Basic 4 Micro-sensor

Basic 4 Micro-sensor Associate Prof. Mitsuhiro Shikida

Center for Micro-Nano Micro Nano Mechatronics Nagoya University

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

History_1 1962 [Anisotropic wet etching] 1962 [Anisotropic wet etching] 1967 Oscillation gate transistor [Sacrificial etching] 1968 [Anodic bonding] 1968 [Anodic bonding] 1970 Micro‐electrodes 1973 Pressure sensor 1973 Pressure sensor、 ISFET (Ion Senstitive FET）

Fundamental technologies

Advent of Micro-sensor

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

History_2 1975 Integrated Gas  g Chromatography Integration of 1979 Integrated Pressure Sensor 1979 Integrated Pressure Sensor Micro sensor Micro-sensor 1982 [LIGA process] 1986 Mass‐flow‐controller 1987 Micro‐gear 1987 Micro gear 1988 Micro‐motor driven by electrostatic force 1991 ～ 1991 Acceleration sensor, E Expansion i off Gyro sensor,  Micro-sensor application Infrared sensor Infrared sensor Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

MEMS applications

Electrostatic actuator

Micro-needle c o eed e

Optical Opt ca scanner sca e

V-grooves g oo es for o opt optical ca fibers be s

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Difficulty of MEMS development  Large amount of capital investment vs. Market size  High‐mix low‐volume production High‐mix low‐volume production  Complexity of fabrication process  Variety of device packaging  multidisciplinary research field   Scale effects S l ff t

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Micro-sensor in MEMS Fundamental Tech.

Device

System Tech.

①Fabrication

①Sensor ②Actuator ③Energy ④RF ⑤ ⑤Integrated circuit

①Contorol ②Interface

Etching LIGA Deposition ②Packaging

Bonding Packaging Interconnection ③Evaluation

M h i l properties Mechanical i

④Design support

CAE,CAM

MEMS d devices i Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Micro-sensor application Micro sensor

Detection principle

分野

I di id l id Individual identification tifi ti

C Capacitance、Image it I processing、Heat i H t transfer t f

I f Information-communication ti i ti Production

Flow sensor

Heat transfer

Automobile Building

Piezo-resistance Tactile sensor

Capacitance、 Piezo-resistance

Airplane Information-communication Production Medical care

P Pressure sensor

C Capacitance、 it Pi Piezo-resistance i t

A t Automobile bil (fuel) (f l) Automobile (tire) Automobile

Acceleration sensor

Capacitance、 Piezo-resistance

Information-communication Amusement

Gyro sensor

Capacitance

Automobile

Probe for sensing

Resonance

Measurement

IR sensor

Diode, Thermoelectric power

Automobile

Chemical sensor

FET Resonance FET、Resonance

Medical care

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Fascination points of Micro-sensor  Batch process Batch process

→ Reduction of cost → Reduction of cost Improvement of alignment accuracy

 Miniaturization

→ Fast response （Improvement of time resolution） Reduction of footprint （Improvement of space resolution） （Improvement of space resolution）

 Integration

→ Reduction of parasitic capacitance 

 Array arrangement

→ 2D analysis

Systemization  Systemization 

→ Multiple functions → Multiple functions Reduction of dead space

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Example of Micro-sensor

Tactile sensor T il Si active tactile sensor Si active tactile sensor Fabric tactile sensor Tuning fork probe for AFM Flow sensor for medical application

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Si active tactile sensor Active tactile sensor：「Passive＋Active elements」 It can detect both of hardness and force of object →It

Multiple functions

Detection point

Displacement p sensor

Force detection

Flat coil

Magnet

Magnetically driven active tactile sensor

Detection

① Quasi-static mode ② Vibration mode

Hardness detection

→ Force versus Displacement curve → Resonance characteristics Y. Hasegawa, et al., J. Micromech. Microeng., 16 (2006), 1625-1632

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Si active tactile sensor Quasi-static mode

Y. Hasegawa, et al., J. Micromech. Microeng., 16 (2006), 1625-1632 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Si active tactile sensor Vibration mode

n  Q un 

Kd  Ks md  m s

md  ms K d  K s  Cd  Cs f0 Cd  Cs

md  m s Kd  Ks

Y. Hasegawa, et al., J. Micromech. Microeng., 16 (2006), 1625-1632 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Si active tactile sensor Hybrid assembly

Y. Hasegawa, et al., J. Micromech. Microeng., 16 (2006), 1625-1632 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Si active tactile sensor Fabrication of sensing element

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Si active tactile sensor Fabrication of flat coil for magnetic actuation Plated first coil

Coil pattern for second plating

Plated second coil

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Si active tactile sensor Change of resonance with difference of resin materials

Y. Hasegawa, et al., J. Micromech. Microeng., 16 (2006), 1625-1632 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Fabric tactile sensor Wearable fabric tactile sensor made from hollow fiber

Weft

Metal film Elastic tube

Warp

Artificial hollow fiber

Schematic view of fabric tactile sensor Contacted area

Fiber

before

Detection principle

Load

Insulation layer

Capacitance change

Ca apacitance e change

Detection point ( (Cross between b warp and d weft f fibers) fb )

after

Force

Y. Hasegawa, et al., J. Micromech. Microeng., 18 (2008), 085014(8pp)

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Fabric tactile sensor

Advantages Can fit any arbitrary surface Can be easily increased in size Can produce wearable sensor G. Kita, et al., Micro & Nano Letters, 5 (2010), pp.389-392 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Fabric tactile sensor Uniformity Points for applied loads

Cross-talk Detections

Load

Y. Hasegawa, et al., J. Micromech. Microeng., 18 (2008), 085014(8pp) Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Fabric tactile sensor Weight detection

CV circuit CV-circuit G. Kita, et al., Micro & Nano Letters, 5 (2010), pp.389-392 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Fabric tactile sensor Demonstration

Patch-type

yp Embedded-type

Y. Hasegawa, et al., J. Micromech. Microeng., 18 (2008), 085014(8pp) Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Fabric tactile sensor Lateral force detection

G. Kita, et al., Micro & Nano Letters, 5 (2010), pp.211-214 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Fabric tactile sensor Lateral force detection

G. Kita, et al., Micro & Nano Letters, 5 (2010), pp.211-214 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Tuning fork probe for AFM Self-vibration and -detection AFM Probe by using quartz tuning fork

Advantages

Tuning fork f k structure→ Increase off d detection sensitivity Quartz material (piezo electric)→ Self-vibration and detection H. Hida, et al., Sensors and Actuators A 148(2008), 311-318 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Tuning fork probe for AFM Fabrication

FIB Anisotropic wet etching H. Hida, et al., Sensors and Actuators A 148(2008), 311-318 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Tuning fork probe for AFM Characteristics

H. Hida, et al., Sensors and Actuators A 148(2008), 311-318 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Flow sensor Conventional flow sensor

On-wall In-tube flow sensor

Advantage Can measure flow rate under non-developed region Can measure flow rate at the end of bent tube Z. Tan, et al., J. Micromech. Microeng., 17 (2007) 679-686 Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Flow sensor Micro-flow sensor for medical applications Collaboration with Prof. Kawabe

M. Shikida et al., J. Micromech. Microeng., 19 (2009) 105027 (9pp) Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Flow sensor Fabrication process

M. Shikida et al., J. Micromech. Microeng., 19 (2009) 105027 (9pp) Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Flow sensor Characteristics

M. Shikida et al., J. Micromech. Microeng., 19 (2009) 105027 (9pp) Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Flow sensor Characteristics

M. Shikida et al., J. Micromech. Microeng., 19 (2009) 105027 (9pp) Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Flow sensor Implanted measurement

M. Shikida et al., J. Micromech. Microeng., 20 (2010) 125030 (11pp) Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Flow sensor Stent-type

M. Shikida et al., J. Micromech. Microeng., 20 (2010) 055029 (8pp) Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University

Summary

Hi History Micro sensor in MEMS Micro‐sensor in MEMS Fascinations of Micro‐sensor Examples Tactile sensor  T i f k Tuning fork probe for AFM b f AFM Flow sensor for medical applications pp

Basic 4 Micro-sensor Associate Prof. M. Shikida COE for Education and Research of Micro-Nano Mechatronics, Nagoya University