SPINNING ROTOR GAUGE. The MKS Spinning Rotor Gauge line is well
established with users around the world as a stable, high accuracy transfer
standard for ...
SPINNING ROTOR GAUGE W W W . M K S I N S T . C O M
Pressure Measurement & Control
SRG-2CE The MKS Spinning Rotor Gauge line is well established with users around the world as a stable, high accuracy transfer standard for high vacuum pressure measurements. We continue to be at the forefront of SRG development with the introduction of the SRG-2CE. The sensing element of the SRG is a magnetically levitated stainless steel ball that resides in a tube connected to the vacuum system. The ball is suspended and rotated by the separable drive assembly. Once the ball reaches a certain rotational speed, the ball is allowed to free spin. Collisions of the gas molecules with the surface of the ball impart a drag which decelerates the ball. Pickup coils measure the deceleration. The electronics unit then uses an algorithm based on the sampling time, physical parameters and gas characteristics to accurately determine the pressure.
Features & Benefits Traceable
Stable
• German Calibration Service, DKD traceable
• Superior long term stability • Wetted surfaces are stainless steel
• Ensures absolute consistency • Satisfies ISO9000 requirements
• Assures chamber-to-chamber consistency
• Recognized transfer standard Accurate • Guaranteed precision from 5x10-7 to 1x10-2 mbar (Torr) • Overall measuring range extends to 1 mbar (Torr) • No thermal or ionization effects inventory requirements
Since the measurement principle is mechanical, there are no thermal or ionization effects (as is the case with ionization gauges) that will influence the accuracy of the measurements. Also, the calibration constant is only weakly influenced by the ball's surface roughness, making the SRG a very stable reference standard. The SRG-2CE will find applications in metrology and in experiments where high accuracy and repeatability are essential. Away from the test bench, the MKS Spinning Rotor Gauge may also be used in situ on a process chamber to assure that your high vacuum gauges are providing accurate readings and that you have tool-totool consistency. This provides repeatable process results, high uptime and optimum cycle times.
When measuring flanges with non-calibrated balls are ordered, they will be checked for usability by the factory. Investigations, as carried out by the Federal Physical Technical Institution (PTB), have shown that with proper care and no damaging effects, the property of the balls will remain almost unchanged for years. For application under laboratory conditions, we recommend a recalibration cycle of 1-2 years. NIST traceable calibrations are also available at an extra cost. 1DKD — German Calibration Service. Calibration laboratory accredited and supervised by PTB.
Calibration, Traceability, Stability —
Dimensional Drawing —
In addition to the SRG-2CE, MKS Instruments offers transfer standard Baratron pressure transducers to meet all of your needs for vacuum gauge calibration.
Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).
MKS Instruments, Inc. delivers the SRG-2CE with a calibrated ball along with a calibration certificate. Calibration is made against the reference standards of our DKD1 calibration laboratory. As a result, the Spinning Rotor Gauge SRG-2CE offers the user consistent traceability pursuant to ISO9000.
The complete SRG-2CE is comprised of a microprocessor-based electronics unit, a measuring head and a ball/flange assembly. Since the measuring head easily decouples from the ball/flange assembly, several permanently mounted ball/flange assemblies may be used with one measuring head and electronics unit. This facilitates taking measurements from multiple locations when continuous readings are not necessary.
Specifications Measuring Range
1 mbar (Torr) to 5 x 10-7 mbar (Torr)
Accuracy
1% of the measured value ±3 x 10-8 mbar (Torr) in the range up to 10-2 mbar (Torr)
Long-Term Stability
Better than 1% per year
Display
LED with 13mm digit height
Pressure Display
Pa, mbar, or Torr; user selectable
Display Format
Scientific notation; number of digits configurable
Analog Output
0-10 VDC, linear or logarithmic
Switching Points
Two adjustable switching points with one relay each, max. load 2 A at 25 V or 1 A at 120 V
Digital Interface
RS-232
Measuring Flange
2¾ CF, made of stainless steel, bakeable up to 450°C (without measuring head)
Rotor
Stainless steel ball, 4.5 mm in diameter (nominal)
Rotor Frequency
Adjustable between 405 and 810 Hz
Operating Temperature
Electronics: 10-40°C; measuring head: 10-50°C; ball/flange assembly bakeable to 400°C
Enclosure
19" slide-in unit, 2HU, approx. 380 mm deep
Weight
Electronics: 5.3kg; measuring head: 0.6kg; measuring flange: 0.5kg
Operating Voltage
85 - 260 V; 50 - 440 Hz
Electromagnetic Compatibility
Fully CE compliant
Programming Features
15 programmable data sets to minimize set up time; database of 17 frequently used gases with the option for the user to add 8 additional gases
Ordering Information Ordering Code Example: SRG2CE
Code
Type SRG-2CE Spinning Rotor Gauge SRG2CE SRG-2CE Complete system (includes electronics, measuring head, ball/flange assembly, etc.) SRG-SH700 Measuring head with 3m long connecting cable SRG-BF-CAL Ball/flange system, calibrated SRF-BF Ball/flange system, not calibrated 001-8483 External printer option 095-103390 Printer cable
The sense/drive head and ball/flange assembly of the SRG-2CE are compatible with the former Spinning Rotor Gauge Type SRG-2.
Global Headquarters 90 Industrial Way Wilmington, MA 01887-4610 Tel: 978.284.4000 Tel: 800.227.8766 (in U.S.A.) Web: www.mksinst.com SRG2CE - 11/05 © 2005 MKS Instruments, Inc. All rights reserved.
Specifications are subject to change without notice.
Configuration SRG2CE
