Fall/2009, 4-2, p1. Lecture 4-2 Other Micromachining Methods ... Micromachined
Transducers source book, Gregory T.A. Kovacs, McGraw Hill,. 1998. (d). (b. ) (e).
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Lecture 4-2 Other Micromachining Methods Non-conventional machining techniques
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LIGA (X-ray lithographie, galvanoformung, abformtechnik, means X-ray lithography, electrodeposition, molding):
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LIGA examples:
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Microelectric discharge machining (MEDM), Wire electrodischarge grinding (WEDG): Resolution depends on wire size, typically 5 µm in diameter and 50 µm in length.
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Laser Machining: Eximer laser
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Laser-assisted etching (LAE): 1. Laser irradiation in liquid with etchant or in a gas gives rise to reactive ions or plasma 2. The reactive ions or the plasma combine with the material or with the reactive atmosphere surrounding the material and change the material into a soluble or vaporized form. 3. The laser power applied is very low, for only activating an opto- or thermochemical reaction, different from traditional laser machining with high temp process, which causes melting and evaporation of material and limits the resolution and surface finish 4. Can be used in materials of ceramic (Al2O3, TiC), semiconductor, metal and polymer.
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Micro-Stereolithography:
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Microdrip fabrication:
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Spatial forming
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Photosensitive glass micromachining
Manufacturing using scanning probe microscopes and electron microscopes
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Microparticle handling by laser tweezers
Laser-assisted Chemical Vapor Deposition (LCVD)
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Ultrasonic Machining
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Focused Ion-Beam Milling
Electroplating: through mask, instant mask
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Localized Electrochemical Deposition:
EFAB (Electrochemical Fabrication)
Un-mated
Blanketdeposited 2nd material Anode
(c) Insulator
Mated
(a) + References: (d) 1. Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997. 2. Micromachines, a new era in mechanical engineering, Iwao Fujimasa, Oxford Science Publication, 1996 3. Micromachined Transducers source book, Gregory T.A. Kovacs, McGraw Hill, 1998 Electrolyte
(e)
(b )
Selectly-deposited 1st material
(f)
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Appendix: Comparisons of Precision/Micromachining techniques:
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