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(SML): Universal Multi-Object Micro-Patterning ...

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Stereomask Lithography (SML): Universal Multi-Object Micro-Patterning Technique for. Biological Applications. Siwei Zhao, Arnold Chen, Alexander Revzin and ...

Electronic Supplementary Information For Stereomask Lithography (SML): Universal Multi-Object Micro-Patterning Technique for Biological Applications Siwei Zhao, Arnold Chen, Alexander Revzin and Tingrui Pan Department of Biomedical Engineering, University of California, Davis, CA 95616 Email: [email protected] A testing alignment structure comprising micro pillars of 250µm in diameter on substrate plugging into a stereomask with micro holes of 300µm in diameter. The vernier structures indicate the misalignment in both horizontal and vertical directions is within 10µm. The scale bar shows 300µm.