Modelling of a capacitively-coupled radio-frequency
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Modelling of a capacitively-coupled radio-frequency
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Modelling of Plasma Reactors L.L. Alves, F.M. Dias, L.A. Marques, S. Letout, L. Novo 1. Introduction Plasma Reactors (PR) are nowadays an essential tool used in different types of industrial chains with electronics, photovoltaic, optics, food industry, or surface modification. In recent years, new reactor configurations have been proposed in order to give adequate effective answers, according to the objectives of each application. The main objective with this research task is the development of simulation tools to optimize, in an effective realistic way, the operation conditions of different PR’s. The validation of such tools requires a strong interaction between modeling and experiment, without which it will not be possible to improve the understanding of the main mechanisms controlling discharge operation. Such interaction is ensured here through different collaborations with foreign research teams.
2. Task description and framework 2.1 Modeling of a capacitively-coupled radio-frequency reactor We have pursuit the modeling of a capacitively-coupled radio-frequency (ccrf) reactor, based on low-pressure (p
