μm. CMOS. The worst case phase noise over the tuning range improves by 5dB when changing a MOS to a MEMS varicap while keeping power consumption ...
AbstractâA novel parallel-plate MEMS variable capacitor with a thin-film vertical comb actuator is proposed. The actuator can vertically displace both plates of ...
AbstractâA microelectromechanical systems (MEMS) variable capacitor having two movable plates loaded with a nitride layer is proposed. A trench in the ...
Abstract â This paper presents a structure of MEMS capacitor providing independence of its nominal capacity and tuning range from the applied RF signal ...
An Unconventional Hybrid Variable Capacitor. With a 2-D Electron Gas. Pouya Dianat, Member, IEEE, Richard Prusak, Anna Persano, Adriano Cola,.
We present the design and analysis of a MEMS variable capacitor coupled to thermal actuators. The variable capacitor is composed by two main components: 1) ...
capacitor is based on controlling the gap area of the dielectric layer for achieving variable capacitance. MEMS with precise,. µm- level movement are ideal drives ...
spacecraft "cold side" (+Y) radiators where most of the housekeeping equipment (including the nickel hydrogen batteries) resides and the insmnnent deck on the ...
AbstractâTwo microelectromechanical systems (MEMS) curled-plate variable capacitors, built in 0.35- m CMOS tech- nology, are presented. The plates of the ...
with torsion bars over a shaped through-hole. ... view of the suspension (2 microns wide and 400 microns ... out from the torsion bar are for preventing the SO1.
Variable capacitors are invaluable for implementing phase shifters ... capacitors to be implemented in imec's SiGe-MEMS .... 3.2 Gap Tuning MEMS capacitor.
struktural untuk rentang tertentu dan frekuensi pengoperasian tertentu. Keywords: capacitor, comb-drive actuators, resonance frequencies, RF-MEMS varactor.
Apr 5, 2017 - ments of the fluid flow and pressure to assess progression of a .... This behavior is expected for flow-dominated lamellar behavior (see Statistics section). .... through the hole of a complete sensor composed of two chips.
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Oct 2, 2013 - results, frequency rule checks, and schedule of treatment or .... -Opioid therapy for chronic non cancer pain. -Determining ..... 42- Patkar V, Hurt C, Steele R, Purushotham A, Love. S,Williams M .... Mackay, J. A. Weise-Kelly, L. Navar
International Journal of Occupational Safety and Ergonomics (JOSE) 2008, Vol. 14, No. 1, 77â ... what will be called active clothing in this article. Such clothing ... The jacket was straight, below hips length, with ... jacket and the trouser legs
Aug 27, 2013 - Institute of Physiology, Benemerita Universidad Autonoma de Puebla, 14 Sur 6301, Colonia San Manuel, Apartado Postal 406, CP 72570,.
AbstractâA surface-micromachined capacitive-type micro- electro-mechanical system (MEMS) acoustic sensor with X- shape bottom electrode anchor on a Si ...
This paper presents a microfabricated electroquasistatic. (EQS) induction turbine-generator that has generated net electric power. A maximum power output of ...
TH1B-5. 9:20. A MEMS Variable Capacitor with Piezoresistive Position Sensing Fabricated in a Standard 0.35um CMOS Process. N. Zahirovic1, R. R. Mansour1, ...
IMS 2010 Abstract Cards
TH1B: RF-MEMS Circuits Thursday 27 May 2010 Time 08:00 - 09:40 Room: 206AB Chair: Joachim Oberhammer, Royal Institute of Technology Co-Chair: Jing Wang, University of South Florida TH1B-5 9:20 A MEMS Variable Capacitor with Piezoresistive Position Sensing Fabricated in a Standard 0.35um CMOS Process N. Zahirovic1, R. R. Mansour1, M. Yu2, 1University of Waterloo, Waterloo, Canada, 2COM DEV International, Cambridge, Canada A variable MEMS capacitor with piezoresistive feedback is presented. The capacitor is fabricated in a commercial 0.35um CMOS process with MEMS post-processing. The work presented demonstrates a piezoresistive sensing scheme capable of controlling hysteresis effects in a CMOS-MEMS variable capacitor. Potential applications of the sensing scheme include closed-loop control of variable capacitors and detection of dielectic charging.
