Mar 15, 2002 - Hirsch, A., âFunctionaliZation of Single-Walled Carbon. Nanotubes ..... coons, nanohorns, nanoropes, nanotori, nanorods, nano platelets, and ...
US007312095B1
(12) United States Patent
(10) Patent N0.:
Gabriel et al. (54)
US 7,312,095 B1
(45) Date of Patent:
Dec. 25, 2007
MODIFICATION OF SELECTIVITY FOR SENSING FOR NANOSTRUCTURE SENSING
4,542,640 A 4,759,210 A
9/1985 0111616 ....................... .. 73/23 7/1988 Wohltjen ..................... .. 73/23
DEVICE ARRAYS
5,571,401 A
11/1996 Lewis et a1. .............. .. 205/787
(75) Inventors: Jean-Christophe P. Gabriel, Pinole, CA (US); Philip G. Collins, Irvine, CA (US); Keith Bradley, Oakland, CA (US); George Gruner, Los Angeles, CA (US)
(Continued) FOREIGN PATENT DOCUMENTS W0
WO 01/44796 Al
ll/2000
(73) Assignee: Nanomix, Inc., Emeryville, CA (US) (*)
Notice:
(Continued)
Subject to any disclaimer, the term of this patent is extended or adjusted under 35
OTHER PUBLICATIONS
U.S.C. 154(b) by 861 days.
Bachtold, A; Hadley, P; Nakanishi, T; Dekker, C; Science 294 (2001) p. 1317.
(21) App1.No.: 10/099,664 (22)
Filed:
(51)
Int. Cl. H01L 21/00
Primary ExamineriBrian Sines (74) Attorney, Agent, or FirmiBeyer Weaver, LLP
(57)
G01N 15/06
(2006.01) (2006.01) (2006.01)
G01N 33/00 G01N 33/48
(2006.01) (2006.01)
An electronic system for selectively detecting and identify
C12Q 1/68
(52)
(Continued)
Mar. 15, 2002
US. Cl. .......................... ..
ing a plurality of chemical species, Which comprises an array of nanostructure sensing devices, is disclosed. Within the
438/49; 438/21; 438/48;
422/50; 422/68.1; 422/82.01; 422/82.03; 422/83; 422/98; 436/43; 436/149; 977/700; 977/701; 977/840; 977/882; 977/883; 977/902;
array, there are at least two different selectivities for sensing among the nanostructure sensing devices. Methods for fab ricating the electronic system are also disclosed. The meth ods involve modifying nanostructures Within the devices to
977/920; 977/953; 977/957; 29/592; 29/592.1
(58)
Field of Classi?cation Search ................ ..
ABSTRACT
29/592,
have different selectivity for sensing chemical species.
29/592.1; 422/50, 68.1, 82.01, 82.02, 83, 422/98, 82.03; 436/149, 43; 438/21, 48, 438/49; 977/700, 701, 840, 882, 883, 902,
Modi?cation can involve chemical, electrochemical, and self-limiting point defect reactions. Reactants for these reac tions can be supplied using a bath method or a chemical jet
977/957, 920, 953 See application ?le for complete search history.
method. Methods for using the arrays of nanostructure sensing devices to detect and identify a plurality of chemical
(56)
species are also provided. The methods involve comparing signals from nanostructure sensing devices that have not been exposed to the chemical species of interest With signals from nanostructure sensing devices that have been exposed to the chemical species of interest.
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P1017108 an may 015815 M
nsnoslmclure aemnq devious, each set having a! 19mm nunoalrucmra
sensing new: w/lh me name selemMly 101 Si?ll?g.
510
E1 |Bi51 PIVIIBW swam 101119 surrounding snvivcmnem.
Position HMSWCIIHB 9011111116 68441585 in an environmental 111161651.
BXDDSEI! "61166110611115 sensing m m each '91.
1 Make 000010110115 name-r1 known 111011
reuse/s when KNOWN
D 0611631 ‘61m: .16 mm and
mid 61909101119961»! bsMeln
sensing newest
US 7,312,095 B1 Page 2 Collins, P., Bradley, K., Ishigami, M., Zetti, A, “Extreme Oxygen
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Provide array of nanostructure
sensing devices.
400
i Modify selectivity tor sensing within a portion of nanostructure sensing devices so that at least one
410
nanostructure sensing device
produces a measurably changed signal when exposed to a chemical
species of interest.
Are all chemical species of interest sensed
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by the array‘?
Yes l Modification of selectivity for
sensing is complete.
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