integrated with LTCC substrate. is calculated by the optical method. FINAL STRUCTURES. The gas flow sensor is made in the LTCC technology using DuPont ...
gas sensor technology have been achieved in various applications such as: safety .... many applications such as: automotive or medicine (i.e. breath analyzers). .... J. Müller received his diploma degree for electrical engineering and the ...
impulse line blockage in differential pressure sensors, and a novel coriolis mass flow meter prototype with SEVA capabilities. 2. THE SELF-VALIDATING (SEVA) ...
pacitors [3] the LTCC (Low Temperature Co-fired Ceramic) technology, which is developed for almost three decades, is very well suited to manufacture MCM ...
Jun 24, 2014 - Abstract: In this paper, a novel capacitance pressure sensor based on Low-Temperature. Co-Fired Ceramic (LTCC) technology is proposed for ...
Originality/value â Miniaturized thermoelectric energy harvester based on thick-film and LTCC technology was fabricated. As materials, metal-based pastes were ...
We designed and fabricated the gas flow sensor on Si wafer based on the heat dissipation ... The flow sensor consists of a heater and temperature sensing parts.
However, LTCC has good both electrical and mechanical properties, because of it the technology was ap- plied in sensors and microsystems applications.
Feb 15, 2017 - In the traditional gas metering, gas flow sensors with electric heating are often ... part, the thermal resistance is adopted for the heat flow meter.
technology specially designed for standard industrial compressed air. .... The fluidic inlet and outlet form the outmost parts of the bottom footprint of the circuit, ...
Ceramics) technology, for automotive applications operating at 24 GHz. .... Of course, other automotive radar applications might require a different antenna ...
Oct 7, 2018 - Thus, there is a true demand for a cost-effective, real-time, label-free cell ..... IEEE J. Solid-State Circuits 2016, 51, 457â472. ... on-chip passivated microelectrodes for bacteria detection in saline buffers up to 575 MHz. IEEE ..
terials: clay brick and autoclaved aerated concrete block. Surface analysis for two sensors was performed by means of 3D profilometer. Mechanical properties of ...
Jun 8, 2014 - dielectric constant in vacuum. Interdigital capacitor can be known from the following ... Figure 3: Fabrication process of passive wireless sensor. The sensor main production ... can ensure that the sensor circuit is connected.
Anita Lloyd Spetza,b,*, Maciej Sobocinskib, Niina Halonenb, Donatella ... are e.g. based on charging of the particles and separation of them in an electric field.
[4] Gràcia I, Ivanov P, Blanco F et al., Influence of the internal gas flow distribution on the efficiency of a μ-preconcentrator, Sens.Act. B 135. (2008) 52–6.
invasive system therefore this thesis presents a non-invasive of ultrasonic ... sistem yang tidak mengganggu proses aliran seperti matlamat dalam tesis ini.
Jun 27, 2005 - Universiti Teknologi Malaysia dengan syarat-syarat kegunaan seperti berikut: 1. Tesis adalah hakmilik Universiti Teknologi Malaysia. 2.
Figure 3. Occurrence of the slug flow in horizontal pipe of 5 cm diameter: ... of the map are the gas and liquid fluxes, the phases are air and water. ... of a pipe where slug flow exists, an observer sees liquid and gas flowing ... successfully appl
Jul 10, 2015 - Science and Technology on Electronic Test & Measurement ... and microwave signals, especially combined with wireless passive sensing.
Dec 8, 2010 - and fluidic interconnection with large gas fittings (e.g., G1/2"). ... heater resistor is surrounded by Ag thermal vias; conductor tracks are in Ag:Pd.
The axial flow gas turbine is used in almost all applications of gas turbine power
plant. ... efficiency of a well-designed turbine is higher than the efficiency of a.
Cofired Ceramics (LTCC) gas flow sensor is developed. The sensor consists ... The gas flow sensor is made in the LTCC technology using DuPont 951 A2 tape.
LTCC GAS FLOW SENSOR Dominik JURKÓW, Henryk ROGUSZCZAK, Leszek GOLONKA Faculty of Microsystem Electronics and Photonics, Wybrzeze Wyspianskiego 27, 50 - 370 Wroclaw, Poland http://wemif.net/lmg/ TECHNOLOGY
INTRODUCTION 1. A new construction of the Low Temperature Cofired Ceramics (LTCC) gas flow sensor is developed. The sensor consists of a gas channel and a cavity with a moving turbine. The turbine and the axle are made separately. 2. The rotational speed of the moving turbine depends on the gas flow velocity. The speed of the turbine is calculated by the optical method. 3. The test structure cover is made of a transparent glass for the turbine movement observation.
The gas flow sensor is made in the LTCC technology using DuPont 951 A2 tape. The thickness of the tape is equal to 165 mm before firing. The sensor consists of two parts cofired separately: Part 1 - a main body of the sensor with the gas channel, the via for optical measurement and a chamber with the axle, Part 2 - the turbine. The turbine, the axle, the vias, the chamber and the gas channel are made in the green tapes using a Nd - YAG laser. The design of the turbine is shown below. The turbine and axle are made independently without sacrificial layer. The test device is made with the transparent glass cover. It allows on the observation of the turbine movement.
FINAL STRUCTURES
Part 1 Final structure
Part 2
Final structure
EXPERIMENTAL
Block diagram of the measure circuit
RESULTS
CONCLUSION 1. The rotational speed of the moving turbine depends on the gas flow velocity. The wings of the turbine cause generation of the light impulses with various frequency which are detected by the light detector. The gas flow is calculated on the base of the frequency measurements. 2. The rotational velocity of the turbine does not depend on the gas temperature. The device can work at high temperature. 3. Using of the microcontroller will allow on light impulses counting during accessible time. One second counting will decrease the hysteresis significantly.
