Single-Photon Avalanche Diode Arrays

1 downloads 0 Views 1MB Size Report
ABSTRACT. We present the development of silicon monolithic arrays of 60 photon-counters (SPADA, Single-Photon Avalanche. Diode Array) for the visible.
Please verify that (1) all pages are present, (2) all figures are acceptable, (3) all fonts and special characters are correct, and (4) all text and figures fit within the margin lines shown on this review document. Return to your MySPIE ToDo list and approve or disapprove this submission. 

 ! #   +-;;-& '5>-& :A-$ !-//-39-95 :9-//595G  :9-99:! 177@>:% &-71??5-90% %:9/177-

 



5; 71??=:95/-$:75?1/95/:05!57-9:;  1:9-=0:0-)59/5  !57-9:?-7D  "% !!&1E5:9105:7:39-A5-:.1??5  :7:39-?-7D G &#@=:;1-9&:@?41=9#.>1=A-?:=D-=7 &/4B-=E>/4570>?=  -=/45931=8-9D  "H>?=:;4D>5/>#.>1=A-?:=D:2-?-95-A &-9?-&:25- -?-95-?-7D  5; 931391=5-0177I92:=8-E5:91(95A1=>5?F05$5>-A -=@>:

$5>-?-7D  



&()$**,"%&#$*%) " %$#%$%" * ((/)% &%*%$%+$*()   $"%*%$ ,"$  % ((/ %( * , ) "     )/)*# ) )+ *" %( )**%*(* &* , &* ) %&(* %$) $ )* ($) $* #'+ ) * %$)*'+ *(* %$%*+(($*%)*% # $((/)( *)%" )**&%*%$ %+$*()((+)/*% $*(* $*%&* ")/)*#/(((%#(%+*$% )$&(%, ,(/)* (#(*) !0%(, ) "%((* %$)$$$%)%$"*(%$ * $%(($ $*+&% $")(#  ** %$  ) $ $*(* $*% $ %&*%#$ " )/)*# )+ *" %( " $#$* $ %+) $ $ , "")*(%&/) )*")%&)** %$"*(%$ ) $"+)$ $*(* * ,+$ $ (+ *)%( & ." % * ((/  ("* # *&(%)) $ %( ) #&"#$* $*%   $  $ ) %$ +(" %( " $- * ($*&&" * %$) *.*(* %$%*+(,*+(-,(%$*%( &&" * %$)$*'+ ) * %$ $&(%)) $%*-% #$) %$" #)- *)*(#(* (#%*%)*%#&+*(%$*(%")""*  "%!) $+&"%)*&(%)) $%(#* %$$ #)(&%(**%&* "$"*( "(*( 0* %$%***%() $*))% *"*(%$ ) #" &$ &59371 $4:?:9 A-7-9/41 5:01 0-;?5A1 #;?5/> ->? '=-9>519? $419:819- 58-3593 01?1/?:=> -==-D01?1/?:=> 

  

 A-7-9/41 $4:?:05:01> @>10 59 1531= /:@9?1= 8:01 ?: 01?1/? 5905A50@-7 ;4:?:9> 4-A1 59?1=1>? 2:= ?B: -=1-> :2 ->?=:9:8D9-817D • ?41 01?1/?5:9 59 ?41 A5>5.71 :2 ->? '=-9>519? $419:819- '$ >@/4 -> >@;1=9:A- 1C;7:>5:9> 3-88- =-D .@=>? :;?5/-7/:@9?1=;-=?> • 0-;?5A1#;?5/>#  9-0-;?5A1:;?5/>?41>1=A:/:9?=:7>D>?18>9110-=17-?5A17D8:01=-?1[email protected]=:2A1=D>19>5?5A1>19>:=>B5?42=-81 =-?1>?4-?:>/577-?1.1?B119 -90 E ??41>12=-81=-?1>?41=1-0 :@?9:5>1:2>58;-5=>0=-8-?5/-77D?41 >1=A: /:9?=:7;1=2:=8-9/1 !:=1:A1=59?41-;;75/-?5:9>B5?4;@7>107->1=3@501>?-=>171/?=:95/3-?5935>=11/:90=1>;:9>1?581>  '41-0A-9?-31:2>:750>?-?1;4:?:9/:@9?1=>5>?4-??41D-=159?=59>5/-77D0535?-701A5/1>35A593:@?->?-90-=0;@7>1 2:=1-/4;4:?:901?1/?10?41D4-A19:=1-0 :@?9:5>1-90/:8.591-3::0>19>5?5A5?DB5?4-7-=310D9-85/=-931 *1 .1751A1?4-??41D/:8;1?12-A:=-.7DB5?4>59?4195/41>819?5:910  &:2-=:97D>59371 05:01>:750 >?-?1/:@9?1=>-=1-A-57-.71 @=A-?@=1>19>:=-0-;?5A1:;?5/>>D>?18>4-A1=1>:=?10?: /:881=/5-7 8:0@71> .->10 :9 $1=659781= &$! 8:0@71>  '41>1 25.1= 210 5905A50@-7 8:0@71> 8-61 5? 2:= .@76D *-A12=:9?&19>:=&D>?18>/-.591?>:2/::710&$!8:0@71>/:8;75/-?10.@9071>:225.=1>-907534?7:>>1>?4=:@34 ?41 25.1= /:@;7593  '41 /:881=/5-7 8:0@71> -=1 :;1=-?10 -? 4534 A:7?-31> -.:@?  ) ?41D 4-A1 >4:B9 >: 2-= -9 59?=59>5/ 2=-3575?D := 9:? ?:: 7:93 - !1-9 '581 1?B119 -57@=1> B45/4 4-> 05>-;;:59?10 >1A1=-7 3=:@;>  ":?B5?4>?-90593-77?4:>10=-B.-/6>/@=A-?@=1>D>?18>:B18@/4:2?415==18-=6-.7D3::0;1=2:=8-9/1?:?41@>1:2 >:750 >?-?1;4:?:9/:@9?1=> 

SPIE USE, V. 2 5490-38 (p.1 of 11) / Color: No / Format: A4/ AF: A4 / Date: 2004-06-09 01:52:36

Please verify that (1) all pages are present, (2) all figures are acceptable, (3) all fonts and special characters are correct, and (4) all text and figures fit within the margin lines shown on this review document. Return to your MySPIE ToDo list and approve or disapprove this submission.

 #785-

Suggest Documents