Imprint Lithography with 25-Nanometer Resolution - Princeton University
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Imprint Lithography with 25-Nanometer Resolution - Princeton University
Aug 6, 2003 - http://www.j stor.org/journals/aaas.html. Science .... fabricated with the use of resist templates created by imprint lithography in combination with a lift-off process. With further ... Eâmail: [email protected] in this report, we ...
