavity loss Margin power +30%
20
Amplifier and circulator power
15
Net power
kW 10 5
B1 4 C
B1 2 C
B1 0 C
B8 C
B6 C
B4 C
B2 C
A9
A1 1 C
C
A7 C
A5 C
3
A3 C
C
1
EG R
A1
0 EG
Air cooled
R
Laboratoire commun CEA/DSM - CNRS/IN2P3
70W
39
Marco Di Giacomo - PAC09 - TU4RAI01
SPIRAL2: 88 MHz, ion, high current SC driver (5mA) 20 kW amplifiers prototype (© DB Elettronica) (2x10 kW cabinets, 8x2.8kW racks
380 kW total installed power
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Applications
Applications
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
40
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
EURISOL driver: 352 MHz, proton SC linac 10 kW prototype amplifier 10 kW cabinets, 36x350W modules, circulators embedded INFN/LNL © Fabio Scarpa
Applications
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
41
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Synchrotron SOLEIL: (Ti Ruan) 352 MHz, 180 kW amplifiers; 4x45 kW towers 35kW + 4x180 kW installed
Contents
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
• Acknowledgements
•
Historical Introduction
•
Commercial Applications and available devices
•
RF power Mosfet manufacturing process
• Solid state amplifier architecture • Splitter/Combiners • Circulators • Accelerator applications
• Conclusion 42
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
• Solid State Technology
Conclusion
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Today, the whole range of frequency for accelerator applications is covered at very competitive prices and performances. Several industrial applications push the development of solid state RF devices in a very large range of frequencies: up to 3.7 GHz.
Operating advantages vs tubes • • • • • •
absence of high biasing voltages longer life times (more than 80000 hours at LANL or CERN) easier and quicker maintenance, possibility of reduced power operation in case of failure, fit ≠ power levels inside the same project, with one elementary brick. Stable gain with aging
Reliable and efficient operation up to 200 kW at 350 MHz has already been proved. Similar levels at 500 MHz are already planned (PSI, … ). 43
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Tube prices increase (when their manufacture is not simply stopped) as the market is falling down.
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Conclusion Next future
RF POWER SOURCES FOR CW SRF LINACS klystrons 1000 HIGH POWER
VHF BAND
UHF BAND
MEDIUM POWER
100
Solid state amplifiers
IOTs
10 LOW POWER
1 10
100
1000
10000
FREQUENCY, MHZ
Original diagram by S. Belomestnykh: RF systems for CW SRF linacs, Linac08
44
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
“NO” circulators
AVERAGE POWER, KW
Circulators and transistors available
L B A N D
END
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
Thank you for your attention
• Publications of people listed in the acknowledgements and available on the JACoW website. • Transistor manufacturers websites • Wikipedia and Microwave Encyclopediae Sorry for not talking at all about power supply schemes and operation monitoring issues. 45
Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
References
RF Transistor Applications
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
• Industrial laser • Nuclear magnetic resonance (NMR) • Plasma generator for semiconductors • Plasma generator for display panels • Spectroscopy • RF heating
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Marco Di Giacomo - PAC09 - TU4RAI01
Laboratoire commun CEA/DSM - CNRS/IN2P3
Industrial, Scientific, Medical Applications
RF Power Device Market
SOLID STATE RF AMPLIFIERS FOR ACCELERATOR APPLICATIONS
RF Power Device market (M$)
1000 900 800 600 500 400 300 200 100 0 2007
2008
2009 All segments
2010
2011
2012
W ithout Cellular Infrastructure
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Laboratoire commun CEA/DSM - CNRS/IN2P3
700