Performance of Arrayed Microring Resonator ... - OMICS International
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Performance of Arrayed Microring Resonator ... - OMICS International
Jun 23, 2016 - Enschede, The Netherlands, Tel: +31 532030053; E-mail: [email protected] ... MRR sensor component in the TriPleX platform [12].
rnal of Jou B
tronics lec oe
sors & Bi sen io
ISSN: 2155-6210
Besselink et al., J Biosens Bioelectron 2016, 7:2 DOI: 10.4172/2155-6210.1000209
Journal of Biosensors & Bioelectronics
Research article
Open Access
Performance of Arrayed Microring Resonator Sensors with the TriPleX Platform Invited Paper Besselink GAJ*, Heideman RG, Schreuder E, Wevers LS, Falke F and Van den Vlekkert HH LioniX BV, Enschede, The Netherlands
Abstract Integrated-optical (bio) chemical sensors are more and more commercialized, mainly because of their high intrinsic sensitivity in combination with the possibilities they offer for integration in optofluidic devices. The microring resonator (MRR), for example, is a very feasible structure to be used as microarray sensor element for multiplex biosensing. Fabrication of MRRs has been described in the case of the TriPleX platform employing well-defined stacks of stoichiometric Si3N4 and SiO2 material. This platform allows for a wide variety of applications, due to its intrinsic low loss and its transparency for the VIS/NIR wavelength range. In the present paper, we describe the recent achievements in the characterization of arrays of these MRRs regarding temperature sensitivity, refractive index sensitivity and protein immobilization performance. Furthermore, the use of a reference channel/reference MRR is demonstrated in order to show the advantage of compensation of unintended change in temperature or sample composition. The refractive index sensitivity was determined to be 104 nm/RIU and the limit of detection was about 2 × 10-6 RIU. MRRs appeared to behave very comparable (expressed as the coefficient of (intra-array) variation (CV)) regarding the response to temperature (CV≈0.3%) as well as refractive index (CV
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