Nano-gap Vapor Sensor C. Ghosh1, S.H. Khan1, S. J. Broadbent2, H.C. Hshieh1, S. Noh1, A. Banerjee1, N. Farhoudi1, C. H. Mastrangelo1, R. Looper2 and H. Kim1 1 Electrical and Computer Engineering, University of Utah, Salt Lake City, UT 84112 2 Department of Chemistry, University of Utah, Salt Lake City, UT 84112
[email protected], 801-587-9497 Abstract— This paper reports the development of a nano-gap vapor sensor that is capable of detecting an airborne target in a repeatable manner in near-zero static power consumption. The nano-gap sensor employed a matching gap distance of 5.8 nm to the lengths of both linkers and targets for selectivity. The nano-gap sensor was fabricated based on deposition and removal of a thin sacrificial layer via atomic-layer-deposition (ALD), and then coated with newly-synthesized linkers. The fabricated vapor sensor demonstrated the detection of a target gas (1, 5-Diaminopentane) or Cadaverine in a concentration of
