Hindawi Publishing Corporation Journal of Nanomaterials Volume 2016, Article ID 3024815, 5 pages http://dx.doi.org/10.1155/2016/3024815
Research Article A Flexible and Highly Sensitive Piezoresistive Pressure Sensor Based on Micropatterned Films Coated with Carbon Nanotubes Jia-lin Yao,1,2,3 Xing Yang,1,2 Na Shao,1,2,4 Hui Luo,5 Ting Zhang,5 and Wu-gui Jiang3 1
MEMS Laboratory, Department of Precision Instruments, Tsinghua University, Beijing 100084, China State Key Laboratory of Precision Measurement Technology and Instrumentation, Tsinghua University, Beijing 100084, China 3 School of Aeronautical Manufacturing Engineering, Nanchang Hangkong University, Nanchang 330063, China 4 School of Information Engineering, Nanchang Hangkong University, Nanchang 330063, China 5 i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215125, China 2
Correspondence should be addressed to Xing Yang;
[email protected] and Ting Zhang;
[email protected] Received 16 April 2016; Accepted 12 July 2016 Academic Editor: Shu Seki Copyright © 2016 Jia-lin Yao et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. Excellent flexibility, high sensitivity, and low consumption are essential characteristics in flexible microtube pressure sensing occasion, for example, implantable medical devices, industrial pipeline, and microfluidic chip. This paper reports a flexible, highly sensitive, and ultrathin piezoresistive pressure sensor for fluid pressure sensing, whose sensing element is micropatterned films with conductive carbon nanotube layer. The flexible pressure sensor, the thickness of which is 40 ± 10 𝜇m, could be economically fabricated by using biocompatible polydimethylsiloxane (PDMS). Experimental results show that the flexible pressure sensor has high sensitivity (0.047 kPa−1 in gas sensing and 5.6 × 10−3 kPa−1 in liquid sensing) and low consumption (
