DuPont Electronic Technologies. Microlithographic Polymer Film. DuPont™
D4000 IC™ Series. Data Sheet & Processing Information. High Purity
Concentrate ...
DuPont Electronic Technologies
Microlithographic Polymer Film
DuPont™ D4000 IC™ Series Data Sheet & Processing Information High Purity Concentrate Liquid Developer D4000 IC PRODUCT DESCRIPTION
DuPont D4000 IC High Purity Concentrate Liquid Developer is a 40% by weight, potassium carbonate liquid concentrate designed for use with fully aqueous MPF polymer films. D4000 IC is a stable solution that easily goes in to solution and is specially design for optimum results with DuPont’s MPF – Microlithographic Polymer Film- in spin developer and vertical spray systems.
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FEATURES •
Consistent concentration
•
Easy rinsing
•
Eliminate incomplete and inaccurate mixing of powders
•
Maximum cold storage stability
Physical Appearance:
Clear Liquid
Specific Gravity:
1.41 @ 16°C (60°F)
Flammability:
> 93°C (200°F)
pH:
>13 (Concentrate Form)
Packaging:
1 and 5 gallon containers
WORKING SOLUTION MAKEUP Mix D4000 IC concentrate developer with water (DI or RO) to obtain a 0.6 to 0.8 wt.% potassium carbonate working solution. The required concentration will depend on the solution operation parameters, including solution temperature, minimum developing time and MPF film used. Refer to the processing guide for particular MPF film in use. Use the following formulas chart to calculate the amount of D4000 IC needed.
WORKING SOLUTION MAKEUP FORMULA: D4000 IC (ml) = wt.% working solution x developer volume needed (liters) x 17.7 Example: If one liter of a 0.6 wt.% working solution is needed and D4000 IC is measured in ml (milliliters), calculate: 0.6 x 1 x 17.7 = 10.62 ml of D4000 IC
Developer Volume Needed (Liters)
Potassium Carbonate Working Solution wt.% 0.6
0.65
0.7
0.75
0.8
1
10.62
11.51
12.39
13.28
14.16
2
21.24
23.01
24.78
26.55
28.32
5
53.10
57.53
61.95
66.38
70.80
10
106.20
115.05
123.90
132.75
141.60
20
212.40
230.10
247.80
265.50
283.20
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OPERATING CONDITIONS Developer Working Solutions:
0.6 - 0.8 wt.% Potassium Carbonate
Solution pH:
11.2
Solution Temperature:
25- 30°C
Spray Pressure:
20-35 psig
Rotation Speed
> 500 rpm (1000 rpm preferred)
Flow Rates:
> 150 ml/min (200 ml/min preferred)
Developing Time:
Refer to MPF product datasheet
Rinsing:
> 50% of Total Development time (DI water)
ANALYTICAL PROCEDURE Analyze for weight percent D4000 IC (potassium carbonate) using standardized hydrochloric acid. The following analytical procedure can be used to check proper mixing ratios. The working developer solution should be 0.6 to 0.8 wt% . Reagents: •
0.01 N Hydrochloric Acid (HCl)
•
0.1% Methyl Orange Solution
Equipment: •
250 ml Erlenmeyer flask
•
25 ml volumetric pipette (Class A or equivalent)
•
50 ml buret
Procedure: 1.
Pipette a 25 ml sample of the developer solution into a 250 ml Erlenmeyer flask
2.
Add 100 ml of deionized water
3.
Add 3-5 drops of methyl orange solution. The solution will be yellow
4.
Titrate with 0.1 N HCl to red end point.
Calculations: wt% D4000 IC = (ml HCl) x 0.028
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DISPOSAL Dispose of D4000 IC working solution according to Federal, State, and local regulations. DuPont D4000 IC and MPF films are formulated to be compatible with municipal wastes treatment systems. Studies have shown that chemical on spent developer solutions have little impact on activities of municipal or regional sewage systems. Therefore, effluents containing only spent MPF film and D4000 IC developer solutions are usually not subject to pre treatment under current EPA and local standards.
SAFETY Before using this product, refer to the Material Safety Data Sheet (MSDS) for detailed safety, handling, and storage information. Always wear safety glasses, goggles, rubber gloves, and protective clothing when handling D4000 IC concentrate or working solutions. Provide adequate ventilation. Emergency First Aid Procedures: Ingestion Do NOT induce vomiting. Give large quantities of water. Never give anything by mouth to an unconscious person. Call a physician. Inhalation Remove to fresh air. If not breathing, give artificial respiration, preferable mouth-to-mouth. If breathing is difficult, give oxygen. Call a physician. Skin Contact Flush thoroughly with plenty of water. Remove contaminated clothing and wash before re-use. Eye contact Immediately flush eyes with plenty of water for at least 15 minutes. Remove contact lens, if applicable. Call a physician. Spill/Leak Clean-up Procedure Absorb with earth, sand, or similar inert material and dispose of with solid waste according to Federal, State, and local regulations. Flush spill area with water.
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STORAGE D4000 IC has been formulated to provide maximum cold weather storage ability. However, this material should not be subjected to extreme cold weather conditions for prolonged periods of time. Storage temperature between 2 and 38°C (35- 100°F), in sealed original containers, are recommended. Do not store D4000 IC near acidic materials.
