Mechanical behavior simulation of MEMS-based ...

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Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics. A. Acheli and R. Serhane. Citation: AIP Conference Proceedings ...
Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics A. Acheli and R. Serhane Citation: AIP Conference Proceedings 1653, 020005 (2015); doi: 10.1063/1.4914196 View online: http://dx.doi.org/10.1063/1.4914196 View Table of Contents: http://scitation.aip.org/content/aip/proceeding/aipcp/1653?ver=pdfcov Published by the AIP Publishing Articles you may be interested in Numerical simulation of MEMS-based blade load distribution control in centrifugal compressor surge suppression AIP Conf. Proc. 1493, 116 (2012); 10.1063/1.4765479 Using COMSOL multiphysics software to investigate advanced acoustic problems J. Acoust. Soc. Am. 130, 2363 (2011); 10.1121/1.3654468 Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude Rev. Sci. Instrum. 82, 075106 (2011); 10.1063/1.3606440 MEMS‐based magnetic and electrostatic acoustic microspeakers J. Acoust. Soc. Am. 123, 3642 (2008); 10.1121/1.2934909 MEMS‐based acoustic arrays: Promise and challenges J. Acoust. Soc. Am. 116, 2510 (2004); 10.1121/1.4785016

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