MEMS-based Micro-Coriolis Density and Flow ... - AMA Science

32 downloads 0 Views 741KB Size Report
sensor by etching a micro tube structure from a silicon wafer. Such micro ... Key words: MEMS, micro-Coriolis, mass flow, density, viscosity. Introduction. Coriolis ...
DOI 10.5162/sensor2015/B6.1

0(06EDVHG 0LFUR&RULROLV 'HQVLW\ DQG )ORZ 0HDVXUHPHQW 7HFKQRORJ\ & +XEHU (QGUHVV+DXVHU )ORZWHF $* .lJHQVWUDVVH  &+ 5HLQDFK 6ZLW]HUODQG FKULVWRIKXEHU#IORZWHFHQGUHVVFRP

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

$QRWKHU JURZLQJ PDUNHW LV WKH PLFUR IOXLGLF PDUNHW >@ 2Q RQH KDQG FODVVLFDO SURGXFWLRQ SURFHVVHV RI WKH FKHPLFDO PHGLFDO RU OLIH VFLHQFH LQGXVWU\ DUH PLQLDWXUL]HG RQ WKH RWKHU KDQG FODVVLFDO ODERUDWRU\ VDPSOH DQDO\]LQJ DQG SURFHVVLQJ LV GRQH LQOLQH RU RQ D PLFURFKLS OHYHO >@ $OO WKHVH WUHQGV UHTXLUH PHDVXUHPHQW HTXLSPHQW IRU ORZHU WKURXJKSXWV XVLQJ OHVV VDPSOH YROXPH DQG KDYLQJ VPDOOHU PHWHU GLPHQVLRQV

(QGUHVV+DXVHU )ORZWHF $* LV GHYHORSLQJ DQG SURGXFLQJ &RULROLV IORZPHWHUV VLQFH PRUH WKDQ  \HDUV >@

,Q UHFHQW \HDUV GLIIHUHQW JURXSV KDYH ZRUNHG RQ WKH DGDSWDWLRQ DQG LPSOHPHQWDWLRQ RI WKH &RULROLV PHDVXULQJ SULQFLSOH LQ D 0(06 VHQVRU E\ HWFKLQJ D PLFUR WXEH VWUXFWXUH IURP D VLOLFRQ ZDIHU 6XFK PLFUR PDFKLQHG VLOLFRQ EDVHG &RULROLV VHQVRU FKLSV DOORZ QRZ WR FRQVLGHU PLFURIOXLGLF DSSOLFDWLRQV IRU WKH &RULROLV PHDVXULQJ SULQFLSOH >@

&RULROLV IORZPHWHUV H[LVW LQ D ORW RI GLIIHUHQW VKDSHV DQG VW\OHV W\SLFDOO\ ZLWK PHWDO IORZ WXEHV 7KHUH H[LVW VLQJOH WXEH GXDO WXEH DQG HYHQ  WXEH PHWHUV )ORZ WXEHV FDQ EH VWUDLJKW EHQGHG RU ORRSHG ,W GHSHQGV RQ VSHFLILF LQGXVWU\ VSHFLILFDWLRQV ZKLFK PHWHU ZLOO EH FRQVLGHUHG 7KH QRPLQDO IORZ UDWHV UDQJHV IURP DERXW JK WR  WK FRUUHVSRQGLQJ WR OLQH VL]HV IURP DERXW  PP XS WR  PP

AMA Conferences 2015 – SENSOR 2015 and IRS2 2015

6RPH RI WKHVH 0(06 VHQVRU GHVLJQV KDYH EHHQ PDLQO\ GHYHORSHG WR PHDVXUH GHQVLW\ DQG YLVFRVLW\ >@ 2WKHUV DUH IRFXVLQJ RQ IORZ PHDVXUHPHQW DW YHU\ORZ IORZ UDWHV  PJK WR  JK >@

286

DOI 10.5162/sensor2015/B6.1

0(06 &RULROLV &KL൛ ,Q WKH ODVW \HDUV (QGUHVV+DXVHU KDV IRFXVHG RQ WKH GHYHORSPHQW RI D UREXVW SURFHVV VHQVRU IRU PHDVXULQJ GHQVLW\ DQG FRQFHQWUDWLRQ RI JDVHV DQG OLTXLGV XVLQJ D 0(06 &RULROLV &KLS DV D VHQVLQJ HOHPHQW 7KH 0(06 &KLS EDVHV RQ WKH WHFKQRORJ\ GHVFULEHG E\ 6SDUNV HW DO >@

)LJ  (+ 0(06 &RULROLV VHQVRU FKL਀ ৾HIW৻ ERWWRP ਁLHZ ZLWK IOXLGLF FRQQHFWLRQ KROHV VHQVLQJ DQG HਂFLWDWLRQ ਀DGV 5LJKW৻ WR਀ ਁLHZ RQ WKH VHQVRU FD਀ DQG WKH ERQG ਀DGV IRU HOHFWULFDO FRQQHFWLRQV

7KH UHVRQDQW PLFURWXEHV HPSOR\V D 0(06 IDEULFDWLRQ SURFHVV ZKLFK XVHV D FRPELQDWLRQ RI SODVPD DQG ZHW HWFKLQJ SKRWROLWKRJUDSK\ DORQJ ZLWK ZDIHU ERQGLQJ WR IRUP WKH PLFURIOXLGLF FKLSV )LJXUH  VKRZV D FDSSHG (+ 0(06 &RULROLV VHQVRU FKLS ,W FRQWDLQV D IUHHVWDQGLQJ RPHJD VKDSHG PLFURWXEH WKDW LV DEOH WR UHVRQDWH LQ D YDFXXP FDYLW\

VLJQDO ZKLFK LV D PHDVXUH IRU WKH PDVV IORZ UDWH WKURXJK WKH WXEH 7KH PHWDO OD\HU LV DOVR XVHG DV DQ RQFKLS UHVLVWLYH WHPSHUDWXUH VHQVRU 7ZR KROHV LQ WKH ERWWRP JODVV FKLS DGPLW IOXLG LQWR DQG RXW RI WKH VLOLFRQ PLFURWXEH )LJ   0(06 'HQVLW\ 6HQVRU 7KH FKLS LV DEOH WR PHDVXUH PDVV IORZ UDWH > ൜@ GHQVLW\ >൝@ DQG HYHQ YLVFRVLW\ >@ +RZHYHU ZH IRFXVHG RQ WKH LQGXVWULDOL]DWLRQ RI WKH GHQVLW\ PHDVXUHPHQW $ YDULHW\ RI GHQVLW\ VHQVRUV DUH FXUUHQWO\ LQ  XVH )RU DFFXUDWH UHDGLQJV  WR  NJP GHQVLW\ LV PRVW RIWHQ PHDVXUHG XVLQJ D UHVRQDWLQJ JODVV RU PHWDO WXEH 7KH GHQVLW\ RI D UHVRQDWLQJ WXEH GHSHQGV RQ WKH VWLIIQHVV (ਃ৽ DQG WKH WRWDO PDVV RI WKH WXEH PWXEHPIOXLG DFFRUGLQJ WR HT  ൟHQVLW\ PHDVXUHPHQW PHWKRGRORJ\ LV UDWKHU VLPSOH LQ VXFK D GHYLFH WKH KLJKHU WKH ZHLJKW RI WKH IOXLG LQ WKH ILOOHG WXEH PIOXLG WKH ORZHU WKH IUHTXHQF\ I

I  FRQVW

(, PWXEH  P IOXLG



7KH PDVV RI WKH IOXLG LV SURSRUWLRQDO WR WKH IOXLG GHQVLW\  DQG WKH LQWHUQDO WXEH YROXPH ৿ DFFRUGLQJ WR HT 

P IOXLG 9



ൠLWK HT  D UHODWLRQVKLS IRU WKH IOXLG GHQVLW\ RI WKH IROORZLQJ VWUXFWXUH FDQ EH IRXQG

  $

% I



ZKHUH $ DQG ৼ DUH FDOLEUDWLRQ FRQVWDQWV GHSHQGLQJ RQ WHPSHUDWXUH DQG SUHVVXUH  )LJ ৺ &URVVVHFWLRQ RI WKH PLFURWXEH

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

AMA Conferences 2015 – SENSOR 2015 and IRS2 2015

7KH XVHG VLOLFRQ PLFURWXEH KDV VTXDUHG SURILOH ZLWK GLPHQVLRQV RI [൛ P DQG D RYHUDOO OHQJWK RI DERXW  PP +HQFH WKH WXEH LQWHUQDO YROXPH LV RQO\  QO 7KH WXEH UHVRQDWHV ZLWK IUHTXHQFLHV EHWZHHQ  WR  N+] 7KH VPDOO VDPSOH YROXPH WRJHWKHU ZLWK WKH KLJK ZRUNLQJ IUHTXHQF\ JLYHV WKH SRWHQWLDO IRU D YHU\ IDVW G\QDPLF UHVSRQVH RI WKH VHQVRU WR GHQVLW\ FKDQJHV 7KH WXEH ZLWKVWDQGV SUHVVXUHV XS WR ൝ EDU &RQYHQWLRQDO GHQVLW\ RU FRULROLV IORZ VHQVRUV PDGH IURP VWHHO DUH ZHOO VXLWHG IRU OLTXLG GHQVLW\ PHDVXUHPHQWV ൞XW WKH\ DUH W\SLFDOO\ QRW VHQVLWLYH HQRXJK WR DFFXUDWHO\ PHDVXUH JDV GHQVLW\ DW ORZ SUHVVXUHV 7KH ELJ DGYDQWDJH RI D VLOLFRQ WXEH RYHU D FRQYHQWLRQDO VWHHO WXEH LV LWV  WLPHV ORZHU PDWHULDO GHQVLW\ PWXEH 7KLV UHVXOWV LQ D VLJQLILFDQWO\ KLJKHU VHQVLWLYLW\ RI D

287

DOI 10.5162/sensor2015/B6.1

VLOLFRQ WXEH VHQVRU IRU FKDQJHV LQ WKH IOXLG GHQVLW\ FRPSDUHG WR D VWHHO WXEH VHQVRU ZLWK WKH VDPH GLPHQVLRQV HT   +HQFH ZH FDQ FRQFOXGH D VLOLFRQ PLFURWXEH KDV VHYHUDO DGYDQWDJHV FRPSDUHG WR WUDGLWLRQDO GHQVLW\ VHQVLQJ WHFKQRORJLHV HJ KLJKHU GHQVLW\ VHQVLWLYLW\ IRU JDV DW ORZ SUHVVXUHV VPDOOHU VDPSOH YROXPH KLJKHU YLEUDWLRQ IUHTXHQFLHV IDVWHU UHVSRQVH WLPH VPDOOHU VL]H DQG LPSURYHG V\VWHP LQWHJUDWLRQ

7KH 0(06FKLS LV DWWDFKHG WR D VWDLQOHVV VWHHO PDQLIROG WKDW FDQ EH FRQQHFWHG WR DQ\ SURFHVV OLQH XVLQJ VWDQGDUG IOXLGLF FRQQHFWLRQV 2QH RI WKH PRVW LPSRUWDQW DQG GLIILFXOW WDVNV RQ WKH ZD\ WR D UREXVW SURFHVV VHQVRU LV WKH DWWDFKPHQW RI WKH 0(06 FKLS WR WKH PHWDO PDQLIROG $ ORW RI H[SHULHQFH LV QHHGHG WR HYDOXDWH WKH EHVW VROXWLRQ IRU D VSHFLILF DSSOLFDWLRQ ൠH KDYH D TXDOLILHG VROXWLRQ WKDW ILWV IRU WHFKQLFDO QRQ FRUURVLYH JDVHV

,QWHJUDWLRQ LQWR D ൞URFHVV 'HQVLWRPHWHU 7KH 0(06 FKLS UHTXLUHV HOHFWURQLFV WR DPSOLI\ WKH VHQVRU VLJQDOV DQG GULYH WKH PLFURWXEH $Q HOHFWURQLF FLUFXLW LV FRQQHFWHG WR WKH 0(06 FKLS YLD ZLUH ERQGV ZKHUH WKH VLJQDO LV SURFHVVHG WR REWDLQ WKH GHQVLW\ DQG WKH WHPSHUDWXUH RI WKH IOXLG IORZLQJ WKURXJK WKH WXEH 7KH WXEH LV HOHFWURVWDWLFDOO\ DFWLYDWHG DQG LWV GHIOHFWLRQ LV VHQVHG E\ WKH FKDQJH LQ FDSDFLWDQFH RI WKH VHQVRU HOHFWURGHV

൜DV 'HQVLW\ 0HDVXUHPHQWV ,Q RUGHU WR DFFXUDWHO\ PHDVXUH WKH GHQVLW\ RI D FRPSUHVVLEOH JDV XVLQJ WKH IUHTXHQF\ RI D UHVRQDWLQJ WXEH UHTXLUHV WKH NQRZOHGJH RI WKH JDV WHPSHUDWXUH DQG SUHVVXUH )RU WKLV VWXG\ D FDSDFLWLYH DEVROXWH SUHVVXUH VHQVRU ZDV XVHG LQ VHULHV ZLWK WKH GHQVLW\ PHWHU WR PHDVXUH WKH SUHVVXUH

7KH 0(06 FKLS LV LQWHJUDWHG LQ D IXOO\ GHYHORSHG SURFHVV VHQVRU ZLWK GLJLWDO DQG DQDORJ FRPPXQLFDWLRQV SRVVLELOLWLHV $Q LQWULQVLF VDIH FLUFXLW HQDEOHV WKH XVH RI WKLV WHFKQRORJ\ ZLWK IODPPDEOH OLTXLGV RU LQ H[SORVLRQ KD]DUGRXV DWPRVSKHUHV

)LJ  ਋HQVLWਗ FDOLEUDWLRQ ZLWK QLWURJHQ FDUERQ GLRਂLGH DQG ZDWHU DW GLIIHUHQW WHP਀HUDWXUHV IURP  WR ਈਇਘ& DQG ਀UHVVXUHV IURP  WR ৺ਇ EDU

,Q )LJ  D W\SLFDO JDV FDOLEUDWLRQ SURFHGXUH LV VKRZQ &DOLEUDWLRQ IOXLGV DUH QLWURJHQ FDUERQ GLR[LGH DQG ZDWHU DW GLIIHUHQW WHPSHUDWXUHV UDQJLQJ IURP  WR ൛൱& DQG SUHVVXUHV IURP  WR  EDU 7KH PHDVXULQJ DFFXUDF\ IRU JDVHV LQ WKLV WHPSHUDWXUH DQG SUHVVXUH UDQJH LV ൲  NJP 

)LJ  ਏR਀৻ ਎URFHVV GHQVLWRPHWHU ZLWK IOXLGLF FRQQHFWLRQV DQDORJ DQG GLJLWDO FRPPXQLFDWLRQ XVHG IRU WKH PHDVXUHPHQWV VKRZQ LQ WKLV ਀D਀HU ৼRWWRP৻ 0(06 VHQVRU FKL਀ DWWDFKHG WR D VWDLQOHVV VWHHO PDQLIROG

AMA Conferences 2015 – SENSOR 2015 and IRS2 2015

)LJ  VKRZV D FRPSDULVRQ RI WKH GHQVLW\ PHDVXUHPHQWV RI VHYHUDO SXUH JDVHV VXFK DV PHWKDQH QLWURJHQ DUJRQ FDUERQ GLR[LGH DQG NU\SWRQ YHUVXV SUHVVXUH 6HQVRU VLJQDOV ZHUH PRQLWRUHG FRQWLQXRXVO\ RYHU D SHULRG WLPH RI DERXW RQH KRXU 6WDUWLQJ IURP D ZRUNLQJ SUHVVXUH RI  EDU WKH JDV ZDV VOLJKWO\ IORZLQJ WKURXJK WKH VHQVRU WXEH OHDGLQJ WR D VORZ EXW VWHDG\ GHFUHDVH RI WKH ZRUNLQJ SUHVVXUH RYHU WLPH 7KH JDVHV FDQ EH QLFHO\ GLVWLQJXLVKHG E\ WKH GHQVLW\

288

DOI 10.5162/sensor2015/B6.1

)LJ  ਋HQVLWਗ PHDVXUHPHQWV ਁHUVXV ਀UHVVXUH RI GLIIHUHQW ਀XUH JDVHV

,Q RUGHU WR WHVW WKH DFFXUDF\ RI WKH VHQVRU WKH PHDVXUHG GHQVLW\ ZDV FRPSDUHG WR UHIHUHQFH YDOXHV WDNHQ IURP WKH ൧,67 GDWDEDVH >@ 7KH UHVXOW IRU PHWKDQH DQG QLWURJHQ LV VKRZQ LQ )LJ ൛ 7KH VHQVRU VLJQDO OLHV ZLWKLQ DQ HUURU EDQG LQ  WKH RUGHU RI ൲ NJP  7KH UHSHDWDELOLW\ LV  HYHQ EHWWHU DERXW ൲ NJP 

)LJ  0HDVXUHPHQW ZLWK OLਖXLGV RI GLIIHUHQW GHQVLWLHV DQG ਁLVFRVLWLHV

,Q RUGHU WR WHVW WKH UHSURGXFLELOLW\ RI WKH VHQVRU WKH GHQVLW\ RI GLIIHUHQW W\SHV RI ZDWHU ZDV DQDO\]HG DW URRP WHPSHUDWXUH ൟHLRQL]HG ZDWHU WDS ZDWHU IURP GLIIHUHQW VRXUFHV DQG YDULRXV ERWWOHG PLQHUDO ZDWHUV ZHUH PHDVXUHG 7KH DQDO\VHV ZHUH SHUIRUPHG RYHU D SHULRG RI VHYHUDO GD\V 6DPSOHV RI  WR  PO ZHUH LQ൮HFWHG ZLWK D V\ULQJH RQH E\ RQH 7KH UHVXOW FDQ EH VHHQ LQ )LJ ൝ 7KH GHQVLWLHV RI WKH GLIIHUHQW VDPSOHV UHSURGXFH ZLWKLQ OHVV WKDQ  ൲ NJP RYHU WKH ZKROH WLPH SHULRG 7KH UHSURGXFLELOLW\ LQFOXGHV WKH XQFHUWDLQW\ RI WKH KDQGOLQJ SURFHVV DQG D SRWHQWLDO FRQWDPLQDWLRQ RI WKH VDPSOHV

AMA Conferences 2015 – SENSOR 2015 and IRS2 2015

2EFERENCE $) WATER

& TAB WATER CITY 

% MINERAL WATER  MG,

$ MINERAL WATER  MG,

# MINERAL WATER  MG,

)LJ ൜ VKRZV WKH PHDVXULQJ SHUIRUPDQFH RI WKH OLTXLG FDOLEUDWLRQ RI WZR GHQVLWRPHWHUV $ FDOLEUDWLRQ ZDV SHUIRUPHG XVLQJ QLWURJHQ DW GLIIHUHQW WHPSHUDWXUHV IURP  WR ൛൱& ZDWHU ,൨$ GLIIHUHQW &DQQRQ UHIHUHQFH VWDQGDUGV ൧ 6൛ DQG 6  WUHH GLIIHUHQW JO\FHURO ZDWHU PL[WXUHV ൡ ൛ൡ DQG ൝ൡ JO\FHURO DQG D VRGLXP SRO\WXQJVWDWH ZDWHU VROXWLRQ 7KH GHQVLW\ DQG YLVFRVLW\ UDQJH RI WKH OLTXLG  VDPSOHV ZDV ൜ WR  NJP DQG  WR  P൨DV UHVSHFWLYHO\ 7KH PHDVXUHG GHQVLWLHV  GHYLDWH ZLWKLQ ൲ NJP IURP WKH UHIHUHQFH YDOXHV

" MINERAL WATER  MG,

൝LൢXLG 'HQVLW\ 0HDVXUHPHQWV

                    



! TAB WATER CITY 

)LJ ਈ ਋HQVLWਗ PHDVXUHPHQWV RI PHWKDQH ਄EODFਕ GRWVਅ DQG QLWURJHQ ਄JUDਗ WULDQJOHVਅ ਁHUVXV ਀UHVVXUH ਎ORWWHG LV WKH GHQVLWਗ GLIIHUHQFH WR WKH GHQVLWਗ ਁDOXHV RI WKH ਍৽6ਏ GDWDEDVH ਓ৺ਔ

BCLQGRW BGDDCPCLAC DPMK "' U?RCP IE K 

)RU WKH PLQHUDO ZDWHU VDPSOHV WKH GHQVLW\ UHDGLQJV FDQ EH FRPSDUHG ZLWK WKH PLQHUDO FRQWHQW LQGLFDWHG RQ WKH ERWWOHV ൞RWK YDOXHV DUH VWURQJO\ FRUUHODWHG 7KLV VKRZV WKH SRWHQWLDO RI WKH VHQVRU WR PHDVXUH WKH WRWDO PLQHUDO FRQWHQW LQ ZDWHU ZLWK DQ XQFHUWDLQW\ RI PJ൦

)LJ ਉ ਑DWHU GHQVLWਗ DQG WRWDO PLQHUDO FRQWHQW

&RQFOXVLRQV 7KH 0(06 &RULROLV VHQVRU SUHVHQWHG LQ WKLV SDSHU LV UHSUHVHQWDWLYH IRU VWDWHRIWKH DUW 0(06 VHQVRU GHYHORSPHQW ,WV VPDOO VL]H IDVW

289

DOI 10.5162/sensor2015/B6.1

UHVSRQVH WLPH YLEUDWLRQ LPPXQLW\ DQG H[FHSWLRQDO DFFXUDF\ DQG UHSURGXFLELOLW\ RSHQ XS QHZ SRVVLELOLWLHV IRU GHQVLW\ DQG FRQFHQWUDWLRQ PHDVXUHPHQW DV D EDVLV IRU JDV DQG OLTXLGV TXDOLW\ FRQWURO LQ D ZLGH YDULHW\ RI DSSOLFDWLRQV DQG HQG XVHU LQGXVWULHV ERWK LQ SURFHVV DQG ODERUDWRU\ HQYLURQPHQWV ,QGXVWULDOL]DWLRQ DQG VXEVHTXHQW WHVWLQJ RI WKLV VHQVLQJ WHFKQRORJ\ KDV VKRZQ LWV FDSDELOLW\ IRU EHLQJ DSSOLHG LQ LQGXVWULDO HQYLURQPHQWV

൜ ൛ ൢ ൛ GRLൢ൛൮IORZPHDVLQVW൛൛ >@

6SDUUHERRP ൠ *HHVW ൤ ൪DQ ൟH ൥DWHUEHUJ 0 HW DO &RPSDFW 0DVV )ORZ 0HWHU ൞DVHG RQ D 0LFUR &RULROLV )ORZ 6HQVRU 0LFURPDFKLQHV   GRLൢPL

>@

൦൯WWHUV ൤& ൦DPPHULQN 76൤ *URHQHVWHL൮Q ൤ +DQHYHOG ൤ ൠLHJHULQN ൩൤ ,QWHJUDWHG WKHUPDO DQG PLFUR&RULROLV IORZ VHQVLQJ V\VWHP ZLWK D G\QDPLF IORZ UDQJH RI PRUH WKDQ ILYH GHFDGHV 0LFURPDFKLQHV  ൳  

>@

ൠDQJ 7 ൞DNHU ൩ &RULROLV IORZPHWHUVൢ D UHYLHZ RI GHYHORSPHQWV RYHU WKH SDVW  \HDUV DQG DQ DVVHVVPHQW RI WKH VWDWH RI WKH DUW DQG OLNHO\ IXWXUH GLUHFWLRQV )ORZ 0HDV ৽QVWUXP    ൣ GRLൢ൛൮IORZPHDVLQVW൝

ൠLHJHULQN ൩൤  ൦DPPHULQN 76൤ *URHQHVWHL൮Q ൤ ൟL൮NVWUD 0 ൦RWWHUV ൤& 0LFUR &RULROLV PDVV IORZ VHQVRU IRU FKHPLFDO PLFURSURSXOVLRQ V\VWHPV )LUVW LQWHUQDWLRQDO FRQIHUHQFH RQ PLFURIOXLGLF KDQGOLQJ VਗVWHPV ਄0)+6৺ਇ৺ਅ (QVFKHGH ਏKH਍HWKHUODQGV 

>@

$QNOLQ 0 ൟUDKP ൠ ൩LHGHU $ &RULROLV PDVV IORZPHWHUVൢ 2YHUYLHZ RI WKH FXUUHQW VWDWH RI WKH DUW DQG ODWHVW UHVHDUFK )ORZ 0HDV ৽QVWUXP ൜ ൛  ൜ ൛ GRLൢ൛൮IORZPHDVLQVW൛൜

൨ (QRNVVRQ * 6WHPPH ( 6WHPPH $ VLOLFRQ UHVRQDQW VHQVRU VWUXFWXUH IRU &RULROLV PDVVIORZ PHDVXUHPHQWV ਌RXUQDO RI 0LFURHOHFWURPHFKDQLFDO 6ਗVWHPV ൛ ൳  ൜

>@

6SDUNV ൟ 6PLWK ൩ 6FKQHLGHU ൩ &ULSH ൤ 0DVVRXG$QVDUL 6 &KLPED\R $ ൧D൮DIL ൧ $ YDULDEOH WHPSHUDWXUH UHVRQDQW GHQVLW\ VHQVRU PDGH XVLQJ DQ LPSURYHG FKLSOHYHO YDFXXP SDFNDJH 6HQVRUV DQG $FWXDWRUV $ ൜  

>@

6SDUNV ൟ ൥DZDJXFKL ൥ ൫DVXGD 0 ൩LOH\ ൟ &UX] ൪ 7UDQ ൧ &KLPED\R $ ൧D൮DIL ൧ (PEHGGHG 0(06 EDVHG FRQFHQWUDWLRQ VHQVRU IRU IXHO FHOO DQG ELRIXHO DSSOLFDWLRQV 6HQVRUV DQG $FWXDWRUV $ YRO ൛   ൝

>൛@

6SDUNV ൟ *RHW]LQJHU ൟ ൩LOH\ ൟ ൧D൮DIL ൧ $ E\SDVV VHQVRU SDFNDJH GHVLJQ HQDEOLQJ WKH XVH RI PLFURIOXLGLFV LQ KLJK IORZ UDWH DSSOLFDWLRQV ਎URFHHGLQJV RI WKH ৺ਇਇਈ $60( 0(06ਆ਍(06 ਎DFਕDJLQJ 6ਗP਀RVLXP &KLFDJR ൛

>൜@

6SDUNV ൟ 6PLWK ൩ ൨DWHO ൤ ൧DG൮DIL ൧ $ 0(06EDVHG ORZ SUHVVXUH OLJKW JDV GHQVLW\ DQG ELQDU\ FRQFHQWUDWLRQ VHQVRU 6HQVRUV DQG $FWXDWRUV $൜ ൛ 

>൝@

+XEHU & 7RX]LQ 0 ൧HZ 0(06EDVHG PLFURFRULROLV GHQVLW\ PHDVXUHPHQW WHFKQRORJ\ ਎URFHHGLQJV RI WKH $60( ৺ਇ ਊWK ৽QWHUQDWLRQDO &RQIHUHQFH RQ ਍DQRFKDQQHOV 0LFURFKDQQHOV DQG 0LQLFKDQQHOV (GPRQWRQ $OEHUWD &$਍$਋$  ,&൧00൝

>@

6SDUNV ൟ 6PLWK ൩ &UX] ൪ &KLPED\R $  ൩LOH\ ൟ ൧D൮DIL ൧ ൟ\QDPLF DQG NLQHPDWLF YLVFRVLW\ PHDVXUHPHQWV ZLWK D UHVRQDWLQJ PLFURWXEH 6HQVRU DQG $FWRUV $   ൝  

$FൡQRZOHGJHPHQWV 7KH DXWKRU ZRXOG OLNH WR DFNQRZOHGJH WKH ZRUN DQG VXSSRUW IURP $ ൩DVFK ൨ ൩HLWK + )HWK 6 ൠLUWK 0 7KHRGRU DQG 0 7RX]LQ ൟHൠHUHQFHV >@

>@

>@

)ORZ ൩HVHDUFK ,QF 7KH ZRUOG PDUNHW IRU WK &RULROLV IORZPHWHUV  HG  

>@

&DVWLOOR൦HRQ ൤ ൦DE RQ D &KLS ൟHYLFHV DQG 0LFUR7RWDO $QDO\VLV 6\VWHPV 6਀ULQJHU ৽QW ਎XEOLVKLQJ 6ZLW]HUODQG   GRLൢ ൜൜൝൝൛൝൜൭

>@

൬KDQJ ൫ 7DGLJDGDSD 6 ൧D൮DIL ൧ $ PLFURPDFKLQHG &RULROLVIRUFHEDVHG PDVV IORZPHWHU IRU GLUHFW PDVV IORZ DQG IOXLG GHQVLW\ PHDVXUHPHQW ਏUDQVGXFHU ਙਇ (XURVHQVRUV ਒৿ WKH WK LQWHUQDWLRQDO FRQIHUHQFH RQ VROLGVWDWH VHQVRUV DQG DFWXDWRUV 0XQLFK *HUPDQਗ 

>൛@

>൜@

>൝@

>@

6SDUNV ൟ 6PLWK ൩ &ULSH ൤ 6FKQHLGHU ൩ ൧D൮DIL ൧ $ SRUWDEOH 0(06 &RULROLV PDVV IORZ VHQVRU ਎URF ৽((( 6HQVRUV ৺ਇਇ ਄৽((( &DW ਍Rਇ&+ਊਉਅ  ൝ ൜  GRLൢ,&6(൧6൜൝ ൩ 6PLWK ൟ 6SDUNV ൟ ൩LOH\ ൧ ൧D൮DIL $ 0(06EDVHG &RULROLV 0DVV )ORZ 6HQVRU IRU ,QGXVWULDO $SSOLFDWLRQV ,((( 7UDQVDFWLRQV RQ ,QGXVWULDO (OHFWURQLFV ൛   +DQHYHOG ൤ ൦DPPHULQN 76൤ GH ൞RHU 0൤ HW DO 0RGHOLQJ GHVLJQ IDEULFDWLRQ DQG FKDUDFWHUL]DWLRQ RI D PLFUR &RULROLV PDVV IORZ VHQVRU ਌ 0LFURPHFKDQLFV 0LFURHQJLQHHULQJ   ൢ  GRLൢ൝൝൛൜ &ODUN & ൠDQJ 6 &KHHVHZULJKW ൩ 7KH SHUIRUPDQFH FKDUDFWHULVWLFV RI D PLFUR PDFKLQHG &RULROLV IORZ PHWHUൢ $Q HYDOXDWLRQ E\ VLPXODWLRQ )ORZ 0HDV ৽QVWUXP

AMA Conferences 2015 – SENSOR 2015 and IRS2 2015

290

DOI 10.5162/sensor2015/B6.1 >@

ൟ 6SDUNV ൩ 6PLWK ൧ ൧D൮DIL 0LFURIOXLGLF ൟHYLFH DQG 0HWKRG RI 2SHUDWLRQ ਎DWHQW ਐ6ਉ৺ਊ ৼ৺ 

>@

൧,67 ൧DWLRQDO ,QVWLWXWH RI 6WDQGDUGV DQG 7HFKQRORJ\ 7KHUPRSK\VLFDO ൨URSHUWLHV RI )OXLG 6\VWHPV KWW਀৻ਆਆZHEERRਕQLVWJRਁਆFKHPLVWUਗਆIOXLGਆ

AMA Conferences 2015 – SENSOR 2015 and IRS2 2015

291

Suggest Documents