Development of highly precise bonding procedures for structured ...
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Development of highly precise bonding procedures for structured ...
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Development of highly precise bonding procedures for structured polyimide films on silicon substrates T.Goettsche1, C.Ruddy1, U.Heller1, M.Stehr1, H.Ashauer1, T.Lindemann2, P.Koltay2, Y. Yu3, R.-P. Peters3, P. Soriani4, A. Bellone4 1
Abstract Established bubble-jet printheads consist of a three layer assembly. The aim of the presented work was to simplify the setup of bubble-jet printheads by bonding a three-dimensional laser-structured polyimide nozzle plate onto a 1/3 inch standard printhead substrate with an alignment accuracy of
